CN206541813U - A kind of low pressure diffusing quartz boat - Google Patents

Abstract

The utility model is related to photovoltaic panel manufacturing apparatus technical field, in particular a kind of low pressure diffusing quartz boat, including groove rod in a pair of end plate, a pair and lower groove rod, groove rod is arranged on the top same level position between a pair of end plate on a pair, lower groove rod is arranged on the bottom between a pair of end plate, and between groove rod on a pair, inserted slot is offered on the relative periphery of upper groove rod, one end diameter of the inserted sheet channel opening is big, and one end diameter away from opening diminishes；The fixing groove that central angle is θ is offered on the periphery of lower groove rod, the fixing groove is connected with fixed plate, and one end of the fixed plate is upwarped, and the other end matches with the surface of fixing groove, while being additionally provided with projection.The cooperation of the utility model, inserted slot and fixing groove, reduces cohesive force of the silicon chip in diffusion technique between boat, and then reduces chipping phenomenon, improves product quality and qualification rate.

Description

A kind of low pressure diffusing quartz boat

Technical field

The utility model is related to photovoltaic panel manufacturing apparatus technical field, specially a kind of low pressure diffusing quartz boat.

Background technology

Crystal silicon solar energy battery plate manufacture craft includes making herbs into wool, diffusion, etching, depositing antireflection film, printed electrode Step, diffusing step is typically used as carrying tool using quartz boat.Current quartz boat, by the upper groove rod and lower groove of shelving silicon chip Rod, which coordinates, causes silicon chip to fix, and the no additionally fixed silicon chip structure of the groove on groove rod, in boat pushing mechanism by silicon chip by net Silicon chip is easily caused during change platform feeding diffusion furnace to rock, so as to cause silicon chip fragment, chipping.

Utility model content

The purpose of this utility model is to provide a kind of low pressure diffusing quartz boat, to solve what is proposed in above-mentioned background technology Problem.The low pressure diffusing quartz boat, which has, reduces chipping phenomenon, the characteristics of improving product quality and qualification rate.

To achieve the above object, the utility model provides following technical scheme：

A kind of low pressure diffusing quartz boat, including a pair of end plate, groove rod and lower groove rod on a pair, groove rod is arranged on a pair Top same level position between a pair of end plate, lower groove rod is arranged on the bottom between a pair of end plate, and positioned at groove on a pair Between rod, inserted slot is offered on the relative periphery of upper groove rod, one end diameter of the inserted sheet channel opening is big, away from opening One end diameter diminishes；The fixing groove that central angle is θ is offered on the periphery of lower groove rod, the fixing groove is connected with fixation Plate, one end of the fixed plate is upwarped, and the other end matches with the surface of fixing groove, while being additionally provided with projection.

It is preferred that, one end of the inserted sheet channel opening is in "eight" shape, and one end away from opening is in " several " font or bottom The isosceles trapezoid of face opening.

It is preferred that, the central angle θ of the fixing groove is 60 °~87 °.

It is preferred that, the fixed plate is set to two groups, and symmetrical with central angle θ angular bisector, while bottom surface Middle part is provided with rotatable parts, and is connected by rotatable parts with fixing groove rotation.

The fixing groove central angle is the thickness that the corresponding chord lengths of θ are more than silicon chip.

It is preferred that, the rotatable parts are the bearing pin that hinge or two ends are arranged axle sleeve.

It is preferred that, the projection is corrugated for spherical or peak.

Compared with prior art, the beneficial effects of the utility model are：(1) inserted slot opened up by two upper groove rods And the fixing groove on lower groove rod makes silicon chip formation three-point fix so that silicon chip more firmly and prevents contained silicon chip from rocking；Inserted sheet The openend diameter of groove is big, and other end diameter is small, it is ensured that 2 points of the edge bottom of silicon chip is stuck on bottom land both sides, and silicon chip Bottom not contact groove bottom, both prevented silicon chip from rocking, and contact of the silicon chip with bottom land reduced again, it is to avoid silicon chip was contaminated, (two) when When silicon chip is inserted into fixing groove, two fixed plates that silicon chip bottom is compressed in fixing groove upwarp end, as insertion depth increases, Fixed plate upwarps end and is pressed down, and fixed plate is rotated by rotatable parts, and the raised firmly card now set by the other end is led Silicon chip, prevents contained silicon chip from rocking, and because the contained silicon wafer thickness of fixing groove chord ratio is big, so also ensure that the bottom of silicon chip not The bottom of contact fixing groove, contact of the reduction silicon chip with fixing groove, it is to avoid silicon chip is contaminated, (three) inserted slot and fixing groove Coordinate, reduce cohesive force of the silicon chip in diffusion technique between boat, and then reduce chipping phenomenon, improve product quality And qualification rate.

Brief description of the drawings

Fig. 1 is the utility model structural representation；

Fig. 2 is that the utility model places silicon chip schematic diagram；

Fig. 3 is groove rod schematic cross-sectional view on the utility model；

Fig. 4 is that groove rod inserts schematic top plan view after silicon chip on the utility model；

Fig. 5 is groove rod schematic top plan view under the utility model；

Fig. 6 is the utility model silicon chip not completely into schematic diagram in fixing groove；

Fig. 7 is the utility model silicon chip completely into schematic diagram in fixing groove.

In figure：1 end plate, groove rod, 20 inserted slots, 3 times groove rods, 30 fixing grooves, 31 fixed plates, 32 raised, 33 rotation sections on 2 Part, 4 silicon chips.

Embodiment

Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made The every other embodiment obtained, belongs to the scope of the utility model protection.

Fig. 1-7 are referred to, the utility model provides a kind of technical scheme：

A kind of low pressure diffusing quartz boat, including a pair of end plate 1, groove rod 2 and lower groove rod 3 on a pair, groove rod 2 is pacified on a pair Top same level position between a pair of end plate 1, lower groove rod 3 is arranged on the bottom between a pair of end plate 1, and positioned at one To between upper groove rod 2, inserted slot 20 is offered on the relative periphery of upper groove rod 2, one end diameter of the inserted slot 20 opening Greatly, one end diameter away from opening diminishes, it is ensured that 2 points of the edge bottom of silicon chip 4 is stuck on bottom land both sides, and silicon chip 4 Bottom not contact groove bottom, had both prevented silicon chip 4 from rocking, and contact of the silicon chip 4 with bottom land is reduced again；Opened up on the periphery of lower groove rod 3 There is the fixing groove 30 that central angle is θ, the fixing groove 30 is connected with fixed plate 31, and one end of the fixed plate 31 is upwarped, another End matches with the surface of fixing groove 30, while being additionally provided with projection 32.

One end that inserted slot 20 is open is in "eight" shape, one end away from opening in " several " font or bottom surface opening etc. Waist is trapezoidal.

The central angle θ of fixing groove 30 is 60 °~87 °.

Fixed plate 31 is set to two groups, and symmetrical with central angle θ angular bisector, turns while the middle part of bottom surface is provided with Dynamic component 33, and be connected by rotatable parts 33 with the rotation of fixing groove 30.

The central angle of fixing groove 30 is the thickness that the corresponding chord lengths of θ are more than silicon chip 4, it is to avoid silicon chip 4 connects with the cell wall of fixing groove 30 Touch.

Rotatable parts 33 are the bearing pin that hinge or two ends are arranged axle sleeve, can make fixed plate 31 using middle part as rotating fulcrum Rotate.

Projection 32 is corrugated for spherical or peak, it is ensured that silicon chip 4 is therewith point contact, reduces contact area, prevents Only silicon chip 4 is rocked, and occurs chipping damage, and projection 32 makes the center of gravity of fixed plate 31 deviation projection 32, so can make silicon chip from Open the rear fixed plate 31 of fixing groove 30 to reset, or magnetic material is applied in projection 32, be allowed to the same sex and keep mutually exclusive, make fixed plate 31 reset.

The fixing groove 30 on inserted slot 20 and lower groove rod 3 opened up by two upper groove rods 2 determines 3 points of the formation of silicon chip 4 Position so that silicon chip 4 more firmly and prevents the contained silicon chip 4 of boat pushing mechanism from rocking；The openend diameter of inserted slot 20 is big, the other end Diameter is small, it is ensured that 2 points of the edge bottom of silicon chip 4 is stuck on bottom land both sides, and the bottom of silicon chip 4 not contact groove bottom, both prevents Only silicon chip 4 is rocked, and contact of the silicon chip 4 with bottom land is reduced again, it is to avoid silicon chip is contaminated, when silicon chip 4 is inserted into fixing groove 30, silicon Two fixed plates 31 that wherein 2 points of the bottom of piece 4 is compressed in fixing groove 30 upwarp end, as insertion depth increases, fixed plate 31 Upwarp end to be pressed down, fixed plate 31 is rotated by rotatable parts 33, the projection 32 now set by the other end firmly blocks master Silicon chip 4, prevents contained silicon chip 4 from rocking, and because the contained thickness of silicon chip 4 of the chord ratio of fixing groove 30 is big, so also ensure that silicon chip 4 Bottom does not contact the bottom of fixing groove 30, reduces the contact with fixing groove 30 of silicon chip 4, it is to avoid silicon chip is contaminated, two upper groove rods 2 And the cooperation of inserted slot 20, lower groove rod and fixing groove 30, cohesive force of the silicon chip 4 in diffusion technique between boat is reduced, is entered And chipping phenomenon is reduced, improve product quality and qualification rate.

While there has been shown and described that embodiment of the present utility model, for the ordinary skill in the art, It is appreciated that these embodiments can be carried out in the case where not departing from principle of the present utility model and spirit a variety of changes, repaiies Change, replace and modification, scope of the present utility model is defined by the appended claims and the equivalents thereof.

Claims (7)

1. a kind of low pressure diffusing quartz boat, including a pair of end plate (1), groove rod (2) and lower groove rod (3) on a pair, groove on a pair Rod (2) is arranged on the top same level position between a pair of end plate (1), and lower groove rod (3) is arranged between a pair of end plate (1) Bottom, and between groove rod (2) on a pair, it is characterised in that：Inserted slot is offered on the relative periphery of upper groove rod (2) (20), one end diameter of the inserted slot (20) opening is big, and one end diameter away from opening diminishes；On the periphery of lower groove rod (3) The fixing groove (30) that central angle is θ is offered, the fixing groove (30) is connected with fixed plate (31), the one of the fixed plate (31) End is upwarped, and the other end matches with the surface of fixing groove (30), while being additionally provided with raised (32).

2. a kind of low pressure diffusing quartz boat according to claim 1, it is characterised in that：The one of inserted slot (20) opening End is in "eight" shape, and one end away from opening is in " several " font or the isosceles trapezoid of bottom surface opening.

3. a kind of low pressure diffusing quartz boat according to claim 1, it is characterised in that：The central angle of the fixing groove (30) θ is 60 °~87 °.

4. a kind of low pressure diffusing quartz boat according to claim 1, it is characterised in that：The fixed plate (31) is set to two Group, and it is symmetrical with central angle θ angular bisector, while the middle part of bottom surface is provided with rotatable parts (33), and pass through rotation section Part (33) is rotated with fixing groove (30) and is connected.

5. a kind of low pressure diffusing quartz boat according to claim 1,3 or 4, it is characterised in that：Fixing groove (30) circle Heart angle is the thickness that the corresponding chord lengths of θ are more than silicon chip (4).

6. a kind of low pressure diffusing quartz boat according to claim 4, it is characterised in that：The rotatable parts (33) are hinge Or two ends are arranged the bearing pin of axle sleeve.

7. a kind of low pressure diffusing quartz boat according to claim 1, it is characterised in that：The projection (32) to be spherical or Peak is corrugated.