CN206627271U - A kind of comprehensive detector of microcobjective - Google Patents
A kind of comprehensive detector of microcobjective Download PDFInfo
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- CN206627271U CN206627271U CN201720392044.2U CN201720392044U CN206627271U CN 206627271 U CN206627271 U CN 206627271U CN 201720392044 U CN201720392044 U CN 201720392044U CN 206627271 U CN206627271 U CN 206627271U
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- microcobjective
- light beam
- lens barrel
- hot spot
- electro
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Abstract
A kind of comprehensive detector of microcobjective, including bearing, the lens barrel being located on bearing, the attachment means for connecting the lens barrel and microcobjective, light-emitting device, the light for light-emitting device to be sent form circular light beam and launch circular light beam to microcobjective and penetrates electro-optical device；Imaging plate is provided with the lens barrel, the imaging plate is located at the conjugated image surface of microcobjective, so that the hot spot imaging that circular light beam is formed after microcobjective reflects is thereon；The attachment means are rotationally connected with the lens barrel, to realize that microcobjective rotates around the mechanical axis of itself；The electro-optical device of penetrating is slidably connected to the bearing, to adjust the distance for penetrating electro-optical device and microcobjective；The central shaft of the circular light beam and the mechanical overlapping of axles of microcobjective.Compared to existing cross hairs, the hot spot that circular light beam is formed through microcobjective becomes apparent from, and facilitates the observation and detection of testing staff.
Description
Technical field
Microscope detection field is the utility model is related to, specially a kind of comprehensive detector of microcobjective.
Background technology
The registration of optical axis and mechanical axis, parfocal distance are the important indicators for judging microcobjective quality.In microcobjective
During manufacture, due to the error processed and assembled, always there is deviation in the position of optical axis and mechanical axis, parfocal distance also can
Certain error be present with theoretical value, therefore, if the deviation of the position of optical axis and mechanical axis, the error of parfocal distance are maintained at
In certain scope, it is qualified that microcobjective is considered as.
The device of existing optical axis and mechanical axis registration and parfocal distance for detecting microcobjective shows for transmission-type
Micro- imager, i.e., on the basis of conventional optical microscope, setting one can be around the company for being proficient in rotation between object lens and lens barrel
Connection device, cross-graduation Measure Board is installed on objective table, between the cross-graduation Measure Board and the assembling position of microcobjective
Distance be theoretical parfocal distance.Focused on by microscopical focus adjusting mechanism, make the cross of the cross-graduation scale on objective table
Line is imaged on the cross-graduation scale built in eyepiece with highest definition, and now, the focusing amount of focus adjusting mechanism is parfocalization
The error of distance；Object lens are rotated, the center of the cross hairs imaging of the cross-graduation scale on objective table is with respect to built in eyepiece
The maximum offset at center of cross-graduation scale be departure between the optical axis of object lens and mechanical axis.It is but this
Detection technique depends on the subjective judgement of testing staff, and accuracy of detection is not high, and labor intensity high efficiency is low, does not apply to detection and overlaps
Degree requires higher microcobjective with parfocality.Therefore, the microcobjective test that a kind of accuracy of detection is high, simple to operate is needed badly
Instrument.
Utility model content
In order to overcome above-mentioned technological deficiency, the utility model provides a kind of
In order to solve the above problems, the utility model is achieved by following technical scheme：
A kind of comprehensive detector of microcobjective provided by the utility model, including bearing, the lens barrel being located on bearing, use
Circle is formed in the attachment means of the connection lens barrel and microcobjective, light-emitting device, the light for light-emitting device to be sent
Circular light beam is simultaneously launched to microcobjective and penetrates electro-optical device by light beam；Imaging plate is provided with the lens barrel, the imaging plate is located at
The conjugated image surface of microcobjective, so that the hot spot imaging that circular light beam is formed after microcobjective reflects is thereon；The connection
Device is rotationally connected with the lens barrel, to realize that microcobjective rotates around the mechanical axis of itself；It is described to penetrate electro-optical device slip
Ground is connected to the bearing, to adjust the distance for penetrating electro-optical device and microcobjective；The central shaft of the circular light beam with it is micro-
The mechanical overlapping of axles of object lens.
Further, the imaging plate is provided with transmission region, and the hot spot images in the transmission region；The printing opacity
Region is provided with some coaxial circular grooves, and the center of circle of the circular groove is located at the extended line of the mechanical axis of microcobjective
On.
Further, graduation mark is provided with the transmission region, to read the center of circle of the circular groove and the light
The distance between center of circle of spot.
Further, the graduation mark totally two, and square crossing；The crosspoint of two graduation marks and the circle
The center of circle of shape groove overlaps；Two graduation marks are respectively reading the edge of the hot spot and the circular groove in both direction
Upper maximum range difference, to calculate the distance between the center of circle in the center of circle of the circular groove and the hot spot.
Further, the electro-optical device of penetrating includes objective table and is located to be used for the light-passing board for forming light beam on objective table；Institute
State objective table and be slidably located at the lens barrel；The light-passing board is the flat board provided with circular non-opaque region.
Further, the objective table is also connected with a focus adjusting mechanism, to drive the objective table to slide.
Further, range unit is additionally provided with the bearing, to measure the sliding distance for penetrating electro-optical device.
Further, the range unit uses amesdial；The upper surface of the gauge rod of the amesdial and the objective table
Vertically；The upper surface of the gauge head of the amesdial and the objective table.
Further, in addition to the camera device with display, to shoot the imaging plate and hot spot, and will shooting
Image amplification afterwards is presented in the display.
Further, the camera device includes charge coupling device imaging sensor and the monitoring provided with the display
Device；The charge coupling device imaging sensor and the monitor are electrically connected with；The charge coupling device imaging sensor
It is enclosed in the lens barrel, to shoot the imaging plate and hot spot and the image amplification after shooting is presented in into the display.
Compared with prior art, the beneficial effects of the utility model are：A kind of microcobjective provided by the utility model
Comprehensive detector, by slide penetrate electro-optical device, make the picture of hot spot limpid in sight, measurement penetrate electro-optical device sliding distance produce it is here
Defocus distance error；Microcobjective is rotated, observation hot spot is with respect to the change of the distance of the mechanical axis of microcobjective, the maximum of the distance
Value is the registration error of optical axis and mechanical axis, and the weight of optical axis and mechanical axis can also be intuitively judged according to the circularity of hot spot
It is right.Compared to cross hairs, the hot spot that circular light beam is formed through microcobjective becomes apparent from, and facilitates the observation and inspection of testing staff
Survey.
Meanwhile be provided with circular groove and graduation mark in the transmission region of imaging plate, testing staff can intuitively read with
The numerical value of deviation is calculated, makes testing result more accurate.
Camera device of the present utility model can shoot the imaging plate and hot spot, and the image after shooting is amplified and presented
In display, facilitate testing staff to observe the change of hot spot, read scale value.
Brief description of the drawings
Specific embodiment of the present utility model is described in further detail below in conjunction with the accompanying drawings, wherein：
Fig. 1 is a kind of structural representation of the comprehensive detector of microcobjective described in the utility model；
Fig. 2 is the structural representation of imaging plate described in the utility model；
Fig. 3 is Fig. 2 partial enlarged drawing；
Fig. 4 is the structural representation of light-passing board described in the utility model；
Fig. 5 is attachment means described in the utility model and the assembling schematic diagram of microcobjective；
Fig. 6 is the structural representation of light-emitting device described in the utility model.
In figure：
1- bearings；
2- lens barrels；21- imaging plates；211- transmission regions；212- circle grooves；213- graduation marks；
3- attachment means；31- object lens joints；32- bearings；33- axle sleeves；
4- light-emitting devices；41-LED LASER Light Sources；42- optical alignment microscope groups；43- aperture light billows；44- joints；
5- penetrates electro-optical device；51- objective tables；52- light-passing boards；521- holes piece；522- endless metal seats；5211- loopholes；
6- focus adjusting mechanisms；
7- amesdials；71- gauge rods；72- sides head；
8- camera devices；81- charge coupling device imaging sensors；82- monitors；821- displays；
9- microcobjectives.
Embodiment
Preferred embodiment of the present utility model is illustrated below in conjunction with accompanying drawing, it will be appreciated that described herein excellent
Select embodiment to be merely to illustrate and explain the utility model, be not used to limit the utility model.
As shown in figure 1, a kind of comprehensive detector of microcobjective provided by the utility model, including bearing 1, it is located at bearing
Lens barrel 2 on 1, the attachment means 3 for connecting lens barrel 2 and microcobjective 9, light-emitting device 4, for light-emitting device 4 to be sent out
The light gone out, which forms circular light beam and launches circular light beam to microcobjective 9, penetrates electro-optical device 5.Wherein, light-emitting device 4 is luminous,
Penetrate electro-optical device 5 and the light that light-emitting device 4 is sent is formed into circular light beam, and circular light beam is launched to microcobjective 9, circular light
The central shaft of post and the mechanical overlapping of axles of microcobjective 9.
Imaging plate 21 is provided with lens barrel 2, imaging plate 21 is located at the conjugated image surface of microcobjective 9, and circular light beam is through micro- thing
The hot spot that mirror 9 is formed after reflecting is imaged on imaging plate 21.Attachment means 3 are rotationally connected with lens barrel 2, also, when the company of rotation
Microcobjective 9 can be driven to be rotated around the mechanical axis of itself during connection device 3.Penetrate electro-optical device 5 and be slidably connected to bearing 1, it is convenient to adjust
The whole distance for penetrating electro-optical device 5 and microcobjective 9.
In theory, if the mechanical axis and optical axis coincidence of microcobjective 9, theoretical parfocal distance and the parfocal distance phase of reality
Deng, under these conditions, be held round the distance between the emission source of light beam and the assembling position of microcobjective 9 for parfocalization away from
From, and when the mechanical axis and optical axis coincidence of the axis of circular light beam and microcobjective 9, can go out in the conjugate planes of microcobjective 9
The existing circular hot spot that a diameter is equal with the diameter of circular light beam, the center of circle is on the mechanical axis of microcobjective 9, and the light
Spot clearly becomes clear；, whereas if the mechanical axis and optical axis of microcobjective 9 are misaligned, the center of circle and the microcobjective 9 of the hot spot
Mechanical axis will existence position deviation, hot spot can also deform upon, and the parfocal distance of theoretical parfocal distance and reality is unequal, light
Spot obscures, not bright enough.
Based on above-mentioned theory, the optical axis of the utility model detection microcobjective 9 and the registration of mechanical axis, parfocal distance
The principle of error is as follows：
(1) when penetrating electro-optical device 5 and being in initial position, between the emission source of circular light beam and the assembling position of microcobjective 9
Distance be theoretical parfocal distance, and the mechanical overlapping of axles of the central shaft of circular light beam and microcobjective 9 observes circular light beam
The hot spot formed after the refraction of microcobjective 9, slip penetrate electro-optical device 5, adjust the emission source of circular light beam and the group of microcobjective 9
The distance between holding position, until hot spot is apparent from becoming clear, now, the distance for penetrating the slip of electro-optical device 5 is microcobjective 9
Error between theoretical parfocal distance and the parfocal distance of reality；
(2) rotary connecting device 3, microcobjective 9 is driven to be rotated around the mechanical axis of itself, when the center of circle and the micro- thing of hot spot
Between the mechanical axis of mirror 9 during position deviation maximum, the deviation is the deviation between the optical axis and mechanical axis of microcobjective 9.
(3) according to the size of obtained deviation, judge whether microcobjective is qualified.
As a preferred embodiment, as in Figure 2-4, imaging plate 21 is provided with transmission region 211, transmission region
Printing opacity is unable to around 211, hot spot is imaged in the transmission region 211, and some coaxial circles are provided with transmission region 211
Groove 212, on the extended line for the mechanical axis that the center of circle of circular groove 212 is located at microcobjective 9.Meanwhile electro-optical device 5 is penetrated including carrying
Thing platform 51 and the light-passing board 52 being located on objective table 51, light-passing board 52 are the flat board of the loophole 5211 provided with circle, and light dress
Put 4 light sent and form circular light beam, the diameter for the circular light beam that different light-passing boards 52 is formed through loophole 5211
Difference, the diameter of some circular grooves 212 on transmission region 211 correspond from the diameter of different circular light beams respectively.
Based on above-mentioned structure, it is only necessary to measure the distance between the center of circle of hot spot and the center of circle of corresponding circular groove, you can obtain
Position deviation between the center of circle of hot spot and the mechanical axis of microcobjective 9.Specifically, it is provided with graduation mark in transmission region 211
213, totally two and the square crossing of graduation mark 213, the crosspoint of two graduation marks 213 overlaps with the center of circle of circular groove 212.
By reading the range difference of the edge and circular groove 212 of hot spot in two perpendicular direction, you can calculate the center of circle of glossing up
The distance between center of circle of circular groove 212.Do two parallel lines of a graduation mark 213, this two parallel lines respectively with
The edge of hot spot and circular groove 212 are tangent, and two parallel lines are respectively positioned at the center of circle of hot spot and the circle of circular groove 212
The same side of the heart, now the distance between this two parallel lines are edge and the side wherein of circular groove 212 of hot spot
Upward range difference.The range difference of the edge of hot spot and circular groove 212 in one direction is a, the distance in another direction
Difference is b, according to Pythagorean theorem, the distance between center of circle of the center of circle of hot spot and circular groove 212
Preferably, the plate of imaging plate 21 is processed into using optical glass H-K9L by vacuum coating and chemical etching process,
In its bottom surface black chromium plating, beam transmittance zero.The outer ring of imaging plate 21 is cased with quoit 22, and imaging plate 21 is set by quoit 22
In lens barrel 2.
Preferably, light-passing board 52 hole piece 521 and endless metal seat 522 made of stainless pin forms, and hole piece 521 passes through
Binding agent is glued in endless metal seat 522, and endless metal seat 522 is arranged on objective table 51.Loophole 5211 is by photochemical
Etch process processing is learned, the surface spraying black matt coating of light-passing board 52, ensures that light can not pass through.
As a preferred embodiment, objective table 51 also has a focus adjusting mechanism 6 to be connected, pass through focus adjusting mechanism 6
Can driving objective table 51 slide.In the present embodiment, focus adjusting mechanism 6 uses existing microscopical focus adjusting mechanism, the present embodiment
The type of middle focus adjusting mechanism is not used to limit the utility model, has the mechanism of equal function in protection of the present utility model
Within the scope of.
As a preferred embodiment, being additionally provided with range unit 7 on bearing 1, range unit 7 penetrates light dress for measurement
Put the distance of 5 slips.Range unit 7 of the present utility model uses amesdial 7, the gauge rod 71 of amesdial and the upper table of objective table 51
Face is vertical, the gauge head of amesdial and the upper surface of objective table 51, by the changing value for calculating amesdial, you can measured
Penetrate the distance value of the slip of electro-optical device 5.
For the hot spot more easily observed imaging plate 21 and be imaged in imaging plate 21, as a kind of preferable embodiment party
Formula, the utility model also include camera device 8, and the camera device 8 is provided with display 821, and camera device 8 shoots the He of imaging plate 21
Hot spot, and the image amplification after shooting is presented in display.Specifically, camera device 8 passes including charge coupling device image
Sensor 81 and the monitor 82 provided with display 821.Charge coupling device imaging sensor 81 and monitor 82 are electrically connected with, electricity
Lotus coupled device imaging sensor 81 is enclosed in lens barrel 2, shoots imaging plate 21 and hot spot, and the image after shooting is amplified and presented
In on the display 821 of monitor 82, testing staff can observe over the display the situation of change of hot spot, the circularity of hot spot and
Read the scale of graduation mark 213.
As a preferred embodiment, as shown in figure 5, attachment means 3 include object lens joint 31, bearing 32, axle sleeve
33 compositions, bearing 32 coordinate with axle sleeve 33, and in order to ensure precision, the circular runout that attachment means 3 rotate is not more than 0.002mm,
Object lens installation end face runout error is not more than 0.001mm, and object lens connection screw thread is RMS object lens screw thread (4/5inX1/36in), spiral shell
Line and the axiality of mechanical rotary shaft are not more than 0.01mm.
As a preferred embodiment, as shown in fig. 6, light-emitting device 4 is by LED laser light source 41, optical alignment mirror
Group 42, aperture light billows 43, joint 44 form.LED laser light source 41 is swashed using the monochromatic collimation of 550nm yellow greens LED laser transmitting
Light beam, by optical alignment microscope group 42 and aperture light billows 43, irradiate light-passing board 52.Joint 44 is used to be connected with objective table 51.This
Monochromatic collimated laser beam is launched in the transmitting of light-emitting device 4 of utility model can prevent hot spot from producing aberration, influence parfocal distance
The judgement of error.
A kind of other structures of the comprehensive detector of micro- thing are referring to prior art described in the present embodiment.
It is described above, only it is preferred embodiment of the present utility model, not the utility model is made any formal
Limitation, it is therefore every without departing from the content of the technical scheme of the utility model, implement according to the technical essence of the utility model to more than
Example any modification, equivalent variations and the modification made, in the range of still falling within technical solutions of the utility model.
Claims (10)
- A kind of 1. comprehensive detector of microcobjective, it is characterised in that：Including bearing, the lens barrel being located on bearing, the attachment means for connecting the lens barrel and microcobjective, light-emitting device, Light for light-emitting device to be sent, which forms circular light beam and launches circular light beam to microcobjective, penetrates electro-optical device；Imaging plate is provided with the lens barrel, the imaging plate is located at the conjugated image surface of microcobjective, so that circular light beam is through micro- The hot spot imaging formed after object lens refraction is thereon；The attachment means are rotationally connected with the lens barrel, to realize that microcobjective rotates around the mechanical axis of itself；The electro-optical device of penetrating is slidably connected to the bearing, to adjust the distance for penetrating electro-optical device and microcobjective；The central shaft of the circular light beam and the mechanical overlapping of axles of microcobjective.
- A kind of 2. comprehensive detector of microcobjective according to claim 1, it is characterised in that：The imaging plate is provided with transmission region, and the hot spot images in the transmission region；The transmission region is provided with some coaxial circular grooves, and the center of circle of the circular groove is located at the machinery of microcobjective On the extended line of axle.
- A kind of 3. comprehensive detector of microcobjective according to claim 2, it is characterised in that：Graduation mark is provided with the transmission region, to calculate between the center of circle of the circular groove and the center of circle of the hot spot Distance.
- A kind of 4. comprehensive detector of microcobjective according to claim 3, it is characterised in that：The graduation mark totally two, and square crossing；The crosspoint of two graduation marks overlaps with the center of circle of the circular groove.
- A kind of 5. comprehensive detector of microcobjective according to claim 1, it is characterised in that：The electro-optical device of penetrating includes objective table and is located to be used for the light-passing board for forming light beam on objective table；The objective table is slidably located at the lens barrel；The light-passing board is the flat board provided with circular non-opaque region.
- A kind of 6. comprehensive detector of microcobjective according to claim 5, it is characterised in that：The objective table is also connected with a focus adjusting mechanism, to drive the objective table to slide.
- A kind of 7. comprehensive detector of microcobjective according to claim 5, it is characterised in that：Range unit is additionally provided with the bearing, to measure the sliding distance for penetrating electro-optical device.
- A kind of 8. comprehensive detector of microcobjective according to claim 7, it is characterised in that：The range unit uses amesdial；The gauge rod of the amesdial is vertical with the upper surface of the objective table；The upper surface of the gauge head of the amesdial and the objective table.
- A kind of 9. comprehensive detector of microcobjective according to claim 1, it is characterised in that：Also include the camera device with display, to shoot the imaging plate and hot spot, and the image after shooting is amplified It is presented in the display.
- A kind of 10. comprehensive detector of microcobjective according to claim 9, it is characterised in that：The camera device includes charge coupling device imaging sensor and the monitor provided with the display；The charge coupling device imaging sensor and the monitor are electrically connected with；The charge coupling device imaging sensor is enclosed in the lens barrel, to shoot the imaging plate and hot spot and will shoot Image amplification afterwards is presented in the display.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720392044.2U CN206627271U (en) | 2017-04-14 | 2017-04-14 | A kind of comprehensive detector of microcobjective |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720392044.2U CN206627271U (en) | 2017-04-14 | 2017-04-14 | A kind of comprehensive detector of microcobjective |
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| Publication Number | Publication Date |
|---|---|
| CN206627271U true CN206627271U (en) | 2017-11-10 |
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ID=60205111
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720392044.2U Expired - Fee Related CN206627271U (en) | 2017-04-14 | 2017-04-14 | A kind of comprehensive detector of microcobjective |
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| Country | Link |
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| CN (1) | CN206627271U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109029928A (en) * | 2018-07-10 | 2018-12-18 | 张家港市光学仪器有限公司 | A kind of micro objective center verifying attachment |
| CN112697054A (en) * | 2020-12-10 | 2021-04-23 | 无锡鑫巨宏智能科技有限公司 | Microlens rise measuring device and method |
-
2017
- 2017-04-14 CN CN201720392044.2U patent/CN206627271U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109029928A (en) * | 2018-07-10 | 2018-12-18 | 张家港市光学仪器有限公司 | A kind of micro objective center verifying attachment |
| CN109029928B (en) * | 2018-07-10 | 2023-12-12 | 张家港市光学仪器有限公司 | Microscope objective center inspection device |
| CN112697054A (en) * | 2020-12-10 | 2021-04-23 | 无锡鑫巨宏智能科技有限公司 | Microlens rise measuring device and method |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171110 Termination date: 20180414 |