CN206535713U - A kind of feeding device of mask glue spreader - Google Patents
A kind of feeding device of mask glue spreader Download PDFInfo
- Publication number
- CN206535713U CN206535713U CN201621479176.0U CN201621479176U CN206535713U CN 206535713 U CN206535713 U CN 206535713U CN 201621479176 U CN201621479176 U CN 201621479176U CN 206535713 U CN206535713 U CN 206535713U
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- glue
- cache slot
- connecting tube
- storage ball
- gas storage
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Abstract
The utility model is related to a kind of feeding device of mask glue spreader, including glue cache slot, secondary connecting tube and main connecting tube are installed at the top of the glue cache slot, and main connecting tube is arranged on the middle position at the top of glue cache slot, secondary connecting tube is installed around main connecting tube, the side of the glue cache slot is provided with glue bucket connector, seal groove is installed below the glue cache slot, the inside of the seal groove is provided with gas storage ball, the inside of the gas storage ball is provided with air bag, escape pipe is installed at the top of the gas storage ball, gas outlet is installed at the top of the escape pipe, the bottom of the gas storage ball is provided with gas tube, magnetic valve is installed on the gas tube.Top of the present utility model is provided with multiple secondary connecting tubes and main connecting tube, and glue can be supplied to different directions by it, and closure may extend over many places, significantly increase the installation of device and glue spreader.
Description
Technical field
The utility model is related to feeding device technical field, more particularly to a kind of feeding device of mask glue spreader.
Background technology
Photoresist or resist (Photo Resist) are by photosensitive resin, three kinds of main component groups of sensitizer and solvent
Into.Photocuring reaction can occur after laser or electron beam exposure for photosensitive resin so that the resin object in exposure area
Rationality can be such as dissolubility, and significant change can occur for affinity etc..Beamwriter lithography requires that resist has sensitivity high, contrast
Strong and anti-dry etching selectivity etc..The electron sensitive resist used earliest is polymethyl methacrylate (polymethyl
Methacrylate, PMMA), this photoresist has stronger stability, excellent resolution ratio and low cost and other advantages.PMMA
Although with higher resolution ratio, the strong sensitivity of adhesive ability is poor.Chemical amplifying type glue (chemically
Amplified resist, CAR) deficiencies of PMMA luminous sensitivities is compensate for, improve the efficiency of electron beam exposure.In CAR
Amplify the effect that the particle of radiation is brought using chemical catalysis reaction, very effectively improve optical cement sensitivity to improve
Yield.
The appearance of the feeding device of glue spreader greatly facilitates the work of glue spreader, but the confession of the glue spreader of current stage
Expect device, there is many weak points, glue is attached thereto for example, feeder process is easily caused, cause the loss of glue,
Feed be oriented to it is single, and it is uncontrollable be disposably fed number.
Utility model content
The technical problems to be solved in the utility model is：In order to solve feeder process, to be easily caused glue attached thereto,
Cause the loss of glue, feed be oriented to it is single, and it is uncontrollable be disposably fed number the problem of, the utility model provides one
The feeding device of mask glue spreader is planted to solve the above problems.
The utility model solves the technical scheme that its technical problem used：A kind of feeding device of mask glue spreader,
Including glue cache slot, secondary connecting tube and main connecting tube are installed at the top of the glue cache slot, and main connecting tube is arranged on
The middle position at the top of glue cache slot, secondary connecting tube is installed around main connecting tube, the side peace of the glue cache slot
Equipped with glue bucket connector, the opposite side of the glue cache slot, which is provided with return duct, the return duct, is provided with water pump, described
The madial wall of glue cache slot is provided with below anti-sticking pasting board, the glue cache slot and is provided with seal groove, the seal groove
Inside gas storage ball is installed, the inside of the gas storage ball, which is provided with air bag, the air bag, is provided with retractor device, the storage
It is provided with the top of balloon at the top of escape pipe, the escape pipe and gas outlet is installed, the bottom of the gas storage ball, which is provided with, is filled
Magnetic valve is installed on tracheae, the gas tube.
It is preferred that, the escape pipe both passes through the inside that gas storage ball is arranged on air bag with gas tube.
It is preferred that, the gas outlet is arranged in glue cache slot through seal groove, and the diameter of gas outlet delays with glue
The diameter for depositing groove suits completely.
It is preferred that, the main connecting tube is provided with three altogether, and three main connecting tubes are mounted side by side on glue cache slot
The diameter institute at top is on line.
The beneficial effects of the utility model are that top of the present utility model is provided with multiple secondary connecting tubes and main connecting tube,
Glue can be supplied to by it by different directions, closure may extend over many places, significantly increase the peace of device and glue spreader
Dress, and anti-sticking pasting board is installed on the madial wall of glue cache slot, by anti-sticking pasting board glue can be prevented in course of conveying
Loss problem, greatly reduce the waste of resource, save resource, and seal groove is installed below glue cache slot,
The air bag protected by gas storage ball is installed in seal groove, by the compression to air bag, gas is entered in glue cache slot, makes
Glue in it is sent, and is become by air pressure and is brought compression feed, is not in feed liquid loss, and can be accurate according to gas flow
The amount of control supply glue.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the utility model structural representation.
Fig. 2 is the top view of the utility model glue cache slot.
1 in figure, secondary connecting tube, 2, water pump, 3, return duct, 4, glue cache slot, 5, gas outlet, 6, escape pipe, 7, sealing
Groove, 8, base, 9, main connecting tube, 10, anti-sticking pasting board, 11, glue bucket connector, 12, gas storage ball, 13, air bag, 14, retractor device,
15th, gas tube, 16, magnetic valve.
Embodiment
The utility model is described in further detail presently in connection with accompanying drawing.These accompanying drawings are simplified schematic diagram,
Only illustrate basic structure of the present utility model in a schematic way, therefore it only shows the composition relevant with the utility model.
Refer to Fig. 1-2, a kind of feeding device embodiment for mask glue spreader that the utility model is provided：A kind of mask is applied
The feeding device of glue machine, including glue cache slot 4, the top of glue cache slot 4 are provided with secondary connecting tube 1 and main connecting tube 9, glue
Liquid cache slot 4 is the terminal of glue feed, and secondary connecting tube 1 and main connecting tube 9 are that the glue of glue cache slot 4 is delivered into spray
Device in glue rifle, and main connecting tube 9 is arranged on the middle position at the top of glue cache slot 4, secondary connecting tube 1 surrounds main company
Adapter 9 is installed, and the side of glue cache slot 4 is provided with glue bucket connector 11, and glue bucket connector 11 is used for delaying in glue bucket and glue
Deposit groove 4 to connect, the opposite side of glue cache slot 4, which is provided with return duct 3, return duct 3, is provided with water pump 2, glue cache slot 4
Madial wall is provided with anti-sticking pasting board 10, and anti-sticking pasting board 10 can prevent glue to be attached to the inner side of glue cache slot 4, glue cache slot
4 lower section is provided with seal groove 7, and seal groove 7 prevents glue from entering and being attached on gas storage ball 12, and the inside of seal groove 7 is installed
There is gas storage ball 12, the inside of gas storage ball 12 is provided with air bag 13, and air bag 13 is used for storing in gas, air bag 13 being provided with flexible dress
14 are put, the flexible of retractor device 14 can be used to by Inner extrusion air bag 13, its interior gas is entered in glue cache slot 4, stored up
The top of balloon 12 is provided with escape pipe 6, and the top of escape pipe 6 is provided with gas outlet 5, and the bottom of gas storage ball 12 is provided with inflation
Magnetic valve 16 is installed, magnetic valve 16 can control turnover of the gas by gas tube 15, and escape pipe 6 is with filling on pipe 15, gas tube 15
Tracheae 15 both passes through the inside that gas storage ball 12 is arranged on air bag 13, and gas outlet 5 is arranged in glue cache slot 4 through seal groove 7,
And the diameter of the diameter of gas outlet 5 and glue cache slot 4 suits completely, main connecting tube 9 is provided with three, and three main connections altogether
Pipe 9 is mounted side by side on the diameter institute at the top of glue cache slot 4 on line.
Specifically used mode：The equipment when in use, is operated by water pump 2, glue is passed through glue bucket connector by glue bucket
11 enter in glue cache slot 4, in the presence of return duct 3, glue is passed in and out in the interior circulation of glue cache slot 4, Ran Houtong
Control retractor device 14 is crossed, it is carried out internal compression to air bag 13, the gas in it is entered by escape pipe 6 by gas outlet 5
Enter into glue cache slot 4, increase the pressure in it, in the presence of pressure difference, the glue in glue cache slot 4 is connected by pair
Adapter 1 and main connecting tube 9 are delivered in glue rifle.
Using it is above-mentioned according to desirable embodiment of the present utility model as enlightenment, pass through above-mentioned description, related work people
Member can carry out various changes and amendments in the range of without departing from this utility model technological thought completely.This reality
The content on specification is not limited to new technical scope, it is necessary to its technology is determined according to right
Property scope.
Claims (4)
1. a kind of feeding device of mask glue spreader, including glue cache slot (4), it is characterised in that：The glue cache slot (4)
Top secondary connecting tube (1) and main connecting tube (9) be installed, and main connecting tube (9) is arranged on the top of glue cache slot (4)
Middle position, secondary connecting tube (1) is installed around main connecting tube (9), and the side of the glue cache slot (4) is provided with glue bucket even
Joint (11), the opposite side of the glue cache slot (4), which is provided with return duct (3), the return duct (3), is provided with water pump
(2), the madial wall of the glue cache slot (4) is provided with below anti-sticking pasting board (10), the glue cache slot (4) and is provided with
Seal groove (7), the inside of the seal groove (7) is provided with gas storage ball (12), and the inside of the gas storage ball (12) is provided with air bag
(13), it is provided with the air bag (13) at the top of retractor device (14), the gas storage ball (12) and escape pipe (6), institute is installed
State and gas outlet (5) is installed at the top of escape pipe (6), the bottom of the gas storage ball (12) is provided with gas tube (15), described to fill
Magnetic valve (16) is installed on tracheae (15).
2. a kind of feeding device of mask glue spreader as claimed in claim 1, it is characterised in that：The escape pipe (6) is with filling
Tracheae (15) both passes through the inside that gas storage ball (12) is arranged on air bag (13).
3. a kind of feeding device of mask glue spreader as claimed in claim 1, it is characterised in that：The gas outlet (5) passes through
Seal groove (7) is arranged in glue cache slot (4), and the diameter of the diameter and glue cache slot (4) of gas outlet (5) is cut completely
Close.
4. a kind of feeding device of mask glue spreader as claimed in claim 1, it is characterised in that：The main connecting tube (9) is altogether
Three are provided with, and three main connecting tubes (9) are mounted side by side on the diameter institute at the top of glue cache slot (4) on line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621479176.0U CN206535713U (en) | 2016-12-30 | 2016-12-30 | A kind of feeding device of mask glue spreader |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621479176.0U CN206535713U (en) | 2016-12-30 | 2016-12-30 | A kind of feeding device of mask glue spreader |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206535713U true CN206535713U (en) | 2017-10-03 |
Family
ID=59937597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621479176.0U Active CN206535713U (en) | 2016-12-30 | 2016-12-30 | A kind of feeding device of mask glue spreader |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206535713U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111601494A (en) * | 2020-05-13 | 2020-08-28 | 宁波酷趣网络科技有限公司 | Computer development is with removing a set connector preparation equipment |
-
2016
- 2016-12-30 CN CN201621479176.0U patent/CN206535713U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111601494A (en) * | 2020-05-13 | 2020-08-28 | 宁波酷趣网络科技有限公司 | Computer development is with removing a set connector preparation equipment |
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