CN206321201U - A kind of laser interferometer interference mirror adjusts platform - Google Patents

A kind of laser interferometer interference mirror adjusts platform Download PDF

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Publication number
CN206321201U
CN206321201U CN201621377497.XU CN201621377497U CN206321201U CN 206321201 U CN206321201 U CN 206321201U CN 201621377497 U CN201621377497 U CN 201621377497U CN 206321201 U CN206321201 U CN 206321201U
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China
Prior art keywords
platform
interference mirror
synchronous motor
laser interferometer
rotary shaft
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CN201621377497.XU
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Chinese (zh)
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李刚利
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Kocel Machinery Co Ltd
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Ningxia Kocel Pattern Co Ltd
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  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

The utility model is related to a kind of laser interferometer interference mirror adjustment platform, including:A-frame, leveling bolt, platform, interference mirror, encoder, synchronous motor, upper flange, lower flange and precise rotary shaft, wherein, interference mirror is arranged on platform, even state precise rotary shaft in platform lower end, precise rotary shaft is arranged on inside upper flange and lower flange by deep groove ball bearing, precise rotary shaft lower end is connected with synchronous motor, synchronous motor drives gyroaxis to realize that platform is turned round, the upper flange and the lower flange are arranged on A-frame, A-frame realizes support platform significantly Level tune, the utility model realizes interference mirror space angle leveling levelling, school inspection vertical axis can be applied to linear, the occasion high to light modulation skill set requirements such as perpendicularity, it can also be used for trunnion axis linear measurement light modulation, improve checking and debugging efficiency.

Description

A kind of laser interferometer interference mirror adjusts platform
Technical field
The utility model belongs to Precision of NC Machine Tool detection field, and in particular to a kind of laser interferometer detects large-sized numerical control Interference mirror adjusts platform during machine tool accuracy.
Background technology
Laser interferometer, using Michelson Interferometer systematic survey displacement, using frequency stabilization He-Ne Lasers as light source, coordinates refraction Mirror, speculum etc. measure work to make linear position, speed, angle, true Pingdu, straigheness, the depth of parallelism and perpendicularity etc., often make Worked for the accuracy correction of measuring instrument and high-precision numerical control lathe.Laser interferometer system is constituted by laser head, interference mirror, anti- Penetrate the most basic composition of three, mirror;Enter interference mirror through generating laser, one or more laser of speculum must assure that space Interior parallel, during light modulation, interference mirror beat, pitching adjustment in horizontal plane, vertical plane is most important, and angle, which does not conform to, to be caused The reference beam formed after interference mirror overlapping can not return to the inductor of generating laser with the measuring beam after reflected mirror On, final measurement data can not be gathered.Every time during measurement, the leveling of interference mirror, levelling require high to operating experience, and 3m length is vertical The linear measurement length of axle needs 2 people's coordinating operations of more than 4 hours, and time and effort consuming can not meet Production requirement.
At present, in the prior art, there are following applications, Publication No. CN on laser interferometer adjustment platform 104390586 A patent document, discloses the detection device and detection method of a kind of geometric error of lathe single axial movement, tool In the mechanism of body, laser interferometer is disclosed, interference microscope group is disclosed, discloses speculum group, is disclosed with installation interference mirror The support of group, but its complex structure, are not easy to operation, and applicability is low, therefore, how to design a kind of adjustment fast, reduce employee Operative skill requirement, can be applied to various complicated, improve the laser interferometer adjustment platform of machine tool accuracy correction efficiency The problem of as this area urgent need to resolve.
Utility model content
The utility model there is provided a kind of adjustment of laser interferometer interference mirror is flat, realizes adjustment in view of the shortcomings of the prior art Fast, make simple, it is easy to maintenance, fast leveling levelling interference mirror, the requirement of reduction employee operative skill and labor intensity are met, Improve machine tool accuracy correction efficiency.
To solve the above problems, the technical solution adopted in the utility model is:
A kind of laser interferometer interference mirror adjusts platform, it is characterised in that including:A-frame, leveling bolt, platform, Interference mirror, encoder, synchronous motor, upper flange, lower flange and precise rotary shaft, wherein, the interference mirror is arranged on described flat On platform, the platform lower end connects the precise rotary shaft, and the precise rotary shaft lower end is connected composition with the synchronous motor Slew gear, synchronous motor drives gyroaxis to realize the platform revolution, and the precise rotary shaft is installed by deep groove ball bearing Inside the upper flange and the lower flange, the synchronous motor is located at below the lower flange, and the encoder is arranged on Below the synchronous motor, the upper flange and the lower flange are arranged on A-frame, wherein:
The A-frame includes:Supporting plate, support bar, support platform and support backing plate, wherein, the supporting plate is installed On the upside of the support platform, three supports that can merge and stretch are installed in the support platform lower end by rotary locking screw Bar, realizes the adjustment of support platform significantly Level tune and three support bar folding angles, the support bar lower end and institute Support backing plate connection is stated, the leveling bolt is arranged on the support backing plate, realizes the Level tune of support platform by a small margin.
Further, the interference mirror is installed on platform by magnetic stand.
Further, also including KBE shaft couplings, the connection for precise rotary shaft lower end and synchronous motor.
Further, also emitted including flexible fastening, the fixation for the flexible place of support bar.
Further, the synchronous motor is with small-sized band-type brake synchronous motor.
Further, also including bolt, the upper flange and lower flange are arranged on the supporting plate of A-frame by bolt On.
Further, also including sleeve, it is located at precise rotary shaft periphery.
Further, the screw thread of the leveling bolt is fine thread.
Further, also including rotary position controlling organization, for adjusting slew gear position.
The beneficial effects of the utility model are:
The utility model should be realized when laser interferometer calibrates precise numerical control machine numerical control precision, interference mirror Space Angle Leveling levelling is spent, school can be applied to and examine the occasion high to light modulation skill set requirements such as linear, perpendicularity of vertical axis, it can also be used to water Flat axle linear measurement light modulation, improves checking and debugging efficiency.The utility model is simple in construction, stable, easy to maintenance, performs Layer level of skill requires low, upper quick-moving.
Brief description of the drawings
Fig. 1 is the utility model laser interferometer measurement principle schematic.
Fig. 2 is the structural representation that the utility model laser interferometer interference mirror adjusts platform.
Wherein, 101, laser head 102, spectroscope 103, reference mirror 104, measurement speculum 105, motion It is axle 106, interference mirror 1, interference mirror 2, platform 3, bolt 4, support platform 5, rotary locking screw 6, flexible Fastening cap 7, support bar 8, leveling bolt 9, support backing plate 10, encoder 11, synchronous motor 12, lower flange 13rd, KBE shaft couplings 14, locking nut 15, supporting plate 16, sleeve 17, upper flange 18, deep groove ball bearing 19, Precise rotary shaft.
Embodiment
In order that those skilled in the art more fully understand the technical solution of the utility model, with reference to specific embodiment The utility model is described in further detail.
According to one side of the present utility model, it is flat that the utility model provides a kind of adjustment of laser interferometer interference mirror Platform, Fig. 1 is the utility model laser interferometer measurement principle schematic, as shown in figure 1, laser interferometer system is constituted by laser First 101, interference mirror 106, measurement speculum 104 3 are most basic is constituted, and measurement speculum 104 is moved with axis of movement 105 Dynamic, interference mirror 106 is anti-by the input measurement parallel with the parallel rays that reference mirror 103 injects laser head 101 of spectroscope 102 Mirror 104 is penetrated, reflection light is returned on laser head inductor through interference mirror 106 is parallel afterwards, by Survey Software computing, realizes position Put measurement.
Fig. 2 is the structural representation that the utility model laser interferometer interference mirror adjusts platform, as shown in figure 1, wherein:Three Angle support, leveling bolt 8, platform 2, interference mirror 1, encoder 10, synchronous motor 11, upper flange 17, lower flange 12 and accurate time Rotating shaft 19, wherein, the interference mirror 1 is arranged on the platform 2, and the lower end of platform 2 connects the precise rotary shaft 19, institute State the lower end of precise rotary shaft 19 to be connected with the synchronous motor 11, synchronous motor 11 drives gyroaxis 19 to realize the platform 2 times Turn, the precise rotary shaft 19 is arranged on inside the upper flange 17 and the lower flange 12 by deep groove ball bearing 18, described Synchronous motor 11 is located at the lower section of lower flange 12, and the encoder 10 is arranged on the lower section of synchronous motor 11, the upper method Orchid 17 and the lower flange 12 are arranged on A-frame, wherein:
The A-frame includes:Supporting plate 15, support bar 7, support platform 4 and support backing plate 9, wherein, the support Plate 15 is arranged on the upside of support platform 4, and the lower end of support platform 4 installs three by rotary locking screw 5 to be merged With flexible support bar 7, the adjustment of support platform 4 significantly Level tune and three folding angles of support bar 7 is realized, it is described The lower end of support bar 7 is connected with the support backing plate 9, and the leveling bolt 8 is arranged on the support backing plate 9, realizes that support is flat The Level tune of platform 4 by a small margin.
According to specific embodiment of the utility model, in the utility model fixed form of the interference mirror 1 on platform 2 not by Especially limitation, as long as both effective fixed can be completed, in some embodiments of the present utility model, interference mirror leads to 1 mistake Magnetic stand is installed on platform 2.
According to specific embodiment of the utility model, precise rotary shaft 19 and synchronous motor 11 is specific in the utility model Connected mode is not particularly limited, it is allowed to the connection of the two is realized using any applicable pattern.More of the present utility model In embodiment, precise rotary shaft 19 and synchronous motor 11 are attached composition slew gear by KBE shaft couplings 13.
According to specific embodiment of the utility model, support bar 7 stretches the fixed form located not by spy in the utility model Do not limit, as long as the fixation at the flexible place of support bar 7 can be realized, it is preferred that flexible fastening can be used to emit 6 realizations support The fixation at the flexible place of bar 7.
According to specific embodiment of the utility model, the selection of the synchronous motor 11 in the utility model is not limited especially System, those skilled in the art can flexibly select as needed, it is preferred that use with small-sized band-type brake synchronous motor, can be online Motor is embraced during circle power-off automatically.
According to specific embodiment of the utility model, in the utility model, the fixed form of upper lower flange and supporting plate 15 is not It is particularly limited, as long as energy three fixes, in some embodiments of the present utility model, upper flange and lower flange pass through spiral shell Bolt 3 is arranged in the supporting plate 15 of A-frame.
According to specific embodiment of the utility model, as shown in Fig. 2 the sleeve 16 in the utility model is located at precision rotating The periphery of axle 19, between two deep groove ball bearings 18 being arranged on inside flange.
According to specific embodiment of the utility model, the fine tuning structure of Level tune is not limited especially in the utility model System, it is allowed to using various ways realize, in some embodiments of the present utility model, using fine thread leveling bolt 7 with The composition fine tuning structure of backing plate 8 is supported, with three support bar groups of folding angle and collapsing length can be adjusted into horizontal adjustment machine Structure.
According to specific embodiment of the utility model, also include rotary position controlling organization in the utility model, it is allowed to adopt With various ways, slew gear and rotary position controlling organization are provided commonly for adjustment interference mirror angle.
After laser interferometer measurement system is set up, it is placed in by frame level on platform 2, adjusts horizontal adjusting mechanism, Laser interferometer is opened afterwards, and interference mirror 106 is installed with platform, to light, using slew gear and revolution by magnetic stand Position control mechanism, adjusts locus and the angle of interference mirror 106, makes to penetrate in speculum 104 by the light of interference mirror 106 Porch, while finely tuning horizontal mechanism, you can realize that reflected light returns to generating laser with incident light by the way that interference mirror 106 is parallel In 101 receiving points, by Survey Software computing, position measurement is realized.
A kind of laser interferometer interference mirror adjustment platform of the present utility model, is realized in laser interferometer school in summary During quasi- precise numerical control machine numerical control precision, interference mirror space angle leveling levelling can be applied to school inspection vertical axis linear, vertical The occasion high to light modulation skill set requirements such as degree, it can also be used to which trunnion axis linear measurement is dimmed, and improves checking and debugging efficiency.This reality Simple with new structure, stable, easy to maintenance, execution level level of skill requires low, upper quick-moving.
A kind of laser interferometer interference mirror adjustment platform provided by the utility model is described in detail above, this Apply embodiment in text to be set forth the principle and embodiment of the application, the explanation of above example is only intended to side Assistant solves the present processes and its core concept;Simultaneously for those of ordinary skill in the art, the think of according to the application Think, will change in specific embodiments and applications, in summary, this specification content should not be construed as pair The limitation of the application.

Claims (9)

1. a kind of laser interferometer interference mirror adjusts platform, it is characterised in that including:It is A-frame, leveling bolt, platform, dry Mirror, encoder, synchronous motor, upper flange, lower flange and precise rotary shaft are related to, wherein, the interference mirror is arranged on the platform On, the platform lower end connects the precise rotary shaft, and the precise rotary shaft lower end is connected with the synchronous motor to be constituted back Rotation mechanism, synchronous motor drives gyroaxis to realize the platform revolution, and the precise rotary shaft is arranged on by deep groove ball bearing Inside the upper flange and the lower flange, the synchronous motor is located at below the lower flange, and the encoder is arranged on institute State below synchronous motor, the upper flange and the lower flange are arranged on A-frame, wherein:
The A-frame includes:Supporting plate, support bar, support platform and support backing plate, wherein, the supporting plate is arranged on institute State on the upside of support platform, three support bars that can merge and stretch are installed in the support platform lower end by rotary locking screw, Realize the adjustment of support platform significantly Level tune and three support bar folding angles, the support bar lower end and the branch Stake pad plate is connected, and the leveling bolt is arranged on the support backing plate, realizes the Level tune of support platform by a small margin.
2. a kind of laser interferometer interference mirror adjustment platform according to claim 1, it is characterised in that the interference mirror leads to Magnetic stand is crossed to be installed on platform.
3. a kind of laser interferometer interference mirror adjustment platform according to claim 1, it is characterised in that also join including KBE Axle device, the connection for precise rotary shaft lower end and synchronous motor.
4. a kind of laser interferometer interference mirror adjustment platform according to claim 1, it is characterised in that also including flexible tight Admittedly emit, the fixation for the flexible place of support bar.
5. a kind of laser interferometer interference mirror adjustment platform according to claim 1, it is characterised in that the synchronous motor For with small-sized band-type brake synchronous motor.
6. a kind of laser interferometer interference mirror adjustment platform according to claim 1, it is characterised in that also including bolt, The upper flange and lower flange are arranged on by bolt in the supporting plate of A-frame.
7. a kind of laser interferometer interference mirror adjustment platform according to claim 1, it is characterised in that also including sleeve, It is located at precise rotary shaft periphery.
8. a kind of laser interferometer interference mirror adjustment platform according to claim 1, it is characterised in that the leveling bolt Screw thread be fine thread.
9. a kind of laser interferometer interference mirror adjustment platform according to claim 1, it is characterised in that also including revolution position Controlling organization is put, for adjusting slew gear position.
CN201621377497.XU 2016-12-15 2016-12-15 A kind of laser interferometer interference mirror adjusts platform Active CN206321201U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621377497.XU CN206321201U (en) 2016-12-15 2016-12-15 A kind of laser interferometer interference mirror adjusts platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621377497.XU CN206321201U (en) 2016-12-15 2016-12-15 A kind of laser interferometer interference mirror adjusts platform

Publications (1)

Publication Number Publication Date
CN206321201U true CN206321201U (en) 2017-07-11

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CN201621377497.XU Active CN206321201U (en) 2016-12-15 2016-12-15 A kind of laser interferometer interference mirror adjusts platform

Country Status (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106500590A (en) * 2016-12-15 2017-03-15 宁夏共享模具有限公司 A kind of laser interferometer interferoscope adjusts platform
CN108035706A (en) * 2017-12-05 2018-05-15 西南石油大学 A kind of stable type three-dimensional stake holes detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106500590A (en) * 2016-12-15 2017-03-15 宁夏共享模具有限公司 A kind of laser interferometer interferoscope adjusts platform
CN108035706A (en) * 2017-12-05 2018-05-15 西南石油大学 A kind of stable type three-dimensional stake holes detector

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CP03 Change of name, title or address

Address after: 750021 the Ningxia Hui Autonomous Region Yinchuan economic and Technological Development Zone ningshuo South Street No. 298

Patentee after: KOCEL INTELLIGENT EQUIPMENT Co.,Ltd.

Address before: 750021 Yinchuan, the Ningxia Hui Autonomous Region Xixia District ningshuo South Street No. 298

Patentee before: NINGXIA KOCEL PATTERN Co.,Ltd.

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TR01 Transfer of patent right

Effective date of registration: 20240429

Address after: 750021, No. 199 Tongxin South Street, Yinchuan economic and Technological Development Zone, the Ningxia Hui Autonomous Region

Patentee after: KOCEL MACHINE CO.,LTD.

Country or region after: China

Address before: 750021 the Ningxia Hui Autonomous Region Yinchuan economic and Technological Development Zone ningshuo South Street No. 298

Patentee before: KOCEL INTELLIGENT EQUIPMENT Co.,Ltd.

Country or region before: China