CN206356333U - Pipeline washing device - Google Patents
Pipeline washing device Download PDFInfo
- Publication number
- CN206356333U CN206356333U CN201621425486.4U CN201621425486U CN206356333U CN 206356333 U CN206356333 U CN 206356333U CN 201621425486 U CN201621425486 U CN 201621425486U CN 206356333 U CN206356333 U CN 206356333U
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- Prior art keywords
- pipeline
- washing device
- liquid bath
- pipeline washing
- cleaned
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model provides a kind of pipeline washing device, including：Liquid bath is cleaned, the cleaning liquid bath is connected by the incoming end of a liquid pump and transmission pipeline, and the other end of the transmission pipeline is passed through the cleaning liquid bath after connecting pipeline to be cleaned；The incoming end of the transmission pipeline is also connected with a gas pump, and the incoming end of the transmission pipeline is connected with the liquid pump by pipeline selection device or connected with the gas pump.The pipeline washing device that the utility model is provided, may be such that in the pipeline to be cleaned that the cleaning fluid in cleaning liquid bath is connected into transmission pipeline and with transmission pipeline by liquid pump, realizes the cleaning for pipeline to be cleaned；Cleaning fluid after use is passed through into the cleaning liquid bath function of realizing wash cycles again；Select to connect by control pipeline selection device and be passed through gas to dry up the pipeline cleaned in gas pump, the pipeline to be cleaned that then can be connected by gas pump to transmission pipeline and with transmission pipeline.
Description
Technical field
The utility model is related to field of semiconductor manufacture, more particularly to a kind of pipeline washing device.
Background technology
, it is necessary to which using various gases, these gases much can all be transmitted by gas piping in semiconductor fabrication process,
Gas piping is in long-term use, and the particle carried in gas is often attached on tube wall, and particularly some are easily oxidized
Gas, the dust granules after being oxidized are attached on tube wall, for example：SiH4Dust granules are formed after being oxidized to hang on tube wall.
It can stick on gas tube wall and easily come off in addition, viscosity gas is used for a long time.Meanwhile, gas piping is 90 degree of corners
Impurity residual is easily formed, and easily liquefied gas can be in 90 degree of corner accumulations.For the high-purity required in process
For gas, the dust on gas piping is either attached on, the deposit of pipeline corner is still remained in, once with gas
Body, which enters, produces link in enormous quantities, and this influence to product quality will be fatal.
In actual production process, particularly special gas are (for example：WF6, SiH4, CCl4 or B2H6 etc.) it is being used for a long time
Under can all be sticked on tube wall and have pollutant, once vacuum breaking, these adhesions will be oxidized to form particle, so as to influence production
Quality, then such pipeline be accomplished by the pipeline more renewed.Therefore greatly waste, and influence production are caused.But people
Work is low using deionized water cleaning efficiency, while requirement of the steam to semiconductor manufacturing facility vacuum is difficult to ensure that, it is also uncomfortable
Close the requirement of high-volume integrated circuit production, therefore means are main to change based on pipeline at present.
Therefore, a kind of pipeline washing device is designed to clean the pipeline being contaminated be that those skilled in the art need solution
A technical problem.
Utility model content
The purpose of this utility model is to provide a kind of pipeline washing device, not square to solve pipeline-cleaning in the prior art
Just the problem of.
In order to solve the above technical problems, a kind of pipeline washing device that the utility model is provided, the pipeline washing device
Including：Clean liquid bath, the cleaning liquid bath is connected by the incoming end of a liquid pump and transmission pipeline, the transmission pipeline it is another
One end is passed through the cleaning liquid bath after connecting pipeline to be cleaned；The incoming end of the transmission pipeline is also connected with a gas pump, described
The incoming end of transmission pipeline is connected with the liquid pump by pipeline selection device or connected with the gas pump.
It is preferred that, in the pipeline washing device, the pipeline washing device also includes heater, the heating dress
Put on the transmission pipeline being arranged on before pipeline to be cleaned.
It is preferred that, in the pipeline washing device, the heater includes heating external member and is arranged on the heating
Part is heated in external member, the heating external member is enclosed on transmission pipeline.
It is preferred that, in the pipeline washing device, the quantity for heating part in each heating external member is 2~8.
It is preferred that, in the pipeline washing device, the heater includes 2~6 sets of heating external members and described
Heat part.
It is preferred that, in the pipeline washing device, the pipeline selection device is triple valve.
It is preferred that, in the pipeline washing device, the pipeline washing device also includes filter, the filtering dress
Put and be arranged in the cleaning liquid bath.
It is preferred that, in the pipeline washing device, the filter includes screen pack.
It is preferred that, in the pipeline washing device, the transmission pipeline is passed through the filtering after connecting pipeline to be cleaned
Device.
It is preferred that, in the pipeline washing device, the transmission pipeline connects pipeline to be cleaned by flexible hose.
It is preferred that, in the pipeline washing device, using vacuum, radial seal connects the interface of the flexible hose in succession
Mouth mode.
It is preferred that, in the pipeline washing device, the cleaning liquid bath is provided with tank cover plate.
It is preferred that, in the pipeline washing device, the tank cover plate is transparent cover plate.
It is preferred that, in the pipeline washing device, the tank cover plate is provided with some passages.
It is preferred that, in the pipeline washing device, the cleaning liquid bath is additionally provided with drainage element.
It is preferred that, in the pipeline washing device, the cleaning liquid bath is additionally provided with cleaning fluid injection member.
It is preferred that, in the pipeline washing device, the pipeline washing device also includes a device medium, the cleaning
Liquid bath is arranged in described device carrier.
It is preferred that, in the pipeline washing device, described device carrier base is provided with multiple castors.
It is preferred that, in the pipeline washing device, carrier cover plate is provided with described device carrier.
The pipeline washing device that the utility model is provided, selects to connect liquid pump, so by control pipeline selection device
The pipe to be cleaned that the cleaning fluid in cleaning liquid bath enters transmission pipeline and is connected with transmission pipeline may be such that by liquid pump afterwards
Lu Zhong, pipeline to be cleaned is rinsed by cleaning fluid, so as to realize the cleaning for pipeline to be cleaned.Further, use
Cleaning fluid afterwards is passed through into the cleaning liquid bath again, so as to realize the function of wash cycles.Further, control pipe is passed through
Road selection device come select connect gas pump, then can be connected by gas pump to transmission pipeline and with transmission pipeline treat clearly
Wash in pipeline and be passed through gas to dry up the pipeline cleaned.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the pipeline washing device of the utility model embodiment；
Fig. 2 is the dimensional structure diagram of the heater of the utility model embodiment；
Fig. 3 is the dimensional structure diagram of the device medium of the utility model embodiment；
Fig. 4 is the dimensional structure diagram of pipeline washing device of the utility model embodiment provided with device medium；
Fig. 5 is the schematic diagram of the use pattern of the pipeline washing device of the utility model embodiment；
Wherein, 10- cleans liquid bath, and 11- tank cover plates, 12- drainage elements, 13- cleaning fluid injection members, 20- liquid pumps, 30- is passed
Defeated pipeline, 40- pipelines to be cleaned, 50- gas pumps, 60- pipeline selection devices, 70- heaters, 71- heating external members, 72- systems
Warmware, 80- filters, 100- device mediums, 101- castors, 102- carrier cover plates, 1- wash cycles circuits, 2- drying lines
Road, 3- heating lines.
Embodiment
In order that the purpose of this utility model, feature and advantage can be more obvious understandable, accompanying drawing is referred to.It should be clear that this
Structure, ratio, size depicted in specification institute accompanying drawings etc., only to coordinate the content disclosed in specification, for ripe
The personage for knowing this technology understands and read, and is not limited to the enforceable qualifications of the utility model, therefore do not have technically
Essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size can be produced not influenceing the utility model
Under raw effect and the purpose that can reach, it all should still fall and obtain the scope that can cover in the technology contents disclosed in the utility model
It is interior.
As shown in figure 1, a kind of pipeline washing device of the utility model embodiment, the pipeline washing device includes：Clearly
Washing lotion groove 10, the cleaning liquid bath 10 is connected by a liquid pump 20 with the incoming end of transmission pipeline 30, the transmission pipeline 30
The other end connect the cleaning liquid bath 10 be passed through after pipeline 40 to be cleaned；The incoming end of the transmission pipeline 30 is also connected with a gas
Body pump 50, the incoming end of the transmission pipeline 30 connected by pipeline selection device 60 with the liquid pump 20 or with the gas
Body pump 50 is connected.
In the solution of the present invention, pipeline to be cleaned is linked into pipeline washing device by transmission pipeline and completes to clean.Example
Such as, transmission pipeline can include the first transmission pipeline and the second transmission pipeline, and pipeline to be cleaned may be disposed at the first transmission pipeline
And second between transmission pipeline, the second transmission pipeline is passed into the cleaning liquid bath；It is understood that transmission pipeline also may be used
Only to connect pipeline to be cleaned by the first transmission pipeline, then the outlet of pipeline to be cleaned is passed into cleaning liquid bath.It is logical
Crossing two kinds of different transmission connected modes can be completed to clean and realize the circulation of cleaning, and others can be selected according to actual needs
Transmit connected mode.
With continued reference to shown in Fig. 1, the pipeline washing device also includes heater 70, and the heater 70 is arranged on
On transmission pipeline 30 before pipeline 40 to be cleaned, the gas in transmission pipeline 30 is heated by heater 70, so that
Realize the effect dried to the pipeline to be cleaned 40 after cleaning.It is understood that transmission pipeline, liquid pump, gas pump
It can be fixed on cleaning liquid bath with heater etc., can also be by itself rigid self-supported.
As shown in Fig. 2 the heater 70 includes heating external member 71 and is arranged on heating in the heating external member 71
Part 72, the heating external member 71 is enclosed on transmission pipeline 30, is transferred to after being heated by heating part 72 in transmission pipeline, so that real
The function of now heating, heating external member 71 may also function as protection and support heats the effect of part 72, for example, heating external member 71 can be pottery
Insulator, it can be heating rod to heat part 72.It is preferred that, the quantity for heating part 72 in each heating external member 71 is 2~8, is passed through
Set it is multiple heat part 72 enhancing heat effect.Further, the heater 70 includes 2~6 sets of heating external members 71
Part 72 is heated with described, heat effect is strengthened by setting multiple heating external members 71 with part 72 is heated.In other embodiments,
Heating effect produced by heater 70 needs to be needed to increase to heating external member 71 or heating the number of part 72 according to realization
Subtract, preferable effect is realized as preferably selection in actual test in the present embodiment.
In the present invention, the gas in transfer conduit can be heated by heater 70, so as to improve to pipe to be cleaned
The drying effect on road, in a particular embodiment, with continued reference to shown in Fig. 2, the heater 70 may be provided at two three
Between siphunculus, described two three-way pipes are communicated to the transmission pipeline 30, are connect heater 70 parallel by two three-way pipes
Enter into transmission pipeline 30, chosen whether by controlling three-way pipe by the transmission pipeline 30 with heater 70, selection
Whether heating function is needed, the need for meeting difference.
It is preferred that, the pipeline selection device 60 is triple valve, the incoming end of transmission pipeline 30 by control triple valve come
Selection is communicated to liquid pump or gas pump, so as to play the function that selection is rinsed or dried up, and makes different devices independently of one another,
Prevent from influencing each other.
With continued reference to shown in Fig. 1, the pipeline washing device also includes filter 80, and the filter 80 is arranged on
In the cleaning liquid bath 10, partial impurities in the cleaning fluid of circulation are filtered out by filter 80, cleaning fluid is preferably met
The effect of recycling.It is preferred that, the filter 80 includes screen pack, is filtered by screen pack, and by more
The screen pack changed realizes preferably filter effect.It is preferred that, the transmission pipeline 30 connect be passed through after pipeline 40 to be cleaned it is described
Filter 80, can produce more impurity, filter 80 is arranged on connection and treated clearly when cleaning fluid rinses pipeline 40 to be cleaned
Filtering can preferably be played a part of by washing after pipeline 40, certainly in other embodiments, and filter 80 can also be arranged on and follow
The other positions of ring flushing link, such as cleaning liquid bath to the exit of transmission pipeline.
It is preferred that, the transmission pipeline 30 connects pipeline to be cleaned by flexible hose, it is contemplated that pipeline to be cleaned has
Different length etc., is met by flexible hose and cleans different pipeline needs, and flexible hose has preferable flexibility.It is excellent
Choosing, the interface of the flexible hose uses vacuum radial seal (VCR, Vacuum Coupling Radius) interface side in succession
Formula, realizes and preferably connects between pipeline.
With continued reference to shown in Fig. 1, the cleaning liquid bath 10 is provided with tank cover plate 11, passes through 11 certain protections of tank cover plate
Effect.It is preferred that, the tank cover plate 11 is transparent cover plate, is easy in operator's observation cleaning liquid bath 10.Further, the groove
Cover plate 11 is provided with some passages, gas during drying is discharged by passage, it is to avoid cause cleaning fluid to splash.
It is preferred that, it is described cleaning liquid bath 10 be additionally provided with drainage element 12, when after the completion of cleaning or it is other need when, lead to
The cleaning fluid discharge cleaned in liquid bath 10 can be fallen by crossing drainage element 12, for example, drainage element 12 is to be located at cleaning liquid bath 10 bottom
Controlled valve can be provided with drainpipe, drainpipe.It is preferred that, the cleaning liquid bath 10 is additionally provided with cleaning fluid injection member 13, leads to
Over cleaning liquid injection member 13 facilitates the injection of cleaning fluid, for example, cleaning fluid injection member 13 is the note for being located at cleaning liquid bath 10 top
Enter pipe, so that convenient add cleaning fluid into cleaning liquid bath 10.
As shown in Figure 3 and Figure 4, the pipeline washing device also includes a device medium 100, and the cleaning liquid bath 10 is set
In described device carrier 100, the function of support and protection is provided for the part of pipeline washing device by device medium 100.
It is preferred that, the bottom of described device carrier 100 is provided with multiple castors 101, and the function of movement is realized by castor 101, so that side
Just the transfer of pipeline washing device, for example, 3 or 4 castors 101 can be installed.Described device carrier 100 is provided with carrier above
Cover plate 102, carrier cover plate 102 can be used to place pipeline to be cleaned, can also be used when idle as workbench, carrier cover plate
102, as the cover plate that can be disassembled from device medium, can meet in actual mechanical process from device medium dismounting or assembling
It is a variety of to need.
The following detailed description of the use of pipeline washing device of the present utility model.
As shown in figure 5, pipeline washing device of the present utility model has 3 kinds of patterns, wherein Line 1 road is as illustrated in the drawing
Wash cycles circuit, adds cleaning liquid bath by cleaning fluid first, cleaning fluid then is transferred into pipeline to be cleaned by liquid pump
It is rinsed, last cleaning fluid returns cleaning liquid bath after the filtering of filter, realizes wash cycles, conveniently continues to make
With, it is to avoid waste.Cleaning fluid abundant circulation flushing in pipeline to be cleaned, also can be complete even if 90 degree of dead angles of pipeline to be cleaned
Clean to entirely, with preferably cleaning performance.During whole detergent line, the liquid of cleaning liquid bath is infused in closing
Pipeline in automatic cycle, with higher security.Cleaning fluid has multiple choices, for example, can select H2O2, alcohols (second
Alcohol, isopropanol IPA etc.), deionized water etc., can select according to actual needs.
Meanwhile, No. 2 circuits are switched to by pipeline selection device, No. 2 circuits are drying circuit, by gas pump by gas
Body is passed into the pipeline to be cleaned after cleaning, so as to realize the function of drying pipeline.Further, No. 3 circuits are heater wire
Road, is realized by the gas of heating and quickly, thoroughly dried up, the need for meeting difference.
The pipeline washing device that the utility model is provided, selects to connect liquid pump, so by control pipeline selection device
The pipe to be cleaned that the cleaning fluid in cleaning liquid bath enters transmission pipeline and is connected with transmission pipeline may be such that by liquid pump afterwards
Lu Zhong, pipeline to be cleaned is rinsed by cleaning fluid, so as to realize the cleaning for pipeline to be cleaned.Further, use
Cleaning fluid afterwards is passed through into the cleaning liquid bath again, so as to realize the function of wash cycles.Further, control pipe is passed through
Road selection device come select connect gas pump, then can be connected by gas pump to transmission pipeline and with transmission pipeline treat clearly
Wash in pipeline and be passed through gas to dry up the pipeline cleaned.
Preferred embodiment of the present utility model is above are only, any restriction effect is not played to the utility model.
Any person of ordinary skill in the field, in the range of the technical solution of the utility model is not departed from, to the utility model
The technical scheme and technology contents of exposure make the variation such as any type of equivalent substitution or modification, belong to without departing from the utility model
Technical scheme content, still fall within protection domain of the present utility model.
Claims (19)
1. a kind of pipeline washing device, it is characterised in that the pipeline washing device includes：
Clean liquid bath, the cleaning liquid bath is connected by the incoming end of a liquid pump and transmission pipeline, the transmission pipeline it is another
One end is passed through the cleaning liquid bath after connecting pipeline to be cleaned；The incoming end of the transmission pipeline is also connected with a gas pump, described
The incoming end of transmission pipeline is connected with the liquid pump by pipeline selection device or connected with the gas pump.
2. pipeline washing device as claimed in claim 1, it is characterised in that the pipeline washing device also includes heating dress
Put, the heater is arranged on the transmission pipeline before pipeline to be cleaned.
3. pipeline washing device as claimed in claim 2, it is characterised in that the heater includes heating external member and setting
Part is heated in the heating external member, the heating external member is enclosed on transmission pipeline.
4. pipeline washing device as claimed in claim 3, it is characterised in that each the quantity for heating part in heating external member is
2~8.
5. the pipeline washing device as described in claim 3 or 4, it is characterised in that the heater is included described in 2~6 sets
Heating external member and described heat part.
6. pipeline washing device as claimed in claim 1, it is characterised in that the pipeline selection device is triple valve.
7. pipeline washing device as claimed in claim 1, it is characterised in that the pipeline washing device also includes filtering dress
Put, the filter is arranged in the cleaning liquid bath.
8. pipeline washing device as claimed in claim 7, it is characterised in that the filter includes screen pack.
9. pipeline washing device as claimed in claim 7 or 8, it is characterised in that the transmission pipeline connects pipeline to be cleaned
After be passed through the filter.
10. pipeline washing device as claimed in claim 1, it is characterised in that the transmission pipeline is connected by flexible hose
Pipeline to be cleaned.
11. pipeline washing device as claimed in claim 10, it is characterised in that the interface of the flexible hose is connect using vacuum
Connect radial seal interface mode.
12. pipeline washing device as claimed in claim 1, it is characterised in that the cleaning liquid bath is provided with tank cover plate.
13. pipeline washing device as claimed in claim 12, it is characterised in that the tank cover plate is transparent cover plate.
14. pipeline washing device as claimed in claim 12, it is characterised in that the tank cover plate is provided with some passages.
15. the pipeline washing device as described in any one in claim 12-14, it is characterised in that the cleaning liquid bath is also
It is provided with drainage element.
16. the pipeline washing device as described in any one in claim 12-14, it is characterised in that the cleaning liquid bath is also
It is provided with cleaning fluid injection member.
17. pipeline washing device as claimed in claim 1, it is characterised in that the pipeline washing device also includes a device
Carrier, the cleaning liquid bath is arranged in described device carrier.
18. pipeline washing device as claimed in claim 17, it is characterised in that described device carrier base is provided with multiple pin
Wheel.
19. the pipeline washing device as described in claim 17 or 18, it is characterised in that be provided with carrier on described device carrier
Cover plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621425486.4U CN206356333U (en) | 2016-12-23 | 2016-12-23 | Pipeline washing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621425486.4U CN206356333U (en) | 2016-12-23 | 2016-12-23 | Pipeline washing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206356333U true CN206356333U (en) | 2017-07-28 |
Family
ID=59376015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621425486.4U Expired - Fee Related CN206356333U (en) | 2016-12-23 | 2016-12-23 | Pipeline washing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206356333U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107350231A (en) * | 2017-08-25 | 2017-11-17 | 山东豪迈化工技术有限公司 | A kind of pipeline-cleaning method and system of micro-reactor apparatus |
| CN108687064A (en) * | 2018-05-15 | 2018-10-23 | 黄乞珠 | A kind of petroleum pipeline cleaning and dredging device |
| CN112871893A (en) * | 2020-12-11 | 2021-06-01 | 三河建华高科有限责任公司 | Device for cleaning pipeline by gas and liquid |
| WO2022217498A1 (en) * | 2021-04-12 | 2022-10-20 | 台湾积体电路制造股份有限公司 | Gas pipeline cleaning mechanism for chemical vapor deposition system |
-
2016
- 2016-12-23 CN CN201621425486.4U patent/CN206356333U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107350231A (en) * | 2017-08-25 | 2017-11-17 | 山东豪迈化工技术有限公司 | A kind of pipeline-cleaning method and system of micro-reactor apparatus |
| CN108687064A (en) * | 2018-05-15 | 2018-10-23 | 黄乞珠 | A kind of petroleum pipeline cleaning and dredging device |
| CN112871893A (en) * | 2020-12-11 | 2021-06-01 | 三河建华高科有限责任公司 | Device for cleaning pipeline by gas and liquid |
| WO2022217498A1 (en) * | 2021-04-12 | 2022-10-20 | 台湾积体电路制造股份有限公司 | Gas pipeline cleaning mechanism for chemical vapor deposition system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170728 Termination date: 20191223 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |