CN206283095U - Grating angle adjusting device with hinge structure - Google Patents
Grating angle adjusting device with hinge structure Download PDFInfo
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- CN206283095U CN206283095U CN201621360398.0U CN201621360398U CN206283095U CN 206283095 U CN206283095 U CN 206283095U CN 201621360398 U CN201621360398 U CN 201621360398U CN 206283095 U CN206283095 U CN 206283095U
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- Prior art keywords
- regulation
- grating
- hinge
- pedestal
- chamber
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- 239000000919 ceramic Substances 0.000 claims abstract description 28
- 230000033228 biological regulation Effects 0.000 claims description 87
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 40
- 238000010276 construction Methods 0.000 claims description 11
- 210000004907 gland Anatomy 0.000 claims description 6
- 230000006835 compression Effects 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 4
- 239000003822 epoxy resin Substances 0.000 claims description 4
- 239000003292 glue Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 229920000647 polyepoxide Polymers 0.000 claims description 4
- 238000002834 transmittance Methods 0.000 claims description 3
- 238000009827 uniform distribution Methods 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 235000010210 aluminium Nutrition 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 abstract description 11
- 238000010586 diagram Methods 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000005489 elastic deformation Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
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- Lasers (AREA)
Abstract
The utility model provides a grating angle adjusting device with a hinge structure, which comprises an adjusting base and an adjusting cavity arranged in the adjusting base; the side wall of the adjusting device is provided with an inlet and an outlet; a grating and a plane reflector are fixedly arranged in the adjusting cavity; the grating receives the light beam entering the tuning cavity from the entrance, the plane mirror receives the first order diffracted light of the grating, and the reflected light beam of the plane mirror exits from the exit. Piezoelectric ceramics are arranged in the adjusting base; the adjusting cavity and the adjusting base are integrated, and a thin-wall hinge structure is arranged between the adjusting cavity and the adjusting base; under the driving action of the piezoelectric ceramics, the hinge structure generates deformation so that the adjusting cavity slightly deflects relative to the adjusting base. The utility model discloses can realize the output wavelength of outer cavity semiconductor laser or output frequency's continuous tuning to do not receive external environment interference in the control range, the light path is stable.
Description
Technical field
The utility model belongs to semiconductor laser field, is related to a kind of grating angle adjusting means.
Background technology
Conventional narrow linewidth laser is external cavity semiconductor laser at present, and it is that one is added outside laser diode
Individual optical dispersion element, such as grating, F-P cavity feedback a part of output light, constitute a laserresonator, to swashing
The transverse mode and longitudinal mode of light device can all play a part of to reselect.
Existing external cavity semiconductor laser is generally adopted by grating feedback external cavity semiconductor laser, and its is conventional
Two kinds of structures are Littrow structures and Littman structures.
In Littrow structures, the output light of laser diode is collimated by collimation lens, is incident upon on balzed grating,
Used as output beam, first-order diffraction light feeds back to laser diode to zero order diffracted light, forms light generation.Because the dispersion of grating is made
With, only have some wavelength to feed back to laser diode in first-order diffraction light, form laser generation.The light of other wavelength without
Method returns to laser diode, cannot also form laser oscillation and be suppressed.External cavity type semiconductor using this structure swashs
The instantaneous output linewidth of light device can narrow 1MHz or lower.By the feedback angle of grating, can adjust within the specific limits
The wavelength of humorous laser.The feedback angle of the grating of external cavity semiconductor laser can also use one in addition to manual coarse adjustment
Block piezoelectric ceramics is finely tuned so that the output wavelength of laser can carry out automatically controlled tuning within the specific limits.
The external cavity semiconductor laser of Littman structures is substantially similar with this, except that one in Littman structures
Direct feedback does not return laser diode to order diffraction light, but impinges perpendicularly on a face speculum, and Zai Yuan roads are reflected back glitters
There is diffraction in grating, reflected light, the new zero order diffracted light for producing feeds back to the pole of laser two again in the presence of balzed grating,
Pipe, forms vibration.Feedback light in Littman structures there occurs frequency-selecting twice, therefore its output linewidth ratio twice by grating
Littrow structures are also much narrower, and instantaneous output linewidth can typically accomplish 100KHz or lower.Also because its light path compared with
Littrow structures are long, and mechanical structure is more complicated, it is easier to influenceed by external mechanical oscillation, especially acoustic oscillations.Separately
Outward, more luminous powers are consumed during frequency-selecting.Therefore, using same laser diode, outside Littman structures
Cavate semiconductor laser power output is small compared with Littrow structures.
The performance of either Littman structures or Littrow structures, their adjusting wavelengths or frequency both depends on regulation
The performance of the mechanical structure at grating feedback angle.Good adjustment structure should be able to ensure the continuous micro- rotation in grating feedback angle, and
Completely cut off the vibration interference of external environment in adjustable range.
Littman structures and Littrow structures use fine thread adjusting means at present or spring regulating device comes
Regulation grating feedback angle.Fine thread adjusting means, exists and adjusts uneven, screw thread cooperation easily because ambient vibration comes in contact
The problems such as sliding, so as to cause frequency drift, cause laser mode hopping；Spring regulating device is limited because of structure, causes overall consolidating
There is frequency relatively low, easily formed with external disturbance and resonated, cause the irregular bounce of frequency, be highly detrimental to the same step of frequency
It is humorous.
Utility model content
To realize the output wavelength of external cavity semiconductor laser or the continuous tuning of output frequency, and ensure in regulation
In the range of by the vibration interference of external environment, light path stabilization is kept, the utility model proposes a kind of with hinge arrangement
Grating angle adjusting means.
The technical solution of the utility model is：
A kind of grating angle adjusting means with hinge arrangement, including regulation pedestal and the tune in regulation pedestal
Section chamber；An entrance and one outlet are provided with the side wall of the adjusting means, entrance and exit is connected；Its special character
It is：Grating and plane mirror are installed with the regulation chamber；The grating is used to receive to enter from the entrance to be adjusted
Save the light beam in chamber；The plane mirror is used to receive the first-order diffraction light of the grating；The reflected light of the plane mirror
Beam is from the outlet outgoing；Piezoelectric ceramics is installed, the pressure action direction of the piezoelectric ceramics is vertical in the regulation pedestal
In the plane mirror or optical grating reflection face；The regulation chamber and regulation pedestal are integrated part, regulation chamber and regulation pedestal it
Between be provided with hinge arrangement；The compression end in contact of the hinge arrangement and piezoelectric ceramics；The hinge arrangement includes being arranged on tune
The recessed hinge that five independence between section chamber and regulation pedestal does not connect, this five recessed hinges form hexagon, and adjacent two
A thin-wall construction is formed between individual recessed hinge, the thin-wall construction is hinge；There are one group of opposite side and institute in the hexagon
State piezo-ceramic pressure action direction vertical, a summit of hexagon as the regulation chamber pivot；In piezoelectricity pottery
Under porcelain driving effect, the hinge produces deformation to cause that regulation chamber relative adjustment pedestal rotates to an angle.
Above-mentioned thin-wall construction thickness is 0.5~2mm, and length is 5~20mm；The minimum range in thin-wall construction distance regulation chamber
0.2~2mm；0~15 μm of the stroke of the piezoelectric ceramics.
The first natural frequency in above-mentioned regulation chamber is 2000Hz~5000Hz.
Above-mentioned adjusting means also includes carrier and rack and rinion adjustment；The regulation pedestal outside is cylinder, and regulation pedestal sets
Put in the carrier；The rack and rinion adjustment include be arranged on carrier multiple radial direction lock-screws, 1 be adjusted circumferentially screw
With 1 Peripheric locking screw；The multiple radial direction lock-screw along regulation pedestal circumference uniform distribution, its axially with the regulation
The radial direction of pedestal overlaps, and wherein 1 axial direction of radial direction lock-screw is vertical with the piezo-ceramic pressure；The circumferential tune
Section screw and Peripheric locking screw are in 90 degree of arrangements, and its circumference axially with the regulation pedestal is tangent.
Above-mentioned adjusting means also includes being fixedly mounted on the gland of carrier upper end.
Sealed mirror is fixed with by trim ring at above-mentioned entrance and exit, is sealed using epoxide-resin glue at sealed mirror；Institute
State the two-sided of sealed mirror and be coated with high transmittance film.
The control circuit of above-mentioned piezoelectric ceramics is drawn by insulated enclosure pad from the regulation chamber；The insulated enclosure pad
Sealed using epoxide-resin glue and regulation chamber between.
Above-mentioned regulation chamber, regulation pedestal are identical with the material of hinge arrangement three.
The material in above-mentioned regulation chamber is 7075 alloy aluminums.
Above-mentioned adjusting screw can be substituted by closely-pitched handwheel.
The beneficial effects of the utility model are：
1st, hinge is provided between the regulation chamber of grating angle adjusting means of the present utility model and regulation pedestal, using pressure
Electroceramics is encouraged so that regulation chamber produces continuously and stably micro- deflection relative to regulation pedestal, realizes that laser adjusts endovenous laser
The frequency of beam or the continuous tuning of wavelength；Due to deflection when regulation chamber only occur rigid body displacement (i.e. adjust chamber as an entirety
Deflection, regulation chamber does not produce elastic deformation), it is ensured that grating and the relative position of level crossing reflection, it is ensured that the stabilization of light path
Property.
2nd, regulation chamber of the present utility model and regulation pedestal are integrated part, and 5 are machined between regulation chamber and regulation pedestal
The recessed hinge that bar does not connect independently, forms a bit of thin-wall construction (thin-walled is equivalent to hinge) between two neighboring recessed hinge,
In the presence of piezoelectric ceramics, there is elastic deformation in arrowband shortwall structure so that regulation chamber is overall micro- relative to regulation pedestal inclined
Turn (thin-wall construction is thinner, and the power needed for the regulation micro- deflection in chamber is just smaller)；Due to straight between the regulation chamber of micro- deflection and regulation pedestal
Connect connected, there is no friction force, therefore dynamic response is rapid during the regulation of grating angle adjusting means, with good Stability Analysis of Structures
Property.The hinge arrangement of this particular design of the utility model, the amplitude that ensure that the direction of regulation and adjust (can be by control
The length and thickness of arrowband thin-walled are come the amplitude that controls to adjust), while also taking into account the Stability Analysis of Structures of grating angle adjusting means.
3rd, the thickness of each hinge of the utility model is 0.5~2mm, and length is 5~20mm so that the single order in regulation chamber is consolidated
Having frequency highest can reach 2000Hz~5000Hz, it is ensured that the pressure input of piezoelectric ceramics is normal with regulation chamber deflection angle
Number stability, further avoid the parameter drift that environmental perturbation causes.
4th, the utility model is by being controlled the frequency or wavelength of realizing that laser adjusts endovenous laser beam to piezoelectric ceramics
Continuous tuning, operate simple and convenient, functional independence, and piezoelectric ceramics is easy to be embedded into.
Brief description of the drawings
Fig. 1 is implementation occasion schematic diagram of the present utility model.
Fig. 2 is shown as the top view that the utility model vital part adjusts chamber；
Fig. 3 is cut-away view schematic diagram of the present utility model；
Fig. 4 is exploded view of the present utility model；
Fig. 5 is the plan of gland of the present utility model；
Fig. 6 is section axonometric drawing of the present utility model；
Specific embodiment
Fig. 1 shows implementation occasion of the present utility model.Laser beam is got to grating surface by semiconductor laser,
The first-order diffraction light of grating is reflexed in laser through plane mirror.The frequency of diffraction light has with the distance of grating to laser
Close.Simultaneous tuning method refers to just to adjust laser device laser beam frequency and grating angle simultaneously so that the frequency of optical grating diffraction light
It is identical with laser beam frequency, produce resonance.
Shown in Fig. 2, regulation chamber 1 of the present utility model and regulation pedestal 3 are integrated part, by five hinges of linear cutter
Groove, this five recessed hinges independently do not connect and are formed and have one section to overlap to form one between hexagon, and two neighboring recessed hinge
Thin-wall construction, the thin-wall construction is hinge, as shown in Figure 2 hinge 4, hinge 5, hinge 6 and hinge 7, wherein, hinge 4 by
Recessed hinge 8 and the adjacent formation of recessed hinge 9, hinge 5 is by recessed hinge 9 and recessed hinge 10 is adjacent is formed, and hinge 6 is by recessed hinge 10 and hinge
The adjacent formation of key way 11, hinge 7 is by recessed hinge 11 and recessed hinge 12 is adjacent is formed；Hinge 4 starts from the end points m of recessed hinge 9, finally
The end points n of recessed hinge 8, other hinges are similarly；During work, regulation chamber 1 carries out the micro- deflection of rigid body around pivot 2.
As shown in figure 3, regulation chamber and regulation pedestal generally hollow cylindrical structure, on carrier 13, on carrier 13
4 uniform radial direction closely-pitched lock-screws 21 are provided with, mutually in 90 degree 1 of arrangement circumferential closely-pitched lock-screw 19 and 1
Circumferential closely-pitched adjusting screw 20；4 axis of radial direction closely-pitched lock-screw 21 overlap with the radial direction of regulation pedestal 3；Circumferential closely-pitched
Circumference of the axis of lock-screw 19 and circumferential closely-pitched adjusting screw 20 with regulation pedestal 3 is tangent.
Adjusting means entrance and adjusting means exit using (two-sided to be the coated with high transmittance film) sealing of sealed mirror 15, are used in combination
Trim ring 14 is compressed, and the surrounding of sealed mirror 15 smears epoxy sealing.
Plane mirror 16 and grating 17 are arranged in regulation chamber 1, and piezoelectric ceramics 18 is arranged in regulation pedestal (in pedestal
Be reserved with the embedded space of piezoelectric ceramics), one end of piezoelectric ceramics 18 is in contact with hinge, the other end and regulation base internal wall phase
Contact.The control line of piezoelectric ceramics 18 is drawn by insulated enclosure pad 22 from extraction channel a, and extraction channel a surroundings are used
Aerospace epoxy is sealed.
D is the outgoing beam (entering the light beam in regulation chamber) of laser in Fig. 3, and c is the first-order diffraction light beam of grating, and b is
Outgoing beam after being reflected through level crossing.
Fig. 4 show exploded view of the present utility model, and gland 23 is arranged on carrier 13 to the regulation He of chamber 1 by screw 24
Regulation pedestal 3 carries out axial compression.
Fig. 5 show the schematic diagram of the utility model gland, there is three boss of circumference uniform distribution on the lower surface of gland, leads to
Cross it carries out contact compression to regulation pedestal.
When in use, can first pass through rack and rinion adjustment is carried out slightly grating angle adjusting means provided by the utility model
Adjust, accurate adjustment is carried out by piezoelectric ceramics again after coarse adjustment is complete, to improve regulation efficiency.Specially：
(1) coarse adjustment：
By the position in circumferential closely-pitched adjusting screw regulation chamber, the frequency of laser beam is adjusted in synchronism, it is suitable to be adjusted to
Frequency after, will adjust that chamber is locked using 1 Peripheric locking screw and 4 radial direction lock-screws, coarse tuning stage is completed.
(2) accurate adjustment：
Synchronization Control laser beam frequency and piezoelectric ceramics voltage, slow regulation, until the frequency and laser beam of diffraction light
Frequency tuning success.
Claims (10)
1. a kind of grating angle adjusting means with hinge arrangement, including regulation pedestal and the regulation in regulation pedestal
Chamber；An entrance and one outlet are provided with the side wall of the adjusting means, entrance and exit is connected；It is characterized in that：
Grating and plane mirror are installed with the regulation chamber；The grating is used for reception and enters regulation from the entrance
The light beam in chamber；The plane mirror is used to receive the first-order diffraction light of the grating；The reflected beams of the plane mirror
From the outlet outgoing；
Piezoelectric ceramics is installed, the pressure action direction of the piezoelectric ceramics is perpendicular to the plane reflection in the regulation pedestal
Mirror or optical grating reflection face；
The regulation chamber and regulation pedestal are integrated part, and hinge arrangement is provided between regulation chamber and regulation pedestal；The hinge
The compression end in contact of structure and piezoelectric ceramics；
The hinge arrangement includes the recessed hinge that five independence being arranged between regulation chamber and regulation pedestal does not connect, this five
Recessed hinge forms and a thin-wall construction is formed between hexagon, and two neighboring recessed hinge, and the thin-wall construction is hinge；
There is one group of opposite side vertical with the piezo-ceramic pressure action direction in the hexagon, a summit of hexagon is used as described
Adjust the pivot in chamber；
Under Piezoelectric Ceramic effect, the hinge produces deformation to cause that regulation chamber relative adjustment pedestal rotates to an angle.
2. the grating angle adjusting means with hinge arrangement according to claim 1, it is characterised in that：The thin-walled knot
Structure thickness is 0.5~2mm, and length is 5~20mm；0.2~the 2mm of minimum range in thin-wall construction distance regulation chamber；The piezoelectricity
0~15 μm of the stroke of ceramics.
3. the grating angle adjusting means with hinge arrangement according to claim 1, it is characterised in that：The regulation chamber
First natural frequency be 2000Hz~5000Hz.
4. the grating angle adjusting means with hinge arrangement according to claim 1,2 or 3, it is characterised in that：
Also include carrier and rack and rinion adjustment；
The regulation pedestal outside is cylinder, and regulation pedestal is arranged in the carrier；
The rack and rinion adjustment include the multiple radial direction lock-screws being arranged on carrier, 1 be adjusted circumferentially the circumferential lock of screw and 1
Tight screw；
The multiple radial direction lock-screw along regulation pedestal circumference uniform distribution, its axially with the radial direction weight of the regulation pedestal
Close, and wherein 1 axial direction of radial direction lock-screw is vertical with the piezo-ceramic pressure；
Screw and the Peripheric locking screw of being adjusted circumferentially in 90 degree arrangements, and its axially with the circumference for adjusting pedestal
It is tangent.
5. the grating angle adjusting means with hinge arrangement according to claim 4, it is characterised in that：Also include fixing
Installed in the gland of carrier upper end.
6. the grating angle adjusting means with hinge arrangement according to claim 1,2 or 3, it is characterised in that：
Sealed mirror is fixed with by trim ring at the entrance and exit, is sealed using epoxide-resin glue at sealed mirror；It is described close
That finishes filming two-sided is coated with high transmittance film.
7. the grating angle adjusting means with hinge arrangement according to claim 1,2 or 3, it is characterised in that：It is described
The control circuit of piezoelectric ceramics is drawn by insulated enclosure pad from the regulation chamber；Between the insulated enclosure pad and regulation chamber
Sealed using epoxide-resin glue.
8. the grating angle adjusting means with hinge arrangement according to claim 1, it is characterised in that：The regulation
Chamber, regulation pedestal are identical with the material of hinge arrangement three.
9. the grating angle adjusting means with hinge arrangement according to claim 8, it is characterised in that：The regulation chamber
Material be 7075 alloy aluminums.
10. the grating angle adjusting means with hinge arrangement according to claim 4, it is characterised in that：The regulation
Screw can be substituted by closely-pitched handwheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621360398.0U CN206283095U (en) | 2016-12-12 | 2016-12-12 | Grating angle adjusting device with hinge structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621360398.0U CN206283095U (en) | 2016-12-12 | 2016-12-12 | Grating angle adjusting device with hinge structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206283095U true CN206283095U (en) | 2017-06-27 |
Family
ID=59076089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621360398.0U Expired - Fee Related CN206283095U (en) | 2016-12-12 | 2016-12-12 | Grating angle adjusting device with hinge structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206283095U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110666343A (en) * | 2019-10-31 | 2020-01-10 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Laser turning device, laser processing light path system and light path debugging method |
| CN113161852A (en) * | 2021-04-07 | 2021-07-23 | 北京大学 | Tunable external cavity semiconductor laser and adjusting method |
-
2016
- 2016-12-12 CN CN201621360398.0U patent/CN206283095U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110666343A (en) * | 2019-10-31 | 2020-01-10 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Laser turning device, laser processing light path system and light path debugging method |
| CN110666343B (en) * | 2019-10-31 | 2021-06-25 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Laser turning device, laser processing light path system and light path debugging method |
| CN113161852A (en) * | 2021-04-07 | 2021-07-23 | 北京大学 | Tunable external cavity semiconductor laser and adjusting method |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170627 |