CN110666343A - Laser turning device, laser processing light path system and light path debugging method - Google Patents
Laser turning device, laser processing light path system and light path debugging method Download PDFInfo
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- CN110666343A CN110666343A CN201911057301.7A CN201911057301A CN110666343A CN 110666343 A CN110666343 A CN 110666343A CN 201911057301 A CN201911057301 A CN 201911057301A CN 110666343 A CN110666343 A CN 110666343A
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- laser
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- turning
- light path
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
Abstract
The application discloses a laser turning device, a laser processing light path system and a light path debugging method, and relates to the technical field of laser processing. The laser processing light path system comprises a processing base, a laser beam expanding and collimating device, a laser turning device, a laser focusing device and a coaxial adjusting device. The laser beam expanding and collimating device and the laser turning device are arranged at intervals along the X-axis direction, and the laser beam expanding and collimating device is used for emitting laser and collimating and expanding the laser; the laser focusing device is connected with the processing base and used for focusing the laser emitted from the light path outlet into a micro light spot for processing; the coaxial adjusting device is connected to the laser turning device along the Z-axis direction and used for recognizing the alignment processing mark and assisting in adjusting the laser light path. The laser processing light path system can quickly and conveniently realize beam expansion, turning adjustment and focusing of laser beams, the light path debugging method is simple, the debugging precision is high, and the laser processing device provides guarantee for industrial production of laser processing equipment.
Description
Technical Field
The application relates to the technical field of laser processing, in particular to a laser turning device, a laser processing light path system and a light path debugging method.
Background
With the development of laser processing technology and the expansion of application fields, the consistency and stability of laser processing equipment have higher requirements. The laser optical path system is a core functional component of the equipment, and needs to comprehensively consider structural design and a debugging method to obtain focusing light spots with uniform energy and shape distribution so as to realize excellent processing quality.
The existing multidimensional angle optical adjusting seat is generally applied to a laboratory and is convenient to adjust. But the moving mechanism of the adjusting seat is easy to change and has poor stability when being applied to industrial production equipment and influenced by factors such as environmental temperature, motor vibration and the like. In addition, limited by the space structure of the equipment, the installation mode of the standard outsourced optical adjusting seat is not flexible, and the equipment integration is not facilitated.
Disclosure of Invention
The application provides a laser turning device, a laser processing light path system and a light path debugging method, which can quickly and conveniently realize beam expansion, turning adjustment and focusing of laser beams, have simple light path debugging method and high debugging precision, and provide guarantee for the industrial production of laser processing equipment.
In a first aspect, a laser bending device is provided, which comprises a lens base substrate, a bending lens and a bending adjusting structure; a cavity for laser to pass through is formed on the lens base substrate, a light path inlet and a light path outlet which are respectively communicated with the cavity are formed on the outer wall of the lens base substrate, the light path inlet is arranged along the X-axis direction, and the light path outlet is arranged along the Z-axis direction; the turning lens is arranged in the cavity along the X-axis direction; the turning adjusting structure is connected with the mirror base body, the turning adjusting structure is connected with the turning lens, and the turning adjusting structure is used for adjusting the position of the turning lens.
Above-mentioned technical scheme can adjust the position of turn lens through turn regulation structure, and the debugging is convenient to can guarantee the stability of turn lens, thereby realized laser beam's turn regulation conveniently.
With reference to the first aspect, in a first possible implementation manner of the first aspect of the present application, an adjustment port is further formed on an outer wall of the base body of the lens holder; the turning adjusting structure comprises a fixed disc, a rotating disc, a lens frame, a connecting rod, an adjusting screw, a top tightening screw and a fixing screw; the fixed disc is connected to the adjusting port through a fixing screw and is provided with a through hole communicated with the chamber; the rotating disc is connected with the connecting rod, the rotating disc covers the through opening, and the turning lens is connected with the rotating disc through the lens frame; the lens frame is arranged in the cavity, so that the turning lens is arranged along the X-axis direction; the connecting rod passes through adjusting screw along X axle direction swing joint in the fixed disk, and the rotary disk passes through tight top screw along Y axle direction swing joint in fixed disk.
According to the technical scheme, the adjusting screw is used for adjusting the connecting rod to move relative to the fixed disc in the X-axis direction so as to drive the turning lens to perform position adjustment in the X-axis direction, the jacking screw is used for adjusting the rotating disc to move relative to the fixed disc in the Y-axis direction so as to drive the turning lens to perform position adjustment in the Y-axis direction, and therefore two-dimensional angle adjustment of the position of the turning lens is achieved; compared with the defects of large occupied space and poor stability of a multi-dimensional adjustable seat in the prior art, the laser turning device has the advantages of compact integral structure, convenience in debugging and good stability, and can conveniently carry out turning adjustment on laser beams.
With reference to the first aspect, in a second possible implementation manner of the first aspect of the present application, the laser turning device includes a first debugging tool, where the first debugging tool includes an installation frame, a cross diaphragm, and a frequency doubling plate; the cross diaphragm and the frequency doubling piece are connected to the mounting frame at intervals, and the mounting frame is connected to the light path inlet, so that laser sequentially passes through the cross diaphragm and the frequency doubling piece along the X-axis direction and then enters the cavity from the light path inlet.
According to the technical scheme, the first debugging tool is arranged at the light path inlet of the laser turning device, laser is expanded through the cross diaphragm, invisible laser is converted into visible light visible to human eyes through the frequency doubling sheet, and the visual field observation and adjustment of follow-up light path debugging are facilitated.
In a second aspect, a laser processing optical path system is provided, where the laser processing optical path system includes the laser turning device in the first aspect or any one of the possible implementation manners of the first aspect, and the laser processing optical path system further includes a processing base, a laser beam expanding and collimating device, a laser focusing device, and a coaxial adjusting device; the lens base body is connected to the processing base through the adapter plate; the laser beam expanding and collimating device is connected to the processing base, the laser beam expanding and collimating device and the laser turning device are arranged at intervals along the X-axis direction, and the laser beam expanding and collimating device is used for emitting laser and collimating and expanding the laser; the laser focusing device is connected with the processing base and used for focusing the laser emitted from the light path outlet into a micro light spot for processing; the coaxial adjusting device is connected to the laser turning device along the Z-axis direction, communicated with the cavity and used for recognizing the alignment processing mark and assisting in adjusting the laser light path.
According to the technical scheme, the laser beam expanding and collimating device emits laser and collimates and expands the laser beam, the laser turning device performs turning adjustment on the laser, and the laser is enabled to be vertically and normally incident into the laser focusing device, so that the laser is focused into a micro light spot for processing. And the coaxial adjusting device is used for precisely focusing to realize the focus alignment of the laser and the coaxial image observation focus. The laser processing light path system can realize beam expanding collimation, turning and focusing of laser beams, is high in debugging precision aiming at invisible wavelength laser, and provides reliable guarantee for industrial production of laser processing equipment.
With reference to the second aspect, in a first possible implementation manner of the second aspect of the present application, the laser beam expanding and collimating device includes a laser, a beam expander, and a first debugging tool; the first debugging tool comprises an installation frame, a cross diaphragm and a frequency doubling piece, wherein the cross diaphragm and the frequency doubling piece are connected to the installation frame at intervals; the laser is connected with the processing base, the beam expanding lens is connected with the outlet of the laser, and the mounting frame is connected with the beam expanding lens; the laser, the beam expander, the first debugging tool and the laser turning device are sequentially arranged along the X-axis direction.
According to the technical scheme, the laser, the beam expander, the first debugging tool and the laser turning device are sequentially arranged along the X-axis direction, and the laser beam expanding and collimating device realizes the collimation and the expansion of laser through the beam expander.
With reference to the second aspect, in a second possible implementation manner of the second aspect of the present application, the laser focusing device includes a focusing seat, a piezoelectric ceramic motor, a servo motor, and a second debugging tool; the processing base is connected with a vertical plate, the vertical plate is connected with a sliding plate in a sliding manner, and the sliding plate is driven by the servo motor to slide relative to the vertical plate along the Z-axis direction; the focusing seat is connected with the sliding plate, and the piezoelectric ceramic motor is connected with the focusing seat; the second debugging frock is used for carrying out the debugging of vertical direction to laser, and the second debugging frock includes long section of thick bamboo and two cross diaphragms, and two cross diaphragms are coaxial arrangement respectively in the both ends of long section of thick bamboo, and long section of thick bamboo is connected in piezoceramics motor, and long section of thick bamboo communicates in the light path export.
According to the technical scheme, the laser focusing device can perform rough adjustment and fine adjustment on laser focusing, wherein the servo motor drives the sliding plate to slide along the Z-axis direction relative to the vertical plate to realize rough adjustment; the focusing mirror is driven by the piezoelectric ceramic motor to slide along the Z-axis direction relative to the sliding plate to realize fine adjustment. Before the precision focusing of laser focusing is carried out, a second debugging tool is installed firstly, and the verticality of the focused laser is adjusted through two crossed diaphragms.
With reference to the second aspect, in a third possible implementation manner of the second aspect of the present application, the laser focusing apparatus includes a focusing base, a piezoelectric ceramic motor, a servo motor, and a focusing mirror; the processing base is connected with a vertical plate, the vertical plate is connected with a sliding plate in a sliding manner, and the sliding plate is driven by the servo motor to slide relative to the vertical plate along the Z-axis direction; the focusing seat is connected with the sliding plate, and the piezoelectric ceramic motor is connected with the focusing seat; the focusing mirror is connected with the piezoelectric ceramic motor and communicated with the light path outlet.
According to the technical scheme, the focusing lens is used for finally focusing on the working table surface to form a micro light spot for processing, the large-range coarse focusing and the small-range fine focusing are combined, and the coaxial adjusting device coaxial with the focusing lens realizes the alignment of the focus with a laser processing light path through the image plane compensation mechanism.
With reference to the second aspect, in a fourth possible implementation manner of the second aspect of the present application, the coaxial adjusting device includes a lens mount, a tube lens, an adjusting ring, a fixing ring, a connecting sleeve, and a CCD; the lens base body is provided with a connecting hole relative to the light path outlet along the Z-axis direction, the connecting hole is communicated with the cavity, and the lens base is connected with the connecting hole; the tube lens is coaxially arranged in the lens seat, the adjusting ring is in threaded connection with the lens seat, the connecting sleeve is sleeved on the outer wall of the lens seat and abuts against the adjusting ring, and the CCD is connected to one end of the connecting sleeve; the other end of adapter sleeve is located to the retainer plate cover and with adapter sleeve interference fit, retainer plate accessible screw fixation in lens mount.
According to the technical scheme, the distance between the tube mirror and the CCD target surface is the image distance, the adjusting ring is screwed clockwise, and the adjusting ring can jack the connecting sleeve up, so that the image distance is increased; otherwise, the adjusting ring is screwed anticlockwise, the connecting sleeve can descend due to gravity, the image distance is further reduced, and therefore precise focusing of the coaxial lens is achieved, and clear imaging is obtained. After the proper image distance is obtained, the connecting sleeve and the lens mount are connected and fixed through the deformation generated by the fastening of the screw due to the interference fit of the fixing ring and the connecting sleeve.
With reference to the fourth possible implementation manner of the second aspect, in a fifth possible implementation manner of the second aspect of the present application, a matching surface between the fixed ring and the connection sleeve is a conical surface.
According to the technical scheme, the press fit distance is short during the interference fit of the conical surface, the assembly and disassembly are convenient, and the joint surface is not prone to being scratched during the assembly and disassembly.
In a third aspect, a method for debugging an optical path of a laser processing optical path system is provided, where the laser processing optical path system is the laser processing optical path system in the second aspect or any one of the possible implementation manners of the second aspect, and the method for debugging an optical path includes the following steps:
the beam expander is provided with a first debugging tool, so that laser emitted by the laser beam expanding and collimating device is uniformly divided into a plurality of parts to enter the laser turning device after passing through the first debugging tool along the X-axis direction, the first debugging tool comprises an installation frame, a cross diaphragm and a frequency doubling piece, and the cross diaphragm and the frequency doubling piece are connected to the installation frame at intervals;
observing an image through a coaxial adjusting device, and simultaneously adjusting the position of the lens base matrix in the X-axis direction and the position of the lens base matrix in the Y-axis direction, so that the brightness in an observation field is uniform;
installing a second debugging tool, wherein the second debugging tool comprises a long cylinder and two crossed diaphragms, and the two crossed diaphragms are respectively and coaxially installed at two ends of the long cylinder;
the position of the turning lens is adjusted through the turning adjusting structure, so that the laser vertically enters a second debugging tool;
disassembling the second debugging tool, and then installing a focusing mirror;
and determining a laser processing focus, and aligning the processing focus and the image observation focus by adjusting the coaxial adjusting device.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
FIG. 1 is a schematic diagram of a laser bending apparatus according to an alternative embodiment of the present application;
fig. 2 is a schematic structural diagram of a first debugging tool in an alternative embodiment of the present application;
FIG. 3 is a schematic diagram of a laser processing optical path system at a first viewing angle according to an alternative embodiment of the present application;
FIG. 4 is a schematic diagram of a laser processing optical path system at a second viewing angle according to an alternative embodiment of the present application;
FIG. 5 is a schematic view of a coaxial adjustment device according to an alternative embodiment of the present application;
fig. 6 is a schematic structural diagram of a second debugging tool in an alternative embodiment of the present application;
fig. 7 is a schematic view of a hinge lens mounting structure according to an alternative embodiment of the present application.
Icon: l1-laser beam expanding and collimating device; l2-laser turning device; l3-laser focusing device; l4-coaxial adjusting device; t1-first debugging tooling; 1-processing a base; 2-adjusting the washer; 3-a laser; 4-a beam expander; 5-a patch panel; 6-standing the plate; 7-a sliding plate; 8-a focus mount; 9-piezoelectric ceramic motor; 10-a focusing mirror; 11-a lens mount; 12-a tube mirror; 13-an adjusting ring; 14-a stationary ring; 15-connecting sleeves; 16-CCD; 17-a base of the lens holder; 18-fixing the disc; 19-a set screw; 20-rotating the disc; 202-a lens frame; 204-turning lens; 21-a set screw; 22-a connecting rod; 23-adjusting screws; 24-a cross diaphragm; 25-frequency doubling chips; 26-a cross diaphragm; 27-long cylinder; 28-saddle seat.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present application, it is to be noted that the terms "inside", "below", and the like refer to orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships that are conventionally arranged when products of the application are used, and are used only for convenience in describing the application and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the application. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
In the description of the present application, it is also to be noted that, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be interpreted broadly, e.g., as being either fixedly connected, detachably connected, or integrally connected; they may be mechanically coupled, directly coupled, indirectly coupled through intervening media, or may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
In this application, unless expressly stated or limited otherwise, the first feature may be directly on or under the second feature or may include both the first and second features being in direct contact, but also the first and second features being in contact via another feature between them, not being in direct contact. Also, the first feature being above, on or above the second feature includes the first feature being directly above and obliquely above the second feature, or merely means that the first feature is at a higher level than the second feature. A first feature that underlies, and underlies a second feature includes a first feature that is directly under and obliquely under a second feature, or simply means that the first feature is at a lesser level than the second feature.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
Turning and debugging of a laser light path are needed in laser processing. For the turning adjustment of the laser, an optical adjusting seat is generally adopted, which is generally applied in a laboratory environment, and for industrial production equipment, the external environment is complicated and changeable, the moving mechanism of the optical adjusting seat is easily influenced, and the installation of the optical adjusting seat is limited by the space of the equipment structure, so that the optical adjusting seat is not suitable for laser processing production.
An alternative embodiment of the present application provides a laser bending apparatus L2, and the laser bending apparatus L2 is applied to a laser processing optical path system. Compared with the defects of large occupied space and poor stability of a multi-dimensional adjustable seat in the prior art, the laser turning device L2 adjusts the connecting rod 22 to move relative to the fixed disk 18 in the X-axis direction through the adjusting screw 23, so as to drive the turning lens to perform position adjustment in the X-axis direction, adjusts the rotating disk 20 to move relative to the fixed disk 18 in the Y-axis direction through the top tightening screw 21, so as to drive the turning lens to perform position adjustment in the Y-axis direction, thereby realizing two-dimensional angle adjustment of the position of the turning lens, and being simple and convenient in debugging mode. The laser turning device L2 only comprises the lens base body 17, the first debugging tool T1, the turning lens and the turning adjusting structure, has compact integral structure and good stability, and can conveniently and rapidly turn and adjust the laser beam.
Referring to fig. 1-2, fig. 1 shows a specific structure of a laser turning device L2 provided in an alternative embodiment of the present application, and fig. 2 shows a specific structure of a first commissioning tooling T1 provided in an alternative embodiment of the present application.
To facilitate description of the path process and the laser turning process of the laser optical path, firstly, a spatial coordinate system XYZ is defined, please refer to fig. 3 and fig. 4 simultaneously, fig. 3 shows a specific structure of the laser processing optical path system provided in an alternative embodiment of the present application at a first viewing angle, and fig. 4 shows a specific structure of the laser processing optical path system provided in an alternative embodiment of the present application at a second viewing angle. The laser beam deflecting device L2 is applied to a laser beam processing optical path system, and fig. 4 shows the X-axis direction and the Z-axis direction of the spatial coordinate system XYZ, and the Y-axis of the spatial coordinate system XYZ is perpendicular to the paper surface (not shown).
The laser bending device L2 includes a lens base substrate 17, a bending lens, a first debugging tool TI, and a bending adjusting structure.
As shown in fig. 1, the base 17 is a metal block in a rectangular parallelepiped shape, and a cavity through which laser light passes is formed in the base. The rear side wall (i.e. the X-axis direction) of the lens base 17 is provided with a light path inlet (not shown in the figure) communicated with the cavity, and the light path inlet is used for laser to enter the cavity. An optical path outlet (not shown) communicating with the cavity is formed in an upper side wall (i.e., in the Z-axis direction) of the lens holder base 17, the optical path outlet is used for connecting a laser focusing device L3 (shown in fig. 4) in a laser processing optical path system, so that laser is emitted from the optical path outlet and enters the laser focusing device L3, a connecting hole (not shown) communicating with the cavity is formed in a lower side wall (i.e., in the Z-axis direction) of the lens holder base 17, the connecting hole is used for connecting a coaxial adjusting device L4 (shown in fig. 4) in the laser processing optical path system, and the connecting hole and the optical path outlet are coaxially arranged. The right side wall (i.e. Y-axis direction) of the lens base body 17 is provided with an adjusting port (not shown) communicated with the cavity, and the adjusting port is used for connecting the turning adjusting structure.
Referring to fig. 1 and 7 together, fig. 7 shows a specific structure for mounting the turning lens 204 according to an alternative embodiment of the present application. The turning adjusting structure comprises a fixed plate 18, a rotating plate 20, a lens frame 202, a connecting rod 22, an adjusting screw 23, a set screw 21 and a fixing screw 19. Since the surface of the rotating disc 20 extends along the X-axis, the lens frame 202 should be vertically connected to the rotating disc 20, and the turning lens 204 is disposed on the lens frame 202, the turning lens 204 can be a beam splitter lens or a reflector lens, so that the turning lens 204 is located in the X-axis direction for realizing the turning effect after the laser is incident.
Referring to fig. 1, 3 and 4 together, the base 17 of the lens holder in fig. 1 is rotated 180 ° and then disposed in fig. 3 and 4, resulting in the rotary disk 20 being disposed in the Y-axis direction in fig. 4 (i.e., facing outward from the plane of the paper), such that the light path exit on the upper side wall in fig. 1 is located below in fig. 3 and 4 (i.e., the lower side in the Z-axis direction in fig. 4), and the connection hole on the lower side wall in fig. 1 is located above in fig. 3 and 4 (i.e., the upper side in the Z-axis direction in fig. 4). After being emitted from the laser beam expanding and collimating device L1 (see fig. 4) along the X-axis direction, the laser enters the chamber through the light path inlet (the rear sidewall of the lens holder base 17 along the X-axis direction in fig. 1), and is incident on the turning mirror 204 vertically disposed opposite to the rotating disk 20 to be refracted by 90 °, so that the light path of the laser is converted into the Z-axis direction by the X-axis direction, and is emitted from the light path outlet (i.e., the upper sidewall of the lens holder base 17 in fig. 1, and the downward direction of the Z-axis direction in fig. 3 and 4), thereby completing the turning of the laser.
With continued reference to fig. 1 and 7, the upper end of the fixed plate 18 is formed with a saddle 28, the saddle 28 is clamped against the upper side wall of the adjustment port and is fixed to the mirror base 17 by screws, the link 22 is disposed between 2 protruding blocks of the saddle, and the adjustment screw 23 is pushed onto the link 22 through two protruding blocks on the saddle 28. The lens frame 202 is connected to the left end face of the rotating disc 20 along the Y-axis direction through a pin, the right end face of the rotating disc 20 along the Y-axis direction is connected to the connecting rod 22 through a screw, the rotating disc 20 covers the through opening to enable the lens frame 202 to be located in the cavity, the turning lens 204 is arranged along the X-axis direction, and the rotating disc 20 is connected to the fixed disc 18 through a set screw 21.
When the position of the turning lens 204 needs to be finely adjusted, the fixing screw 19 is firstly loosened, and the rotating disk 20 can move relative to the fixing disk 18 in the Y-axis direction by adjusting the set screw 21, so that the turning lens 204 is driven to move, and the turning lens 204 swings in the Y-axis direction; the two adjusting screws 23 can be screwed to adjust along the X-axis direction, so as to push the connecting rod 22 to swing, drive the rotating disc 20 to move in the X-axis direction, and further drive the turning lens 204 to realize the swing adjustment of the turning lens 204 in the X-axis direction, thereby realizing the two-dimensional angle adjustment of the position of the turning lens 204. After the adjustment of the turning lens is completed, the fixing screw 19 is locked to ensure the stability of the turning lens 204. Compared with the defects of large occupied space and poor stability of a multi-dimensional adjustable seat in the prior art, the laser turning device L2 has the advantages of compact integral structure, convenience and quickness in debugging and good stability, and can conveniently carry out turning adjustment on laser beams.
With reference to fig. 2, the first debugging tool T1 includes a mounting frame (not shown), a cross diaphragm 24 and a frequency doubling plate 25, the cross diaphragm 24 and the frequency doubling plate 25 are connected to the mounting frame at intervals, and the mounting frame is connected to the light path inlet, so that the laser enters the cavity from the light path inlet after passing through the cross diaphragm 24 and the frequency doubling plate 25 in sequence along the X-axis direction. The first debugging tool T1 is arranged at the light path inlet of the laser turning device L2, expands the laser beam through the cross diaphragm 24, converts the invisible laser into visible light visible to human eyes through the frequency doubling piece 25, and is convenient to observe and adjust.
The two-dimensional angle adjustment can be carried out on the position of the turning lens 204 through the turning adjustment structure, the debugging is convenient, the stability of the turning lens 204 can be ensured, and the turning adjustment of the laser beam is conveniently realized.
An embodiment of the present application further provides a laser processing optical path system, and the laser processing optical path system emits laser through the laser beam expanding collimating device L1 and expands the beam to the laser in a collimating manner, and the laser is subjected to turning adjustment by the laser turning device L2, so as to ensure that the laser is vertically incident into the laser focusing device L3, and the laser is focused into a micro spot for processing. The coaxial adjusting device L4 is used for fine focusing, and finally the image observation focus and the laser processing focus are in focus. The laser processing light path system can realize beam expanding collimation, turning and focusing of laser beams, is high in debugging precision aiming at invisible wavelength laser, and provides reliable guarantee for industrial production of laser processing equipment.
Referring to fig. 3 to 6, fig. 3 shows a specific structure of a laser processing optical path system provided in an alternative embodiment of the present application at a first viewing angle, fig. 4 shows a specific structure of a laser processing optical path system provided in an alternative embodiment of the present application at a second viewing angle, fig. 5 shows a specific structure of a coaxial adjusting device L4 provided in an alternative embodiment of the present application, and fig. 6 shows a specific structure of a second commissioning tool provided in an alternative embodiment of the present application.
The laser processing optical path system comprises a processing base 1, a laser beam expanding and collimating device L1, a laser turning device L2, a coaxial adjusting device L4 and a laser focusing device L3.
Referring to fig. 3 and 4, the processing base 1 is a marble base, the upper surface of the processing base 1 is provided with adjusting washers 2 and an adapter plate 5 at intervals along the X-axis direction, and the right side surface of the processing base 1 is provided with a vertical plate 6 along the Z-axis direction.
The laser beam expanding and collimating device L1 comprises a laser 3, a beam expanding lens 4 and a first debugging tool T1. Laser instrument 3 is connected on adjusting washer 2, and beam expanding lens 4 is connected in the export of laser instrument 3, and first debugging frock T1 and beam expanding lens 4's export clearance fit. Referring to fig. 1, the lens base 17 of the laser bending device L2 is connected to the right end of the bending plate, such that the light path entrance is located in the X-axis direction, and the light exit of the laser 3, the beam expander 4, the first debugging tool T1, and the light path entrance are coaxially disposed in sequence along the X-axis direction. The laser beam expanding and collimating device L1 realizes the collimation and the expansion of the laser beam through the beam expanding lens 4.
With continued reference to fig. 5, the coaxial adjusting Device L4 includes a lens holder 11, a tube mirror 12, an adjusting ring 13, a fixing ring 14, a connecting sleeve 15 and a CCD (Charge Coupled Device) 16. The lens mount 11 is connected to a connecting hole on a lens mount base 17 (see fig. 1), the tube lens 12 is coaxially installed in the lens mount 11, the adjusting ring 13 is sleeved on the lower end of the outer wall of the lens mount 11 and is in threaded connection with the lens mount 11, the connecting sleeve 15 is sleeved on the upper end of the outer wall of the lens mount 11 and abuts against the adjusting ring 13, the connecting sleeve 15 can slide up and down (i.e. along the Z-axis direction) relative to the lens mount 11, and the CCD16 is connected to the upper end of the connecting sleeve 15. The fixing ring 14 is sleeved at the lower end of the connecting sleeve 15 and is in interference fit with the connecting sleeve 15, the matching surface of the fixing ring 14 and the connecting sleeve 15 is a conical surface, the fixing ring 14 can be fixed on the lens base 11 through screws, a transverse slot is formed in the connecting sleeve 15, and the connecting sleeve 15 and the lens base 11 are connected and fixed through deformation generated by screw fastening. The distance between the tube mirror 12 and the target surface of the CCD16 is the image distance, the adjusting ring 13 is screwed clockwise, and the connecting sleeve 15 can be jacked up by the adjusting ring 13, so that the image distance is increased; otherwise, the adjusting ring 13 is screwed anticlockwise, the connecting sleeve 15 can descend due to gravity, so that the image distance is further reduced, the precise focusing of the coaxial lens is realized, and clear imaging is obtained. After the proper image distance is obtained, the fixed ring 14 is in interference fit with the connecting sleeve 15, the fixed ring 14 and the connecting sleeve 15 are fixed through screws, and the screws are fastened to deform so that the connecting sleeve 15 and the lens mount 11 are connected and fixed.
Referring to fig. 4 and fig. 6, the laser focusing device L3 includes a sliding plate 7, a focusing base 8, a piezoelectric ceramic motor 9, a servo motor (not shown), a second debugging tool, and a focusing mirror 10.
Before carrying out the precision focusing of laser focusing through coaxial adjusting device L4, install first debugging frock, carry out the straightness through two crossed diaphragms 24 and adjust the straightness that hangs down to can set up doubling of frequency piece 25 in long section of thick bamboo 27 below, be convenient for further form visible light. Then, the second debugging tool is disassembled, the focusing mirror 10 is connected with the piezoelectric ceramic motor 9, and the focusing mirror 10 is communicated with the light path outlet. The focusing lens 10 is used for focusing on the worktable surface to form a micro light spot for processing, and the coaxial adjusting device L4 coaxial with the focusing lens 10 realizes the focus alignment with the laser processing light path through an image plane compensation mechanism by combining large-range coarse focusing and small-range fine focusing.
An embodiment of the present application further provides a method for debugging a light path of a laser processing light path system, where the method for debugging a light path includes the following steps:
(1) a first debugging tool T1 is installed at the exit of the beam expander 4, and the first debugging tool T1 is in clearance fit with the exit of the beam expander 4, so that laser emitted by the laser beam expanding and collimating device L1 is divided into four parts along the X-axis direction after passing through the first debugging tool T1 and enters the laser turning device L2, wherein the inner diameter of the cross diaphragm 24 is in tolerance fit with the outer diameter of the exit of the beam expander 4. Adjusting the positions of the mounting threads of the beam expander 4 and the laser 3, so that the light beam passing through the beam expander 4 irradiates on the frequency doubling chip 25 and is divided into four parts;
(2) observing an image through a coaxial adjusting device L4, adjusting the position of the lens base body 17 relative to the adapter plate 5 in the X-axis direction and the position of the lens base body 17 relative to the adapter plate 5 in the Y-axis direction at the same time, and adjusting the position of the focusing base 8 along the X-axis direction, so that the brightness in an observation field is uniform, which indicates that the coaxiality of the CCD16 and the focusing mirror 10 is better;
(3) installing a second debugging tool;
(4) the position of the turning lens 204 is adjusted through the turning adjusting structure, so that the laser vertically enters a second debugging tool;
(5) disassembling the second debugging tool, and then installing the focusing mirror 10;
(6) the laser processing focus is determined, and the processing focus and the image observation focus are made to be in focus by adjusting the coaxial adjusting device L4.
The light path debugging method can meet the requirements of good consistency and high stability of the industrial laser micro-processing equipment, and the installation of the corresponding optical elements and the design of the adjusting mechanism ensure that the complex light path debugging is simple, convenient and reliable, both visible light and non-visible light can be applicable, thereby providing effective guidance and reliability guarantee for the production of the industrial laser processing equipment.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. A laser turning device, comprising:
the laser microscope comprises a microscope base body, a laser module and a laser module, wherein a cavity for laser to pass through is formed on the microscope base body, a light path inlet and a light path outlet which are respectively communicated with the cavity are formed on the outer wall of the microscope base body, the light path inlet is arranged along the X-axis direction, and the light path outlet is arranged along the Z-axis direction;
a turning lens disposed in the chamber along an X-axis direction; and
the turning adjusting structure is connected with the mirror base body, the turning adjusting structure is connected with the turning lens, and the turning adjusting structure is used for adjusting the position of the turning lens.
2. The laser turning device of claim 1, wherein:
an adjusting port is formed on the outer wall of the base body of the microscope base;
the turning adjusting structure comprises a fixed disc, a rotating disc, a lens frame, a connecting rod, an adjusting screw, a top tightening screw and a fixing screw;
the fixed disc is connected to the adjusting port through the fixing screw, and the fixed disc is provided with a through hole communicated with the chamber;
the rotating disc is connected to the connecting rod, the rotating disc covers the through opening, and the turning lens is connected to the rotating disc through the lens frame;
the lens frame is arranged in the cavity, so that the turning lens is arranged along the X-axis direction;
the connecting rod passes through adjusting screw along X axle direction swing joint in the fixed disk, the rotary disk passes through tight top screw along Y axle direction swing joint in the fixed disk.
3. The laser turning device of claim 1, wherein:
the laser turning device comprises a first debugging tool, wherein the first debugging tool comprises an installation frame, a cross diaphragm and a frequency doubling piece;
the cross diaphragm and the frequency doubling piece are connected to the mounting frame at intervals, and the mounting frame is connected to the light path inlet, so that the laser sequentially passes through the cross diaphragm and the frequency doubling piece along the X-axis direction and then enters the cavity from the light path inlet.
4. A laser processing optical path system is characterized in that:
the laser processing optical path system comprises the laser turning device of any one of claims 1-3;
the laser processing light path system also comprises a processing base, a laser beam expanding and collimating device, a laser focusing device and a coaxial adjusting device;
the lens base body is connected to the processing base through an adapter plate;
the laser beam expanding and collimating device is connected to the processing base, the laser beam expanding and collimating device and the laser turning device are arranged at intervals along the X-axis direction, and the laser beam expanding and collimating device is used for emitting laser and collimating and expanding the laser;
the laser focusing device is connected with the processing base and is used for focusing the laser emitted from the light path outlet into a micro light spot for processing;
the coaxial adjusting device is connected to the laser turning device along the Z-axis direction, communicated with the cavity and used for identifying the alignment processing mark and assisting in adjusting the laser light path.
5. The laser processing optical path system according to claim 4, wherein:
the laser beam expanding and collimating device comprises a laser, a beam expanding lens and a first debugging tool;
the first debugging tool comprises an installation frame, a cross diaphragm and a frequency doubling piece, wherein the cross diaphragm and the frequency doubling piece are connected to the installation frame at intervals;
the laser is connected to the processing base, the beam expander is connected to the laser outlet, and the mounting frame is connected to the beam expander;
the laser device, the beam expander, the first debugging tool and the laser turning device are sequentially arranged along the X-axis direction.
6. The laser processing optical path system according to claim 4, wherein:
the laser focusing device comprises a focusing seat, a piezoelectric ceramic motor, a servo motor and a second debugging tool;
the processing base is connected with a vertical plate, the vertical plate is connected with a sliding plate in a sliding mode, and the servo motor drives the sliding plate to slide relative to the vertical plate along the Z-axis direction;
the focusing seat is connected with the sliding plate, and the piezoelectric ceramic motor is connected with the focusing seat;
the second debugging tool is used for debugging the laser in the vertical direction, and comprises a long cylinder and two crossed diaphragms, wherein the two crossed diaphragms are coaxially arranged at two ends of the long cylinder respectively, the long cylinder is connected with the piezoelectric ceramic motor, and the long cylinder is communicated with the light path outlet.
7. The laser processing optical path system according to claim 4, wherein:
the laser focusing device comprises a focusing seat, a piezoelectric ceramic motor, a servo motor and a focusing mirror;
the processing base is connected with a vertical plate, the vertical plate is connected with a sliding plate in a sliding mode, and the servo motor drives the sliding plate to slide relative to the vertical plate along the Z-axis direction;
the focusing seat is connected with the sliding plate, and the piezoelectric ceramic motor is connected with the focusing seat;
the focusing mirror is connected with the piezoelectric ceramic motor and communicated with the light path outlet.
8. The laser processing optical path system according to claim 4, wherein:
the coaxial adjusting device comprises a lens mount, a tube lens, an adjusting ring, a fixed ring, a connecting sleeve and a CCD;
the lens seat base body is provided with a connecting hole relative to the light path outlet along the Z-axis direction, the connecting hole is communicated with the cavity, and the lens seat is connected with the connecting hole;
the tube lens is coaxially arranged in the lens seat, the adjusting ring is in threaded connection with the lens seat, the connecting sleeve is sleeved on the outer wall of the lens seat and abuts against the adjusting ring, and the CCD is connected to one end of the connecting sleeve;
the fixed ring is sleeved at the other end of the connecting sleeve and is in interference fit with the connecting sleeve, and the fixed ring can be fixed on the lens mount through screws.
9. The laser processing optical path system of claim 8, wherein:
the fitting surface of the fixed ring and the connecting sleeve is a conical surface.
10. An optical path debugging method of a laser processing optical path system, wherein the laser processing optical path system is the laser processing optical path system of any one of claims 4 to 9, the optical path debugging method comprising the steps of:
installing a first debugging tool on a beam expander, so that laser emitted by the laser beam expanding and collimating device is uniformly divided into a plurality of parts to enter the laser turning device after passing through the first debugging tool along the X-axis direction, wherein the first debugging tool comprises an installation frame, a cross diaphragm and a frequency doubling plate, and the cross diaphragm and the frequency doubling plate are connected to the installation frame at intervals;
observing an image through the coaxial adjusting device, and simultaneously adjusting the position of the lens base substrate in the X-axis direction and the position of the lens base substrate in the Y-axis direction, so that the brightness in an observation field is uniform;
installing a second debugging tool, wherein the second debugging tool comprises a long cylinder and two crossed diaphragms, and the two crossed diaphragms are respectively and coaxially installed at two ends of the long cylinder;
the turning lens is subjected to position adjustment through the turning adjusting structure, so that laser vertically enters the second debugging tool;
disassembling the second debugging tool, and then installing a focusing mirror;
and determining a laser processing focus, and aligning the processing focus and the image observation focus by adjusting the coaxial adjusting device.
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