CN206292198U - Many substrate integrated structures of electronic type biology sensor and microfluidic device - Google Patents
Many substrate integrated structures of electronic type biology sensor and microfluidic device Download PDFInfo
- Publication number
- CN206292198U CN206292198U CN201621067343.0U CN201621067343U CN206292198U CN 206292198 U CN206292198 U CN 206292198U CN 201621067343 U CN201621067343 U CN 201621067343U CN 206292198 U CN206292198 U CN 206292198U
- Authority
- CN
- China
- Prior art keywords
- substrate
- electronic type
- biology sensor
- flow channel
- type biology
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Apparatus Associated With Microorganisms And Enzymes (AREA)
Abstract
The utility model provides many substrate integrated structures of a kind of electronic type biology sensor and microfluidic device, including：One first substrate, an electronic type biology sensor, an adhesion layer, a second substrate, a flow channel layer and a covering；With this, an at least fluid can be flowed into from the covering, flowed through the second substrate by the flow channel layer and contacted the electronic type biology sensor, to be sensed.The electronic type biology sensor through adhesion layer respectively with first substrate and second substrate set, and be electrically connected with through conductive pad, projection, the second conducting wire and the first conducting wire, sensing result is reached and is arranged at first substrate and externally connected conductive pad.
Description
Technical field
The utility model is many substrate integrated structures about a kind of electronic type biology sensor and microfluidic device.
Background technology
Biology sensor (Biosensor) refers to utilize biological sensing component by the knots modification of the chemical substance in system,
It is converted into a kind of analytical equipment of electric signal or optical signal.In fast-developing biology or medical science and technology field, electronics
The appearance of formula biology sensor is not less than the quantum jump for being modern age biology relevant technical.The main composition component of biology sensor,
Including sensing component, transducer and electronic installation.
Because organism inherently has chemocepter miscellaneous, so the uniqueness of biology sensor is exactly to come
From biological sensing component and biomolecule possesses thereon high sensitivity, high specific or high selectivity, electronic type is also brought up
Biology sensor can meet the demand of many important measurements.In other words, organism is actually in itself a chemoreceptor
(chemoreceptors) aggregate, these chemoreceptors are respectively provided with specific or selectivity and the sensitivity of height.
Furthermore, through artificial during conventional biochemical is analyzed or mechanically actuated, with micro- side Pu, micro-valve door, micro-filter, micro- mix
The microfluid components such as clutch, microchannel, microsensor and microreactor are concentrated and are made on microfluidic device, before carrying out sample
The programs such as treatment, mixing, transmission, separation and detecting, are even more actively used on biology sensor.
However, the integrated structure of existing electronic type biology sensor and microfluidic device is often because application and existing integration
The limitation of processing procedure, it is impossible to which quality conformance, structural intergrity and the processing procedure height production of detection module are provided.Therefore, how
The electronic type biology sensor and the integrated structure of microfluidic device for providing a kind of effective and tool application elasticity are current industries
Important issue.
Utility model content
Embodiment of the present utility model discloses a kind of electronic type biology sensor and integrates knot with many substrates of microfluidic device
Structure, including：One first substrate, with accommodating window, one first wire line and multiple first vias, the wherein appearance
One conductive material of filling in the center section that window is disposed on the first substrate, the plurality of first via is put, and respectively
The lower end of the plurality of first via be provided with a conductive pad and the upper end of the plurality of first via connect this first
The electrical phase of the conductive material filled in wire line, first wire line, the conductive pad and the plurality of first via
Even；One electronic type biology sensor, is combined by a set material and is arranged in the accommodating window of the first substrate, with all one's life
Thing sensed layer and multiple conductive pads, wherein biological sensing layer is to set upward, exposed to the accommodating window of the first substrate
Interior, the plurality of conductive pad is set upward, there is provided the electric connection of the electronic type biology sensor；One adhesion layer, with reference to being arranged at
On the first substrate, with one first hollow out window and multiple conductive projections, wherein the first hollow out window is correspondingly arranged in
The biological sensing layer top of the electronic type biology sensor, to expose biological sensing layer, the plurality of conductive projection is corresponded to respectively
It is arranged on the first wire line of multiple conductive pads of the electronic type biology sensor and the first substrate, and it is many with this respectively
First wire line of individual conductive pad and the first substrate is electrically connected with, and closes the conductive pad on the electronic type biology sensor
And first wire line on the first substrate；One second substrate, with reference to the top for being arranged at the adhesion layer, with one second
Hollow out window and one second wire line, wherein the second hollow out window are correspondingly arranged in the first hollow out window of the adhesion layer
Mouthful with the biological sensing of electronic type biology sensor layer top, to expose the biological sensing layer, second wire line is to set
Be placed in the second substrate towards lower surface, the plurality of conductive projection with the adhesion layer is electrical connected, the surface of the second substrate
It is to be modified to hydrophily or hydrophobic surface；One flow channel layer, is arranged at second substrate top, and with an at least runner,
For an at least flow of fluid, and a covering, be arranged at flow channel layer top, and with an at least first fluid entrance and
An at least first fluid is exported, for the stream into and out of an at least fluid, at least fluid intake and this is at least first-class
Body outlet is connected with an at least runner for the flow channel layer, wherein, an at least fluid is from an at least first fluid entrance
Flow into, the second hollow out window of the second substrate and the first hollow out window of the adhesion layer are flowed through by an at least runner
Mouthful, the biological sensing layer for contacting the electronic type biology sensor is used, to be sensed, then from an at least fluid issuing stream
Go out.
It is preferred that the first substrate also includes first circuit being made up of actively and/or passively component, first circuit
Electrically communicated with first wire line.
It is preferred that the second substrate further includes a second circuit being made up of actively and/or passively component, the second circuit
Electrically communicated with second wire line.
It is preferred that the first substrate is the stack architecture of a multilager base plate.
It is preferred that the second substrate is the stack architecture of a multilager base plate.
It is preferred that the flow channel layer also include at least a gang of Pu component, an at least valve member, at least one mixed liquid component, its
His microfluid component or its any combination, to carry out the flowing and pretreatment of an at least fluid.
It is preferred that the flow channel layer is a multilayered structure, with many numbers of plies, and the runner layer surface is to be modified to hydrophily
Or hydrophobic surface.
It is preferred that the flow channel layer also includes a tertiary circuit, the tertiary circuit is and second electricity on the second substrate
Road is electrical connected, and the tertiary circuit is and an at least fluid isolation with the second circuit junction.
It is preferred that the covering is integrated with the flow channel layer, or the flow channel layer is integrated with the second substrate,
Or the covering, the flow channel layer and the second substrate are integrated, or the covering, the flow channel layer, the second substrate with should
Adhesion layer is integrated.
It is preferred that on the flow channel layer, other substrates and other flow channel layers are also set gradually, to form the substrate knot of more layers
Structure, other substrates and the structure of other flow channel layers and the structure of combination and the second substrate and the flow channel layer and combination side
Formula is identical.
The utility model embodiment by by electronic type biology sensor through the adhesion layer respectively with first substrate and the
Two substrates are electrically connected with, and sensing result is reached and is arranged at first substrate and externally connected conductive pad.
Brief description of the drawings
Fig. 1 is the reality of a kind of electronic type biology sensor of the present utility model and many substrate integrated structures of microfluidic device
Apply the schematic diagram of example；
Fig. 2 is the reality of a kind of electronic type biology sensor of the present utility model and many substrate integrated structures of microfluidic device
Apply the profile of example.
Description of reference numerals
110 first substrates
111 accommodating windows
112 first wire lines
113 first vias
114 conductive pads
120 electronic type biology sensors
121 set materials
122 biological sensings layer
123 conductive pads
130 adhesion layers
131 first hollow out windows
132 conductive projections
140 second substrates
141 second hollow out windows
142 second wire lines
150 flow channel layers
160 coverings
161 first fluid entrances
162 first fluids are exported
Specific embodiment
Implementation method of the present utility model is illustrated the following is by particular specific embodiment, people skilled in the art can
Other advantages of the present utility model and effect are understood by content disclosed in the present specification easily.The utility model can also pass through
Other different instantiations are implemented or applied, and the every details in the utility model specification may be based on different viewpoints
Various modifications and change are carried out in the case where spirit of the present utility model is not departed from applying.
It should be clear that this specification institute accompanying drawings structure, ratio, size for illustrating etc., are only used to coordinate disclosed in specification
Content, for people skilled in the art understand with read, be not limited to the enforceable qualifications of the utility model,
Therefore not having technical essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influenceing this reality
With under new effect that can be generated and the purpose to be reached, all should fall obtain energy in the technology contents disclosed in the utility model
In the range of covering.
Fig. 1 and Fig. 2 is respectively many bases of integration of a kind of electronic type biology sensor of the present utility model and microfluidic device
The schematic diagram and profile of the embodiment of hardened structure.Electronic type biology sensor is application with the integrated structure of microfluidic device
Encapsulated in an electronic type biology sensor and a micro runner device are integrated.As shown in Figures 1 and 2, electronic type biology sensor
Integrated structure with microfluidic device sequentially includes from lower to upper：One first substrate 110, an electronic type biology sensor 120,
Adhesion layer 130, a second substrate 140, a flow channel layer 150 and a covering 160.
First substrate 110 has accommodating window 111, one first wire line 112 and multiple first vias 113,
Wherein, it is that filling one is led in the center section that hollow out is arranged at first substrate 110, multiple first vias 113 to house window 111
Electric material, and respectively the lower end of multiple first vias 113 be provided with a conductive pad 114, its upper end connect the first wire
Circuit 112, the first wire line 112, conductive pad 114 and the interior electrical phase of conductive material filled of multiple first vias 113
Even.
First substrate 110 also includes a first circuit (not shown) being made up of actively and/or passively component, the first electricity
Road electrically communicates with the first wire line 112.Also, the stack architecture of first substrate 110 or a multilager base plate, to allow
Setting structure is more complicated and more first circuits of function.
Electronic type biology sensor 120 is to combine the accommodating window for being arranged at first substrate 110 by a set material 121
In 111, with a biological sensed layer 122 and multiple conductive pads 123, wherein, biological sensing layer 122 is to set upward, exposure
In in the accommodating window 111 of first substrate 110, multiple conductive pads 123 are set upward, there is provided electronic type biology sensor 120
It is electrically connected with.
Adhesion layer 130 is combined and is arranged on first substrate 110, with one first hollow out window 131 and multiple conductive studs
Block 132, wherein, the first hollow out window 131 is correspondingly arranged in the top of biological sensing layer 122 of electronic type biology sensor 120, with
Exposure biological sensing layer 122, the multiple that multiple conductive projections 132 are correspondingly arranged in electronic type biology sensor 120 respectively is conductive
On first wire line 112 of pad 123 and first substrate 110, and respectively with the plurality of conductive pad 123 and first substrate 110
First wire line 112 is electrically connected with, and closes on the conductive pad 123 on electronic type biology sensor 120 and first substrate 110
The first wire line 112.
Second substrate 140 combines the top for being arranged at adhesion layer 130, with one second hollow out window 141 and one second
Wire line 142, wherein, the second hollow out window 141 is correspondingly arranged in the first hollow out window 131 and electronic type of adhesion layer 130
The top of biological sensing layer 122 of biology sensor 120, to expose biological sensing layer 122, the second wire line 142 is disposed on
Second substrate 140 towards lower surface, the multiple conductive projections 132 with adhesion layer 130 are electrical connected, the surface of second substrate 140
Hydrophily or hydrophobic surface can be modified to according to application demand.
Similarly, second substrate 140 further includes a second circuit being made up of actively and/or passively component (in figure not
Show), second circuit is electrically communicated with the second wire line 142.Also, the storehouse of second substrate 140 or a multilager base plate
Structure, to allow that setting structure is more complicated and more first circuits of function.
Flow channel layer 150 is arranged at the top of second substrate 140, and with an at least runner, for an at least flow of fluid.
It is worth noting that, flow channel layer 150 further includes at least a gang of Pu component, at least a valve member, at least one mixed liquid
Component, other microfluid components or its any combination, to carry out the flowing and pretreatment of an at least fluid.Flow channel layer 150 also may be used
It is a multilayered structure, with many numbers of plies, so that different fluid flows, and its surface is to be modified to hydrophily or hydrophobic table
Face.Flow channel layer 150 can be made up of a transparent material or opaque material, for example, macromolecular material, plastics, ceramics, metal, silicon
Wafer, glass or other composites.
Furthermore, flow channel layer more may include a tertiary circuit (not shown), and tertiary circuit is and on second substrate 140
Two circuits are electrical connected, and the tertiary circuit place of being connected thereto is and an at least fluid isolation.It is worth noting that, the utility model
Overall structure in addition to runner, the junction of other components should all completely cut off fluid, it is to avoid fluid seepage；For example, foregoing
One circuit and second circuit also with an at least fluid isolation.
Covering 160 is arranged at the top of flow channel layer 150, and with an at least first fluid entrance 161 and at least one first
Fluid issuing 162, for the stream into and out of an at least fluid, an at least fluid intake 161 and at least a fluid issuing 162 with
An at least runner of flow channel layer 150 is connected；Wherein, an at least fluid is flowed into from an at least first fluid entrance 161, by extremely
A few runner flows through the second hollow out window 141 and the first hollow out window 131 of adhesion layer 130 of second substrate 140, uses contact
The biological sensing layer 122 of electronic type biology sensor 120, to be sensed, then flows out from an at least fluid issuing 162.
Covering 160 can be made up of a transparent material or opaque material, for example, macromolecular material, plastics, ceramics, gold
Category, Silicon Wafer, glass or other composites.
It is worth noting that, in order to simplify assembly program, can be made in an integrated fashion between above-mentioned each component, to reduce structure
The number of part, the complexity for reducing assembling.For example, covering 160 is integrated with flow channel layer 150, or flow channel layer 150 and
Two substrates 140 are integrated, or covering 160, flow channel layer 150 are integrated with second substrate 140, or covering 160,
Flow channel layer 150, second substrate 140 are integrated with adhesion layer 130.
Wherein, other substrates and other flow channel layers can be more set gradually on flow channel layer 150, to form the substrate knot of more layers
Structure, other substrates are identical with flow channel layer 150 with combination with second substrate 140 with the structure of other flow channel layers.
In summary, embodiment of the present utility model discloses many bases of a kind of electronic type biology sensor and microfluidic device
Plate integrated structure, through combination electronic type biology sensor and microfluidic device, can detect produced by electronic type biology sensor
Electric signal, and its overall structure, in addition to runner, the junction of other components can all completely cut off fluid, avoid seepage, fit
Electronic type biology sensor and microfluidic device for integrating diversified forms.
However, above-described embodiment only illustrative effect of the present utility model, not for limitation the utility model, appoints
What those skilled in the art can be modified above-described embodiment under without prejudice to spirit and scope of the present utility model
With change.Additionally, the quantity of the component in above-mentioned those embodiments is only illustrative, it is not intended for use in and limits this practicality newly
Type.Therefore rights protection scope of the present utility model, should be as listed by following claim.
Claims (10)
1. many substrate integrated structures of a kind of electronic type biology sensor and microfluidic device, it is characterised in that including：
One first substrate, with accommodating window, one first wire line and multiple first vias, the wherein accommodating window
One conductive material of filling in the center section of the first substrate, the plurality of first via is disposed on, and it is many at this respectively
The lower end of individual first via is provided with a conductive pad and connects first wire in the upper end of the plurality of first via
Road, first wire line, the conductive pad are electrical connected with the conductive material of filling in the plurality of first via；
One electronic type biology sensor, is combined by a set material and is arranged in the accommodating window of the first substrate, with one
Biological sensing layer and multiple conductive pads, wherein biological sensing layer is to set upward, exposed to the accommodating window of the first substrate
Intraoral, the plurality of conductive pad is set upward, there is provided the electric connection of the electronic type biology sensor；
One adhesion layer, with reference to being arranged on the first substrate, with one first hollow out window and multiple conductive projections, wherein should
First hollow out window is correspondingly arranged in the biological sensing layer top of the electronic type biology sensor, to expose biological sensing layer,
The plurality of conductive projection be correspondingly arranged in respectively the electronic type biology sensor multiple conductive pads and the first substrate first
On wire line, and it is electrically connected with the plurality of conductive pad and the first substrate respectively, and closes the electronic type biology sensor
On conductive pad and first wire line on the first substrate；
One second substrate, is bonded to first substrate top, with one second hollow out window and one second by the adhesion layer
Wire line, wherein the second hollow out window are correspondingly arranged in the first hollow out window and the biological biography of the electronic type of the adhesion layer
The biological sensing layer top of sensor, to expose biological sensing layer, second wire line is disposed on the court of the second substrate
Lower surface, the plurality of conductive projection with the adhesion layer is electrical connected, and the surface of the second substrate is to be modified to hydrophily or dredge
Aqueous surface；
One flow channel layer, is arranged at second substrate top, and with an at least runner, for an at least flow of fluid；And
One covering, is arranged at flow channel layer top, and is exported with an at least first fluid entrance and an at least first fluid,
For the stream into and out of an at least fluid, an at least fluid intake and an at least fluid issuing should with the flow channel layer
At least a runner is connected,
Wherein, an at least fluid is flowed into from an at least first fluid entrance, and second base is flowed through by an at least runner
The second hollow out window of plate and the first hollow out window of the adhesion layer, use the life for contacting the electronic type biology sensor
Thing sensed layer, to be sensed, then flows out from an at least fluid issuing.
2. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists
In the first substrate also includes first circuit being made up of actively and/or passively component, first circuit and first wire
Circuit is electrically communicated.
3. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists
In the second substrate also includes a second circuit being made up of actively and/or passively component, the second circuit and second wire
Circuit is electrically communicated.
4. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists
In the first substrate is the stack architecture of a multilager base plate.
5. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists
In the second substrate is the stack architecture of a multilager base plate.
6. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists
In the flow channel layer also includes at least a gang of Pu component, at least a valve member, at least one mixed liquid component, other microfluid components
Or its any combination, to carry out the flowing and pretreatment of an at least fluid.
7. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists
In the flow channel layer is a multilayered structure, and with many numbers of plies, and the runner layer surface is to be modified to hydrophily or hydrophobic table
Face.
8. many substrate integrated structures of electronic type biology sensor as claimed in claim 3 and microfluidic device, its feature exists
In, the flow channel layer also includes a tertiary circuit, and the tertiary circuit is electrical connected with the second circuit on the second substrate, and
The tertiary circuit and the second circuit junction are and an at least fluid isolation.
9. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists
In, the covering is integrated with the flow channel layer, or the flow channel layer is integrated with the second substrate, or the covering,
The flow channel layer is integrated with the second substrate, or the covering, the flow channel layer, the second substrate and the adhesion layer are integrated into
Integrally.
10. many substrate integrated structures of electronic type biology sensor as claimed in claim 1 and microfluidic device, its feature exists
In, other substrates and other flow channel layers are also set gradually on the flow channel layer, to form the board structure of more layers, other substrates
Structure with other flow channel layers is identical with combination with the structure of the flow channel layer with the second substrate with combination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621067343.0U CN206292198U (en) | 2016-09-21 | 2016-09-21 | Many substrate integrated structures of electronic type biology sensor and microfluidic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621067343.0U CN206292198U (en) | 2016-09-21 | 2016-09-21 | Many substrate integrated structures of electronic type biology sensor and microfluidic device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206292198U true CN206292198U (en) | 2017-06-30 |
Family
ID=59095210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621067343.0U Expired - Fee Related CN206292198U (en) | 2016-09-21 | 2016-09-21 | Many substrate integrated structures of electronic type biology sensor and microfluidic device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206292198U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107502534A (en) * | 2017-08-08 | 2017-12-22 | 珠海创飞芯科技有限公司 | The encapsulating structure and method for packing of biochip |
| KR20190135869A (en) * | 2018-05-29 | 2019-12-09 | 주식회사 큐에스택 | Biosensor having vertical channel |
| WO2022169763A1 (en) * | 2021-02-05 | 2022-08-11 | Illumina, Inc. | Fanout flow cell |
-
2016
- 2016-09-21 CN CN201621067343.0U patent/CN206292198U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107502534A (en) * | 2017-08-08 | 2017-12-22 | 珠海创飞芯科技有限公司 | The encapsulating structure and method for packing of biochip |
| CN107502534B (en) * | 2017-08-08 | 2021-03-19 | 珠海创飞芯科技有限公司 | Packaging structure and packaging method of biochip |
| KR20190135869A (en) * | 2018-05-29 | 2019-12-09 | 주식회사 큐에스택 | Biosensor having vertical channel |
| KR102122082B1 (en) | 2018-05-29 | 2020-06-11 | 주식회사 큐에스택 | Biosensor having vertical channel |
| WO2022169763A1 (en) * | 2021-02-05 | 2022-08-11 | Illumina, Inc. | Fanout flow cell |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206292198U (en) | Many substrate integrated structures of electronic type biology sensor and microfluidic device | |
| CN106955750B (en) | Micro-fluidic chip based on the flowing of active control liquid | |
| US8835247B2 (en) | Sensor array and a method of manufacturing the same | |
| CN101258397A (en) | Microfluidic devices and methods of preparing and using the same | |
| CN106501340B (en) | The detection method of electrode, ion-sensitive sensor, capacitor and ionic activity | |
| Zheng et al. | Micro coulter counters with platinum black electroplated electrodes for human blood cell sensing | |
| KR20070108532A (en) | Apparatuses and methods for manipulating droplets on a printed circuit board | |
| Lindsay et al. | Heterogeneous integration of CMOS sensors and fluidic networks using wafer-level molding | |
| JP4687653B2 (en) | Analysis pretreatment parts | |
| CN112969536B (en) | Multi-layer electrical connection of digital microfluidics on a substrate | |
| Li et al. | Epoxy chip-in-carrier integration and screen-printed metalization for multichannel microfluidic lab-on-CMOS microsystems | |
| CN106471360A (en) | Electrochemical sensor array and equipment | |
| US20100314699A1 (en) | Electrochemical sensor device, method of manufacturing the same | |
| US20210055255A1 (en) | Devices incorporating multilane flow cell | |
| CN206020327U (en) | Electronic type biology sensor and the integrated structure of microfluidic device | |
| CN109668949B (en) | Analyte sensor package with dispensing chemistry and microfluidic cover | |
| TWM538153U (en) | Integrated multi-substrate structure of electronic biosensor and microfluidic device | |
| TW202013624A (en) | Electronic package and manufacturing method thereof | |
| CN107764875A (en) | The integrated structure of electronic type biology sensor and microfluidic device | |
| Lindsay et al. | Scalable hybrid integration of CMOS circuits and fluidic networks for biosensor applications | |
| TWI716730B (en) | Apparatus for biological or chemical analysis and method using the same | |
| Dawes et al. | Lab-on-CMOS packaging using wafer-level molding and direct-write 3D-printed interconnects | |
| TWI623487B (en) | Microfluid sensing device and method for fabricating the same | |
| TWI538116B (en) | Biosensor package and method of forming the same | |
| US9810662B1 (en) | Structure for integrating microfluidic devices and electrical biosensors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170630 Termination date: 20180921 |