CN206440239U - A kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means - Google Patents
A kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means Download PDFInfo
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- CN206440239U CN206440239U CN201621190924.3U CN201621190924U CN206440239U CN 206440239 U CN206440239 U CN 206440239U CN 201621190924 U CN201621190924 U CN 201621190924U CN 206440239 U CN206440239 U CN 206440239U
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Abstract
The utility model is related to a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means, the micro-displacement detection means includes displacement sensing module, processing unit, display unit, and the displacement sensing module connects the display unit by the processing unit；The displacement sensing module includes the double-layer nanometer grating that can be relatively moved, the double-layer nanometer grating includes movable nanometer grating array and fixed nanometer grating, and the movable nanometer grating array is spliced by multiple nanometer grating regions, and stay at regular intervals between multiple grating regions；The processing unit includes a sub-circuit, and the sub-circuit can improve the resolution ratio of the photodetector array output signal.The utility model is compared with existing micron-sized screen periods, and its screen periods is smaller, improves the precision of Grating examinations micro-displacement；By using the nanometer grating array of splicing, range is bigger；Compact overall structure, miniaturization degree is high, and practicality is stronger.
Description
Technical field
The utility model is related to technical field of micrometric displacement detection, and in particular to a kind of high precision and large measuring range double-layer nanometer grating
Micro-displacement detection means.
Background technology
Vector Diffraction Theory is to analyze one of method of diffraction properties, and it provides the accurate solution of diffraction properties,
It is more ripe by vicennial development, it is divided into two classes：Integration method and differential method.Integration method, which is applicable, has continuous surface type
Diffraction properties analysis, solution procedure is complicated, and differential method is more applicable with discontinuous, discrete face type feature
Diffraction properties are analyzed, and solution procedure is relatively simple.Differential method mainly includes rigorous coupled wave approach (Rigorous
Coupled-Wave Analysis, RCWA) and modal method (Modal Method) both.Rigorous coupled wave approach (RCWA)
Calculated using numerical value and elementary mathematics, it is not necessary to complicated numerical technique, obtained and widely should with simple and general advantage
With.
High-precision micro displacement e measurement technology is in important development direction and fields of measurement as modern industry e measurement technology
Study hotspot.The characteristics of pattern displacement e measurement technology is with its low cost, high stability, high resolution is widely used in various
High-precision micro displacement fields of measurement.Nineteen ninety-five, M.G.Moharam first use rigorous coupled wave approach, using TE ripple and TM ripple as
Example discusses transmission and reflection characteristic of the diffraction grating under laser array irradiation, it was demonstrated that utilize rigorous coupled wave approach analysis
The feasibility of grating, is that theoretical foundation has been established in the development of grating sensor.
Current grating displacement sensor is based on moire fringe displacement sensor, but More's displacement transducer uses grid
Away from larger grating, resolution ratio is difficult to improve, and volume is larger, it is difficult to apply the microbit that in-plane moving is measured in micro-nano structure
Move.
Utility model content
In order to solve the above problems, the utility model devises a kind of high precision and large measuring range double-layer nanometer grating micro-displacement inspection
Device is surveyed, the critical size of double-layer grating structure is improved, the screen periods of design are Nano grade, with existing micron
The screen periods of level are compared, and its screen periods is smaller, improves the precision of Grating examinations micro-displacement, and multiple nanometer gratings are spelled
Connect, increase the range of micro-displacement detection means, fixed nanometer grating area is the two of the single region area of movable nanometer grating
Times, the movable single interregional area of nanometer grating is the area of single nanometer grating；Sub-circuit is designed, micro-displacement inspection is improved
Survey the resolution ratio of device.It is power supply, laser array, photodetector array, movable nanometer grating array, solid in the utility model
Determine nanometer grating, guide rail overall placing structure it is compact, miniaturization degree is high, and practicality is stronger, can be applicable to MEMS correlation necks
Domain.
The utility model provides a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means.
The utility model uses rigorous coupled wave approach (RCWA) as the analysis theories of diffraction properties, mainly includes
Three below step：
1) according to maxwell equation group, the expression formula of incidence zone, transmission area and grating region electromagnetic field is provided respectively, to light
The dielectric constant in grid region and each area's electromagnetic field are deployed；
2) grating region internal electric field and the coupled relation in magnetic field are solved using maxwell equation group, sets up coupledwave equation
Group；
3) in incidence zone and the border and grating region and the border of transmission area of grating region, using electromagnetic boundary condition,
Solve the amplitude and diffraction efficiency of the diffraction light of each diffraction time.
The analysis theories of double-layer nanometer grating micro-displacement detection means are also based on rigorous coupled wave approach.
Concrete technical scheme is as follows：A kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means, the microbit
Moving detection means includes：Displacement physical signalling can be converted into primary electronic signal displacement sensing module, can be by primary electronic signal
The processing unit for being converted into readable signal, the display unit that can show readable signal, the displacement sensing module passes through described
Processing unit connects the display unit；
The displacement sensing module includes a double-layer nanometer grating that can be relatively moved, and the double-layer nanometer grating includes can
Dynamic nanometer grating array, fixed nanometer grating, the relatively described display unit of fixed nanometer grating are fixed.
The movable nanometer grating array is fixedly installed on the sensitive end of displacement of object being measured, and can relatively described fixation
Nanometer grating is moved on a guide rail；
The movable nanometer grating array is spliced by multiple nanometer grating regions；
The processing unit includes a sub-circuit, and the sub-circuit can improve the photodetector array output signal
Resolution ratio.
The area of raster of the fixed nanometer grating is twice of the grating region, and the spacing between the grating region
Area is equal with the grating region.
The grid face of the movable nanometer grating array and the fixed nanometer grating is arranged in parallel, and described movably receives
The grid line of rice grating array is arranged in parallel.
Further, the displacement sensing module also includes photodetector array, laser array, the photodetector
Array, the laser array are arranged on the central axis of the fixed nanometer grating, and the central axis is perpendicular to institute
The central axis in movable nanometer grating arraymotion direction is stated, and the light that the laser array is launched may pass through the bilayer
Nanometer grating is to the photodetector array.
Further, the grating period A interval of the movable nanometer grating array and the fixed nanometer grating is
750nm-850nm, dutycycle r span are 0.48-0.52, and grating thickness d spans are 350nm-450nm.
Further, the lambda1-wavelength λ of the laser array is 800nm-900nm.
Further, the spacing g intervals of the movable nanometer grating array and the fixed nanometer grating are
150nm-170nm。
Further, the processing unit also includes optical signalling, amplifying circuit, shaping circuit, A/D change-over circuits, list
Piece machine process circuit, Digital Display Circuit.
Further, the laser array is connected with a power supply.
The beneficial effects of the utility model are：The utility model is improved to the critical size of double-layer grating structure,
The screen periods of design are Nano grade, and compared with existing micron-sized screen periods, its screen periods is smaller, improves grating
The precision of micro-displacement is detected, multiple nano gratings are spliced, the range of micro-displacement detection means is considerably increased；Design is thin
Parallel circuit, improves the resolution ratio of micro-displacement detection means, and compact overall structure, miniaturization degree is high, realizes to in-plane moving
Measurement, practicality is stronger, can be applicable to MEMS association areas.
Brief description of the drawings：
Drawing reference numeral：1- photodetector arrays；The movable nanometer grating arrays of 2-；201- regions grating；3- fixes nanometer
Grating；4- laser arrays；5- housings；6- is bonded substrate；7- substrates；8- optical signallings；9- amplifying circuits；10- shaping circuits；
11- sub-circuits；12-A/D change-over circuits；13- single-chip microcomputer process circuits；14- Digital Display Circuits；15- display units；16- guide rails；
Fig. 1 is the overall structure diagram of the utility model double-layer nanometer grating micro-displacement measuring device；
Fig. 2 is the utility model double-layer nanometer grating micro-displacement detection means in-plane moving micro-displacement detection principle diagram；
Fig. 3 is that the utility model double-layer nanometer grating micro-displacement detection means nanometer grating array grating parameter marks figure；
Fig. 4 is the utility model double-layer nanometer grating micro-displacement detection means circuit connection diagram.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is explained in further detail.It should be appreciated that specific embodiment described herein is used only for explaining
The utility model, is not used to limit the utility model.
On the contrary, the utility model cover it is any be defined by the claims do in spirit and scope of the present utility model
Replacement, modification, equivalent method and scheme.Further, it is right below in order that the public has a better understanding to the utility model
It is detailed to describe some specific detail sections in detailed description of the present utility model.Do not have for a person skilled in the art
The description of these detail sections can also understand the utility model completely.
It is the integrated connection figure of the utility model grating micro-displacement detection means, a kind of high precision and large measuring range as shown in Figure 1
Double-layer nanometer grating micro-displacement detection means, the detection means includes displacement sensing module, and the displacement sensing module includes
Photodetector array 1, movable nanometer grating array 2, fixed nanometer grating 3, laser array 4, the photodetector array
1st, the movable nanometer grating array 2, the fixed nanometer grating 3, the light source 4 are arranged at the detection means axis
On, the axis is perpendicular to the axis in the movable nanometer grating arraymotion direction, it is understood that be, the photoelectricity
Detector array 1, the movable nanometer grating array 2, the fixed nanometer grating 3, laser array 4 are arranged at straight line
On, the straight line is vertical with the direction of motion of the removable slit array.As shown being correspondingly arranged up and down for axis in accompanying drawing 1,
The ray for sending light source 4 may pass through the movable nanometer grating array 2 and the fixed nanometer grating 3 in the figure, and penetrate
To the photodetector array, the displacement that the movable nanometer grating array 2 shown in accompanying drawing 1 is fixed on test system is sensitive
End, can be moved, and be arranged in parallel with the fixed nanometer grating 3 on a guide rail 16；
It should be pointed out that the movable nanometer grating array 2 is spliced by multiple nanometer grating regions 201, to increase
The range of the big detection means, and spacing area is left between multiple grating regions 201, spacing area herein refers to adjacent
The area that parallel two length of sides and spacing of grating region 201 are defined.
The area of raster of the fixed nanometer grating 3 is twice of the grating region 201, and the grating region 201
Between spacing area it is equal with the grating region 201, size of grating region 201 is not specifically limited at this.
It is illustrated in figure 2 the general structure schematic diagram of the utility model grating micro-displacement detection means, the movable nanometer
Grating array 2 is fixed on the sensitive end of measured object displacement body, and micro-displacement movement, the fixation can occur with object being measured
Nanometer grating 3 is arranged on the side of the movable nanometer grating array 2, and is fixed on a substrate 7, the movable nanometer grating
The opposite side of array 2 sets the photodetector array 1, and the photodetector array 1 sets multiple, the laser array
4 are arranged on the side of the fixed nanometer grating 3, and in contrast to the side for setting the movable nanometer grating array 2；
It should be added that, it is outer in contrast to towards on the one side of laser array 4, also setting up on the substrate 7
Frame 5, bonding substrate 6, the housing 5 are fixedly connected with the substrate 7 by the bonding substrate 6；
The photodetector array 1, the fixed nanometer grating 3, the laser array 4 are relative to be fixedly installed, institute
State the relatively described fixed nanometer grating 3 of movable nanometer grating array 2 may move, and can occur with the sensitive end of object being measured small
Displacement；
The output end of the laser array 4 and the receiving terminal of the photodetector array 1 are correspondingly arranged, and make the laser
The light that the output end of array 4 is launched can reach institute through the fixed nanometer grating 3, the movable nanometer grating array 2
State the receiving terminal of photodetector array 1；
Need to illustrate, the grid face of the movable nanometer grating array 2 and the fixed nanometer grating 3 is mutually put down
Row is set, the sliceable individual identical nanometer grating of N (N >=1) as needed, and the grid line of the movable nanometer grating array 2 is put down
Row arrangement.
The utility model is described further below in conjunction with accompanying drawing 2：
As shown in Figure 2 for the utility model micro-displacement detection means in-plane moving when micro-displacement detection principle diagram, institute
Show laser array 4, the fixed nanometer grating 3, movable the nanometer grating array 2 and the photodetector array 1 such as
Above-mentioned position relationship arrangement, when the sensitive end of above-mentioned displacement drives the movable nanometer grating array 2 to do in-plane moving, by described
Diffraction occurs for the light of the light that laser array 4 is launched through the movable nanometer grating array 2, the fixed nanometer grating 3,
Make the electricity output quantity respective change of photodetector array 1, and this change is exported in the way of electrical signal.Now, receive
The lambda1-wavelength λ of rice grating is 800nm-900nm,
It is important to note that, the structure for movable nanometer grating array and fixed nanometer grating gone out as shown in Figure 3
Parameter, the material of movable nanometer grating array 2 and the fixed nanometer grating 3 is silicon described in the utility model, its grating
Cycle and spacing are nanoscale, and its grating period A interval is 750nm-850nm, and dutycycle r spans are
0.48-0.52, grating thickness d span are 350nm-450nm, and the movable nanometer grating array 2 and the fixation receive
The spacing g intervals of rice grating 3 are 150nm-170nm, and the spacing g at this refers to the movable nanometer grating array 2 and institute
State the vertical range between the fixed opposite face of nanometer grating 3) in micro-displacement detection means, pass through the superposition of simple grating region former
The range of common displacement detecting can be just extended to several times by reason, length.
Screen periods and the nano level setting of spacing substantially increase physical displacement accuracy of detection, more than existing pattern displacement
Sensor, makes micro-displacement detection means while solving range expands the problem of being improved with precision.
The displacement of object to be measured can be calculated by the wavelength shift of double-layer nanometer grating, that is, surveyed physical displacement letter
Number；Nanometer grating temperature change is simultaneously sensitive, movable nanometer grating array 2 and fixed nanometer light in the micro-displacement detection means
Grid 3 are in same environment temperature, thus as the change of two optic fiber grating wavelengths caused by temperature change be it is equal,
Therefore influence is not produced on spacing g values, and it is simple to operate, performance is stable, reliable, precision is high, it is ensured that it is in different temperatures
Accuracy of detection in.
The circuit connection diagram of the utility model micro-displacement detection means is illustrated in figure 4, institute's displacement sensing device is also wrapped
Processing unit, display unit 15 are included, the displacement sensing module connects the display unit 15 by the processing unit；
The detectable light-sensing signal of photoelectronic detecting array 1, the signal is sent from laser array 4, through movable nanometer
Grating array 2, fixed nanometer grating are simultaneously received, and this detectable signal is sent into the processing list by the photoelectronic detecting array 1
Member.
The processing unit includes optical signalling 8, amplifying circuit 9, shaping circuit 10, sub-circuit 11, A/D change-over circuits
12nd, single-chip microcomputer process circuit 13, Digital Display Circuit 14, described one end of optical signalling 8 is connected with the photodetector array 1；
The other end is sequentially connected the amplifying circuit 9, the shaping circuit 10, the sub-circuit 11, the A/D
Change-over circuit 12, the single-chip microcomputer process circuit 13, the Digital Display Circuit 14, the Digital Display Circuit 14 and the display unit 15
Connection；
The display unit 15 is a digital display meter, or other devices for showing the shift value, the display unit conduct
Conventional technical means of the prior art is not specifically limited.
Operation principle of the present utility model is：Light is by double-layer nanometer grating, and when the sensitive end of displacement, to sense physics micro-
When displacement signal is inputted, that is, movable nanometer grating array is driven to do in-plane moving, now, movable nanometer grating array and fixation are received
Level is there occurs with respect to micro-displacement between rice grating, and causes the acute variation of Zero-order diffractive light efficiency of transmission；It is arranged on this
The photodetector array of laser array output end offside detects the change, and sends by way of primary electronic signal place to
Unit is managed, the processing unit is arranged to this primary signal, by entering single-chip microcomputer after amplification, shaping, subdivision, A/D conversions
Data analysis and process is carried out in process circuit, readable signal is obtained, it is finally by display unit that the readable signal measured is defeated
Go out and show.
Require supplementation with, the increase of sub-circuit in processing unit improves the resolution ratio to primary electronic signal, it is same big
The micro-displacement detection means precision is added greatly.
For the ordinary skill in the art, according to teaching of the present utility model, the utility model is not being departed from
Principle with spirit in the case of, this reality is still fallen within to changes, modifications, replacement and the modification that the structure of the detecting device is carried out
Within new protection domain.
Claims (10)
1. a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means, it is characterised in that the micro-displacement detection dress
Put including：
Physical displacement signal is converted into the displacement sensing module of electric signal；
Convert electrical signals to the processing unit of readable signal；
The display unit that readable signal is shown, the displacement sensing module connects the display by the processing unit
Unit；
The displacement sensing module includes a double-layer nanometer grating that can be relatively moved, and the double-layer nanometer grating includes receiving thing
Manage the movable nanometer grating array and fixed nanometer grating of displacement signal.
2. a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means according to claim 1, its feature exists
The sensitive end of displacement for being fixedly installed on object being measured in, the movable nanometer grating array, and with the fixed nanometer grating
It is oppositely arranged, the movable nanometer grating is moved on a guide rail；
The movable nanometer grating array is spliced by multiple nanometer grating regions.
3. a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means according to claim 2, its feature exists
In the area of raster of the fixed nanometer grating is twice of the grating region, and the spacing area between the grating region
It is equal with the grating region.
4. a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means according to claim 1, its feature exists
In the grid face of the movable nanometer grating array and the fixed nanometer grating is arranged in parallel, and the movable nanometer light
The grid line of grid array is arranged in parallel.
5. a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means according to claim 1, its feature exists
In the displacement sensing module also includes photodetector array, laser array, the photodetector array, the laser
Array is arranged on the central axis of the fixed nanometer grating, and the central axis is perpendicular to the movable nanometer grating
The central axis in arraymotion direction, and the light that the laser array is launched may pass through the double-layer nanometer grating described in
Photodetector array；
The processing unit includes the sub-circuit of the resolution ratio that can improve the photodetector array output signal.
6. a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means according to claim 1, its feature exists
In the grating period A interval of the movable nanometer grating array and the fixed nanometer grating is 750nm-850nm, is accounted for
Empty is 0.48-0.52 than r span, and grating thickness d spans are 350nm-450nm.
7. a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means according to claim 5, its feature exists
In the lambda1-wavelength λ of the laser array is 800nm-900nm.
8. a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means according to claim 6, its feature exists
In the spacing g intervals of the movable nanometer grating array and the fixed nanometer grating are 150nm-170nm.
9. a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means according to claim 1, its feature exists
In the processing unit also includes optical signalling, amplifying circuit, shaping circuit, A/D change-over circuits, single-chip microcomputer process circuit, number
Aobvious circuit.
10. a kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection means according to claim 5, its feature exists
In the laser array is connected with a power supply.
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