CN206408288U - A kind of high definition shows industry rotation silicon zirconium titanium target material - Google Patents
A kind of high definition shows industry rotation silicon zirconium titanium target material Download PDFInfo
- Publication number
- CN206408288U CN206408288U CN201621463754.1U CN201621463754U CN206408288U CN 206408288 U CN206408288 U CN 206408288U CN 201621463754 U CN201621463754 U CN 201621463754U CN 206408288 U CN206408288 U CN 206408288U
- Authority
- CN
- China
- Prior art keywords
- penstock
- target material
- high definition
- prime coat
- silicon zirconium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Coating By Spraying Or Casting (AREA)
- Cookers (AREA)
Abstract
The utility model is related to a kind of high definition and shows industry rotation silicon zirconium titanium target material, belongs to technical field of function materials.It includes penstock body, prime coat and mixed layer；Set on the penstock body on one layer of prime coat, prime coat and spray mixed layer；The penstock body interior two ends are equipped with seal groove, and penstock body exterior two ends are sequentially provided with fastening neck and support neck.The utility model is connected simplicity with equipment, and reliability is high, can improve the adhesion of touch-screen and other film layers, and hardness is high, and anti-wear performance is good, and refractive index is moderate, can mutually be connected with the refractive index of other film layers, can be as transition zone, and disappear shadow layer and protective layer.
Description
Technical field
The utility model is related to a kind of high definition and shows industry rotation silicon zirconium titanium target material, is to use next life in high definition display industry
The product of function film is produced, belongs to technical field of function materials.
Background technology
Magnetic control spattering target is to sputter on substrate to form each under appropriate process conditions by magnetron sputtering coating system
The sputtering source of function film is planted, and the film with various functions is the necessary component of touch-screen.The material of rotary target material
Utilization rate can reach 80%, be 2-3 times of utilization ratio of planar targets, and sputtering yield is high, obtained it is more and more universal should
With.Operationally, outside is the high temperature spent 2000 and the environment for being similar to vacuum to rotary target material more, and inside needs logical 10 kilograms of pressures
The cooling water of power, the port of rotary target material needs appropriate design, can be installed in vacuum magnetron sputtering coating film equipment, full
The harsh requirement of sufficient sputtering technology.
High-end intelligent touch-screen needs with silica to be made between glass and other functional film layers in process of production
Transition zone, to increase adhesion between the two, or as screen layer, prevents the sodium ion in glass from entering in liquid crystal.
And need niobium oxide layer and titanium oxide layer to coordinate come shadow layer of making to disappear.The production technology generally used at present is splashed with vacuum magnetic control
Filming equipment is penetrated, respectively with silicon target, titanium oxide target and niobium oxide target come plated film, this several film layer group on panel glass is touched
Altogether, the shadow vestige elimination that ITO layer can be produced due to refractive index difference.Because the electric conductivity of pure silicon is very poor, sputtering
Difficulty, causes production efficiency low.Titanium oxide target easily ftractures, and production difficulty is big, and cost is high.Individually with metal titanium targets in oxygen
Although changing under atmosphere, sputtering cost is low, and technique is difficult control, and film quality is unstable.In order to increase the conduction of silicon target
Property, some producers do raw material using the silica flour of low-purity, and the impurity element such as iron content and aluminium is more, or even also has some producers artificial
Be mixed into a certain amount of aluminium powder to inside raw material silica flour.Although so doing and adding electric conductivity, its impurity largely contained
The color of film layer, which can be influenceed, can also cause film layer uneven, or even produce piebald makes product rejection.
The content of the invention
The purpose of this utility model is to overcome above-mentioned weak point to show industry rotation silicon zirconium titanium there is provided a kind of high definition
Target.
A kind of technical scheme provided according to the utility model, high definition shows industry rotation silicon zirconium titanium target material, including the back of the body
Tube body, prime coat and mixed layer；Set on the penstock body on one layer of prime coat, prime coat and spray mixed layer；The back of the body
Two ends are equipped with seal groove inside tube body, and penstock body exterior two ends are sequentially provided with fastening neck and support neck.
The penstock body is 304 stainless steel penstocks.The prime coat is aluminium titanium nickel prime coat.
The mixed layer is silicon zirconium titanium mixed layer.
The penstock is originally provided with supporting region with prime coat junction in vitro；The supporting region is less than penstock body port position
0.5-1.5mm。
The supporting region both ends are provided with the rounded corner equal with supporting region depth dimensions, two circles simultaneously with penstock
The external diameter of footpath and supporting region is tangent.
The thickness of the mixed layer is 2-20mm, specially Coating Materials, and wherein zirconium content is 1%-30%, and Ti content is
5%-40%, remaining is silicon.
Its raw material melts under vacuum for silico briquette, zirconium block and the titanium block of high-purity, is cast into alloy, then passes through
Powder that is broken and being sieved into certain particle size, then target is made by low-voltage plasma spraying.
The beneficial effects of the utility model：The fastening reliability of the utility model port is high, in prolonged rotation, no
Can occur seepage, and avoid target from operationally shaking；Due to adding supporting region, penstock inner magnet can be made
Magnetic field penetration strengthens, and the maximum available thickness of corresponding target is increased.The two tangent rounded corners set, can be effective
Avoid penstock caused by stress concentration from damaging.
The utility model product is easy to loading and unloading, and reliability is high, easily sputtering, and even film layer improves plated film production efficiency,
Improve coating quality simultaneously.
Brief description of the drawings
Fig. 1 is the utility model structural representation.
Description of reference numerals：1st, penstock body；2nd, seal groove；3rd, neck is fastened；4th, neck is supported；5th, mixed layer；6th, hold
Carry area；7th, rounded corner；8th, prime coat.
Embodiment
As shown in Figure 1：A kind of high definition shows industry rotation silicon zirconium titanium target material, including penstock body 1, prime coat 8 and mixed
Close layer 5；Set on the penstock body 1 and mixed layer 5 is sprayed on one layer of prime coat 8, prime coat 8；The inside of penstock body 1 two
End is equipped with seal groove 2, and the outside two ends of penstock body 1 are sequentially provided with fastening neck 3 and support neck 4.
The penstock body 1 is 304 stainless steel penstocks.The prime coat 8 is aluminium titanium nickel prime coat.The mixed layer 5 is
Silicon zirconium titanium mixed layer.
The penstock body 1 is outer and the junction of prime coat 8 is provided with supporting region 6；The supporting region 6 is less than the end of penstock body 1
Oral area position 0.5-1.5mm.
The both ends of supporting region 6 are provided with the rounded corner 7 equal with the depth dimensions of supporting region 6, two circles simultaneously with penstock 1
Internal diameter and supporting region 6 external diameter it is tangent.
The thickness of the mixed layer 5 is 2-20mm.
The utility model makees penstock using 304 stainless steels, and such a material price is cheap, and will not both get rusty, and does not also have
Magnetic, does not interfere with the magnetic field intensity of magnet internally placed when using.The two ends of 304 stainless steel penstocks are provided with sealing
Groove, binding groove and support slot, to be connected with production equipment.Penstock external process has supporting region, is coated with supporting region bottom surface
Aluminium Ti-Ni alloy prime coat, has silicon zirconium titanium mixed layer in aluminium Ti-Ni alloy prime coat external spray.Aluminium Ti-Ni alloy prime coat is used
To increase the bond strength between 304 stainless steel penstocks and silicon zirconium titanium mixed layer, its thickness is 0.1-1 millimeters.Silicon zirconium titanium is mixed
Layer is made using plasma spray coating process.Its thickness is 2-20 millimeters of thickness, and wherein zirconium content is 1%-30%, and Ti content is 5%-
40%, remaining is silicon.
In prolonged rotation seepage will not occur for the utility model, and avoid target from operationally shaking；
Due to adding supporting region, can make the magnetic field penetration of penstock inner magnet strengthens, the maximum available thickness of corresponding target
Increased.The two tangent rounded corners set, penstock is damaged caused by effectively avoiding stress concentration.Its raw material is
Silico briquette, zirconium block and the titanium block of high-purity melt under vacuum, are cast into alloy, then certain by crushing and being sieved into
The powder of granularity, then target is made by low-voltage plasma spraying.
Claims (7)
1. a kind of high definition shows industry rotation silicon zirconium titanium target material, it is characterized in that：Including penstock body（1）, prime coat（8）With it is mixed
Close layer（5）；The penstock body（1）One layer of prime coat of upper setting（8）, prime coat（8）Upper spraying mixed layer（5）；The penstock
Body（1）Internal two ends are equipped with seal groove（2）, penstock body（1）Outside two ends are sequentially provided with fastening neck（3）And support card
Groove（4）.
2. high definition as claimed in claim 1 shows industry rotation silicon zirconium titanium target material, it is characterized in that：The penstock body（1）For
304 stainless steel penstocks.
3. high definition as claimed in claim 1 shows industry rotation silicon zirconium titanium target material, it is characterized in that：The prime coat（8）For aluminium
Titanium nickel prime coat.
4. high definition as claimed in claim 1 shows industry rotation silicon zirconium titanium target material, it is characterized in that：The mixed layer（5）For silicon
Zirconium titanium mixed layer.
5. high definition as claimed in claim 1 shows industry rotation silicon zirconium titanium target material, it is characterized in that：The penstock body（1）Outside
With prime coat（8）Junction is provided with supporting region（6）；The supporting region（6）Less than penstock body（1）Port position 0.5-1.5mm.
6. high definition as claimed in claim 5 shows industry rotation silicon zirconium titanium target material, it is characterized in that：The supporting region（6）Two ends
Portion is provided with and supporting region（6）The equal rounded corner of depth dimensions（7）, two circle simultaneously with penstock body（1）Internal diameter and carrying
Area（6）External diameter it is tangent.
7. high definition as claimed in claim 1 shows industry rotation silicon zirconium titanium target material, it is characterized in that：The mixed layer（5）Thickness
Spend for 2-20mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621463754.1U CN206408288U (en) | 2016-12-28 | 2016-12-28 | A kind of high definition shows industry rotation silicon zirconium titanium target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621463754.1U CN206408288U (en) | 2016-12-28 | 2016-12-28 | A kind of high definition shows industry rotation silicon zirconium titanium target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206408288U true CN206408288U (en) | 2017-08-15 |
Family
ID=59552636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621463754.1U Active CN206408288U (en) | 2016-12-28 | 2016-12-28 | A kind of high definition shows industry rotation silicon zirconium titanium target material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206408288U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108570652A (en) * | 2018-07-24 | 2018-09-25 | 江苏迪丞光电材料有限公司 | A kind of rotary target material and preparation method thereof bearing high power sputtering |
-
2016
- 2016-12-28 CN CN201621463754.1U patent/CN206408288U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108570652A (en) * | 2018-07-24 | 2018-09-25 | 江苏迪丞光电材料有限公司 | A kind of rotary target material and preparation method thereof bearing high power sputtering |
| CN108570652B (en) * | 2018-07-24 | 2019-04-12 | 江苏迪丞光电材料有限公司 | A kind of rotary target material and preparation method thereof bearing high power sputtering |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206408288U (en) | A kind of high definition shows industry rotation silicon zirconium titanium target material | |
| CN101475317A (en) | High transmittance conductive glass for touch screen and technique for producing the same | |
| CN104416160B (en) | High-density zinc oxide based target and preparation method thereof | |
| CN103337511A (en) | OLED panel and packaging method thereof | |
| CN102174689A (en) | FZO/metal/FZO transparent conductive film and preparation method thereof | |
| CN103987873A (en) | Sputtering device, target and shield | |
| CN102634754A (en) | Coated piece and preparation method thereof | |
| CN201826007U (en) | Anti-adhesion plate and membrane deposition equipment | |
| CN101736301A (en) | Shielding device in vacuum magnetic control film coating chamber | |
| CN202576553U (en) | Magnetron sputtering target material | |
| CN201793723U (en) | Sputtering target with long service life | |
| CN105986233A (en) | Stacked wireing film for electronic member and sputtering target material for formation of coating layer | |
| CN106282924B (en) | One kind having the preparation method of the indium and tin oxide film material of (400) crystal face preferentially | |
| CN206052146U (en) | A kind of magnetic-control sputtering continuous plating line for handware | |
| CN103014644A (en) | ITO (indium tin oxide) film for touch screen and preparation method thereof | |
| CN204589291U (en) | High definition display is with rotating silicon target | |
| CN210881161U (en) | High-definition scratch-resistant film | |
| CN103257476A (en) | Colorful filtering substrate and liquid crystal display panel | |
| CN106544634B (en) | A kind of forming method of film layer, target and target production method | |
| CN204779787U (en) | Magnetron sputtering target rifle | |
| CN201820795U (en) | High-power LED encapsulating structure | |
| CN203960321U (en) | The even airing system pipeline of linear magnetic control sputtering cathode | |
| CN203864104U (en) | Golden LOW-E glass | |
| CN202344932U (en) | Light-transparent single silver low radiation coated glass | |
| CN207193127U (en) | A kind of color low emissivity glass |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |