CN206258624U

CN206258624U - A kind of structure light generating means with MEMS galvanometers feedback

Info

Publication number: CN206258624U
Application number: CN201621434365.6U
Authority: CN
Inventors: 李显龙; 杜先鹏; 郭俊兴; 代启强; 丁大海; 郭会芹; 刘栋; 刘艳
Original assignee: Qingdao Xiaoyou Intelligent Technology Co Ltd
Current assignee: Qingdao Xiaoyou Intelligent Technology Co Ltd
Priority date: 2016-12-26
Filing date: 2016-12-26
Publication date: 2017-06-16
Anticipated expiration: 2026-12-26

Abstract

The utility model discloses a kind of structure light generating means with MEMS galvanometers feedback, belong to 3D imaging fields.Its technical scheme is：Including optics module and hardware control circuit, hardware control circuit includes FPGA module, and ARM modules, MEMS galvanometers drive module, the laser drive module being connected with FPGA module, photodetector is additionally provided with optics module, photodetector connects the input of common emitter amplifying circuit, the output end connection ARM modules of common emitter amplifying circuit；Photodetector is located at the beam exit direction of MEMS galvanometers.The beneficial effects of the utility model are：Can the micro- galvanometers of monitor in real time MEMS, and can modulate so that obtain brightness uniformity clearly laser grating, there is good application during structure light scan and 3D modeling.

Description

A kind of structure light generating means with MEMS galvanometers feedback

Technical field

The utility model belongs to 3D imaging fields, and in particular to a kind of structure photogenerated dress with MEMS galvanometers feedback Put.

Background technology

MEMS galvanometers have turned into optics at present with its small volume, low cost, fast response time and integrated level advantage high The direction of MEMS technology development, but device existing defects in technique productions or material property, such as structural deviation, film thickness Deviation, zero drift phenomenon, the aging of material, mechanical creep and response curve it is non-linear etc., can to using bringing many problems, It is the image fault that causes such as the handoff delay of photoswitch, the increase of deviation and insertion loss, the distortion of OCT systems raster, micro- The application problem such as spectrum analysis deviation caused by mirror kinematic nonlinearities.Accordingly, it would be desirable to introduce closed-loop feedback circuit ask solving this Topic.

The electrostatic micro- galvanometers of MEMS in the course of the work, because the influence of outwardly and inwardly temperature causes rising for MEMS galvanometers The phenomenon that time appearance of shaking postpones, causes the laser grating of whole module generation phase difference occur so that mould occurs in laser grating The phenomenon of paste.

Utility model content

It is the deficiency for solving above-mentioned prior art, the purpose of this utility model is to provide a kind of with MEMS galvanometers feedback Structure light generating means.

Invention thinking of the present utility model shows as：LD lasers are controlled to produce the laser of fixed width by FPGA module Striped, the laser stripe scans through photodetector, certain electric current is produced, at the amplification by common emitter amplifying circuit Reason, passes to the starting of oscillation position that ARM modules carry out the micro- galvanometers of real-time detection MEMS, and monitor in real time simultaneously gathers the phase of laser grating Difference, the deflection that FPGA module controls MEMS galvanometers is adjusted by closed loop feedback, compensates the phase difference of laser grating, is obtained clearly Laser grating.

The technical solution of the utility model is, a kind of structure light generating means with MEMS galvanometers feedback, including optics Module and hardware control circuit, the optics module include the LD lasers, two-sided lens and the MEMS galvanometers that are sequentially connected；It is described Hardware control circuit includes FPGA module, and ARM modules, MEMS galvanometers drive module, the laser drive being connected with FPGA module Dynamic model block, the MEMS galvanometers drive module connects and composes control loop, the laser drive module and institute with MEMS galvanometers State LD lasers and connect and compose control loop, photodetector is additionally provided with the optics module, the photodetector connects The input of common emitter amplifying circuit is connect, the output end of the common emitter amplifying circuit connects the ARM modules；Photodetector Positioned at the beam exit direction of MEMS galvanometers.

Preferably, the photodetector is pasted on the inner side of optics module, just to the exit facet of the MEMS galvanometers It is middle.

The total radio amplifier being made up of triode, will be amplified treatment by the electric current of photodetector, by inspection The low level signal duration of light-metering electric explorer gather monitoring laser grating phase difference, in order to ARM modules for Monitoring, collection and the treatment of voltage signal；

In optics module, laser facula is gone out using high-power LD laser emittings, the one side of two-sided lens is focused on, another Face collimates, and laser facula turns into laser beam, and uniform laser lines are scattering into the deflection of MEMS galvanometers；LD laser Device is high-power semiconductor laser.

A piece laser stripe for fixed width bright line is controlled by FPGA module, detects that the laser stripe gets to photodetection Time on device, that is, the length of the duration of photodetector both end voltage height judges whether MEMS galvanometers produce Starting of oscillation postpones；If this duration is not in default scope, it is necessary to carry out phase compensation, MEMS is weakened as far as possible The time that starting of oscillation postpones.

ARM modules think that the signal that photodetector is detected is limited in certain width range, and treatment is obtained Phase difference value pass to FPGA module, these original phase datas are carried out phase compensation and obtain a series of tune by FPGA module Phase value after whole.These values are stored as a real-time form, FPGA module from form by taking out phase in real time Position data obtain clearly laser grating to control MEMS galvanometers.

Common emitter amplifying circuit is connected with the DAC passages of the ARM modules, the ARM modules by I I C interface by Data transfer gives the FPGA module.

Preferably, the plane of incidence of the two-sided lens is focusing surface, and exit facet is collimation plane.

Preferably, the MEMS galvanometers are electrostatic MEMS galvanometers, and the galvanometer drive module is by described in high drive MEMS galvanometers, the laser beam of the LD laser emittings modulated through two-sided lens after by MEMS galvanometers scattering for and Laser lines.

By experiment, the beneficial effects of the utility model are that simple structure is reasonable in design, can monitor in real time MEMS it is micro- Galvanometer, and can modulate so that brightness uniformity clearly laser grating is obtained, has good during structure light scan and 3D modeling Good application.

Brief description of the drawings

Fig. 1 is the theory diagram of the utility model embodiment.

Fig. 2 realizes flow chart for the utility model embodiment.

Fig. 3 is the ARM chip circuit figures of the utility model embodiment.

Fig. 4 illustrates interface circuit figure for the data between the FPGA and ARM of the utility model embodiment.

Fig. 5 is the power supply circuit of the ARM chips of the utility model embodiment.

Fig. 6 is the common emitter amplification circuit diagram of the utility model embodiment.

Specific embodiment

In order that the purpose of this utility model, technical scheme and advantage become more apparent, below in conjunction with accompanying drawing and implementation Example, is further elaborated to the utility model.Certainly, specific embodiment described herein is only used to explain this practicality It is new, it is not used to limit the utility model.

Embodiment 1

Referring to Fig. 1 and Fig. 6, the utility model is a kind of structure light generating means with MEMS galvanometers feedback, including light Module and hardware control circuit are learned, optics module includes the LD lasers, two-sided lens and the MEMS galvanometers that are sequentially connected；Hardware control Circuit processed includes FPGA module, and ARM modules, MEMS galvanometers drive module, the laser drive module being connected with FPGA module, MEMS galvanometers drive module connects and composes control loop with MEMS galvanometers, and laser drive module connects and composes control with LD lasers Loop processed, is additionally provided with photodetector in optics module, photodetector connects the input of common emitter amplifying circuit, cascode The output end connection ARM modules of pole amplifying circuit；Photodetector is pasted on the inner side of optics module, is right against MEMS galvanometers The centre of exit facet.

Common emitter amplifying circuit is connected with the DAC passages of ARM modules, ARM modules by IIC interfaces by data transfer give FPGA module.

The plane of incidence of two-sided lens is focusing surface, and exit facet is collimation plane.

MEMS galvanometers are electrostatic MEMS galvanometers, and galvanometer drive module is gone out by high drive MEMS galvanometers, LD lasers The laser beam penetrated through two-sided lens modulate after by MEMS galvanometers scattering for and laser lines.

The utility model without description technical characteristic can by or using prior art realize, will not be repeated here, Certainly, described above is not that, to limitation of the present utility model, the utility model is also not limited to the example above, this technology neck Change, remodeling, addition or replacement that the those of ordinary skill in domain is made in essential scope of the present utility model, should also belong to Protection domain of the present utility model.

Claims

1. a kind of structure light generating means with MEMS galvanometers feedback, including optics module and hardware control circuit, the light Learning module includes the LD lasers, two-sided lens and the MEMS galvanometers that are sequentially connected；Characterized in that, the hardware control circuit bag FPGA module is included, and ARM modules, MEMS galvanometers drive module, the laser drive module, the MEMS being connected with FPGA module Galvanometer drive module connects and composes control loop with MEMS galvanometers, and the laser drive module is connected structure with the LD lasers Into control loop, photodetector is additionally provided with the optics module, the photodetector connects common emitter amplifying circuit Input, the output end of the common emitter amplifying circuit connects the ARM modules；Photodetector is located at the light of MEMS galvanometers Beam-emergence direction.

2. structure light generating means with MEMS galvanometers feedback according to claim 1, the photodetector is pasted In the inner side of the optics module, and just to the centre of the exit facet of the MEMS galvanometers.

3. it is according to claim 1 with MEMS galvanometers feedback structure light generating means, it is characterised in that the cascode Pole amplifying circuit is connected with the DAC passages of the ARM modules；The ARM modules are connected by IIC interfaces with the FPGA module Connect.

4. it is according to claim 1 with MEMS galvanometers feedback structure light generating means, it is characterised in that it is described two-sided The plane of incidence of lens is focusing surface, and exit facet is collimation plane.

5. it is according to claim 1 with MEMS galvanometers feedback structure light generating means, it is characterised in that the MEMS Galvanometer is electrostatic MEMS galvanometers.