CN107764875A - The integrated structure of electronic type biology sensor and microfluidic device - Google Patents
The integrated structure of electronic type biology sensor and microfluidic device Download PDFInfo
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- CN107764875A CN107764875A CN201610696881.4A CN201610696881A CN107764875A CN 107764875 A CN107764875 A CN 107764875A CN 201610696881 A CN201610696881 A CN 201610696881A CN 107764875 A CN107764875 A CN 107764875A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
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Abstract
The present invention provides a kind of integrated structure of electronic type biology sensor and microfluidic device, including:One substrate, there is conductive pad to provide and be connected with exposed electrical;One flow channel layer, is arranged at surface, comprising a runner, for a flow of fluid;One covering, it is arranged above flow channel layer, there is a first fluid entrance and a first fluid to export, for the stream into and out of fluid, first fluid entrance and first fluid outlet is connected with the runner of flow channel layer, and have a hollow out window, to expose fluid;And an electronic type biology sensor, it is arranged in a manner of flip on covering, electronic type biology sensor has a biological sensed layer, fluid flows into from first fluid entrance, the biological sensing layer of electronic type biology sensor is flowed through by runner, to be sensed, then exports and flows out from first fluid.
Description
Technical field
The present invention is the integrated structure about a kind of electronic type biology sensor and microfluidic device.
Background technology
With the sustainable development of electronics technology, its feeler applied also constantly deploys cross-cutting exploration and combination.Wherein,
In the biotechnology of fast development or medical science and technology field, the appearance of biology sensor is more than modern age biology relevant technical
One quantum jump, so-called biology sensor (Biosensor) refer to the changing the chemical substance in system using biological sensing component
Variable, it is converted into a kind of analytical equipment of electric signal or optical signal.The main composition component of biology sensor includes sensing
Component, transducer and electronic installation.
Biology sensor meets the demand of many important measurements, and the most unique place of biology sensor is exactly from biology
Sensing component with biomolecule possessed high sensitivity, high specific or high selectivity, its reason are organism sheet thereon
Body just has miscellaneous chemocepter.In other words, organism is actually a chemoreceptor in itself
(chemoreceptors) aggregate, these chemoreceptors are respectively provided with specific or selectivity and the sensitivity of height.
On the other hand, the artificial or mechanically actuated needed for being analyzed through conventional biochemical, with micro- side Pu, micro-valve door, micro- mistake
The microfluid components such as filter, micro-mixer, microchannel, microsensor and microreactor are concentrated and are made on microfluidic device, with
The programs such as sample pre-treatments, mixing, transmission, separation and detecting are carried out, are more actively used on biology sensor.
However, the integrated structure of existing biology sensor and microfluidic device is often because application and existing integration processing procedure
Limitation, quality conformance, structural intergrity and the processing procedure height production of detection module can not be provided.
What is more, the biological sensing layer on biology sensor is often bonded by chemical molecular and biomolecule forms, these
Chemical molecular and biomolecule are limited to the nature of material, can not bear the high temperature more than more than 100 degree Celsius, or even have
Molecule can only be born less than the environment below 40 degrees Centigrade, and between semiconductor subassembly or electric component of microcomputer and other materials
Connection process, often therefore, it need to necessarily cause biomolecule and chemistry on biological sensing layer in more than 100 degree Celsius progress
Molecular structure changes or loses its natural activity, in turn results in its biological sensing performance failure.Therefore, how to provide one kind has
The integrated structure of the electronic type biology sensor and microfluidic device of effect and tool application elasticity, it is the important issue of current industry.
The content of the invention
Embodiments of the invention disclose a kind of integrated structure of electronic type biology sensor and microfluidic device, including:One
Substrate, there are multiple first through hole, wherein one conductive material of filling in the plurality of first through hole, and in the plurality of first through hole
Both ends be respectively arranged with a conductive pad, the electrical phase of the conductive material of filling in the conductive pad and the plurality of first through hole
Even;One flow channel layer, the surface is arranged at, and comprising an at least runner, for an at least flow of fluid, and multiple second
Through hole, wherein one conductive material of filling in the plurality of second through hole, the conductive material and the base of the plurality of second through hole
The conductive pad of plate is electrical connected;One covering, it is arranged above the flow channel layer, with an at least first fluid entrance and at least
One first fluid exports, for the stream into and out of an at least fluid, wherein an at least first fluid entrance and this at least
One first fluid exports that at least a runner is connected with this of the flow channel layer, and has a hollow out window, with it is exposed this at least one
Fluid, and multiple third through-holes are set, wherein one conductive material of filling in the plurality of third through-hole, the plurality of third through-hole
The conductive material is electrical connected with the conductive material in the plurality of second through hole of the flow channel layer;And one electronic type life
Thing sensor, combined and be arranged on the covering in a manner of flip by projection, wherein the electronic type biology sensor has
One biological sensed layer, when an at least fluid flows through the hollow out window, the hollow out window of the covering and the biological sensing area
Contact, the projection is implanted in the conductive material of the plurality of third through-hole of the covering, is electrical connected with reaching, its
In, an at least fluid flows into from an at least first fluid entrance, and flowing through electronic type biology by an at least runner passes
The biological sensing layer of sensor, to be sensed, then export and flow out from an at least first fluid.
Preferably, the electronic type biology sensor of the present invention and the integrated structure of microfluidic device are also protected comprising a support
Plate, the support protection board are provided with a hollow out window, to house the electronic type biology sensor, and have an at least second fluid
Entrance and the outlet of an at least second fluid, an at least second fluid entrance and the outlet of an at least second fluid and the covering
An at least first fluid entrance and at least first fluid outlet are oppositely arranged.
Preferably, the electronic type biology sensor of the present invention and the integrated structure of microfluidic device are also protected comprising a support
Plate, the support protection board are provided with a hollow out window, with house the electronic type biology sensor, wherein the substrate be additionally provided with to
A few second fluid entrance and an at least second fluid outlet, an at least second fluid entrance and the outlet of an at least second fluid
It is oppositely arranged with the both ends of an at least runner of the flow channel layer, for the inflow and outflow of an at least fluid.
Preferably, the substrate of the present invention also sets up a circuit being made up of active and/or passive component.
Preferably, the substrate of the present invention is the stack architecture of multilager base plate.
Preferably, the flow channel layer of the present invention also includes at least a gang of Pu component, at least a valve member, at least one mixed liquid group
Part, other microfluid components or its any combination, to carry out the flowing and pretreatment of an at least fluid.
Preferably, the flow channel layer of the present invention can be a multilayered structure, there is the plural number of plies.
Preferably, the flow channel layer of the present invention also has a circuit, the circuit is electrical connected with the circuit on the substrate, and
The circuit place of being connected thereto is and an at least fluid isolation.
Preferably, the flow channel layer of the present invention is integrated with the covering or the flow channel layer is integrated into one with the substrate
Body.
Preferably, the covering of the present invention also has a circuit, the circuit is electrical connected with the circuit on the flow channel layer,
And the circuit place of being connected thereto is and an at least fluid isolation.
Brief description of the drawings
Fig. 1 is the solid of the embodiment of the integrated structure of a kind of the electronic type biology sensor and microfluidic device of the present invention
Schematic diagram;And
Fig. 2 is the section of the embodiment of the integrated structure of a kind of the electronic type biology sensor and microfluidic device of the present invention
Figure.
Symbol description
110 substrates
111 first through hole
112 conductive pads
120 flow channel layers
121 runners
122 second through holes
130 coverings
131 first fluid entrances
132 first fluids export
133 hollow out windows
134 third through-holes
140 electronic type biology sensors
141 projections
142 biological sensing layers
150 support protection boards
151 second fluid entrances
152 second fluids export
Embodiment
It is that embodiments of the present invention are illustrated by particular specific embodiment below, people skilled in the art can be by this
Content disclosed in specification understands other advantages and effect of the present invention easily.The present invention can also pass through other different tools
Body example is implemented or applied, and every details in description of the invention may be based on different viewpoints and apply do not departing from this
Various modifications and change are carried out under the spirit of invention.
It should be clear that structure, ratio, size etc. that this specification institute accompanying drawings illustrate, only coordinating disclosed in specification
Content, so that people skilled in the art understands and reads, be not limited to the enforceable qualifications of the present invention, therefore not
Have technical essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size, do not influenceing institute of the present invention
Under the effect of producing and the purpose that can reach, it all should fall and obtain the scope that can cover in disclosed technology contents
It is interior.
Fig. 1 and Fig. 2 is respectively the reality of the integrated structure of a kind of the electronic type biology sensor and microfluidic device of the present invention
Apply the schematic diagram and profile of example.The integrated structure of electronic type biology sensor and microfluidic device is applied to an electronics
Formula biology sensor and a micro runner device, which are integrated, to be encapsulated.As shown in Fig. 1 figures and Fig. 2, electronic type biology sensor and microfluid
The integrated structure of device sequentially includes from lower to upper:One substrate 110, a flow channel layer 120, a covering 130 and an electronic type
Biology sensor 140.
As shown in Figures 1 and 2, substrate 110 can have multiple first through hole 111, and one can be filled in multiple first through hole 111
Conductive material, and a conductive pad 112 can be respectively arranged with the both ends of multiple first through hole, conductive pad 112 can be with multiple
The conductive material of filling is electrical connected in one through hole 111;Conductive pad 112 can also provide the electric connection to the external world.
Flow channel layer 120 is disposed on the top of substrate 110, and including providing an at least runner 121 for an at least flow of fluid
And multiple second through holes 122, wherein, a conductive material, multiple second through holes 122 can be filled in multiple second through holes 122
Conductive material can be electrical connected with the conductive pad 112 of substrate 110.
According to one embodiment of the invention, covering 130 may be disposed at the top of flow channel layer 120, and with least one first
Fluid intake 131 and at least first fluid outlet 132, for the stream into and out of an at least fluid, wherein, at least one first
Fluid intake 131 and at least first fluid outlet 132 are connected with an at least runner for flow channel layer, wherein, an at least fluid
Flowed into from an at least first fluid entrance 131, and flow through electronic type biology sensor 112 and biological sensing layer 113 thereon,
To be sensed, then export 132 from an at least first fluid and flow out.
According to another embodiment of the present invention, covering 130 may be disposed at the top of flow channel layer 120, and with least 1 the
One fluid intake 131 and at least first fluid outlet 132, for the stream into and out of an at least fluid, wherein, at least 1 the
One fluid intake 131 and at least first fluid outlet 132 are connected with an at least runner 121 for flow channel layer 120, and with one
Hollow out window 133, with least first-class body of exposure, and multiple third through-holes 134 are set, wherein, filled in multiple third through-holes 134
One conductive material, the conductive material of multiple third through-holes 134 and the conduction in multiple second through holes 122 of flow channel layer 120
Property material is electrical connected.
Electronic type biology sensor 140 can be combined in a manner of flip by projection 141 and is arranged on covering 130, projection
141 is implantable in the conductive material of multiple third through-holes 134 of covering 130, is electrical connected with reaching.Electronic type biology
Sensor 140 also has a biological sensed layer 142, when at least a fluid flows through hollow out window 133, the hollow out of covering 130
Window 133 contacts with biological sensing layer 142.Therefore, when an at least fluid flows into from an at least first fluid entrance 131, pass through
When at least a runner 121 flow to the hollow out window 133 of covering 130, the biological sensing layer with electronic type biology sensor 140
142 contacts, to be sensed, then export and flow out from an at least first fluid.
Furthermore also settable one circuit being made up of active and/or passive component of substrate 110;And substrate 110 can also be according to
Using the stack architecture for needing to be designed as multilager base plate composition, with accommodating more complicated circuit.Similarly, flow channel layer 120 is gone back
Can have a circuit, circuit can be electrical connected with the circuit on substrate 110, and the circuit place of being connected thereto be with an at least fluid every
Absolutely.Covering 130 also has a circuit, and circuit is electrical connected with the circuit on flow channel layer 120, and circuit be connected thereto place can
With an at least fluid isolation.
In other words, substrate 110, flow channel layer 120, covering 130 and electronic type biology sensor 140 can all be set respectively
One circuit;And substrate 110, flow channel layer 120, covering 130 and electronic type biology sensor 140 can pass through conduction respectively
Pad 112, first through hole 111, the second through hole 122, third through-hole 134 and projection 141 are electrically connected.
In the preferred embodiment, the integration of a kind of electronic type biology sensor and microfluidic device of the invention
Structure is also comprising a support protection board 150, and support protection board 150 is provided with a hollow out window, with holding electronic formula bio-sensing
Device 140, and with an at least second fluid entrance 151 or at least second fluid outlet 152;An at least second fluid entrance
151 or at least one second fluid outlet 152 respectively with an at least first fluid entrance 131 for covering 130 and at least one first
Fluid issuing 132 is oppositely arranged.
It is worth noting that, in other embodiments of the invention, substrate 110 is also provided with an at least second fluid and entered
Mouth and the outlet of an at least second fluid, so that an at least fluid flows into and flows out;In the case, then protection board 150 is supported not
An at least second fluid entrance 151 and at least second fluid outlet 152 need to be provided with.An or at least second fluid entrance
Support protection board 150 is may be disposed at, and the outlet of an at least second fluid may be disposed at substrate 110, vice versa.In other words, extremely
A few second fluid entrance may be disposed at substrate 110 or support protection board 150 with the outlet of an at least second fluid, for fluid
Outflow and inflow.In summary, an at least first fluid entrance and at least a second fluid entrance and at least a first fluid
Outlet with an at least second fluid outlet setting must be communicated with the runner 121 of flow channel layer 120, with provide the inflow of fluid and
Outflow;And its position set can change according to application.
In the preferred embodiment, flow channel layer 120 can be made up of a transparent material or opaque material, for example,
High polymer material, plastics, ceramics, metal, Silicon Wafer, glass or other composites.The surface of flow channel layer 120 can be modified to
Hydrophily or hydrophobic surface.Flow channel layer 120 may also comprise an at least a gang of Pu component, at least valve member, at least one mixed
Liquid component, other microfluid components or its any combination, to carry out the flowing and pretreatment of an at least fluid.Furthermore flow channel layer
120 are alternatively a multilayered structure, have the plural number of plies, its surface can be modified to hydrophily or hydrophobic surface.
In the preferred embodiment, covering 130 can be made up of a transparent material or opaque material, for example,
High polymer material, plastics, ceramics, metal, Silicon Wafer, glass or other composites.Furthermore flow channel layer 120 and covering
130 can integrate the structure of shaping, or flow channel layer 120 integrates with substrate 110.It is it is worth noting that, of the invention
Overall structure, in addition to runner, the junction of other components, for example, bearing part 110, biological sensing layer 113, flow channel layer
120 and a junction between covering 130 can all completely cut off fluid, avoid fluid seepage.
In the preferred embodiment, the combination of electronic type biology sensor and covering is with the side of normal temperature
Formula is carried out, and relative to the high temperature connection process that semiconductor subassembly or electric component of microcomputer are conventional, combination of the invention is avoided that
The biology and chemical characteristic of the biological sensing layer destroyed on electronic type biology sensor, can be repaiied in advance with providing biology sensor one
Adorn the integrated structure of biological sensing layer thereon.
In summary, embodiments of the invention disclose a kind of integration knot of electronic type biology sensor and microfluidic device
Structure, through with reference to electronic type biology sensor and microfluidic device, electronic type biology sensor can be detected caused by electronics interrogate
Number, and its overall structure, in addition to runner, the junction of other components can all completely cut off fluid, avoid seepage, not destroy biology
The biomolecule of sensed layer, electronic type biology sensor and microfluidic device suitable for integrating diversified forms.
However, above-described embodiment only the illustrative present invention the effect of, not for limitation the present invention, it is any to be familiar with this
The personage of item skill can be modified above-described embodiment and changed under the spirit and scope without prejudice to the present invention.In addition,
The quantity of component in those above-mentioned embodiments is only illustrative, is not intended for use in the limitation present invention.Therefore the present invention
Rights protection scope, should be as listed by claim.
Claims (10)
- A kind of 1. integrated structure of electronic type biology sensor and microfluidic device, it is characterised in that including:One substrate, there are multiple first through hole, wherein one conductive material of filling in the plurality of first through hole, and the plurality of the The both ends of one through hole are respectively arranged with a conductive pad, the conductive pad and the conductive material electricity of filling in the plurality of first through hole Property is connected;One flow channel layer, the surface is arranged at, and comprising an at least runner, for an at least flow of fluid, and multiple Two through holes, wherein one conductive material of filling in the plurality of second through hole, the conductive material of the plurality of second through hole is with being somebody's turn to do The conductive pad of substrate is electrical connected;One covering, it is arranged above the flow channel layer, there is an at least first fluid entrance and an at least first fluid to export, with For the stream into and out of an at least fluid, wherein at least first fluid entrance and at least first fluid outlet is with being somebody's turn to do At least a runner is connected for this of flow channel layer, and has a hollow out window, with an exposure at least fluid, and sets multiple three Through hole, wherein one conductive material of filling in the plurality of third through-hole, the conductive material and the stream of the plurality of third through-hole The conductive material in the plurality of second through hole of channel layer is electrical connected;AndOne electronic type biology sensor, combined and be arranged on the covering in a manner of flip by projection, wherein the electronic type Biology sensor has a biological sensed layer, when an at least fluid flows through the hollow out window, the hollow out window of the covering Contacted with the biological sensing layer, the projection is implanted in the conductive material of the plurality of third through-hole of the covering, with up to To being electrical connected,Wherein, an at least fluid flows into from an at least first fluid entrance, and by this, at least a runner flows through the electronic type The biological sensing layer of biology sensor, to be sensed, then export and flow out from an at least first fluid.
- 2. the integrated structure of electronic type biology sensor as claimed in claim 1 and microfluidic device, it is characterised in that also wrap Containing a support protection board, the support protection board is provided with a hollow out window, to house the electronic type biology sensor, and with extremely A few second fluid entrance and an at least second fluid outlet, an at least second fluid entrance and the outlet of an at least second fluid It is oppositely arranged with an at least first fluid entrance for the covering and at least first fluid outlet.
- 3. the integrated structure of electronic type biology sensor as claimed in claim 1 and microfluidic device, it is characterised in that also wrap Containing a support protection board, the support protection board is provided with a hollow out window, to house the electronic type biology sensor, the wherein base Plate is additionally provided with an at least second fluid entrance and the outlet of an at least second fluid, at least second fluid entrance and at least one Second fluid is exported and the both ends of an at least runner of the flow channel layer are oppositely arranged, at least inflow of a fluid and the stream Go out.
- 4. the integrated structure of electronic type biology sensor as claimed in claim 1 and microfluidic device, it is characterised in that the base Plate also sets up a circuit being made up of active and/or passive component.
- 5. the integrated structure of electronic type biology sensor as claimed in claim 1 and microfluidic device, it is characterised in that the base Plate is the stack architecture of multilager base plate.
- 6. the integrated structure of electronic type biology sensor as claimed in claim 1 and microfluidic device, it is characterised in that the stream Channel layer also includes at least a gang of Pu component, at least a valve member, at least one mixed liquid component, other microfluid components or its is any Combination, to carry out the flowing and pretreatment of an at least fluid.
- 7. the integrated structure of electronic type biology sensor as claimed in claim 1 and microfluidic device, it is characterised in that the stream Channel layer is a multilayered structure, has the plural number of plies.
- 8. the integrated structure of electronic type biology sensor as claimed in claim 1 and microfluidic device, it is characterised in that the stream Channel layer also has a circuit, and the circuit is electrical connected with the circuit on the substrate, and the circuit place of being connected thereto be with this extremely A few fluid isolation.
- 9. the integrated structure of electronic type biology sensor as claimed in claim 1 and microfluidic device, it is characterised in that the stream Channel layer integrates with the covering or the flow channel layer integrates with the substrate.
- 10. the integrated structure of electronic type biology sensor as claimed in claim 1 and microfluidic device, it is characterised in that should Covering also has a circuit, and the circuit is electrical connected with the circuit on the flow channel layer, and the circuit place of being connected thereto be with An at least fluid isolation.
Priority Applications (1)
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CN201610696881.4A CN107764875A (en) | 2016-08-19 | 2016-08-19 | The integrated structure of electronic type biology sensor and microfluidic device |
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CN201610696881.4A CN107764875A (en) | 2016-08-19 | 2016-08-19 | The integrated structure of electronic type biology sensor and microfluidic device |
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CN201610696881.4A Pending CN107764875A (en) | 2016-08-19 | 2016-08-19 | The integrated structure of electronic type biology sensor and microfluidic device |
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2016
- 2016-08-19 CN CN201610696881.4A patent/CN107764875A/en active Pending
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Application publication date: 20180306 |