CN206292524U - A kind of glue-spreading development equipment coating element - Google Patents
A kind of glue-spreading development equipment coating element Download PDFInfo
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- CN206292524U CN206292524U CN201621374677.2U CN201621374677U CN206292524U CN 206292524 U CN206292524 U CN 206292524U CN 201621374677 U CN201621374677 U CN 201621374677U CN 206292524 U CN206292524 U CN 206292524U
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- development equipment
- equipment coating
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Abstract
The utility model proposes a kind of glue-spreading development equipment coating element, including：Lower cover, its physical fit is in first size substrate and the second size substrate；Upper lid and inner cap, positioned at lower cover top, its physical fit is in the second size substrate；Sucker, wears the lower cover, upper lid and inner cap, for adsorbing substrate；Iron pan, is arranged at the sucker periphery, is provided with the clear shower nozzle of the back of the body for removing substrate backside residual chemical, and the hole for collecting waste liquid.The utility model proposes glue-spreading development equipment coating element, it is adaptable to the treatment of sizes substrate, save purchase machine cost, so as to reduce production cost.
Description
Technical field
The utility model is related to semiconductor integrated circuit to manufacture field, and more particularly to a kind of glue-spreading development equipment coating is single
Unit.
Background technology
At present, in the manufacture of semiconductor devices, generally using glue-spreading development equipment (Automatic clean track,
ACT photoresist and development) are coated.Usual ACT equipment has wafer case station, coating element, developing cell and manipulator
Arm etc..
Glue-spreading development equipment is coating photoresists and heating cure in IC chip manufacturing process, after graph exposure again
The equipment for carrying out development shaping.Coating element is to realize that photoresist is coated in the operation of substrate surface.The effect of coating element also has,
Photoresist spluttering is prevented while gluing, the unnecessary photoresist concentration that spills is collected and is discharged to collection glue bucket to reclaim.The unit
Being connected with gas extraction system can be while excludes peculiar smell.
Original equipment coating element is only adapted to 8 inch silicon chips.As the rise of LED industry and other new devices is, it is necessary to equipment
It is applicable 4 inch sapphire sheets or the production of other substrate bases.Therefore reforming equipment correlation function is needed, meets client's Production requirement.
Utility model content
The utility model proposes a kind of glue-spreading development equipment coating element, it is adaptable to the treatment of sizes substrate, save
Purchase machine cost, so as to reduce production cost.
In order to achieve the above object, the utility model proposes a kind of glue-spreading development equipment coating element, including：
Lower cover, its physical fit is in first size substrate and the second size substrate；
Upper lid and inner cap, positioned at lower cover top, its physical fit is in the second size substrate；
Sucker, wears the lower cover, upper lid and inner cap, for adsorbing substrate；
Iron pan, is arranged at the sucker periphery, is provided with the clear shower nozzle of the back of the body for removing substrate backside residual chemical, with
And collect the hole of waste liquid.
Further, the lower cover lower section is provided with chassis, and the chassis is circumscribed with air draft and sewer pipe.
Further, the first size substrate is 8 inch substrates, and second size substrate is 4 inch substrates.
Further, the upper lid and inner cap can be replaced physical fit in the component of first size substrate.
Further, the material of the upper lid and inner cap is made of polytetrafluoroethylene (PTFE).
Further, interior the covering symmetrically has cut open 2 openings so that the clear shower nozzle of the back of the body can be carried out to substrate backside
Cleaning.
Further, the interior A/F for covering is 2mm.
Further, the material of the iron pan is made of stainless steel.
The utility model proposes glue-spreading development equipment coating element, it is adaptable to the treatment of sizes substrate, Ke Yishi
8 inch substrates can be produced on existing same machine can produce 4 inch substrates again, and client oneself changes option in scene, so may be used
To save purchase machine cost.Material selection polytetrafluoroethylene (PTFE) (Teflon), stable chemical performance, antiseptic property is good, is easy to assembling, easily
In cleaning.Compression molding, uniformity is good, is easy to exchange.2 openings of 2mm width symmetrically are cut open in interior covering, can be made original
The clear shower nozzle of the back of the body of installation continues to play a role, the menu adjustment position that the organic solvent sprayed in shower nozzle can be in actual production
Put, effective cleaning is done to silicon chip back.
Brief description of the drawings
Fig. 1 show the glue-spreading development equipment coating element structure of the inch substrate of adaptation 4 of the utility model preferred embodiment
Schematic diagram.
Fig. 2 show the glue-spreading development equipment coating element structure of the inch substrate of adaptation 8 of the utility model preferred embodiment
Schematic diagram.
Specific embodiment
Specific embodiment of the present utility model is given below in conjunction with accompanying drawing, but the utility model is not limited to following implementation
Mode.According to following explanation and claims, advantages and features of the present utility model will become apparent from.It should be noted that, accompanying drawing
Non- accurately ratio is used in the form of simplifying very much and, convenience is only used for, is lucidly aided in illustrating the utility model
The purpose of embodiment.
Refer to Fig. 1 and Fig. 2, Fig. 1 and Fig. 2 show the glue-spreading development equipment coating list of the utility model preferred embodiment
Meta structure schematic diagram.The utility model proposes a kind of glue-spreading development equipment coating element, including：Lower cover 100, its physical fit in
First size substrate and the second size substrate；Upper lid 200 and inner cap 300, positioned at the top of the lower cover 100, its physical fit in
Second size substrate；Sucker 400, wears the lower cover 100, upper lid 200 and inner cap 300, for adsorbing substrate 500；Iron pan, if
The periphery of the sucker 400 is placed in, the clear shower nozzle of the back of the body for removing substrate backside residual chemical is provided with, and collect waste liquid
Hole.
According to the utility model preferred embodiment, the lower section of the lower cover 100 is provided with chassis, and the chassis is circumscribed with air draft
And sewer pipe, Main Function is the waste liquid in accepting production process, and ensures the environment in whole unit.
The first size substrate is 8 inch substrates, and second size substrate is 4 inch substrates.The upper lid and inner cap can
Physical fit is replaced with the component 280,380 of first size substrate, 8 inch substrates 580 are produced by realizing on same machine
4 inch substrates 500 can be produced again.Client oneself changes option in scene, can so save purchase machine cost.
The material of the upper lid 200 and inner cap 300 is made of polytetrafluoroethylene (PTFE), and stable chemical performance, antiseptic property is good,
It is easy to assembling, it is easy to clear up.Compression molding is used simultaneously, uniformity is good, be easy to exchange.Upper lid 200 need to ensure the loading of substrate
Therefore its endoporus need to be bigger than substrate, but can not be too big, such as too big, can not be carried out when the waste liquid in production throws away effective
Block.Inner cap 300 need to accept the waste liquid produced in production process, therefore need to coordinate the size of substrate, it is impossible to too greatly can not be too
It is small.
Symmetrically 2 openings have been cut open on the inner cap 300 so that the clear shower nozzle of the back of the body can be cleaned to substrate backside.
Further, the A/F on the inner cap 300 is 2mm.The clear shower nozzle of the back of the body of original installation can be made to continue to play a role, sprayed
The menu adjustment position that the organic solvent of ejection can be in actual production in head, effective cleaning is done to substrate backside.
The material of the iron pan is made of stainless steel.It is installed above to there is the back of the body for removing silicon chip back residual chemical to spray clearly
Head, and collect the hole of waste liquid.Most waste liquid is more in theory flows away over there from inner cap, and amount here is very small, but can not
Saying does not have.It is 8 inch substrate designs that iron pan is, therefore the edge of 8 inch substrate inner caps is just stuck in those holes for collecting waste liquid
Edge, will not block hole.The inner cap of 8 inch substrates is adapted to because of reduced bore, therefore this some holes, therefore inner cap edge can be sheltered from
No longer contacted with iron pan.And because inner cap has blocked the clear shower nozzle of the back of the body, therefore two seams have been covered out interior, can allow back of the body clear liquid
Body sprays.
In sum, the utility model proposes glue-spreading development equipment coating element, it is adaptable to the place of sizes substrate
Reason, it is possible to achieve 8 inch substrates can be produced on same machine can produce 4 inch substrates again, and client oneself changes at scene option and is
Can, can so save purchase machine cost.Material selection polytetrafluoroethylene (PTFE) (Teflon), stable chemical performance, antiseptic property is good, just
In assembling, it is easy to clear up.Compression molding, uniformity is good, is easy to exchange.2 openings of 2mm width symmetrically are cut open in interior covering,
The clear shower nozzle of the back of the body of original installation can be made to continue to play a role, the organic solvent sprayed in shower nozzle can be according in actual production
Menu adjustment position, effective cleaning is done to silicon chip back.
Although the utility model is disclosed above with preferred embodiment, so it is not limited to the utility model.This reality
New those of ordinary skill in the art is used, is not being departed from spirit and scope of the present utility model, it is each when that can make
The change planted and retouching.Therefore, protection domain of the present utility model is worked as and is defined depending on those as defined in claim.
Claims (8)
1. a kind of glue-spreading development equipment coating element, it is characterised in that including：
Lower cover, its physical fit is in first size substrate and the second size substrate；
Upper lid and inner cap, positioned at lower cover top, its physical fit is in the second size substrate；
Sucker, wears the lower cover, upper lid and inner cap, for adsorbing substrate；
Iron pan, is arranged at the sucker periphery, is provided with the clear shower nozzle of the back of the body for removing substrate backside residual chemical, Yi Jishou
Collect the hole of waste liquid.
2. glue-spreading development equipment coating element according to claim 1, it is characterised in that the lower cover lower section is provided with bottom
Disk, the chassis is circumscribed with air draft and sewer pipe.
3. glue-spreading development equipment coating element according to claim 1, it is characterised in that the first size substrate is 8
Inch substrate, second size substrate is 4 inch substrates.
4. glue-spreading development equipment coating element according to claim 1, it is characterised in that the upper lid and inner cap are replaceable
It is physical fit in the component of first size substrate.
5. glue-spreading development equipment coating element according to claim 1, it is characterised in that the material of the upper lid and inner cap
It is made of polytetrafluoroethylene (PTFE).
6. glue-spreading development equipment coating element according to claim 1, it is characterised in that covered in described and symmetrically cut open
2 openings so that the clear shower nozzle of the back of the body can be cleaned to substrate backside.
7. glue-spreading development equipment coating element according to claim 1, it is characterised in that the A/F covered in described
It is 2mm.
8. glue-spreading development equipment coating element according to claim 1, it is characterised in that the material of the iron pan is not using
Rust steel is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621374677.2U CN206292524U (en) | 2016-12-15 | 2016-12-15 | A kind of glue-spreading development equipment coating element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621374677.2U CN206292524U (en) | 2016-12-15 | 2016-12-15 | A kind of glue-spreading development equipment coating element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206292524U true CN206292524U (en) | 2017-06-30 |
Family
ID=59104375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621374677.2U Active CN206292524U (en) | 2016-12-15 | 2016-12-15 | A kind of glue-spreading development equipment coating element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206292524U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111146122A (en) * | 2019-12-26 | 2020-05-12 | 厦门通富微电子有限公司 | Liquid collection device, developing/etching machine table and developing/etching method |
-
2016
- 2016-12-15 CN CN201621374677.2U patent/CN206292524U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111146122A (en) * | 2019-12-26 | 2020-05-12 | 厦门通富微电子有限公司 | Liquid collection device, developing/etching machine table and developing/etching method |
| CN111146122B (en) * | 2019-12-26 | 2022-10-28 | 厦门通富微电子有限公司 | Liquid collection device, developing/etching machine table and developing/etching method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: Floor 1, Block C, 169 Taigu Road, Shanghai Pudong New Area Free Trade Pilot Area, 2013 Patentee after: Jingdian Electronics Co., Ltd. Address before: 20120106 1st floor, Block C, 169 Taigu Road, China (Shanghai) Free Trade Pilot Area, Pudong New Area, Shanghai Patentee before: Shanghai Jingdian Electronics Co. Ltd. |
|
| CP03 | Change of name, title or address |