CN206312876U - A kind of board-like PECVD graphite carrying plates - Google Patents
A kind of board-like PECVD graphite carrying plates Download PDFInfo
- Publication number
- CN206312876U CN206312876U CN201621373565.5U CN201621373565U CN206312876U CN 206312876 U CN206312876 U CN 206312876U CN 201621373565 U CN201621373565 U CN 201621373565U CN 206312876 U CN206312876 U CN 206312876U
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- graphite
- specifications
- bar
- silicon chip
- utility
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a kind of board-like PECVD graphite carrying plates, it is characterised in that including graphite carrying plate body, graphite carrying plate body is provided with multiple graphite frames, and at least one graphite bar is fixed with graphite frame.The utility model, in silicon chip of the production one side length of side less than 156mm specifications, can reach or close to the coating effects as the silicon chip of 156mm*156mm specifications is done in the case where machine is not changed, and reduces or does not influence presentation quality and efficiency losses, such as：After loading onto the utility model during the slice, thin piece for doing 156mm*150mm specifications, can reach silicon chip do the slice, thin piece of 156mm*156mm specifications with the 160mm*160mm support plate graphite frames for using at present with support plate graphite frame marginal gap as effect.The utility model is loaded on original support plate graphite frame, and detachably, after dismounting does not influence plate published originally normally to use, and can be reduced after loading or not influenceed to do presentation quality and efficiency losses when one side length of side is less than the silicon chip of 156mm specifications.
Description
Technical field
The utility model is related to a kind of board-like PECVD graphite carrying plates, in belonging to crystal silicon solar batteries manufacture field
The technological improvement of the graphite carrying plate in flat coating machine.
Background technology
A critically important link is coated with antireflection film during manufacture of solar cells, typically by flat-plate type PECVD
Or tubular type PECVD (plasma reinforced chemical vapour deposition), what wherein the support plate of flat-plate type PECVD was used at present is all horizontally-arranged
5, vertical setting of types 9, the length of side is the square support plate graphite frame of 160mm as shown in figure 1, for carrying silicon chip, doing such as Fig. 3 a institutes
When the length of side shown is the square silicon pieces of 156mm, anti-plating situation is controllable as shown in Fig. 2 support plate edge and silicon chip edge behind
Clearance D is 2mm, but when one side length of side is done in the silicon chip of below 156mm specifications, such as：Do one side length of side as shown in Figure 3 b
It is 156mm, when the another side length of side is the silicon chip of 150mm specifications, as shown in figure 4, because silicon chip is too big with support plate frame edge voids,
The overweight jaundice influence outward appearance of marginal deposit can be caused, the anti-plating of behind is serious, and anti-plating part back field aluminum paste cannot be grilled thoroughly, influence effect
Rate, the more big anti-plating in space is more serious.
The content of the invention
The purpose of this utility model is to provide a kind of board-like PECVD graphite carrying plates, for producing 156mm*156mm specifications
With lower silicon slice, reach or close to the coating effects as the silicon chip of 156mm*156mm specifications is done, reduce or do not influence outer
Appearance quality and efficiency losses.
In order to achieve the above object, the utility model provides a kind of board-like PECVD graphite carrying plates, it is characterised in that
Including graphite carrying plate body, graphite carrying plate body is provided with multiple graphite frames, and at least one graphite bar is fixed with graphite frame.
Preferably, described graphite bar is fixed in graphite frame by card pin and pad, in graphite frame, pad and graphite bar
Hole is all provided with, card pin sequentially passes through the hole in graphite frame, pad and graphite bar.
Preferably, adjacent graphite bar is interfixed by card pin and pad.
It is highly preferred that described card pin is U-shaped, the upper and lower both sides middle part of graphite bar is respectively provided with least two holes, card pin
Two ends can be respectively arranged at the two ends with a hole also cross two holes in the middle part of the upper and lower both sides of same graphite bar, the left and right of graphite bar,
The two ends of card pin can be also cross the hole of the end of adjoining graphite bar.
Compared with prior art, the beneficial effects of the utility model are：
The utility model in the case where machine is not changed, produce one side length of side less than 156mm specifications silicon chip when, can
Reach or close to the coating effects as the silicon chip of 156mm*156mm specifications is done, reduce or do not influence presentation quality and efficiency
Loss, such as：After loading onto the utility model during the slice, thin piece for doing 156mm*150mm specifications, silicon chip and support plate graphite frame edge are can reach
Gap do the slice, thin piece of 156mm*156mm specifications with the 160mm*160mm support plate graphite frames for using at present as effect.This practicality
New loaded on original support plate graphite frame, and detachably, after dismounting does not influence plate published originally normally to use, and can be reduced after loading
Or do not influence to do presentation quality and efficiency losses when one side length of side is less than the silicon chip of 156mm specifications.
Brief description of the drawings：
Fig. 1 is 160mm*160mm support plate graphite frames；
Fig. 2 is the silicon chip that 156mm*156mm is of 160mm*160mm support plate graphite frames；
Fig. 3 a are the silicon chip schematic diagram of 156mm*156mm；
Fig. 3 b are the silicon chip schematic diagram of 156mm*150mm；
Fig. 4 is the silicon chip that 156mm*150mm is of 160mm*160mm support plate frames；
Fig. 5 a are graphite bar schematic diagram；
Fig. 5 b are card pin schematic diagram；
Fig. 5 c are pad schematic diagram；
Fig. 6 is the silicon chip schematic diagram that board-like PECVD graphite carrying plates of the present utility model are 156mm*150mm.
Specific embodiment
With reference to specific embodiment, the utility model is expanded on further.It should be understood that these embodiments are merely to illustrate this
Utility model rather than limitation scope of the present utility model.In addition, it is to be understood that reading the content of the utility model instruction
Afterwards, those skilled in the art can make various changes or modifications to the utility model, and these equivalent form of values equally fall within this Shen
Please appended claims limited range.
Embodiment
As shown in fig. 6, a kind of board-like PECVD graphite carrying plates, including graphite carrying plate body 1, set on graphite carrying plate body 1
There are multiple graphite frames 2,6 graphite bars 3 are fixed with each graphite frame 2.
Described graphite bar 3 is fixed in graphite frame 2 by card pin 5 and pad 6, and adjacent graphite bar 3 passes through the He of card pin 5
Pad 6 interfixes, and as illustrated in figs. 5 a-5 c, hole 4 is all provided with graphite frame 2, pad 6 and graphite bar 3, and card pin 5 sequentially passes through stone
Hole 4 in black frame 2, pad 6 and graphite bar 3.
Described card pin 5 is U-shaped, and the upper and lower both sides middle part of graphite bar 3 is respectively provided with two holes 4, and the two ends of card pin 5 can
Also cross two holes 4 in the middle part of the upper and lower both sides of same graphite bar 3, the left and right of graphite bar 3 is respectively arranged at the two ends with a hole 4, card pin
5 two ends can be also cross the hole 4 of the end of adjoining graphite bar 3.
The length of described graphite bar 3 is 160mm, and width is 10mm, and thickness is 10mm, the diameter in the hole 4 in graphite bar 3
It is 1mm, the distance between the center in the hole 4 at described two ends of graphite bar 3 and the side long of graphite bar 3 are 2.5mm, the bottom surface of card pin 5
Length L1=5mm, height H=15mm, top surface one side length L2=0.5mm, the thickness of pad 6 is 1mm, and length is 10mm, width
It is 3mm, two holes 4 is had on pad 6, two spacing at the center in hole 4 is 5mm.
During installation, the graphite bar 3 of graphite frame is pulled down from waste and old support plate, it is split growth 160mm, width 10mm, point
After good graphite bar 3 two ends it is each make a call to a hole of diameter 1mm 4, both sides are each to make a call to two holes of diameter 1mm 4, and card pin is used during loading
5 and pad 6 two ends and graphite carrying plate are fixed, two graphite bars 3 are also fixed when assembled with card pin 5 and pad 6.Depending on the silicon for producing
Piece can adjust the bar number of the graphite bar 3 of installation from how many spacing dress of support plate edge according to actual conditions.Do not influenceing support plate sheet
In the case of body additional the utility model is installed to support plate, the silicon chip production below all 156mm*156mm specifications can be applied to.
Claims (4)
1. a kind of board-like PECVD graphite carrying plates, it is characterised in that including graphite carrying plate body (1), graphite carrying plate body (1)
Multiple graphite frames (2) are provided with, at least one graphite bar (3) is fixed with graphite frame (2).
2. board-like PECVD graphite carrying plates as claimed in claim 1, it is characterised in that described graphite bar (3) is by card pin
(5) it is fixed in graphite frame (2) with pad (6), hole (4), card pin is all provided with graphite frame (2), pad (6) and graphite bar (3)
(5) hole (4) in graphite frame (2), pad (6) and graphite bar (3) is sequentially passed through.
3. board-like PECVD graphite carrying plates as claimed in claim 1, it is characterised in that adjacent graphite bar (3) is by card pin
(5) interfixed with pad (6).
4. as claimed in claim 2 or claim 3 board-like PECVD graphite carrying plates, it is characterised in that described card pin (5) is U-shaped,
The upper and lower both sides middle part of graphite bar (3) is respectively provided with least two holes (4), and the two ends of card pin (5) can be also cross same graphite
Two holes (4) in the middle part of bar (3) upper and lower both sides, the left and right of graphite bar (3) is respectively arranged at the two ends with a hole (4), the two of card pin (5)
End can be also cross the hole (4) of the end of adjoining graphite bar (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621373565.5U CN206312876U (en) | 2016-12-14 | 2016-12-14 | A kind of board-like PECVD graphite carrying plates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621373565.5U CN206312876U (en) | 2016-12-14 | 2016-12-14 | A kind of board-like PECVD graphite carrying plates |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206312876U true CN206312876U (en) | 2017-07-07 |
Family
ID=59252238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621373565.5U Expired - Fee Related CN206312876U (en) | 2016-12-14 | 2016-12-14 | A kind of board-like PECVD graphite carrying plates |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206312876U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110323165A (en) * | 2019-07-31 | 2019-10-11 | 常州时创能源科技有限公司 | It is a kind of for carrying the graphite frame of silicon wafer |
-
2016
- 2016-12-14 CN CN201621373565.5U patent/CN206312876U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110323165A (en) * | 2019-07-31 | 2019-10-11 | 常州时创能源科技有限公司 | It is a kind of for carrying the graphite frame of silicon wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170707 Termination date: 20211214 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |