CN206497880U - A kind of vacuum adsorption equipment for IC chip pad pasting - Google Patents

A kind of vacuum adsorption equipment for IC chip pad pasting Download PDF

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Publication number
CN206497880U
CN206497880U CN201720126747.0U CN201720126747U CN206497880U CN 206497880 U CN206497880 U CN 206497880U CN 201720126747 U CN201720126747 U CN 201720126747U CN 206497880 U CN206497880 U CN 206497880U
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CN
China
Prior art keywords
disk seat
sucker disk
air flue
mounting interface
suction cup
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201720126747.0U
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Chinese (zh)
Inventor
温为杰
李卫国
李锦霞
张亚民
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangmen Huakai Technology Co., Ltd.
Original Assignee
温为杰
李锦霞
李卫国
张亚民
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 温为杰, 李锦霞, 李卫国, 张亚民 filed Critical 温为杰
Priority to CN201720126747.0U priority Critical patent/CN206497880U/en
Application granted granted Critical
Publication of CN206497880U publication Critical patent/CN206497880U/en
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Abstract

The utility model discloses a kind of vacuum adsorption equipment for IC chip pad pasting, including base, vacuum generator, transmission air flue, sucker disk seat and Suction cup assembly, it is characterised in that:The base is provided with the vacuum generator and the sucker disk seat, the side wall of the sucker disk seat offers air flue mounting interface, sucker disk seat mounting interface is offered at the top of the sucker disk seat, one end of the transmission air flue is tightly connected with the vacuum generator, the other end of the transmission air flue is tightly connected with the air flue mounting interface, the Suction cup assembly is tightly connected with the sucker disk seat mounting interface, gas port is offered in the middle part of the Suction cup assembly, the gas port, the air flue mounting interface and the sucker disk seat mounting interface are interconnected.Vacuum adsorption equipment of the present utility model for IC chip pad pasting, applied to IC Chip Production apparatus field, the simple cost of complete machine structure is low, easy for installation, do not damage the surface of wafer and circuit.

Description

A kind of vacuum adsorption equipment for IC chip pad pasting
Technical field
The utility model is related to IC Chip Production apparatus field, more particularly to a kind of to be used for IC chip patch The vacuum adsorption equipment of film.
Background technology
In ic chip package production process, the thickness of wafer generally can not meet the requirement of plastic package die, institute To need to carry out skiving processing to wafer with thinned wafer lapping machine.
In the prior art, the disk of various different sizes can not be met due to wafer lapping machine is thinned, makes the circle of different size Piece can process the film for having to that a piece of PVC is pasted on wafer to be processed is unilateral on same wafer lapping machine, to ensure Sucker improves its pull of vacuum with wafer sealing.Manufacturer's needs searching one kind is inexpensive, easy for installation, wafer is made Into the pad pasting adsorption plant that degree of injury is minimum.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of vacuum suction for IC chip pad pasting and set Standby, the equipment application is in IC Chip Production apparatus field, and the simple cost of complete machine structure is low, easy for installation, will not damage The surface of wafer and circuit.
In order to solve the above-mentioned technical problem, the technical solution of the utility model is:
A kind of vacuum adsorption equipment for IC chip pad pasting, including base, vacuum generator, transmission air flue, Sucker disk seat and Suction cup assembly, the base are provided with the vacuum generator and the sucker disk seat, and the side wall of the sucker disk seat is opened Provided with air flue mounting interface, sucker disk seat mounting interface, one end of the transmission air flue and institute are offered at the top of the sucker disk seat State vacuum generator to be tightly connected, the other end of the transmission air flue is tightly connected with the air flue mounting interface, the sucker Component is tightly connected with the sucker disk seat mounting interface, and gas port, the gas port, institute are offered in the middle part of the Suction cup assembly State air flue mounting interface and the sucker disk seat mounting interface is interconnected.
Preferably, the base is also equipped with air valve switch, and the air valve switch is tightly connected with the vacuum generator.
Preferably, the top both sides of the sucker disk seat are provided with convex locating piece, and the bottom of the Suction cup assembly offers recessed Shape groove is engaged with the convex locating piece to be fixed at the top of the sucker disk seat.
Preferably, it is also equipped with filter in the vacuum generator.
Using above-mentioned technical proposal, vacuum generator, transmission air flue and Suction cup assembly installed in base are engaged composition Vacuum adsorption equipment, operating personnel, which need to will only cut appropriate PVC film and be placed on Suction cup assembly, to be adsorbed, and wafer is put Put in PVC film, applying slight external force to wafer can both cling wafer in PVC film, and operating personnel are without straight Contact wafer, will not damage surface and the circuit of wafer, and the equipment only has vacuum generator, transmission air flue and sucker group The several primary clusterings of part, complete machine structure is simple, and easy for installation, cost is low.
Brief description of the drawings
Fig. 1 is the sectional side elevation for the vacuum adsorption equipment that the utility model is used for IC chip pad pasting;
Fig. 2 is the top view for the vacuum adsorption equipment that the utility model is used for IC chip pad pasting.
In figure, 1- bases;2- vacuum generators;3- transmits air flue;4- sucker disk seats;5- Suction cup assemblies;6- air flues are installed and connect Mouthful;7- sucker disk seat mounting interfaces;8- gas ports;9- air valve switch;10- convex locating pieces;11- Baltimore grooves.
Embodiment
Embodiment of the present utility model is described further below in conjunction with the accompanying drawings.Herein it should be noted that Explanation for these embodiments is used to help understand the utility model, but does not constitute to restriction of the present utility model.This Outside, as long as technical characteristic involved in each embodiment of the utility model disclosed below does not constitute conflict each other It can just be mutually combined.
Shown in reference picture 1, Fig. 2, a kind of vacuum adsorption equipment for IC chip pad pasting, including base 1, vacuum Generator 2, transmission air flue 3, sucker disk seat 4 and Suction cup assembly 5, base 1 are provided with vacuum generator 2 and sucker disk seat 4, sucker disk seat 4 Side wall offer air flue mounting interface 6, the top of sucker disk seat 4 offers sucker disk seat mounting interface 7, transmits one end of air flue 3 It is tightly connected with vacuum generator 2, the other end of transmission air flue 3 is tightly connected with air flue mounting interface 6, and Suction cup assembly 5 is with inhaling Disk seat mounting interface 7 is tightly connected, and the middle part of Suction cup assembly 5 offers gas port 8, gas port 8, air flue mounting interface 6 and suction Disk seat mounting interface 7 is interconnected.Vacuum generator 2, transmission air flue 3 and Suction cup assembly 5 installed in base are engaged composition Vacuum adsorption equipment, operating personnel, which need to will only cut appropriate PVC film and be placed on Suction cup assembly 5, to be adsorbed, wafer It is placed in PVC film, applying slight external force to wafer can both cling wafer in PVC film, and operating personnel need not Directly contact wafer, it is to avoid the surface of damage wafer and circuit, the equipment only has vacuum generator 2, transmission air flue 3 and inhaled The several primary clusterings of disk component 5, complete machine structure is simple, and easy for installation, cost is low.
Base 1 is also equipped with air valve switch 9, and air valve switch 9 is tightly connected with vacuum generator 2.Air valve switch 9 coordinates very The empty use of generator 2 can tackle the convenient control negative pressure size of different product process requirements.
The top both sides of sucker disk seat 4 are provided with convex locating piece 10, and the bottom of Suction cup assembly 5 offers Baltimore groove 11 and convex Locating piece 10, which is engaged, is fixed on the top of sucker disk seat 4.Baltimore groove 11 on Suction cup assembly 5 coordinates spill locating piece on sucker disk seat 4 10 installations make Suction cup assembly 5 more be fixed on sucker disk seat 4.
Filter (not shown) is also equipped with vacuum generator 2.The filter set in vacuum generator 2 is effective Obstruct the significant components of dust, effectively protection vacuum generator 2.
Embodiment of the present utility model is explained in detail above in association with accompanying drawing, but the utility model is not limited to be retouched The embodiment stated.For a person skilled in the art, it is right in the case where not departing from the utility model principle and spirit These embodiments carry out a variety of change, modification, replacement and modification, still fall within protection domain of the present utility model.

Claims (4)

1. a kind of vacuum adsorption equipment for IC chip pad pasting, including base, vacuum generator, transmission air flue, suction Disk seat and Suction cup assembly, it is characterised in that:The base is provided with the vacuum generator and the sucker disk seat, the sucker disk seat Side wall offer sucker disk seat mounting interface offered at the top of air flue mounting interface, the sucker disk seat, the transmission air flue One end is tightly connected with the vacuum generator, and the other end of the transmission air flue is tightly connected with the air flue mounting interface, The Suction cup assembly is tightly connected with the sucker disk seat mounting interface, and gas port is offered in the middle part of the Suction cup assembly, described Gas port, the air flue mounting interface and the sucker disk seat mounting interface are interconnected.
2. the vacuum adsorption equipment according to claim 1 for IC chip pad pasting, it is characterised in that:The bottom Seat is also equipped with air valve switch, and the air valve switch is tightly connected with the vacuum generator.
3. the vacuum adsorption equipment according to claim 1 for IC chip pad pasting, it is characterised in that:It is described to inhale The top both sides of disk seat are provided with convex locating piece, and the Baltimore groove that the Suction cup assembly is opened up by its bottom is positioned with the convex Block, which is engaged, to be fixed at the top of the sucker disk seat.
4. the vacuum adsorption equipment according to claim 1 for IC chip pad pasting, it is characterised in that:It is described true Filter is installed in empty generator.
CN201720126747.0U 2017-02-10 2017-02-10 A kind of vacuum adsorption equipment for IC chip pad pasting Active CN206497880U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720126747.0U CN206497880U (en) 2017-02-10 2017-02-10 A kind of vacuum adsorption equipment for IC chip pad pasting

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720126747.0U CN206497880U (en) 2017-02-10 2017-02-10 A kind of vacuum adsorption equipment for IC chip pad pasting

Publications (1)

Publication Number Publication Date
CN206497880U true CN206497880U (en) 2017-09-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720126747.0U Active CN206497880U (en) 2017-02-10 2017-02-10 A kind of vacuum adsorption equipment for IC chip pad pasting

Country Status (1)

Country Link
CN (1) CN206497880U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109236840A (en) * 2018-11-06 2019-01-18 深圳市诺峰光电设备有限公司 A kind of detachable suction film head of magnetic

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109236840A (en) * 2018-11-06 2019-01-18 深圳市诺峰光电设备有限公司 A kind of detachable suction film head of magnetic

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GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20180419

Address after: 529100 2 Dong Hou Road, Xinhui District, Jiangmen, Guangdong, 2

Patentee after: Jiangmen Huakai Technology Co., Ltd.

Address before: 529100 2 Dong Hou Road, Xinhui District, Jiangmen, Guangdong, 2

Co-patentee before: Li Jinxia

Patentee before: Wen Weijie

Co-patentee before: Li Weiguo

Co-patentee before: Zhang Yamin