CN206298636U - Vapor deposition source - Google Patents
Vapor deposition source Download PDFInfo
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- CN206298636U CN206298636U CN201720006481.6U CN201720006481U CN206298636U CN 206298636 U CN206298636 U CN 206298636U CN 201720006481 U CN201720006481 U CN 201720006481U CN 206298636 U CN206298636 U CN 206298636U
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- crucible
- nozzle
- vapor deposition
- laser
- deposition source
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- 238000007740 vapor deposition Methods 0.000 title claims abstract description 62
- 230000008020 evaporation Effects 0.000 claims abstract description 37
- 238000001704 evaporation Methods 0.000 claims abstract description 37
- 229910052751 metal Inorganic materials 0.000 claims description 79
- 239000002184 metal Substances 0.000 claims description 79
- 239000000463 material Substances 0.000 claims description 46
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000006073 displacement reaction Methods 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 13
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 239000011368 organic material Substances 0.000 description 7
- 238000004380 ashing Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229920001621 AMOLED Polymers 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 5
- 229910052571 earthenware Inorganic materials 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000004925 denaturation Methods 0.000 description 2
- 230000036425 denaturation Effects 0.000 description 2
- 238000002309 gasification Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Abstract
The utility model discloses a kind of vapor deposition source, belong to evaporation coating technique field.The vapor deposition source includes：Evaporation body and n heater block, the n are more than 1, and the evaporation body includes being the crucible of hollow structure, is circumferentially positioned at the heater strip of the crucible outer wall and is provided with the n crucible cover of nozzle, and the crucible cover is arranged on the crucible openend；The n heater block is arranged in the crucible, and each described heater block is located at a lower section for nozzle, and each described heater block is provided with heater strip.The utility model solves the problems, such as that the reliability of vapor deposition source evaporation in correlation technique is poor, the reliability of vapor deposition source evaporation is improve, for display device.
Description
Technical field
The utility model is related to evaporation coating technique field, more particularly to a kind of vapor deposition source.
Background technology
It is liquid crystal display (English to be currently being widely used screen：Liquid Crystal Display；Referred to as：LCD)
With organic light emitting diode display (English：Organic Light-Emitting Diode；Referred to as：OLED).OLED due to
With frivolous, low-power consumption, high-contrast, colour gamut high, it is possible to achieve the advantages of Flexible Displays, it is considered to be display of future generation
Development trend.The display of OLED includes passive type organic electric exciting light-emitting diode (English：Passive matrix Organic
Light-Emitting Diode；Referred to as：PMOLED) display and active matrix organic light-emitting diode (AMOLED) panel (English：
Active-matrix organic light emittingdiode；Referred to as：AMOLED two kinds) are shown.Wherein, AMOLED
Implementation has low temperature polycrystalline silicon (English：Low Temperature Poly-silicon；Referred to as：LTPS) backboard+fine gold
Category mask (English：Fine Metal Mask；Referred to as：FMM) mode, and oxide (English：Oxide) the organic hair of backboard+white light
Optical diode (English：White Organic Light Emitting Diode；Referred to as：The mode of WOLED)+color film.The former
It is mainly used in small size panel, correspondence mobile phone and Mobile solution；The latter is mainly used in large size panel, correspondence monitor and
TV etc. is applied.The mode of current LTPS backboards+FMM is tentatively ripe, realizes volume production.
In correlation technique, the mode of LTPS backboards+FMM is that OLED organic materials are steamed according to preset program using vapor deposition source
It is plated on LTPS backboards, using the figure on FMM, forms RGB device.Wherein, vapor deposition source includes crucible, heater strip and sets
It is equipped with the crucible cover of multiple nozzles.Crucible is made up of titanium matter and is hollow structure, and heater strip is circumferentially positioned at crucible outer wall, earthenware
Crucible lid is arranged on crucible openend.When being deposited with, the OLED organic materials in crucible are heated after silk is heated from nozzle
Spray, and then complete the evaporation to LTPS backboards.
Because crucible is made up of titanium matter, so the heat conductivity of crucible is poor, and the heater strip of crucible outer wall is yielding,
The uniformity that crucible is heated is poor, and then makes the uniformity that OLED organic materials are heated poor, ultimately results in OLED organic materials
Ashing denaturation, therefore, the reliability of vapor deposition source evaporation is poor.
Utility model content
In order to the reliability for solving the problems, such as vapor deposition source evaporation in correlation technique is poor, the utility model provides a kind of steaming
Plating source.The technical scheme is as follows：
There is provided a kind of vapor deposition source, the vapor deposition source includes：Evaporation body and n heater block, the n are more than 1,
The evaporation body includes the crucible for hollow structure, the heater strip for being circumferentially positioned at the crucible outer wall and setting
There is the n crucible cover of nozzle, the crucible cover is arranged on the crucible openend；
The n heater block is arranged in the crucible, and each described heater block is located at a lower section for nozzle, often
The individual heater block is provided with heater strip.
Optionally, the vapor deposition source also includes：Nozzle dredges part, nozzle dredging part include laser generator,
Metal bar, controller and the first driver part,
The nozzle dredging part is located at the crucible either internally or externally；
The metal bar is hollow structure, and the top of the metal bar is closed structure, the laser generator with it is described
Controller is connected, and the laser generator is used to launch laser under the control of the controller, and using the laser to institute
Metal bar heating is stated, the metal bar of heating can be penetrated in the nozzle under the driving force of first driver part.
Optionally, each heater block is highly equal, and the material to be deposited that can be accommodated more than the crucible
Maximum gauge.
Optionally, the nozzle dredging part is located inside the crucible, and the quantity of the nozzle dredging part is n, often
The individual nozzle dredging part also includes：Base, laser conduction part and the second driver part,
The crucible bottom surface is provided with n opening, the center of orthographic projection of each described nozzle on the crucible bottom surface
With a center superposition for opening；
Each described heater block includes sleeve pipe and lid, and the lid is arranged on the top of described sleeve pipe, described sleeve pipe
Tube wall include inner layer wall and outer wall, the heater strip of the heater block is circumferentially positioned on the inner layer wall, described sleeve pipe
Bottom be integrated type structure with the opening of the crucible bottom surface；
For nozzle dredging part each described, the metal bar is arranged in described sleeve pipe, and the base is arranged on institute
State the bottom of metal bar, the base is hollow structure, the metal bar is connected with the base, the laser generator and institute
State laser conduction part to be arranged in the base, the laser that the laser conduction part can launch the laser generator
Transmitted to the top of the metal bar by the metal bar, first driver part is arranged on one end of the base,
Receiving pipe is provided with the annular space that the inner layer wall and the outer wall are formed, described receiving is provided with pipe
First support bar, one end of the first support bar is connected with second driver part, and the first support bar can be in institute
There is vertical displacement under the driving force for stating the second driver part, and rotate in the horizontal direction, the first support bar it is another
End is fixedly connected with the lid.
Optionally, nozzle dredging part is located at outside the crucible, the nozzle dredging part also include plummer,
Guide rail and second support bar,
First driver part and the guide rail are arranged on the plummer, and one end of the second support bar is located at
In the guide rail, the second support bar is connected with first driver part, and the second support bar can be described first
Move along the guide rail and occur vertical displacement under the driving force of driver part in the horizontal plane, the second support bar away from
One end of the plummer is provided with laser head, and the metal bar is arranged on the laser head away from the one of the second support bar
End.
Optionally, the second support bar is hollow structure, and the nozzle dredging part also includes laser conduction part,
The laser generator is arranged on the plummer, and the laser conduction part is arranged on the second support bar
It is interior.
Optionally, the laser generator is arranged on the one end of the second support bar away from the plummer, and is close to
At the position of the laser head.
Optionally, the first temperature sensor, first temperature sensor are provided with the inside of the outer wall of described sleeve pipe
For monitoring the temperature in described sleeve pipe, and the temperature that will be monitored is transmitted to the controller.
Optionally, the outer wall of the metal bar is provided with second temperature sensor, and the second temperature sensor is used to supervise
The temperature surveyed on the metal bar, and the temperature that will be monitored transmitted to the controller.
Optionally, the nozzle dredging part also includes guard block, and the laser conduction part is arranged on the protection
In part.
The utility model provides a kind of vapor deposition source, and because the vapor deposition source includes heater block, each heater block is located at
One lower section of nozzle, each heater block is provided with heater strip, so heater block can be to the material to be deposited in crucible
Further heating, this improves the uniformity that material to be deposited is heated, it is to avoid material ashing deformation to be deposited, improves
The reliability of vapor deposition source evaporation.
It should be appreciated that the general description of the above and detailed description hereinafter are only exemplary and explanatory, not
The utility model can be limited.
Brief description of the drawings
In order to illustrate more clearly of the technical scheme in the utility model embodiment, below will be to needed for embodiment description
The accompanying drawing to be used is briefly described, it should be apparent that, drawings in the following description are only some realities of the present utility model
Example is applied, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to these accompanying drawings
Obtain other accompanying drawings.
Fig. 1-1 is a kind of structural representation of the vapor deposition source in correlation technique；
Fig. 1-2 is the schematic cross-section of vapor deposition source shown in Fig. 1-1；
Fig. 1-3 is a kind of structural representation of vapor deposition source that the utility model embodiment is provided；
Fig. 2-1 is the structural representation of another vapor deposition source that the utility model embodiment is provided；
Fig. 2-2 is the structural representation of the heater block of vapor deposition source shown in Fig. 2-1；
Fig. 2-3 is the sleeve pipe of heater block shown in Fig. 2-2 and the structural representation of lid；
Fig. 3 is the structural representation of another vapor deposition source that the utility model embodiment is provided.
By above-mentioned accompanying drawing, it has been shown that the clear and definite embodiment of the utility model, will hereinafter be described in more detail.These
Accompanying drawing and word description are not intended to limit the scope that the utility model is conceived by any mode, but by reference to specific
Embodiment is that those skilled in the art illustrate concept of the present utility model.
Specific embodiment
It is new to this practicality below in conjunction with accompanying drawing to make the purpose of this utility model, technical scheme and advantage clearer
Type implementation method is described in further detail.
Fig. 1-1 is a kind of structural representation of the vapor deposition source in correlation technique, and as Figure 1-1, the vapor deposition source includes：Earthenware
Crucible 001, heater strip 002 and it is provided with the crucible cover 004 of multiple nozzles 003.When being deposited with, the OLED in crucible 001 has
Machine material sprays after being heated from nozzle 003, completes the evaporation to LTPS backboards.Fig. 1-2 shows the section of the vapor deposition source
Schematic diagram.In Fig. 1-2 003 is nozzle, and 004 is crucible cover, and 002 is heater strip, and 001 is crucible."+" and "-" in Fig. 1-2
Represent the sense of current on heating wire.Because the heat conductivity of crucible is poor, and the heater strip of crucible outer wall is yielding, crucible
The uniformity being heated is poor, so the uniformity that OLED organic materials are heated is poor, OLED organic materials are easily ashed denaturation, evaporation
Reliability it is poor.
The utility model embodiment provides a kind of vapor deposition source, and as Figure 1-3, the vapor deposition source includes evaporation body 100
With n heater block 200, n by n in Fig. 1-3 more than 1 (be equal to as a example by 10 and illustrated).
Evaporation body 100 includes crucible 110 for hollow structure, is circumferentially positioned at the and of heater strip 111 of the outer wall of crucible 110
It is provided with the n crucible cover of nozzle 1,120 112.Crucible cover 112 is arranged on the openend of crucible 110.
N heater block 200 is arranged in crucible 110, and each heater block 200 is located at a lower section for nozzle 1120,
Each heater block 200 is provided with heater strip 201.
In sum, the vapor deposition source that the utility model embodiment is provided, because the vapor deposition source includes heater block, each adds
Thermal part is located at a lower section for nozzle, and each heater block is provided with heater strip, so heater block can be in crucible
Material to be deposited is further heated, this improves the uniformity that material to be deposited is heated, it is to avoid material ashing to be deposited becomes
Shape, improves the reliability of vapor deposition source evaporation.
The utility model embodiment provides another vapor deposition source, and as shown in Fig. 2-1, the vapor deposition source includes evaporation body, n
Individual heater block 200 and nozzle dredging part 300, n by n in Fig. 2-1 more than 1 (be equal to as a example by 10 and illustrated).
Evaporation body includes crucible 110 for hollow structure, is circumferentially positioned at the heater strip of the outer wall of crucible 110 (in Fig. 2-1
It is not drawn into) and it is provided with the n crucible cover of nozzle 1,120 112.Crucible cover 112 is arranged on the openend of crucible 110.Optionally, earthenware
Crucible and crucible cover can be linear bodies, and linear body refers to the load object linear with the deformation of object.
N heater block 200 is arranged in crucible 110, and each heater block 200 is located at a lower section for nozzle 1120,
Each heater block 200 is provided with heater strip 201.
In order to further improve the uniformity that material (such as OLED organic materials) to be deposited is heated in crucible, the vapor deposition source
Each heater block 200 it is highly equal, and the material to be deposited that can be accommodated more than crucible 110 maximum gauge.Generally, earthenware
The maximum gauge of the material to be deposited that crucible can be accommodated is the 3/4 of crucible height.
As shown in Fig. 2-1, nozzle dredging part 300 is located inside crucible 110, and the quantity of nozzle dredging part is n.Namely
The quantity of nozzle dredging part is identical with the quantity of the nozzle on crucible cover.
Example, Fig. 2-2 shows a kind of structural representation of each heater block.As shown in Fig. 2-2, each nozzle is dredged
Logical part includes laser generator 310, metal bar 320, controller (being not drawn into Fig. 2-2) and the first driver part 330.Each
Nozzle dredging part also includes：Base 340, the driver part 360 of laser conduction part 350 and second.
The bottom surface of crucible 110 is provided with n opening (not shown in Fig. 2-2), and each nozzle (in such as Fig. 2-1 1120) is in earthenware
The center of the orthographic projection on the bottom surface of crucible 110 and a center superposition for opening.
Referring to Fig. 2-2, each heater block includes sleeve pipe 210 and lid 220.Lid 220 is arranged on the top of sleeve pipe 210
End.Lid 220 has sealing function to sleeve pipe 210, it is ensured that during evaporation, has air pressure higher in crucible, prevents from treating
Deposition material sprays downwards from inside pipe casing.Buckle the height of the height less than crucible of the sleeve pipe of lid.When lid 220 is located at
When on sleeve pipe 210, the top of the lower end less than sleeve pipe 210 at the edge of lid 220, as Figure 2-3.Additionally, in order to avoid sleeve pipe
Deformed in hot environment with lid, example, sleeve pipe and lid can be made up of titanium.
The tube wall of sleeve pipe 210 includes inner layer wall 211 and outer wall 212.In the heater strip 201 of heater block is circumferentially positioned at
On layer wall 211.Heater strip 201 is electrically connected with external power source.Heater strip 201 is used for treating in heating muff, and then heating crucible
Deposition material, improve the uniformity that material to be deposited is heated, it is to avoid material to be deposited because be heated it is uneven the part that causes
High temperature, the final phenomenon for producing ashing to deform, heater block improves properties of product.
The bottom of sleeve pipe 210 is integrated type structure with the opening of the bottom surface of crucible 110.The top of sleeve pipe 210 is located in crucible
Portion.Internal diameter of the internal diameter of sleeve pipe more than or equal to the nozzle directly over sleeve pipe.
Laser generator 310 is connected with controller.Laser generator 310 is used to launch laser under the control of the controller
01, and metal bar 320 is heated using laser, the metal bar 320 of heating can be worn under the driving force of the first driver part 330
Enter in nozzle, the nozzle to blocking effectively is dredged.Example, the controller is programmable logic controller (PLC) (English：
Programmable Logic Controller；Referred to as：PLC).Laser generator could be arranged to outer even type structure, be easy to electricity
Source line is connected with ambient controller respectively with control line.Because laser technology is a kind of preferable directionality, energy size can be selected
The wide noncontact shape treatment technology of a kind of application for selecting, so the utility model embodiment is added using laser to metal bar
Heat.Because nozzle is typically to be made of metal, so the metal bar of heating can make to be attached to the material to be deposited in nozzle inner walls
The rapid distillation of material and gasification.
Specifically, dredging part for each nozzle, metal bar 320 is hollow structure, and the top of metal bar 320 is closed knot
Structure.Metal bar 320 is arranged in sleeve pipe 210.Base 340 is arranged on the bottom of metal bar 320.Base is linked as one with metal bar
Body.Base 340 is hollow structure, and metal bar 320 is connected with base 340.Laser generator 310 and laser conduction part 350 set
Put in base 340.The laser that laser conduction part 350 can launch laser generator 310 by metal bar 320 transmit to
The top of metal bar 320.First driver part 330 is arranged on one end of base 340.First driver part 330 can make gold
Category rod 320 is vertically moved up and down, and metal bar 320 can be made to be moved freely in sleeve pipe 210.First driver part
330 can be mechanical motor.Metal bar is Collapsible structure.
Receiving pipe 213 is provided with the annular space that the inner layer wall 211 and outer wall 212 of sleeve pipe 210 are formed.Accommodate pipe
First support bar 2131 is provided with 213.One end of first support bar 2131 is connected with the second driver part 360.First support
Bar 2131 can occur vertical displacement under the driving force of the second driver part 360, and rotate in the horizontal direction.Namely second
Driver part can control support bar vertically to move and rotate in the horizontal direction.Second driver part can be mechanical horse
Reach.
The other end of first support bar 2131 is fixedly connected with lid 220.The other end of first support bar is one with lid
Three-dimensional-structure.When first support bar is vertically moved and rotated in the horizontal direction, lid also can be with first support bar
Vertically move and rotate in the horizontal direction.
Nozzle dredging part in the utility model embodiment is located inside crucible.Each heater block is provided with a spray
Mouth dredges part.The nozzle for blocking can effectively be dredged using nozzle dredging part, it is to avoid buildup of material, be improve
Evaporation process production capacity, has saved manpower, reduces evaporation cost.
Further, as shown in Fig. 2-2, the inner side of the outer wall 212 of sleeve pipe 210 is provided with the first temperature sensor
2121.First temperature sensor 2121 is transmitted to controller for the temperature on monitoring sleeve 210, and the temperature that will be monitored,
The current value of the heater strip 201 on inner layer wall 211 is flowed through according to temperature adjustment in order to controller, and then adjusts the temperature of sleeve pipe
Degree so that the uniformity that the material to be deposited in crucible is heated is higher.
Further, as shown in Fig. 2-2, the outer wall of metal bar 320 is provided with second temperature sensor 3201.Second temperature
Sensor 3201 is used to monitor the temperature on metal bar 320, and the temperature that will be monitored is transmitted to controller, in order to controller
Time, intensity, spot size and switching frequency of laser etc. are launched according to the temperature control laser generator 310, gold is improve
Belong to the high-temperature stability of rod.
Further, each nozzle dredging part also includes guard block.Laser conduction part can be arranged on the protection
In part.The guard block is used to protect laser conduction part, makes laser conduction part not by ectocine, and then ensure laser
Conducting parts can be transmitted to the top of metal bar the laser that laser generator is launched by metal bar.
Referring to Fig. 2-2, when the vapor deposition source provided using the utility model embodiment is deposited with, in nozzle by crucible
After material to be deposited is blocked, vapor deposition source is moved into non-evaporation region, and (non-evaporation area is referred in evaporator without evaporation substrate
Region).First support bar 2131 drives the vertical ascent of lid 220 under the driving force of the second driver part 360.Work as lid
When the lower end at 220 edges is higher than the top of sleeve pipe 210, driving force lower band of the first support bar 2131 in the second driver part 360
Dynamic lid 220 rotates in the horizontal direction.Now, the inside of sleeve pipe 210 is all exposed.Then, laser generator 310 is in controller
The laser of the control certain energy of lower transmitting, laser is projected to the top of metal bar 320, metal bar by laser conduction part 350
320 tops are brought rapidly up.Meanwhile, metal bar 320 is penetrated in nozzle under the driving force of the first driver part 330, and in nozzle
Inside move in the horizontal direction.The material to be deposited in nozzle is blocked in by gasification process, is dredged in the nozzle of blocking.Finally,
Laser generator 310 is closed, and metal bar 320 vertically declines and be retracted into sleeve pipe 210 under the driving force of the first driver part 330
It is internal.First support bar 2131 also drives lid 220 to rotate in the horizontal direction under the driving force of the second driver part 360, then
Vertical to decline, lid 220 is again positioned at the top of sleeve pipe 210.So far, evaporation production can be proceeded.
In sum, the vapor deposition source that the utility model embodiment is provided, because the vapor deposition source includes heater block, each adds
Thermal part is located at a lower section for nozzle, and each heater block is provided with heater strip, so heater block can be in crucible
Material to be deposited is further heated, this improves the uniformity that material to be deposited is heated, it is to avoid material ashing to be deposited becomes
Shape, improves the reliability of vapor deposition source evaporation, and the vapor deposition source can be when nozzle be blocked by material to be deposited, automatic sparse pass blocking
The nozzle of plug, removal is attached to the material to be deposited of nozzle interior, it is to avoid buildup of material, improves evaporation process production capacity.
The utility model embodiment provides another vapor deposition source, as shown in figure 3, the vapor deposition source includes that evaporation body, n are individual
Heater block 200 and nozzle dredging part 300, n are more than 1.
Evaporation body includes being the crucible 110 of hollow structure, is circumferentially positioned at the heater strip 111 of the outer wall of crucible 110 and sets
The n crucible cover of nozzle 1,120 112 is equipped with, crucible cover 112 is arranged on the openend of crucible 110.Additionally, "+" and "-" in Fig. 3
Represent the sense of current on heating wire.
N heater block 200 is arranged in crucible 110, and each heater block 200 is located at a lower section for nozzle 1120,
Each heater block 200 is provided with heater strip 201.
In order to further improve the uniformity that material to be deposited is heated in crucible, each heater block 200 of the vapor deposition source
It is highly equal, and the material to be deposited that can be accommodated more than crucible 110 maximum gauge.Generally, what crucible can be accommodated treats
The maximum gauge of deposition material is the 3/4 of crucible height.
As shown in figure 3, nozzle dredging part 300 is located at outside crucible 110, nozzle is dredged part 300 and is sent out including laser
Raw device 310, metal bar 320, controller (being not drawn into Fig. 3) and the first driver part 330.Nozzle dredging part 300 is also wrapped
Include plummer 301, guide rail (being not drawn into Fig. 3) and second support bar 302.
Wherein, the first driver part 330 and guide rail are arranged on plummer 301.One end of second support bar 302 is located at and leads
In rail.Second support bar 302 is connected with the first driver part 330.Second support bar 302 can be in the first driver part 330
Vertical displacement is moved along guide rail and occurs under driving force in the horizontal plane.Second support bar is Collapsible structure.Second support
Bar 302 is provided with laser head 3031 away from one end of plummer 301.Metal bar 320 is arranged on laser head 3031 away from second
One end of strut 302.
Metal bar 320 is hollow structure, and the top of metal bar 320 is closed structure.The upper end of metal bar 320 and laser head
3031 airtight connections.The optical port of penetrating of laser head is located in the cavity of metal bar, and the laser of laser head transmitting can irradiate metal bar
Inwall, heat metal bar closed structure one end.
Laser generator 310 is connected with controller.Laser generator 310 is used to launch laser 01 under the control of the controller
And metal bar 320 is heated using laser.Specifically, laser generator 310 is by Laser emission to laser head 3031, laser head
3031 inwalls for irradiating metal bar 320 using laser again.In practical application, can choose will not make metal bar soften and material change
The generating laser of property is used as laser emitting source.
Referring to Fig. 3, the metal bar 320 of heating can be penetrated in nozzle 1120 under the driving force of the first driver part 330.
Second support bar 302 can drive laser head 3031 and metal bar 320 to move under the driving force of the first driver part 330, make
Obtain laser head 3031 and metal bar 320 is moved to the top of nozzle 1120.Then, laser head 3031 irradiates metal bar using laser
320 inwall, illuminated metal bar 320 is brought rapidly up, and the heating of metal bar 320 of high temperature is attached to treating for the inwall of crucible 110
Deposition material, evaporates material to be deposited, reaches the effect for removing crucible internal walls.Meanwhile, second support bar 302 can be first
Laser head 3031 and metal bar 320 is driven vertically to move under the driving force of driver part 330.So, metal bar 320
Can penetrate in nozzle 1120, and vertically be moved in nozzle 1120, reach the purpose of the nozzle of dredge blockage.
Specifically, the guide rail of nozzle dredging part can include the first of x directions (i.e. the direction that " x " in Fig. 3 is indicated)
Guide rail and second guide rail in y directions (i.e. the direction that " y " in Fig. 3 is indicated).It is first when vapor deposition source is moved to non-evaporation region
First, second support bar pan-up under the driving force of the first driver part, (the direction movement that " z+ " is indicated i.e. along Fig. 3),
Second support bar drives laser head and metal bar pan-up.Then, second support bar is under the driving force of the first driver part
Along the first guide rail according to x positive directions (i.e. the direction that " x+ " in Fig. 3 is indicated) near crucible, second support bar drives laser head
With metal bar near crucible so that laser head and metal bar are located at the top of nozzle.Then, laser head irradiates metal using laser
The inwall of rod, removes the material to be deposited on crucible internal walls.Meanwhile, second support bar drives laser head and metal bar vertically
It is mobile, the nozzle of dredge blockage.When needing to dredge next nozzle, second support bar can be in the driving of the first driver part
Mobile according to y positive directions (i.e. the direction that " y+ " in Fig. 3 is indicated) along the second guide rail under power, second support bar drives laser head
With the top that metal bar is moved to next nozzle to be unclogged, the inwall of laser head continuation use laser irradiation metal bar, removing
Material to be deposited on crucible internal walls, meanwhile, second support bar drives laser head and metal bar vertically to move, dredge blockage
Nozzle.When all nozzles to be unclogged are dredged to be finished, second support bar can be under the driving force of the first driver part
Laser head and metal bar are driven along y negative directions (i.e. the opposite direction in the direction that " y+ " in Fig. 3 is indicated), x negative directions (i.e. Fig. 3
In " x+ " indicate direction opposite direction) and z negative directions (i.e. in Fig. 3 " z+ " instruction direction opposite direction) be retracted into original
Point, so that next time works on.
Nozzle dredging part in the utility model embodiment is located at outside crucible.Vapor deposition source need to only include that a nozzle is dredged
Logical part.The metal bar of nozzle dredging part can move back and forth, and the nozzle that each is blocked is dredged successively.The nozzle
Dredging part can also remove the material to be deposited for being attached to crucible internal walls.Nozzle dredging part can not open crucible
In the case of rapid treatment nozzle and crucible internal walls material to be deposited, so improve evaporation process production capacity, saved manpower,
Reduce evaporation cost.
In addition, the relative distance of laser generator and laser head can determine according to the space of vapor deposition source.Optionally, such as
Shown in Fig. 3, second support bar 302 can be hollow structure, and nozzle dredging part 300 also includes laser conduction part.Laser is sent out
Raw device 310 is arranged on plummer 301, and laser conduction part is arranged in 302 in second support bar.Due to laser generator and
The relative distance of laser head is larger, it is possible to laser conduction part is set between laser generator and laser head.
Optionally, laser generator can also be arranged on the one end of second support bar away from plummer, and near laser head
Position at.Because laser generator is larger with the relative distance of laser head, thus without laser generator and laser head it
Between set laser conduction part.Second support bar can be hollow structure, and the power line and control line of laser generator can be through
The second support bar for crossing hollow structure is connected with ambient controller.
Further, nozzle dredging part also includes guard block.Laser conduction part is arranged in the guard block.Protect
Shield part is used to protect laser conduction part, makes laser conduction part not by ectocine, and then ensure laser conduction part energy
It is enough that the laser that laser generator is launched is transmitted to metal bar by metal bar.
In sum, the vapor deposition source that the utility model embodiment is provided, because the vapor deposition source includes heater block, each adds
Thermal part is located at a lower section for nozzle, and each heater block is provided with heater strip, so heater block can be to material to be deposited
Material further heating, this improves the uniformity that material to be deposited is heated, it is to avoid material ashing deformation to be deposited, improves
The reliability of vapor deposition source evaporation, and the vapor deposition source can be when nozzle be blocked by material to be deposited, the spray of automatic dredging blocking
Mouth, removal is attached to the material to be deposited of nozzle interior, and removes the material to be deposited for being attached to crucible internal walls, it is to avoid material tires out
Product, improves evaporation process production capacity.
Preferred embodiment of the present utility model is the foregoing is only, is not used to limit the utility model, it is all in this practicality
Within new spirit and principle, any modification, equivalent substitution and improvements made etc. should be included in guarantor of the present utility model
Within the scope of shield.
Claims (10)
1. a kind of vapor deposition source, it is characterised in that the vapor deposition source includes：Evaporation body and n heater block, the n are more than 1,
The evaporation body includes being the crucible of hollow structure, is circumferentially positioned at the heater strip of the crucible outer wall and is provided with n
The crucible cover of individual nozzle, the crucible cover is arranged on the crucible openend；
The n heater block is arranged in the crucible, and each described heater block is located at a lower section for nozzle, each institute
State heater block and be provided with heater strip.
2. vapor deposition source according to claim 1, it is characterised in that the vapor deposition source also includes：Nozzle dredges part, described
Nozzle dredging part includes laser generator, metal bar, controller and the first driver part,
The nozzle dredging part is located at the crucible either internally or externally；
The metal bar is hollow structure, and the top of the metal bar is closed structure, the laser generator and the control
Device is connected, and the laser generator is used to launch laser under the control of the controller, and using the laser to the gold
Category rod heating, the metal bar of heating can be penetrated in the nozzle under the driving force of first driver part.
3. vapor deposition source according to claim 1, it is characterised in that
Each heater block it is highly equal, and the material to be deposited that can be accommodated more than the crucible maximum gauge.
4. vapor deposition source according to claim 2, it is characterised in that the nozzle dredging part is located inside the crucible,
The quantity of the nozzle dredging part is n, and each described nozzle dredging part also includes：Base, laser conduction part and second
Driver part,
The crucible bottom surface is provided with n opening, the center and of orthographic projection of each described nozzle on the crucible bottom surface
The center superposition of individual opening；
Each described heater block includes sleeve pipe and lid, and the lid is arranged on the top of described sleeve pipe, the pipe of described sleeve pipe
Wall includes inner layer wall and outer wall, and the heater strip of the heater block is circumferentially positioned on the inner layer wall, the bottom of described sleeve pipe
End is integrated type structure with the opening of the crucible bottom surface；
For nozzle dredging part each described, the metal bar is arranged in described sleeve pipe, and the base is arranged on the gold
Belong to the bottom of rod, the base is hollow structure, and the metal bar connect with the base, the laser generator and described sharp
Optical transmission component is arranged in the base, and the laser that the laser conduction part can launch the laser generator passes through
The metal bar is transmitted to the top of the metal bar, and first driver part is arranged on one end of the base,
Receiving pipe is provided with the annular space that the inner layer wall and the outer wall are formed, described receiving in pipe is provided with first
Support bar, one end of the first support bar is connected with second driver part, and the first support bar can be described
There is vertical displacement under the driving force of two driver parts, and rotate in the horizontal direction, the other end of the first support bar with
The lid is fixedly connected.
5. vapor deposition source according to claim 2, it is characterised in that the nozzle dredging part is located at outside the crucible,
The nozzle dredging part also includes plummer, guide rail and second support bar,
First driver part and the guide rail are arranged on the plummer, and one end of the second support bar is positioned at described
In guide rail, the second support bar is connected with first driver part, and the second support bar can drive described first
Moved in the horizontal plane along the guide rail under the driving force of part and vertical displacement occurs, the second support bar is away from described
One end of plummer is provided with laser head, and the metal bar is arranged on the one end of the laser head away from the second support bar.
6. vapor deposition source according to claim 5, it is characterised in that the second support bar is hollow structure, the nozzle
Dredging part also includes laser conduction part,
The laser generator is arranged on the plummer, and the laser conduction part is arranged in the second support bar.
7. vapor deposition source according to claim 5, it is characterised in that
The laser generator is arranged on the one end of the second support bar away from the plummer, and near the laser head
At position.
8. vapor deposition source according to claim 4, it is characterised in that
The first temperature sensor is provided with the inside of the outer wall of described sleeve pipe, first temperature sensor is described for monitoring
Temperature on sleeve pipe, and the temperature that will be monitored transmitted to the controller.
9. vapor deposition source according to claim 4, it is characterised in that
The outer wall of the metal bar is provided with second temperature sensor, and the second temperature sensor is used to monitor the metal bar
On temperature, and the temperature that will be monitored transmitted to the controller.
10. the vapor deposition source according to claim 4 or 6, it is characterised in that
The nozzle dredging part also includes guard block, and the laser conduction part is arranged in the guard block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720006481.6U CN206298636U (en) | 2017-01-04 | 2017-01-04 | Vapor deposition source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720006481.6U CN206298636U (en) | 2017-01-04 | 2017-01-04 | Vapor deposition source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206298636U true CN206298636U (en) | 2017-07-04 |
Family
ID=59203873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720006481.6U Expired - Fee Related CN206298636U (en) | 2017-01-04 | 2017-01-04 | Vapor deposition source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206298636U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107779824A (en) * | 2017-12-07 | 2018-03-09 | 合肥鑫晟光电科技有限公司 | The production equipment of evaporation source, evaporation coating device and display of organic electroluminescence |
| WO2022217634A1 (en) * | 2021-04-12 | 2022-10-20 | 武汉华星光电技术有限公司 | Vapor deposition device |
| CN116005114A (en) * | 2023-01-04 | 2023-04-25 | 京东方科技集团股份有限公司 | Vapor deposition source and vapor deposition device |
-
2017
- 2017-01-04 CN CN201720006481.6U patent/CN206298636U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107779824A (en) * | 2017-12-07 | 2018-03-09 | 合肥鑫晟光电科技有限公司 | The production equipment of evaporation source, evaporation coating device and display of organic electroluminescence |
| WO2022217634A1 (en) * | 2021-04-12 | 2022-10-20 | 武汉华星光电技术有限公司 | Vapor deposition device |
| CN116005114A (en) * | 2023-01-04 | 2023-04-25 | 京东方科技集团股份有限公司 | Vapor deposition source and vapor deposition device |
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Granted publication date: 20170704 |