CN206535843U - A kind of cleaning equipment of glass substrate - Google Patents
A kind of cleaning equipment of glass substrate Download PDFInfo
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- CN206535843U CN206535843U CN201621483192.7U CN201621483192U CN206535843U CN 206535843 U CN206535843 U CN 206535843U CN 201621483192 U CN201621483192 U CN 201621483192U CN 206535843 U CN206535843 U CN 206535843U
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- glass substrate
- conduction part
- cleaning
- solution
- cleaning equipment
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Abstract
The utility model discloses a kind of cleaning equipment of glass substrate, including casing, cover plate, two spray structures and upper lid, and upper lid is removably disposed in the open top of casing;The edge formation of upper lid has the conduction part being recessed towards inner chamber, and the bottom of conduction part is located at the surface of cleaning chamber, for guiding the solution condensed on conduction part internal face to fall after rise in cleaning chamber.When cleaning base plate; internal face even in conduction part condenses or is injected with solution; solution can flow to its bottom along the internal face of conduction part in time; fall back to again in cleaning chamber; so as to reduce the amount of solution of the residual on the wall cover plate of side; fluid sealant between side channel and cover plate is played a protective role, the service life of fluid sealant is improved, it is ensured that the sealing property of cover plate and side channel top open part;Meanwhile, the solution of backflow is again introduced into cleaning chamber to be cleaned to the surface of glass substrate, is formed recycling for solution, is reduced the waste of solution.
Description
Technical field
The utility model is related to the technical field of substrate cleaning, and in particular to a kind of cleaning equipment of glass substrate.
Background technology
, it is necessary to carry out cleaning treatment, existing glass substrate cleaning equipment to glass substrate in photoelectric device manufacturing process
Structure mostly as shown in figure 1, the cleaning equipment includes casing 1, casing 1 has open top and inner chamber, is parallel-laid into inner chamber
Type has two pieces of dividing plates 13, and inner chamber is divided into the side channel 11 positioned at both sides and the cleaning between two side channels by two pieces of dividing plates 13
Cavity 12;Level is located in two showers 41 on casing and being oppositely arranged, and the biography between two showers 41
Moving axis 5;The open top of side channel 11 is located between two showers 41, and solid by fluid sealant in the open top of side channel 11
Surely there is cover plate 2;And the conical upper lid 3 set in the open top of casing 1, namely upper lid 3 longitudinal section shape
For " people " font.
When needing to clean glass substrate 7, glass substrate 7 is placed on power transmission shaft 5, under the drive of power transmission shaft 5 not
Move forward disconnectedly, the nozzle on two relative showers 41 constantly sprays cleaning solution, next pair to the both side surface of substrate 7
The both side surface of glass substrate 7 is cleaned.
But, the cleaning equipment of this structure, underlying shower necessarily has in upward high-pressure injection cleaning solution
Partial solution is ejected on the internal face of the upper lid of prior art " people " font;Meanwhile, substantial amounts of steam is had in casing and is existed
On upper lid internal face condense, under gravity, condense and remain in internal face of the solution of lid internal face along upper lid and
The internal face of casing is constantly dropped on the cover plate of side channel, when tank solution is dripped on the cover board so that fluid sealant soaks for a long time
Bubble in the solution, can influence the sealing property between cover plate and side channel, reduce its service life.
Utility model content
Therefore, the technical problems to be solved in the utility model is to overcome in the cleaning equipment of glass substrate in the prior art
Fluid sealant on side channel is easily damaged, the problem of poor sealing performance between cover plate and side channel.
Therefore, the utility model provides a kind of cleaning equipment of glass substrate, including
Casing, with inner chamber and open top, along its length, formed in the inner chamber be arranged in parallel two pieces every
Plate, two dividing plates form between side channel, side channel described in two between the internal face of the casing and form cleaning chamber respectively;
Cover plate, corresponds and is fixed on by fluid sealant in the open top of the side channel;
Spray structure, is at least two, and level is oppositely arranged in the cleaning chamber, and the cover plate is located at described in two
Between spray structure;
In upper lid, the open top for being removably disposed in the casing;
The edge formation of the upper lid has the conduction part being recessed towards the inner chamber, and the bottom of the conduction part is positioned at described
The surface of cleaning chamber, for guiding the solution condensed on the conduction part internal face to fall after rise in the cleaning chamber.
Preferably, the cleaning equipment of above-mentioned glass substrate, the longitudinal section shape of the conduction part is V-arrangement, the V-arrangement
Opening towards extraneous, its bottom is towards the inner chamber.
It is further preferred that the cleaning equipment of above-mentioned glass substrate, the angle angle of the V-arrangement is 130-165 °.
Preferably, the cleaning equipment of above-mentioned glass substrate, the edge of the upper lid also has towards inner chamber extension
Ring part, the drain site is in the inner chamber of the ring part, so that the longitudinal section shape of the upper lid is M shapes;
The upper lid is fixed on by the ring part on the internal face of the casing.
It is further preferred that the cleaning equipment of above-mentioned glass substrate, the open top internal face of the casing has court
To the annular erecting bed that the cleaning chamber direction is horizontal-extending;
The bottom of the ring part is arranged on the annular erecting bed.
More preferably preferably, the cleaning equipment of above-mentioned glass substrate, the conduction part is cone, it is described conical
Cone is towards the inner chamber.
Preferably, the cleaning equipment of above-mentioned glass substrate, the longitudinal section shape of the conduction part is trapezoidal, also,
The trapezoidal short side is located at the surface of the cleaning chamber.
It is further preferred that the cleaning equipment of above-mentioned glass substrate, the conduction part is the frustum of a cone.
Preferably, the cleaning equipment of above-mentioned glass substrate, the spray structure includes being located in casing both sides table
Shower on face, at least two nozzles of the interval on the shower wall, and be connected with the shower
Solution feed mechanism.
Preferably, the cleaning equipment of above-mentioned glass substrate, in addition to level are located on the box bilateral wall extremely
A few power transmission shaft, the power transmission shaft is located in the cleaning chamber and between two spray equipments, is put for conveying
Put the glass substrate thereon
Technical solutions of the utility model, have the following advantages that:
1. the utility model provide glass substrate cleaning equipment, including casing, cover plate, two spray structures and on
Lid, casing has inner chamber and open top, two pieces of dividing plates be arrangeding in parallel, two institutes is formed along its length, in inner chamber
State dividing plate and formed respectively between the internal face of the casing between side channel, side channel described in two and form cleaning chamber;Cover plate is one by one
Correspond to and be fixed on by fluid sealant in the open top of the side channel;Two spray structure levels are oppositely arranged on the cleaning
In cavity, the cover plate is located between two spray structures;It is upper to cover the open top for being removably disposed in the casing
On;The edge formation of upper lid has the conduction part being recessed towards the inner chamber, and the bottom of the conduction part is located at the cleaning chamber
Surface, for guide the solution that condenses on the conduction part internal face along the conduction part be dropped in the side channel it
Between cleaning chamber in.
The cleaning equipment of the glass substrate of this structure, cover rim is provided with conduction part towards inner chamber, works as cleaning base plate
When, the internal face even in conduction part condenses or is injected with solution, and solution can flow to its bottom along the internal face of conduction part in time
Portion, then fall back in cleaning chamber, so that the amount of solution of the residual on the wall cover plate of side is reduced, to close between side channel and cover plate
Sealing plays a protective role, and improves the service life of fluid sealant, it is ensured that the sealing property of cover plate and side channel top open part;Together
When, the solution of backflow is again introduced into cleaning chamber to be cleaned to the surface of glass substrate, is formed recycling for solution, is subtracted
The waste of few solution.
2. the cleaning equipment for the glass substrate that the utility model is provided, the longitudinal section shape of conduction part is V-arrangement, the V
The opening of shape is towards extraneous, and its bottom is towards the inner chamber.The conduction part of V-arrangement is enabled to condense or is injected in inner wall surface thereof
Solution be back in time through V-Bottom portion in cleaning chamber, further ensure that the solution remained in conduction part will not be dropped in
On the cover plate of side channel.
3. the cleaning equipment for the glass substrate that the utility model is provided, the angle angle of the V-arrangement is 130-165 °.Pass through
It is suitably designed the angle of V-arrangement so that the solution for condensing or being injected on conduction part internal face is back to cleaning chamber in time
It is interior.Prevent when angle too small, depth of inner cavity is stretched into greatly in the bottom of conduction part, is collided with shower;Or when angle is excessive,
The solution condensed in conduction part can not flow back in time, and solution under gravity, has a small amount of solution still can be dropped in side
On the cover plate of groove.
Brief description of the drawings
, below will be right in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
The accompanying drawing used required in embodiment or description of the prior art is briefly described, it should be apparent that, describe below
In accompanying drawing be some embodiments of the present utility model, for those of ordinary skill in the art, do not paying creativeness
On the premise of work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the lateral diagrammatic cross-section of the cleaning equipment of glass substrate of the prior art;
Fig. 2 is the lateral diagrammatic cross-section of the cleaning equipment of glass substrate provided in the utility model embodiment 1;
Fig. 3 is the partial enlarged drawing at A in the cleaning equipment of the glass substrate provided in the utility model embodiment 1;
Description of reference numerals:1- casings;11- side channels;12- cleaning chamber;13- dividing plates;14- annular erecting beds;2- cover plates;
Covered on 3-;31- conduction parts;32- ring parts;41- showers;42- nozzles;5- power transmission shafts;6- handles;7- glass substrates;A-V shapes
Angle;8- fluid sealants.
Embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with accompanying drawing, it is clear that described
Embodiment is a part of embodiment of the utility model, rather than whole embodiments.Based on the embodiment in the utility model, sheet
The every other embodiment that field those of ordinary skill is obtained under the premise of creative work is not made, belongs to this practicality
Novel protected scope.
, it is necessary to explanation in description of the present utility model, term " " center ", " on ", " under ", it is "left", "right", " perpendicular
Directly ", the orientation or position relationship of the instruction such as " level ", " interior ", " outer " are, based on orientation shown in the drawings or position relationship, to be only
Described for the ease of description the utility model and simplifying, rather than to indicate or imply that signified device or element must have specific
Orientation, with specific azimuth configuration and operation, therefore it is not intended that to limitation of the present utility model.In addition, term " the
One ", " second ", " the 3rd " are only used for describing purpose, and it is not intended that indicating or implying relative importance.
, it is necessary to which explanation, unless otherwise clearly defined and limited, term " are pacified in description of the present utility model
Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integratedly
Connection;Can be mechanical connection or electrical connection;Can be joined directly together, can also be indirectly connected to by intermediary,
It can be the connection of two element internals.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
Concrete meaning of the language in the utility model.
As long as in addition, technical characteristic involved in the utility model different embodiments disclosed below is each other
Not constituting conflict can just be combined with each other.
Embodiment 1
The present embodiment provides a kind of cleaning equipment of glass substrate, as shown in Figures 2 and 3, including casing 1, cover plate 2, two
Individual spray structure, upper lid 3, handle 6 and power transmission shaft 5.
As shown in Fig. 2 casing 1 has inner chamber and open top, form what is be arranged in parallel along its length, in inner chamber
Two pieces of dividing plates 13, two dividing plates 13 form between the internal face of casing 1 cleaning is formed between side channel 11, two side channels 11 respectively
Cavity 12.The open top of two side channels 11 is respectively fixed with a cover plate 2 by fluid sealant 8.
Two spray structure levels are oppositely arranged in cleaning chamber 12, as shown in Fig. 2 a spray structure includes wearing
Shower 41 in the both side surface of casing 1, interval is arranged on multiple nozzles 42 on the wall of shower 41, and and shower
The solution feed mechanism (not shown) of 41 connections, for example, being separately provided a solution storehouse outside casing 1, passes through high-pressure pump
Solution in solution storehouse is delivered in shower 41, and outwards sprayed through nozzle 42, high-pressure injection mode is formed.Two sprays
The nozzle 42 of two showers 41 in structure is oppositely arranged, and is cleaned with the both side surface to substrate, above-mentioned cover plate 2
Between two showers 41.
As shown in Fig. 2 the edge of upper lid 3 has the conduction part 31 being recessed towards inner chamber.Preferably, the longitudinal direction of conduction part 31
Cross sectional shape is V-arrangement, and the opening of V-arrangement is towards the external world, and its bottom is located at the surface of cleaning chamber 12 towards inner chamber, V-arrangement
Angle a angles are 150 °;Meanwhile, the edge of upper lid 3 also has the ring part 32 extended towards inner chamber, and longitudinal cross-section is V-arrangement
Conduction part 31 is located at the inner chamber of ring part 32, so that the longitudinal section shape of upper lid 3 is M shapes.
The open top internal face of casing 1 has towards the horizontal-extending annular erecting bed 14 in the direction of cleaning chamber 12, annular
The bottom in portion 32 is arranged on annular erecting bed 14.For example, opening up neck on annular erecting bed 14, the bottom of ring part 32 is caught in
In neck, so that upper lid 3 is fixed on the internal face of casing 1.
In addition, longitudinal cross-section for V-arrangement conduction part 31 top surface on set two symmetrical handles 6, be easy on
Lid 3 is picked and placeed.Power transmission shaft 5 is multiple, and multiple levels of power transmission shaft 5 are located on the two side of casing 1, and power transmission shaft 5 is located at cleaning chamber
In body 12 and between two showers 41, for conveying the glass substrate 7 being placed on it.
The cleaning equipment of this embodiment, it is necessary to when being cleaned to glass substrate 7, glass substrate 7 is placed on power transmission shaft 5,
In the continuous rotation process of power transmission shaft 5, driving glass substrate 7 is run forward;Nozzle 42 on two showers 41 is respectively to glass
The top surface and lower surface jet cleaning solution of substrate 7, the both side surface to glass substrate 7 are cleaned;Positioned at lower section
The solution that sprays of shower 41 be injected on the internal face of conduction part 31, or substantial amounts of condensation vapor is in conduction part 31
When on wall, solution can flow to the bottom of V-arrangement along the internal face of V-arrangement conduction part 31 in time, then drip and return to cleaning chamber
In body 12, or even it is dropped in glass substrate 7 surface of glass substrate 7 is cleaned again, form the secondary utilization of solution, reduces
The waste of solution and raising cleaning efficiency.Meanwhile, the edge of upper lid 3 will not coagulation solution or condensation solution seldom, correspondence
The amount of solution that ground is dropped on the cover plate 2 of side channel 11 is seldom, the solution remained on cover plate 2 is reduced, so as to side channel 11 and cover plate 2
Between fluid sealant 8 play a protective role, the life-span and lid for improving fluid sealant 8 set sealing property between side channel 11 and cover plate 2.
As interchangeable embodiment, the number of power transmission shaft 5 can also be one, two, three, four etc., tool
The number that body is set is depending on actual use situation.As deformation, power transmission shaft 5 can also be replaced by other structure for conveying, example
Such as slide rail.
As interchangeable embodiment, the number of the nozzle 42 on shower 41 can for two, three, four, five
It is individual etc., it is specific that number is set depending on actual use situation.As further deformation, the number of spray equipment can be many
Individual, multiple spray equipments be arranged in parallel, are cleaned come the both side surface to glass substrate 7.As deformation, spray equipment may be used also
Think other existing flushers.
As deformation, handle 6 can also only set one, either three, four etc. or can also be not provided with above-mentioned
Handle 6.
As deformation, the fixed form of the ring part 32 of upper lid 3 and annular erecting bed 14 can also be other modes, only need
The two is removably disposed, is connected upper lid 3 with the open top of casing 1 for example with fastener.
As deformation, upper lid 3 can also be not provided with above-mentioned ring part 32, and it is V-arrangement only to have above-mentioned longitudinal section shape
Conduction part 31, directly by conduction part 31 lid be located in the open top of casing 1.
As deformation, the angle a angles of above-mentioned V-arrangement can also be 130 °, 135 °, 140 °, 145 °, 155 °, 165 ° etc..
Most preferably, the angle of the angle is controlled in the range of 130 ° -165 °.Prevent that, when angle too small, the bottom of conduction part 31 is stretched
Enter depth of inner cavity big, collided with shower 41;Or prevent when angle is excessive, the solution condensed in conduction part 31 can not and
When flow back, solution under gravity, has a small amount of solution still can be dropped on the cover plate 2 of side channel 11.
As deformation, the longitudinal section shape of above-mentioned conduction part 31 can also be located at clearly for trapezoidal also, trapezoidal short side
Wash the surface of cavity 12, such as frustum of a cone;Or, conduction part 31 is cone, and conical cone is towards inner chamber;Or,
It can also be other shapes, need to only be molded over the edge of lid 3 and towards inner chamber to lower recess, its bottom is located at cleaning chamber 12
Surface, condense in solution on the internal face of conduction part 31 for guiding and fall after rise in cleaning chamber 12.
Obviously, above-described embodiment is only intended to clearly illustrate example, and the not restriction to embodiment.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of change or
Change.There is no necessity and possibility to exhaust all the enbodiments.And the obvious change thus extended out or
Among the protection domain that variation is created still in the utility model.
Claims (10)
1. a kind of cleaning equipment of glass substrate, including
Casing (1), with inner chamber and open top, along its length, formed in the inner chamber be arranged in parallel two pieces every
Plate (13), two dividing plates (13) form side channel (11), side channel described in two between the internal face of the casing (1) respectively
(11) cleaning chamber (12) is formed between;
Cover plate (2), corresponds and is fixed on by fluid sealant in the open top of the side channel (11);
Spray structure, is at least two, and level is oppositely arranged in the cleaning chamber (12), and the cover plate (2) is located at two
Between the spray structure;
In upper lid (3), the open top for being removably disposed in the casing (1);
It is characterized in that:The edge formation of the upper lid (3) has the conduction part (31) being recessed towards the inner chamber, the conduction part
(31) bottom is located at the surface of the cleaning chamber (12), is condensed in for guiding on the conduction part (31) internal face
Solution is fallen after rise in the cleaning chamber (12).
2. the cleaning equipment of glass substrate according to claim 1, it is characterised in that:The longitudinal direction of the conduction part (31) is cut
Face is shaped as V-arrangement, and the opening of the V-arrangement is towards extraneous, and its bottom is towards the inner chamber.
3. the cleaning equipment of glass substrate according to claim 2, it is characterised in that:Angle (a) angle of the V-arrangement is
130-165°。
4. the cleaning equipment of the glass substrate according to Claims 2 or 3, it is characterised in that:The edge of the upper lid (3) is also
With the ring part (32) extended towards the inner chamber, the conduction part (31) is located at the inner chamber of the ring part (32), so that
The longitudinal section shape of the upper lid (3) is M shapes;
The upper lid (3) is fixed on the internal face of the casing (1) by the ring part (32).
5. the cleaning equipment of glass substrate according to claim 4, it is characterised in that:The open top of the casing (1)
Internal face has towards the horizontal-extending annular erecting bed (14) in the cleaning chamber (12) direction;
The bottom of the ring part (32) is arranged on the annular erecting bed (14).
6. the cleaning equipment of glass substrate according to claim 1, it is characterised in that:The conduction part (31) is circular cone
Shape, the conical cone is towards the inner chamber.
7. the cleaning equipment of glass substrate according to claim 1, it is characterised in that:The longitudinal direction of the conduction part (31) is cut
Face be shaped as it is trapezoidal, also, the trapezoidal short side be located at the cleaning chamber (12) surface.
8. the cleaning equipment of glass substrate according to claim 7, it is characterised in that:The conduction part (31) is circular cone
Platform.
9. the cleaning equipment of the glass substrate according to any one of claim 1-3,6-8, it is characterised in that:The spray
Structure includes the shower (41) being located in the casing (1) both side surface, and interval is arranged on the shower (41) wall
On at least two nozzles (42), and the solution feed mechanism being connected with the shower (41).
10. the cleaning equipment of the glass substrate according to any one of claim 1-3,6-8, it is characterised in that:Also include
Level is located at least one power transmission shaft (5) on the casing (1) two side, and the power transmission shaft (5) is located at the cleaning chamber
In body (12) and between two spray structures, for conveying the glass substrate (7) being placed on it.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201621483192.7U CN206535843U (en) | 2016-12-30 | 2016-12-30 | A kind of cleaning equipment of glass substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201621483192.7U CN206535843U (en) | 2016-12-30 | 2016-12-30 | A kind of cleaning equipment of glass substrate |
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CN206535843U true CN206535843U (en) | 2017-10-03 |
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ID=59938804
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CN201621483192.7U Active CN206535843U (en) | 2016-12-30 | 2016-12-30 | A kind of cleaning equipment of glass substrate |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109351737A (en) * | 2018-12-06 | 2019-02-19 | 中国人民解放军总医院 | A kind of cupping jar cleaning method and cupping jar cleaning device |
-
2016
- 2016-12-30 CN CN201621483192.7U patent/CN206535843U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109351737A (en) * | 2018-12-06 | 2019-02-19 | 中国人民解放军总医院 | A kind of cupping jar cleaning method and cupping jar cleaning device |
CN109351737B (en) * | 2018-12-06 | 2023-09-01 | 中国人民解放军总医院 | Cupping jar cleaning method and cupping jar cleaning device |
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Address after: No. 3168, Fuyuan Third Road, high tech Zone, Zaozhuang City, Shandong Province Patentee after: Zaozhuang Ruinuo Electronic Technology Co., Ltd Address before: 277000, No. 15, building 322, Internet Town, Zaozhuang hi tech Zone, Shandong Patentee before: ZAOZHUANG VISIONOX ELECTRONIC TECHNOLOGY Co.,Ltd. |