CN206349338U - A kind of electronic product built-in chip production wafer cleaning equipment - Google Patents
A kind of electronic product built-in chip production wafer cleaning equipment Download PDFInfo
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- CN206349338U CN206349338U CN201621413581.2U CN201621413581U CN206349338U CN 206349338 U CN206349338 U CN 206349338U CN 201621413581 U CN201621413581 U CN 201621413581U CN 206349338 U CN206349338 U CN 206349338U
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Abstract
The utility model is related to a kind of wafer cleaning equipment, more particularly to a kind of electronic product built-in chip production wafer cleaning equipment.The technical problems to be solved in the utility model is to provide the physiotherapy equipment built-in chip production wafer cleaning equipment that a kind of cleaning performance is good, cleaning speed is fast.In order to solve the above-mentioned technical problem, the utility model provides such a electronic product built-in chip production wafer cleaning equipment, includes bottom plate, left frame, support bar, service sink, drain pipe, valve, web plate, bearing block, rotating shaft, reel, electric rotating machine, stirring vane, first fixed pulley etc.；Bottom plate top left is welded with the right side of left frame, bottom plate top right side and is symmetrically welded with support bar, and supporting bar top is welded with service sink.The utility model has reached the effect that cleaning performance is good, cleaning speed is fast, and simple in construction, easy to operate, reduces the labor intensity of workman, improves work task efficiency, and crystal column surface cleaning is thorough.
Description
Technical field
The utility model is related to a kind of wafer cleaning equipment, more particularly to a kind of electronic product built-in chip production wafer
Cleaning equipment.
Background technology
Electronic product, is the electronic product that confession under directions everyday consumer life is used.It belongs to specific household electrical appliance, inside has
Electronic component, it will usually applied to amusement, communication and document purposes, such as phone, sound appliances, television set, DVD player
Or even electronic clock etc..Consumption electronic product in there is manufacture all over the world.From operational monitoring Coordinating Bureau of the Ministry of Industry and Information Technology
Solve, 1~November in 2012,1,068,500,000,000 dollars of China's electronics and IT products total import and export value increases by 4.1%, speed increasing ratio 1 on a year-on-year basis
Improve 0.8 percentage point~October.
Chip or microcircuit, microchip, integrated circuit are one kind in electronics circuit（Mainly include semiconductor
Equipment, also including passive component etc.）The mode of miniaturization, and be normally manufactured on semiconductor wafer surface.It is in electronics
One kind is circuit（Mainly include semiconductor equipment, also including passive component etc.）The mode of miniaturization, and be normally manufactured in and partly lead
On body crystal column surface.It is foregoing that integrated circuit of the circuit manufacture in semiconductor chip surface is also known as thin film integrated circuit.Separately have
It is, by separate semiconductor equipment and passive component, to be integrated into substrate or that wiring board is constituted is small that a kind of thick film, which blendes together integrated circuit,
Type circuit.It is on monolithic integrated optical circuit, i.e. thin film integrated circuit herein.
Wafer refers to the silicon used in silicon semiconductor production of integrated circuits, because it is shaped as circle, therefore referred to as wafer.
Wafer is the carrier for producing used in integrated circuits, refers to monocrystalline silicon wafer general significance wafer more.Wafer is the most frequently used semiconductor
Material, is divided into 4 inches, 5 inches, 6 inches, 8 inches of equal-specifications by its diameter, and 12 inches or even the bigger rule of research and development are developed recently
Lattice（14 English inch, 15 English inch, the English inch of 16 English inch ... 20 are with first-class）.Wafer is bigger, and producible IC is more on same disk,
Cost can be reduced；But the requirement to material technology and production technology is higher, such as the problem of uniformity etc..It is generally acknowledged that silicon wafer
Diameter of a circle is bigger, and represent this fab has superior technique, and among the process of production wafer, yields is critically important
Condition.
Electronic product realizes control of which mainly by the chip in it, if chip is of poor quality, physiotherapy equipment can be caused to exist
Unstable during work, so chip is extremely important part in electronic product, chip main carriers are wafer, so wafer
Quality influence whether the quality of chip, wafer is firstly the need of being cleaned before integrated circuit is made, and current wafer is clear
Wash equipment and have the shortcomings that cleaning performance is poor, cleaning speed is slow, thus need that a kind of cleaning performance of research and development is good badly, cleaning speed is fast
Physiotherapy equipment built-in chip production wafer cleaning equipment.
Utility model content
（1）The technical problem to be solved
The utility model in order to overcome current wafer cleaning equipment to have the shortcomings that cleaning performance is poor, cleaning speed is slow,
The technical problems to be solved in the utility model is to provide the physiotherapy equipment built-in chip production that a kind of cleaning performance is good, cleaning speed is fast
Use wafer cleaning equipment.
（2）Technical scheme
In order to solve the above-mentioned technical problem, the utility model provides such a electronic product built-in chip production crystalline substance
Circle cleaning equipment, include bottom plate, left frame, support bar, service sink, drain pipe, valve, web plate, bearing block, rotating shaft, reel,
Electric rotating machine, stirring vane, the first fixed pulley, the first bracing wire, support, the second fixed pulley, fix bar, fixed plate, projection, cunning
Rail, sliding block, top plate, the first spring, L-type connecting rod, pole, arcuate oscillating motion bar, jacking block, second spring, retainer ring, the 3rd are slided calmly
Wheel, the second bracing wire, hinge member, cleaning case, case lid and hinge, bottom plate top left are welded with left frame, and bottom plate top right side is right
Side is symmetrically welded with support bar, and supporting bar top is welded with service sink, and service sink right wall bottom is provided with drain pipe, drain pipe and set
There is the mode that bottom is connected by screw in valve, service sink to be connected with web plate, service sink bottom centre is bolted
Interference is connected with left and right at the top of rotating shaft, rotating shaft and is arranged with stirring vane on the bearing that mode is connected with bearing block, bearing block,
Stirring vane is located in service sink, and rotating shaft bottom, which is connected with by way of key is connected on reel, reel, is wound with the first drawing
Line, the mode that bottom plate crown center is bolted is connected with electric rotating machine, the output shaft of electric rotating machine by shaft coupling with
Rotating shaft is connected, and left frame lower right side is welded with the first fixed pulley and the second fixed pulley by support, and the second fixed pulley is located at first
Above fixed pulley, left frame right side central is symmetrically welded with fix bar, and fix bar right-hand member is welded with uniform on the right side of fixed plate, fixed plate
Projection is welded with, the mode that left frame right upper portion is bolted is connected with slidingtype on slide rail, slide rail and is connected with sliding block, it is sliding
Block coordinates with slide rail, and first is drawstring through Left-side support bar, bypasses the first fixed pulley and the second fixed pulley, is then passed through fix bar,
And be connected by way of linking up with connection with slider bottom, L-type connecting rod is welded with the right side of sliding block, left frame top is welded with top plate,
Left side in the middle part of the first spring, L-type connecting rod is symmetrically connected between top plate bottom and L-type connecting rod by way of linking up with connection to weld
Have a pole, pole left end is connected with arcuate oscillating motion bar by hinge member, arcuate oscillating motion bar left end is welded with jacking block, jacking block with it is convex
Rise and coordinate, the 3rd fixed pulley is welded with by support on the right side of L-type connecting rod bottom, L-type connecting rod bottom is connected with by hinge member
Uniform on cleaning case, cleaning case to be provided with through hole, the mode that cleaning right wall of box bottom is connected by screw is connected with hinge, hinge
The mode being connected by screw, which is connected with case lid, retainer ring, is fixed with the second bracing wire, and the second bracing wire bypasses the 3rd fixed pulley, and
And be connected with cleaning case.
Preferably, hinge member includes notch plate, connecting shaft and swivel plate, and connecting shaft is fixedly mounted on notch plate,
Through hole is provided with swivel plate, connecting shaft is rotated through the through hole on swivel plate, and swivel plate by connecting shaft, on pole
The swivel plate of hinge member that is welded on the left end of pole, pole of notch plate of hinge member connected by way of welding
The notch plate for having the hinge member on arcuate oscillating motion bar, L-type connecting rod is welded on the articulated section on the bottom of L-type connecting rod, L-type connecting rod
The swivel plate of part is connected with cleaning case by way of welding.
Preferably, sealing ring is also included, service sink inner bottom part center is provided with sealing ring, and sealing ring closely connects with bearing block
Touch.
Preferably, also include the mode that upper and lower ends are connected by screw on the right side of travel switch, slide rail and be connected with stroke
Switch, travel switch is connected by circuit with electric rotating machine.
Preferably, electric rotating machine is servomotor.
Preferably, the material of cleaning case is stainless steel.
Preferably, the material of the first bracing wire and the second bracing wire is steel wire rope.
Operation principle：When needing to clean wafer, workman is first toward the cleaning that 4/5ths are poured into service sink
Agent, then opens case lid, it would be desirable to which the wafer of cleaning is put into cleaning case, and then workman's control electric rotating machine is clockwise or inverse
Hour hands rotate, when electric rotating machine turns clockwise, electric rotating machine drive rotating shaft turn clockwise, rotating shaft drive stirring vane and
Reel turns clockwise, and stirring vane turns clockwise agitation cleaning agent, and reel turns clockwise the first bracing wire around rising,
And then moved downward by the first bracing wire band movable slider, so as to drive L-type pole and device is moved downward thereon, the first spring quilt
Stretching so that in cleaning case immersion cleaning agent, and because jacking block and male cooperation, jacking block, which is moved downward, touches projection
When, jacking block can be moved right, and drive arcuate oscillating motion bar lower end to move right, second spring is compressed, and then drive arcuate oscillating motion
Bar upper end pulls cleaning case to swing to the right to left movement, retainer ring by the second bracing wire, when jacking block departs from raised low order end
When, arcuate oscillating motion bar lower end to left movement, and then drives arcuate oscillating motion bar upper end to transport to the right under the elastic force effect of second spring
Dynamic, the second bracing wire is relaxed so that cleaning case is swung to the left under effect of inertia, when electric rotating machine rotate counterclockwise, rotation
Motor drives rotating shaft rotate counterclockwise, and rotating shaft drives stirring vane and reel rotate counterclockwise, stirring vane rotate counterclockwise
Cleaning agent is stirred, reel rotate counterclockwise decontrols the first bracing wire, L-type pole and thereon device are made in the elastic force of the first spring
With lower upward motion so that cleaning case gradually disengages cleaning agent, and cleaning case continues to swing, so repeatedly, paddle
Piece constantly stirs cleaning agent, and cleaning case is constantly immersed in cleaning agent so that cleaning agent is carried out to the wafer in cleaning case
Cleaning, cleaning case is constantly swung so that the wafer in it is constantly stirred, and has reached the effect of uniform cleaning.When wafer is clear
Wash into, and cleaning case is returned to after initial position, workman's control electric rotating machine is stopped, and then opens case lid by the crystalline substance in it
Circle, which takes out, carries out further work, and then workman opens valve, and cleaning agent is flowed out by drain pipe, and workman receives to it
Collection, because there is web plate, the rubbish produced in cleaning process is filtered by web plate, it is ensured that cleaning agent is recycled, when
After cleaning agent whole collection is finished, workman closes valve, and the garbage-cleaning on web plate is clean.
Because hinge member includes notch plate, connecting shaft and swivel plate, connecting shaft is fixedly mounted on notch plate, in rotation
Through hole is provided with flap, connecting shaft is rotated through the through hole on swivel plate, and swivel plate by connecting shaft, the hinge on pole
The swivel plate for the hinge member that the notch plate of relay part is welded on the left end of pole, pole is connected with arc by way of welding
The notch plate of hinge member on shape oscillating rod, L-type connecting rod is welded on the hinge member on the bottom of L-type connecting rod, L-type connecting rod
Swivel plate is connected with cleaning case by way of welding, the hinge member flexible swinging, makes the service life of device longer.
Because also including sealing ring, service sink inner bottom part center is provided with sealing ring, and sealing ring is in close contact with bearing block,
Prevent cleaning agent from leaking.
Because also including travel switch, the mode that upper and lower ends are connected by screw on the right side of slide rail is connected with stroke and opened
Close, travel switch is connected by circuit with electric rotating machine, when sliding block, which is moved downward, touches downside travel switch, lower skidding
Cheng Kaiguan controls electric rotating machine rotate counterclockwise, when the upward motion contact of sliding block is to upside travel switch, upside travel switch
Control electric rotating machine turns clockwise, so so that operation more facilitates, accurate, it is to avoid maloperation causes device to damage.
Because electric rotating machine is servomotor, servomotor can preferably control its rotating speed, and convenient regulation cleaning causes frequency
Rate.
Because the material of cleaning case is stainless steel, stainless steel is corrosion-resistant, effectively extends the service life of device.
Because the material of the first bracing wire and the second bracing wire is steel wire rope, steel wire rope is not easy to break, effectively extends device
Service life.
（3）Beneficial effect
The utility model has reached the effect that cleaning performance is good, cleaning speed is fast, and simple in construction, easy to operate, subtracts
The small labor intensity of workman, improves work task efficiency, and crystal column surface cleaning is thorough, improves the matter of chip production
Amount, and then improve the benefit of enterprise.
Brief description of the drawings
Fig. 1 is the first main structure diagram of the present utility model.
Fig. 2 is the dimensional structure diagram of the utility model hinge member.
Fig. 3 is second of main structure diagram of the present utility model.
Fig. 4 is the third main structure diagram of the present utility model.
Mark in accompanying drawing for：1- bottom plates, the left framves of 2-, 3- support bars, 4- service sinks, 5- drain pipes, 6- valves, 7- nets
Plate, 8- bearing blocks, 9- rotating shafts, 10- reels, 11- electric rotating machines, 12- stirring vanes, the fixed pulleys of 13- first, 14- first is drawn
Line, 15- supports, the fixed pulleys of 16- second, 17- fix bars, 18- fixed plates, 19- is raised, 20- slide rails, 21- sliding blocks, 22- top plates,
The springs of 23- first, 24-L type connecting rods, 25- poles, 26- arcuate oscillating motion bars, 27- jacking blocks, 28- second springs, 29- retainer rings,
The fixed pulleys of 30- the 3rd, the bracing wires of 31- second, 32- hinge members, 321- notch plates, 322- connecting shafts, 323- swivel plates, 33- is clear
Tank-washer, 34- through holes, 35- case lids, 36- hinges, 37- sealing rings, 38- travel switches.
Embodiment
The utility model is further described with reference to the accompanying drawings and examples.
Embodiment 1
A kind of electronic product built-in chip production wafer cleaning equipment, as Figure 1-4, include bottom plate 1, left frame 2,
Support bar 3, service sink 4, drain pipe 5, valve 6, web plate 7, bearing block 8, rotating shaft 9, reel 10, electric rotating machine 11, paddle
Piece 12, the first fixed pulley 13, the first bracing wire 14, support 15, the second fixed pulley 16, fix bar 17, fixed plate 18, projection 19, cunning
Rail 20, sliding block 21, top plate 22, the first spring 23, L-type connecting rod 24, pole 25, arcuate oscillating motion bar 26, jacking block 27, second spring
28th, retainer ring 29, the 3rd fixed pulley 30, the second bracing wire 31, hinge member 32, cleaning case 33, case lid 35 and hinge 36, bottom plate 1
Top left is welded with the right side of left frame 2, the top right side of bottom plate 1 and is symmetrically welded with support bar 3, and the top of support bar 3 is welded with cleaning
Pond 4, the right wall bottom of service sink 4 is provided with drain pipe 5, and drain pipe 5 is provided with what bottom in valve 6, service sink 4 was connected by screw
Mode is connected with web plate 7, and the mode that the bottom centre of service sink 4 is bolted is connected with the axle in bearing block 8, bearing block 8
Hold interference and be connected with rotating shaft 9, the top of rotating shaft 9 left and right is arranged with stirring vane 12, and stirring vane 12 is located in service sink 4,
The bottom of rotating shaft 9, which is connected with by way of key is connected on reel 10, reel 10, is wound with the first bracing wire 14, in the top of bottom plate 1
Between the mode that is bolted be connected with electric rotating machine 11, the output shaft of electric rotating machine 11 is connected by shaft coupling with rotating shaft 9,
The left lower right side of frame 2 is welded with the first fixed pulley 13 and the second fixed pulley 16 by support 15, and the second fixed pulley 16 is located at first
The top of fixed pulley 13, the left right side central of frame 2 is symmetrically welded with fix bar 17, and the right-hand member of fix bar 17 is welded with fixed plate 18, fixed
The right side uniform welding of plate 18 has projection 19, and the mode that the left right upper portion of frame 2 is bolted is connected with slide rail 20, slide rail 20
Slidingtype is connected with sliding block 21, and sliding block 21 coordinates with slide rail 20, and the first bracing wire 14 passes through Left-side support bar 3, bypasses first fixed sliding
The fixed pulley 16 of wheel 13 and second, is then passed through fix bar 17, and be connected by way of linking up with connection with the bottom of sliding block 21, sliding block 21
Right side is welded with L-type connecting rod 24, and the left top of frame 2 is welded with top plate 22, passes through the company of hook between the bottom of top plate 22 and L-type connecting rod 24
The mode connect is symmetrically connected with the first spring 23, and the middle part of L-type connecting rod 24 left side is welded with pole 25, and the left end of pole 25 is by being hinged
Part 32 is connected with arcuate oscillating motion bar 26, and the left end of arcuate oscillating motion bar 26 is welded with jacking block 27, and jacking block 27 coordinates with projection 19, L-type
The 3rd fixed pulley 30 is welded with by support 15 on the right side of the bottom of connecting rod 24, the bottom of L-type connecting rod 24 is connected with by hinge member 32
Through hole 34 uniformly is provided with cleaning case 33, cleaning case 33, the mode that the right wall bottom of cleaning case 33 is connected by screw is connected with conjunction
The mode being connected by screw on page 36, hinge 36, which is connected with case lid 35, retainer ring 29, is fixed with the second bracing wire 31, and second draws
Line 31 bypasses the 3rd fixed pulley 30, and is connected with cleaning case 33.
Hinge member 32 includes notch plate 321, connecting shaft 322 and swivel plate 323, and connecting shaft 322 is fixedly mounted on recessed
On shape plate 321, through hole 34 is provided with swivel plate 323, connecting shaft 322 rotates through the through hole 34 on swivel plate 323
Plate 323 is rotated by connecting shaft 322, and the notch plate 321 of the hinge member 32 on pole 25 is welded on the left end of pole 25, pole
The swivel plate 323 of hinge member 32 on 25 is connected with being hinged on arcuate oscillating motion bar 26, L-type connecting rod 24 by way of welding
The swivel plate 323 for the hinge member 32 that the notch plate 321 of part 32 is welded on the bottom of L-type connecting rod 24, L-type connecting rod 24 passes through
The mode of welding is connected with cleaning case 33.
Also include sealing ring 37, the inner bottom part center of service sink 4 is provided with sealing ring 37, and sealing ring 37 and bearing block 8 are close
Contact.
Also include travel switch 38, the mode that the right side upper and lower ends of slide rail 20 are connected by screw is connected with travel switch
38, travel switch 38 is connected by circuit with electric rotating machine 11.
Electric rotating machine 11 is servomotor.
The material of cleaning case 33 is stainless steel.
The material of first bracing wire 14 and the second bracing wire 31 is steel wire rope.
Operation principle：When needing to clean wafer, workman is first toward the cleaning that 4/5ths are poured into service sink 4
Agent, then opens case lid 35, it would be desirable to which the wafer of cleaning is put into cleaning case 33, then workman's control up time of electric rotating machine 11
Pin or rotate counterclockwise, when electric rotating machine 11 turns clockwise, electric rotating machine 11 drives rotating shaft 9 to turn clockwise, the band of rotating shaft 9
Dynamic stirring vane 12 and reel 10 turn clockwise, and stirring vane 12 turns clockwise agitation cleaning agent, the up time of reel 10
Pin is rotated the first bracing wire 14 around, and then is moved downward by the first bracing wire 14 with movable slider 21, so as to drive L-type pole 25
And device is moved downward thereon, the first spring 23 is stretched so that cleaning case 33 immersion cleaning agent in, and because jacking block 27 with
Projection 19 coordinates, so jacking block 27 is moved downward when touching raised 19, jacking block 27 can be moved right, and drives arcuate oscillating motion bar 26
Lower end is moved right, and second spring 28 is compressed, and then drives the upper end of arcuate oscillating motion bar 26 to left movement, and retainer ring 29 passes through the
Two bracing wires 31 pull cleaning case 33 to swing to the right, when jacking block 27 and the low order end disengaging of projection 19, the lower end of arcuate oscillating motion bar 26
To left movement under the elastic force effect of second spring 28, and then the upper end of arcuate oscillating motion bar 26 is driven to move right, the second bracing wire 31
It is relaxed so that cleaning case 33 is swung to the left under effect of inertia, when 11 rotate counterclockwise of electric rotating machine, the band of electric rotating machine 11
The dynamic rotate counterclockwise of rotating shaft 9, rotating shaft 9 drives stirring vane 12 and the rotate counterclockwise of reel 10, and stirring vane 12 revolves counterclockwise
Turn agitation cleaning agent, the rotate counterclockwise of reel 10 decontrols the first bracing wire 14, and L-type pole 25 and thereon device are in the first spring
The 23 lower motion upwards of elastic force effect so that cleaning case 33 gradually disengages cleaning agent, and cleaning case 33 continues to swing, such as
This repeatedly, the constantly agitation cleaning agent, and cleaning case 33 is constantly immersed in cleaning agent of stirring vane 12 so that cleaning agent is to clear
Wafer in tank-washer 33 is cleaned, and cleaning case 33 constantly swings so that the wafer in it is constantly stirred, and has been reached uniform
The effect of cleaning.When wafer cleaning is completed, and cleaning case 33 returned to after initial position, and workman's control electric rotating machine 11 stops work
Make, then open case lid 35 and the wafer in it is taken out into progress further work, then workman opens valve 6, and cleaning agent leads to
Cross drain pipe 5 to flow out, workman is collected it, because playing the role of the rubbish produced in web plate 7, cleaning process by web plate 7
Filtering, it is ensured that cleaning agent is recycled, after cleaning agent, which is all collected, to be finished, workman closes valve 6, and by web plate 7
On garbage-cleaning it is clean.
Because hinge member 32 includes notch plate 321, connecting shaft 322 and swivel plate 323, connecting shaft 322 is fixedly mounted
On notch plate 321, through hole 34 is provided with swivel plate 323, connecting shaft 322 passes through the through hole 34 on swivel plate 323, and
Swivel plate 323 is rotated by connecting shaft 322, and the notch plate 321 of the hinge member 32 on pole 25 is welded on the left end of pole 25,
The swivel plate 323 of hinge member 32 on pole 25 is connected with by way of welding on arcuate oscillating motion bar 26, L-type connecting rod 24
The notch plate 321 of hinge member 32 is welded on the swivel plate 323 of the hinge member 32 on the bottom of L-type connecting rod 24, L-type connecting rod 24
Cleaning case 33 is connected with by way of welding, the flexible swinging of hinge member 32 makes the service life of device longer.
Because also including sealing ring 37, the inner bottom part center of service sink 4 is provided with sealing ring 37, sealing ring 37 and bearing block 8
It is in close contact, prevents cleaning agent from leaking.
Because also including travel switch 38, the mode that the right side upper and lower ends of slide rail 20 are connected by screw is connected with stroke
Switch 38, travel switch 38 is connected by circuit with electric rotating machine 11, when sliding block 21 move downward touch on the downside of stroke open
When closing 38, the control rotate counterclockwise of electric rotating machine 11 of downside travel switch 38, when the upward motion contact of sliding block 21 to upside stroke
When switching 38, the control electric rotating machine 11 of upside travel switch 38 turns clockwise, so so that operation more facilitates, accurately, keeps away
Having exempted from maloperation causes device to damage.
Because electric rotating machine 11 is servomotor, servomotor can preferably control its rotating speed, and convenient regulation cleaning causes
Frequency.
Because the material of cleaning case 33 is stainless steel, stainless steel is corrosion-resistant, effectively extends the service life of device.
Because the material of the first bracing wire 14 and the second bracing wire 31 is steel wire rope, steel wire rope is not easy to break, effectively extends dress
The service life put.
Embodiment described above only expresses preferred embodiment of the present utility model, and it describes more specific and detailed,
But therefore it can not be interpreted as the limitation to the utility model the scope of the claims.It should be pointed out that for the common of this area
For technical staff, without departing from the inventive concept of the premise, some deformations can also be made, improves and substitutes, these are all
Belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (7)
1. a kind of electronic product built-in chip production wafer cleaning equipment, it is characterised in that include bottom plate（1）, left frame
（2）, support bar（3）, service sink（4）, drain pipe（5）, valve（6）, web plate（7）, bearing block（8）, rotating shaft（9）, reel
（10）, electric rotating machine（11）, stirring vane（12）, the first fixed pulley（13）, the first bracing wire（14）, support（15）, it is second fixed sliding
Wheel（16）, fix bar（17）, fixed plate（18）, it is raised（19）, slide rail（20）, sliding block（21）, top plate（22）, the first spring
（23）, L-type connecting rod（24）, pole（25）, arcuate oscillating motion bar（26）, jacking block（27）, second spring（28）, retainer ring（29）,
Three fixed pulleys（30）, the second bracing wire（31）, hinge member（32）, cleaning case（33）, case lid（35）And hinge（36）, bottom plate（1）
Top left is welded with left frame（2）, bottom plate（1）Support bar is symmetrically welded with the right side of top right side（3）, support bar（3）Weld on top
It is connected to service sink（4）, service sink（4）Right wall bottom is provided with drain pipe（5）, drain pipe（5）It is provided with valve（6）, service sink（4）
The mode that interior bottom is connected by screw is connected with web plate（7）, service sink（4）The mode that bottom centre is bolted is connected
There is bearing block（8）, bearing block（8）Interference is connected with rotating shaft on interior bearing（9）, rotating shaft（9）Top or so is arranged with stirring
Blade（12）, stirring vane（12）Positioned at service sink（4）It is interior, rotating shaft（9）Bottom is connected with reel by way of key is connected
（10）, reel（10）On be wound with the first bracing wire（14）, bottom plate（1）The mode that crown center is bolted is connected with rotation
Motor（11）, electric rotating machine（11）Output shaft pass through shaft coupling and rotating shaft（9）Connection, left frame（2）Lower right side passes through support
（15）It is welded with the first fixed pulley（13）With the second fixed pulley（16）, the second fixed pulley（16）Positioned at the first fixed pulley（13）On
Side, left frame（2）Right side central is symmetrically welded with fix bar（17）, fix bar（17）Right-hand member is welded with fixed plate（18）, fixed plate
（18）Right side uniform welding has projection（19）, left frame（2）The mode that right upper portion is bolted is connected with slide rail（20）, it is sliding
Rail（20）Upper slidingtype is connected with sliding block（21）, sliding block（21）With slide rail（20）Coordinate, the first bracing wire（14）Through Left-side support
Bar（3）, bypass the first fixed pulley（13）With the second fixed pulley（16）, it is then passed through fix bar（17）, and by linking up with the side of connection
Formula and sliding block（21）Bottom is connected, sliding block（21）Right side is welded with L-type connecting rod（24）, left frame（2）Top is welded with top plate（22）,
Top plate（22）Bottom and L-type connecting rod（24）Between link up with connection by way of be symmetrically connected with the first spring（23）, L-type connecting rod
（24）Pole is welded with the left of middle part（25）, pole（25）Left end passes through hinge member（32）It is connected with arcuate oscillating motion bar（26）,
Arcuate oscillating motion bar（26）Left end is welded with jacking block（27）, jacking block（27）With projection（19）Coordinate, L-type connecting rod（24）It is logical on the right side of bottom
Cross support（15）It is welded with the 3rd fixed pulley（30）, L-type connecting rod（24）Bottom passes through hinge member（32）It is connected with cleaning case
（33）, cleaning case（33）On be uniformly provided with through hole（34）, cleaning case（33）The mode that right wall bottom is connected by screw is connected with
Hinge（36）, hinge（36）On the mode that is connected by screw be connected with case lid（35）, retainer ring（29）On be fixed with the second drawing
Line（31）, the second bracing wire（31）Bypass the 3rd fixed pulley（30）, and and cleaning case（33）Connection.
2. a kind of electronic product built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that hinge
Relay part（32）Include notch plate（321）, connecting shaft（322）And swivel plate（323）, connecting shaft（322）It is fixedly mounted on recessed
Shape plate（321）On, in swivel plate（323）On be provided with through hole（34）, connecting shaft（322）Through swivel plate（323）On through hole
（34）, and swivel plate（323）Pass through connecting shaft（322）Rotate, pole（25）On hinge member（32）Notch plate（321）
It is welded on pole（25）Left end, pole（25）On hinge member（32）Swivel plate（323）Connected by way of welding
There is arcuate oscillating motion bar（26）, L-type connecting rod（24）On hinge member（32）Notch plate（321）It is welded on L-type connecting rod（24）'s
Bottom, L-type connecting rod（24）On hinge member（32）Swivel plate（323）Cleaning case is connected with by way of welding（33）.
3. a kind of electronic product built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that also
Include sealing ring（37）, service sink（4）Inner bottom part center is provided with sealing ring（37）, sealing ring（37）With bearing block（8）Closely
Contact.
4. a kind of electronic product built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that also
Include travel switch（38）, slide rail（20）The mode that right side upper and lower ends are connected by screw is connected with travel switch（38）,
Travel switch（38）Pass through circuit and electric rotating machine（11）Connection.
5. a kind of electronic product built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that rotation
Rotating motor（11）For servomotor.
6. a kind of electronic product built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that clear
Tank-washer（33）Material be stainless steel.
7. a kind of electronic product built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that the
One bracing wire（14）With the second bracing wire（31）Material be steel wire rope.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107597729A (en) * | 2017-10-26 | 2018-01-19 | 杜俊慧 | A kind of integrated circuit tester deduster |
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2016
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107597729A (en) * | 2017-10-26 | 2018-01-19 | 杜俊慧 | A kind of integrated circuit tester deduster |
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