CN206225336U - A kind of physiotherapy equipment built-in chip production wafer cleaning equipment - Google Patents
A kind of physiotherapy equipment built-in chip production wafer cleaning equipment Download PDFInfo
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- CN206225336U CN206225336U CN201621257309.XU CN201621257309U CN206225336U CN 206225336 U CN206225336 U CN 206225336U CN 201621257309 U CN201621257309 U CN 201621257309U CN 206225336 U CN206225336 U CN 206225336U
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- cleaning
- cleaning case
- bearing seat
- belt pulley
- chip production
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Abstract
The utility model belongs to physiotherapy equipment production technical field, more particularly to a kind of physiotherapy equipment built-in chip production wafer cleaning equipment.The technical problems to be solved in the utility model is to provide the physiotherapy equipment built-in chip production wafer cleaning equipment that a kind of cleaning performance is good, cleaning speed is fast.In order to solve the above-mentioned technical problem, the utility model provides such a physiotherapy equipment built-in chip production wafer cleaning equipment, includes base plate, sliding block, slide rail, connecting rod, right shelf, fixed seat, spring, cleaning case, hinge, case lid, web plate, drain pipe, valve, first bearing seat etc.；Base plate top passes on left bolted mode and is connected with slide rail, and slidingtype is provided with sliding block on slide rail, and sliding block coordinates with slide rail.The utility model has reached the effect that cleaning performance is good, cleaning speed is fast, and simple structure, easy to operate, reduces the labour intensity of workman, improves work task efficiency, and crystal column surface cleaning is thorough.
Description
Technical field
The utility model belongs to physiotherapy equipment production technical field, more particularly to a kind of physiotherapy equipment built-in chip production wafer
Cleaning equipment.
Background technology
Physical therapy apparatus, its principle is that such as far infrared can be activated with by high-tech technology to physiotherapy equipment full name
Cell, also something magnetic therapy, the also operation principle such as electronic impulse, improve body metabolism, activate physical function to provide body
The health status of body.
Wafer refers to the silicon used by silicon semiconductor production of integrated circuits, because it is shaped as circle, therefore referred to as wafer.
Wafer is the carrier for producing used in integrated circuits, and monocrystalline silicon wafer is referred to general significance wafer more.Wafer is the most frequently used semiconductor
Material, 4 inches, 5 inches, 6 inches, 8 inches of equal-specifications are divided into by its diameter, and 12 inches of even bigger rule of research and development are developed recently
Lattice（14 English inch, 15 English inch, the English inch of 16 English inch ... 20 are with first-class）.Wafer is bigger, and producible IC is more on same disk,
Can reduces cost；But the requirement to material technology and production technology is higher, the problem of such as uniformity etc..It is generally acknowledged that silicon wafer
Diameter of a circle is bigger, and represent this fab has superior technique, and in the middle of the process of production wafer, yields is critically important
Condition.
Physiotherapy equipment realizes control of which mainly by the chip in it, if chip is of poor quality, can cause physiotherapy equipment in work
Unstable when making, so chip is extremely important part in physiotherapy equipment, chip main carriers are wafer, so the matter of wafer
Amount influences whether the quality of chip, and firstly the need of being cleaned before integrated circuit is made, current wafer cleaning sets wafer
It is standby to have the shortcomings that cleaning performance is poor, cleaning speed is slow, therefore need badly and research and develop a kind of physiotherapy that cleaning performance is good, cleaning speed is fast
Instrument built-in chip production wafer cleaning equipment.
Utility model content
（1）The technical problem to be solved
The utility model in order to overcome current wafer cleaning equipment to have the shortcomings that cleaning performance is poor, cleaning speed is slow,
The technical problems to be solved in the utility model is to provide the physiotherapy equipment built-in chip production that a kind of cleaning performance is good, cleaning speed is fast
Use wafer cleaning equipment.
（2）Technical scheme
In order to solve the above-mentioned technical problem, the utility model provides such a physiotherapy equipment built-in chip production wafer
Cleaning equipment, include base plate, sliding block, slide rail, connecting rod, right shelf, fixed seat, spring, cleaning case, hinge, case lid, web plate,
Drain pipe, valve, first bearing seat, L-type mounting seat, electric rotating machine, worm screw, stirring vane, first base, second bearing seat,
First rotating shaft, small belt pulley, worm gear, flat belt, second base, 3rd bearing seat, the second rotating shaft, big belt pulley, rotating disk, it is hinged
Part, fastening lid and swing arm, base plate top pass on left bolted mode and are connected with slide rail, and slidingtype is provided with slide rail
Sliding block, sliding block coordinates with slide rail, and base plate top right-hand member is welded with right shelf, and right shelf left lower is welded with fixed seat, right shelf left side
Top is uniformly connected with spring by way of linking up with connection, and spring left end is connected with cleaning case by way of linking up with connection,
The mode that cleaning case left wall top is connected by screw is connected with hinge, and the mode being connected by screw on hinge is connected with case
Lid, the mode that bottom is connected by screw in cleaning case is connected with web plate, and cleaning case left wall bottom is provided with drain pipe, on drain pipe
Valve is provided with, cleaning case bottom centre is provided with and is provided with manhole, and interference is connected with first bearing seat, first axle in manhole
Interference is connected with worm screw on bearing in bearing, and worm screw top uniform welding has stirring vane, and stirring vane is located in cleaning case,
Connecting rod is welded between cleaning case bottom left end and slider top, cleaning case bottom left is welded with L-type mounting seat, L-type peace
The mode that dress seat right-hand member is bolted is connected with electric rotating machine, and output shaft and the worm screw bottom of electric rotating machine pass through shaft coupling
Connection, cleaning case bottom right is welded with first base and second base, and first base is located at second base left side, first base
On the mode that is bolted be connected with second bearing seat, interference is connected with first rotating shaft on the bearing in second bearing seat,
Worm gear and small belt pulley are connected with first rotating shaft by way of being bonded and connecing, worm gear is located at small belt pulley rear side, worm gear and snail
Bar is engaged, and the mode being bolted in second base is connected with 3rd bearing seat, interference on the bearing in 3rd bearing seat
The second rotating shaft is connected with, big belt pulley and rotating disk is connected with the second rotating shaft by way of being bonded and connecing, big belt pulley is located at and turns
Disk rear side, is wound with flat belt between big belt pulley and small belt pulley, pass through articulated section at rotating disk eccentric position and fixed seat between
Part is connected with swing arm.
Preferably, hinge member includes rotary shaft and fastening lid, through hole is provided with rotating disk eccentric position, in fixed seat
It is provided with through hole, swing arm or so two ends and is provided with through hole, rotary shaft passes through the through hole at swing arm left end and rotating disk eccentric position,
And rotate shaft rear end to be connected with fastening lid interference, rotary shaft rotates through the through hole on swing arm right-hand member and fixed seat
Shaft rear end is connected with fastening lid interference.
Preferably, sealing ring is also included, cleaning case inner bottom part central glue is connected to sealing ring, sealing ring and first bearing seat
It is in close contact.
Preferably, also it is welded with reinforcement between base plate top right side and right shelf left lower including reinforcement.
Preferably, electric rotating machine is servomotor.
Preferably, the material of cleaning case is stainless steel.
Preferably, the material of swing arm is Q235 steel.
Operation principle：When workman needs cleaning wafer, workman first opens case lid, and proper amount of wafer is poured into clearly
In tank-washer, wafer falls on web plate, and then workman is again poured into cleaning case cleaning agent, when cleaning agent all submerges wafer
Afterwards, workman stops pouring into cleaning agent, and case lid is closed.Then workman's control electric rotating machine turns clockwise, electric rotating machine
Worm screw is driven to turn clockwise, worm screw drives stirring vane to turn clockwise, stirring vane rotational agitation cleaning agent so that cleaning
Agent is cleaned to wafer, and at the same time, worm screw drives worm gear to turn clockwise, and worm gear drives first rotating shaft to turn clockwise,
First rotating shaft drives small belt pulley to turn clockwise, and small belt pulley drives big belt pulley to turn clockwise by flat belt, great Pi
Belt wheel drives the second rotating shaft to turn clockwise, and the second rotating shaft drives rotating disk to turn clockwise, because swing arm right-hand member and fixed seat
It is hinged, and connecting rod is welded between cleaning case right-hand member and spring connection and cleaning case bottom and sliding block, so works as rotating disk
When turning clockwise, cleaning case double swerve is driven by swing arm so that the wafer in it is stirred, reach the effect of uniform cleaning
Really.So repeatedly, after crystal column surface is cleaned up, and cleaning case returns to initial position, workman's control electric rotating machine stops
Rotation, then opens valve, and cleaning agent is flowed out by drain pipe, and workman is collected to it, after cleaning agent has all flowed,
Workman is then opened valve closing by case lid, and the wafer on web plate is taken out, and web plate is cleaned out, then case lid is closed.
Because hinge member includes rotary shaft and fastening lid, through hole is provided with rotating disk eccentric position, is also opened in fixed seat
There are through hole, swing arm or so two ends to be provided with through hole, rotary shaft passes through the through hole at swing arm left end and rotating disk eccentric position, and
And rotation shaft rear end is connected with fastening lid interference, rotary shaft passes through the through hole on swing arm right-hand member and fixed seat, and rotary shaft
Rear end is connected with fastening lid interference, the hinge member flexible swinging, makes the service life of equipment longer.
Because also including sealing ring, cleaning case inner bottom part central glue is connected to sealing ring, and sealing ring is tight with first bearing seat
Contiguity is touched, and prevents cleaning agent from leaking.
Because also including reinforcement, reinforcement is welded between base plate top right side and right shelf left lower, strengthens and set
The stability of standby structure.
Because electric rotating machine is servomotor, servomotor can preferably control its rotating speed, make the more steady of equipment operation.
Because the material of cleaning case is stainless steel, stainless steel is corrosion-resistant, effectively extends the service life of equipment.
Because the material of swing arm is Q235 steel, Q235 steel rigidity is strong and is unlikely to deform, and effectively extends the use of equipment
Life-span.
（3）Beneficial effect
The utility model has reached the effect that cleaning performance is good, cleaning speed is fast, and simple structure, easy to operate, subtracts
The small labour intensity of workman, improves work task efficiency, and crystal column surface cleaning is thorough, improves the matter of chip production
Amount, and then improve the benefit of enterprise.
Brief description of the drawings
Fig. 1 is the first main structure diagram of the present utility model.
Fig. 2 is the dimensional structure diagram of the utility model hinge member.
Fig. 3 is second main structure diagram of the present utility model.
Fig. 4 is the third main structure diagram of the present utility model.
Mark in accompanying drawing for：1- base plates, 2- sliding blocks, 3- slide rails, 4- connecting rods, 5- right shelfs, 6- fixed seats, 7- springs,
8- cleaning cases, 9- hinges, 10- case lids, 11- web plates, 12- drain pipes, 13- valves, 14- first bearing seats, 15-L type mounting seats,
16- electric rotating machines, 17- worm screws, 18- stirring vanes, 19- first bases, 20- second bearing seats, 21- first rotating shafts, 22- cuticles
Belt wheel, 23- worm gears, 24- flat belts, 25- second bases, 26- 3rd bearings seat, the rotating shafts of 27- second, 28- big belt pulleys, 29-
Rotating disk, 30- hinge members, 301- rotary shafts, 302- fastening lids, 31- swing arms, 32- sealing rings, 33- reinforcements.
Specific embodiment
The utility model is further described with reference to the accompanying drawings and examples.
Embodiment 1
A kind of physiotherapy equipment built-in chip production wafer cleaning equipment, as Figure 1-4, includes base plate 1, sliding block 2, slides
Rail 3, connecting rod 4, right shelf 5, fixed seat 6, spring 7, cleaning case 8, hinge 9, case lid 10, web plate 11, drain pipe 12, valve 13,
First bearing seat 14, L-type mounting seat 15, electric rotating machine 16, worm screw 17, stirring vane 18, first base 19, second bearing seat
20th, first rotating shaft 21, small belt pulley 22, worm gear 23, flat belt 24, second base 25,3rd bearing seat the 26, second rotating shaft 27,
Big belt pulley 28, rotating disk 29, hinge member 30, fastening lid 302 and swing arm 31, the top left side of base plate 1 are bolted
Mode is connected with slide rail 3, and slidingtype is provided with sliding block 2 on slide rail 3, and sliding block 2 coordinates with slide rail 3, and the top right-hand member of base plate 1 is welded with the right side
Frame 5, the left lower of right shelf 5 is welded with fixed seat 6, and the left upper portion of right shelf 5 is uniformly connected with spring by way of linking up with connection
7, the left end of spring 7 is connected with cleaning case 8, the mode that the left wall of cleaning case 8 top is connected by screw by way of linking up with connection
Hinge 9 is connected with, the mode being connected by screw on hinge 9 is connected with case lid 10, and bottom is connected by screw in cleaning case 8
Mode is connected with web plate 11, and the left wall bottom of cleaning case 8 is provided with drain pipe 12, and drain pipe 12 is provided with valve 13, the bottom of cleaning case 8
Center is provided with and is provided with manhole, and interference is connected with first bearing seat 14 in manhole, on the bearing in first bearing seat 14
Interference is connected with worm screw 17, and the top uniform welding of worm screw 17 has stirring vane 18, and stirring vane 18 is located in cleaning case 8, cleaning
Connecting rod 4 is welded between the bottom left end of case 8 and the top of sliding block 2, the bottom left of cleaning case 8 is welded with L-type mounting seat 15, L-type
The mode that the right-hand member of mounting seat 15 is bolted is connected with electric rotating machine 16, output shaft and the bottom of worm screw 17 of electric rotating machine 16
Connected by shaft coupling, the bottom right of cleaning case 8 is welded with first base 19 and second base 25, first base 19 is located at second
The left side of base 25, the mode being bolted in first base 19 is connected with second bearing seat 20, in second bearing seat 20
Interference is connected with first rotating shaft 21 on bearing, is connected with worm gear 23 and small belt pulley in first rotating shaft 21 by way of being bonded and connecing
22, worm gear 23 is located at the rear side of small belt pulley 22, and worm gear 23 is engaged with worm screw 17, the mode being bolted in second base 25
3rd bearing seat 26 is connected with, interference is connected with the second rotating shaft 27 on the bearing in 3rd bearing seat 26, leads in the second rotating shaft 27
Cross and be bonded the mode for connecing and be connected with big belt pulley 28 and rotating disk 29, big belt pulley 28 is located at the rear side of rotating disk 29, big belt pulley 28 with
Flat belt 24 is wound between small belt pulley 22, is connected with by hinge member 30 and fixed seat 6 between at the eccentric position of rotating disk 29
Swing arm 31.
Hinge member 30 includes rotary shaft 301 and fastening lid 302, and through hole, fixed seat 6 are provided with the eccentric position of rotating disk 29
On be also provided with through hole, the two ends of swing arm 31 or so are provided with through hole, and rotary shaft 301 is eccentric through the left end of swing arm 31 and rotating disk 29
Through hole at position, and the rear end of rotary shaft 301 is connected with the interference of fastening lid 302, rotary shaft 301 through the right-hand member of swing arm 31 and
Through hole in fixed seat 6, and the rear end of rotary shaft 301 is connected with the interference of fastening lid 302.
Sealing ring 32 is also included, the inner bottom part central glue of cleaning case 8 is connected to sealing ring 32, sealing ring 32 and first bearing seat
14 are in close contact.
Also include reinforcement 33, reinforcement 33 is welded between the top right side of base plate 1 and the left lower of right shelf 5.
Electric rotating machine 16 is servomotor.
The material of cleaning case 8 is stainless steel.
The material of swing arm 31 is Q235 steel.
Operation principle：When workman needs cleaning wafer, workman first opens case lid 10, and proper amount of wafer is poured into
In cleaning case 8, wafer falls on web plate 11, and then workman is again poured into cleaning case 8 cleaning agent, when cleaning agent is by wafer whole
After submergence, workman stops pouring into cleaning agent, and case lid 10 is closed.Then workman's control electric rotating machine 16 turns clockwise,
Electric rotating machine 16 drives worm screw 17 to turn clockwise, and worm screw 17 drives stirring vane 18 to turn clockwise, and stirring vane 18 rotates
Agitation cleaning agent so that cleaning agent is cleaned to wafer, at the same time, worm screw 17 drives worm gear 23 to turn clockwise, worm gear
23 drive first rotating shafts 21 turn clockwise, and first rotating shaft 21 drives small belt pulley 22 to turn clockwise, and small belt pulley 22 passes through
Flat belt 24 drives big belt pulley 28 to turn clockwise, and big belt pulley 28 drives the second rotating shaft 27 to turn clockwise, the second rotating shaft
27 drive rotating disks 29 turn clockwise, because the right-hand member of swing arm 31 is hinged with fixed seat 6, and the right-hand member of cleaning case 8 connects with spring 7
Connect and the bottom of cleaning case 8 and sliding block 2 between be welded with connecting rod 4, so when rotating disk 29 turns clockwise, by swing arm
31 drive the double swerve of cleaning case 8 so that the wafer in it is stirred, and reach the effect of uniform cleaning.So repeatedly, when wafer table
After face cleans up, and cleaning case 8 returns to initial position, workman's control electric rotating machine 16 stops the rotation, then by valve 13
Open, cleaning agent flows out by drain pipe 12, workman is collected to it, after cleaning agent is whole to have flowed, workman is by valve 13
Close, then open case lid 10, the wafer on web plate 11 is taken out, web plate 11 is cleaned out, then case lid 10 is closed.
Because hinge member 30 includes rotary shaft 301 and fastening lid 302, through hole is provided with the eccentric position of rotating disk 29, Gu
Also through hole is provided with reservation 6, the two ends of swing arm 31 or so are provided with through hole, and rotary shaft 301 passes through the left end of swing arm 31 and rotating disk
Through hole at 29 eccentric positions, and the rear end of rotary shaft 301 is connected with the interference of fastening lid 302, and rotary shaft 301 passes through swing arm 31
Through hole on right-hand member and fixed seat 6, and the rear end of rotary shaft 301 is connected with the interference of fastening lid 302, and the hinge member 30 swings spirit
It is living, make the service life of equipment longer.
Because also including sealing ring 32, the inner bottom part central glue of cleaning case 8 is connected to sealing ring 32, sealing ring 32 and first axle
Bearing 14 is in close contact, and prevents cleaning agent from leaking.
Because also including reinforcement 33, reinforcement 33 is welded between the top right side of base plate 1 and the left lower of right shelf 5, plus
The strong stability of device structure.
Because electric rotating machine 16 is servomotor, servomotor can preferably control its rotating speed, make the more flat of equipment operation
Surely.
Because the material of cleaning case 8 is stainless steel, stainless steel is corrosion-resistant, effectively extends the service life of equipment.
Because the material of swing arm 31 is Q235 steel, Q235 steel rigidity is strong and is unlikely to deform, and effectively extends making for equipment
Use the life-span.
Embodiment described above only expresses preferred embodiment of the present utility model, and its description is more specific and detailed,
But therefore can not be interpreted as the limitation to the utility model the scope of the claims.It should be pointed out that common for this area
For technical staff, without departing from the inventive concept of the premise, some deformations, improvement can also be made and substituted, these are all
Belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (7)
1. a kind of physiotherapy equipment built-in chip production wafer cleaning equipment, it is characterised in that include base plate（1）, sliding block（2）、
Slide rail（3）, connecting rod（4）, right shelf（5）, fixed seat（6）, spring（7）, cleaning case（8）, hinge（9）, case lid（10）, web plate
（11）, drain pipe（12）, valve（13）, first bearing seat（14）, L-type mounting seat（15）, electric rotating machine（16）, worm screw（17）、
Stirring vane（18）, first base（19）, second bearing seat（20）, first rotating shaft（21）, small belt pulley（22）, worm gear（23）、
Flat belt（24）, second base（25）, 3rd bearing seat（26）, the second rotating shaft（27）, big belt pulley（28）, rotating disk（29）, hinge
Relay part（30）, fastening lid（302）And swing arm（31）, base plate（1）The mode that top left side is bolted is connected with cunning
Rail（3）, slide rail（3）Upper slidingtype is provided with sliding block（2）, sliding block（2）With slide rail（3）Coordinate, base plate（1）Top right-hand member is welded with the right side
Frame（5）, right shelf（5）Left lower is welded with fixed seat（6）, right shelf（5）Left upper portion is uniformly connected by way of linking up with connection
It is connected to spring（7）, spring（7）Left end is connected with cleaning case by way of linking up with connection（8）, cleaning case（8）Left wall top is logical
The mode for crossing mode connects for screw is connected with hinge（9）, hinge（9）On the mode that is connected by screw be connected with case lid（10）, cleaning
Case（8）The mode that interior bottom is connected by screw is connected with web plate（11）, cleaning case（8）Left wall bottom is provided with drain pipe（12）,
Drain pipe（12）It is provided with valve（13）, cleaning case（8）Bottom centre is provided with and is provided with manhole, interference connection in manhole
There is first bearing seat（14）, first bearing seat（14）Interference is connected with worm screw on interior bearing（17）, worm screw（17）Top is uniform
It is welded with stirring vane（18）, stirring vane（18）Positioned at cleaning case（8）It is interior, cleaning case（8）Bottom left end and sliding block（2）Top
Between be welded with connecting rod（4）, cleaning case（8）Bottom left is welded with L-type mounting seat（15）, L-type mounting seat（15）Right-hand member leads to
Cross bolted mode and be connected with electric rotating machine（16）, electric rotating machine（16）Output shaft and worm screw（17）Bottom passes through shaft coupling
Device is connected, cleaning case（8）Bottom right is welded with first base（19）And second base（25）, first base（19）Positioned at second
Base（25）Left side, first base（19）On the mode that is bolted be connected with second bearing seat（20）, second bearing seat
（20）Interference is connected with first rotating shaft on interior bearing（21）, first rotating shaft（21）On worm gear is connected with by way of being bonded and connecing
（23）And small belt pulley（22）, worm gear（23）Positioned at small belt pulley（22）Rear side, worm gear（23）With worm screw（17）Engagement, the second bottom
Seat（25）On the mode that is bolted be connected with 3rd bearing seat（26）, 3rd bearing seat（26）Interference connects on interior bearing
It is connected to the second rotating shaft（27）, the second rotating shaft（27）On big belt pulley is connected with by way of being bonded and connecing（28）And rotating disk（29）,
Big belt pulley（28）Positioned at rotating disk（29）Rear side, big belt pulley（28）With small belt pulley（22）Between be wound with flat belt（24）, turn
Disk（29）At eccentric position and fixed seat（6）Between pass through hinge member（30）It is connected with swing arm（31）.
2. a kind of physiotherapy equipment built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that be hinged
Part（30）Include rotary shaft（301）And fastening lid（302）, rotating disk（29）Through hole, fixed seat are provided with eccentric position（6）On
Also through hole, swing arm are provided with（31）Left and right two ends are provided with through hole, rotary shaft（301）Through swing arm（31）Left end and rotating disk
（29）Through hole at eccentric position, and rotary shaft（301）Rear end and fastening lid（302）Interference is connected, rotary shaft（301）Pass through
Swing arm（31）Right-hand member and fixed seat（6）On through hole, and rotary shaft（301）Rear end and fastening lid（302）Interference is connected.
3. a kind of physiotherapy equipment built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that also wrap
Sealing ring is included（32）, cleaning case（8）Inner bottom part central glue is connected to sealing ring（32）, sealing ring（32）With first bearing seat（14）
It is in close contact.
4. a kind of physiotherapy equipment built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that also wrap
Include reinforcement（33）, base plate（1）Top right side and right shelf（5）Reinforcement is welded between left lower（33）.
5. a kind of physiotherapy equipment built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that rotation
Motor（16）It is servomotor.
6. a kind of physiotherapy equipment built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that cleaning
Case（8）Material be stainless steel.
7. a kind of physiotherapy equipment built-in chip production wafer cleaning equipment according to claim 1, it is characterised in that swing
Bar（31）Material be Q235 steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621257309.XU CN206225336U (en) | 2016-11-23 | 2016-11-23 | A kind of physiotherapy equipment built-in chip production wafer cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621257309.XU CN206225336U (en) | 2016-11-23 | 2016-11-23 | A kind of physiotherapy equipment built-in chip production wafer cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206225336U true CN206225336U (en) | 2017-06-06 |
Family
ID=58791083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621257309.XU Expired - Fee Related CN206225336U (en) | 2016-11-23 | 2016-11-23 | A kind of physiotherapy equipment built-in chip production wafer cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206225336U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109860084A (en) * | 2019-02-28 | 2019-06-07 | 重庆小马智诚科技有限责任公司 | Intelligent chip production crystal column surface cleaning device |
-
2016
- 2016-11-23 CN CN201621257309.XU patent/CN206225336U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109860084A (en) * | 2019-02-28 | 2019-06-07 | 重庆小马智诚科技有限责任公司 | Intelligent chip production crystal column surface cleaning device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Chen Xiongbin Inventor before: Xu Zijun |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170929 Address after: Xinhui District, Guangdong city of Jiangmen province 529156 City three Ming Road No. 32 (- six workshop) Patentee after: Jiangmen City gold Pingguo laundry chain Co. Ltd. Address before: 362100, Fujian, Quanzhou province Huian County town of snail East Road, No. 2, Qi Xiang Lane 4, 408 housing area Patentee before: Quanzhou Longhang Trading Co. Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170606 Termination date: 20201123 |