CN206250163U - A kind of soda acid cleaning device of graphical sapphire substrate - Google Patents

A kind of soda acid cleaning device of graphical sapphire substrate Download PDF

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Publication number
CN206250163U
CN206250163U CN201621417113.2U CN201621417113U CN206250163U CN 206250163 U CN206250163 U CN 206250163U CN 201621417113 U CN201621417113 U CN 201621417113U CN 206250163 U CN206250163 U CN 206250163U
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China
Prior art keywords
housing
hole
sapphire substrate
toilet seat
cleaning device
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CN201621417113.2U
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Chinese (zh)
Inventor
侯想
仇凯弘
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Fujian Microtek Technology Co Ltd
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Fujian Microtek Technology Co Ltd
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Priority to CN201621417113.2U priority Critical patent/CN206250163U/en
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Abstract

The utility model discloses a kind of soda acid cleaning device of graphical sapphire substrate, including housing, the housing is cavity structure, the top of housing is provided with charging aperture, the side inwall of the charging aperture is hinged with top cover, it is provided with the top inwall of the housing and draws bin, the bottom inwall of the housing slidably connects supporting plate, the top of the supporting plate is provided with toilet seat by alignment pin, the toilet seat is provided with first through hole, the top of the toilet seat is respectively equipped with the standing groove and baffle plate of arc, the side of the toilet seat offers chute, the supporting plate is provided with groove near the side of toilet seat, deflector is provided with the groove, the deflector is provided with the second through hole, the bottom of the supporting plate and the bottom of housing are equipped with interconnected discharging opening, sliding bar is additionally provided with the housing.The utility model layout rationally, mitigates the damage to Sapphire Substrate, and cleaning effect is notable, while effectively improving cleaning quality.

Description

A kind of soda acid cleaning device of graphical sapphire substrate
Technical field
The utility model is related to Sapphire Substrate technical field, more particularly to a kind of soda acid of graphical sapphire substrate is clear Cleaning device.
Background technology
For making LED chip, the selection of backing material is the problem of overriding concern to Sapphire Substrate.Generally, GaN The epitaxial layer of sill and device mainly grows on a sapphire substrate.Sapphire Substrate has the advantages that many:First, sapphire The production technology of substrate is ripe, device quality is preferable;Secondly, sapphire stability very well, can be used in high growth temperature mistake Cheng Zhong;Finally, sapphire high mechanical strength, it is easy to treatment and clean, thus most of techniques it is general all using sapphire as Substrate.And the soda acid cleaning device simple structure of existing graphical sapphire substrate, substrate is easily damaged in cleaning process , typically directly be put into machine for Sapphire Substrate and cleaning agent and cleaned by part, and intelligence degree is low, and cleaning performance is poor, Input and output material cannot be voluntarily controlled, using above having some limitations.
Utility model content
The purpose of this utility model be in order to solve shortcoming present in prior art, and propose it is a kind of graphical blue precious The soda acid cleaning device at stone lining bottom.
To achieve these goals, the utility model employs following technical scheme.
A kind of soda acid cleaning device of graphical sapphire substrate, including housing, the housing are cavity structure, housing Top is provided with charging aperture, and the side inwall of the charging aperture is hinged with top cover, is provided with the top inwall of the housing and draws material Frame, the bottom inwall of the housing slidably connects supporting plate, and the top of the supporting plate is provided with toilet seat by alignment pin, The toilet seat is provided with multiple first through hole, and the top of the toilet seat is respectively equipped with the standing groove of arc and is vertically arranged Baffle plate, the standing groove is located between baffle plate, and the side of the toilet seat offers the chute being vertically arranged, and the supporting plate is leaned on The side of nearly toilet seat is provided with groove, is provided with horizontally disposed deflector in the groove, and the deflector is provided with multiple the Two through holes, and the second through hole is engaged with first through hole, the bottom of the supporting plate and the bottom of housing are equipped with interconnected Discharging opening, the discharging opening is corresponding with first through hole and the second through hole respectively, is additionally provided with what is be vertically arranged in the housing One end of sliding bar, wherein sliding bar extends to the top of housing, and the other end of sliding bar is fixed with deflector by chute and connected Connect, the bottom both sides of the housing are equipped with the support bar being vertically arranged, and horizontally disposed fixation is provided between the support bar Plate, the bottom of the fixed plate is provided with support frame, and support frame as described above is provided with rotary electric machine, the output shaft of the rotary electric machine On be connected with the rotating bar being vertically arranged, and rotating bar is fixedly connected with supporting plate.
Preferably, for awl shape structure, the bottom for drawing bin is provided with circular hole to the bin that draws, and circular hole is located at cleaning The surface of seat.
Preferably, the chute is arcuate structure, and sliding bar is slidably connected with the inwall of chute, the sliding length of chute Cooperation with first through hole and the second through hole is apart from identical.
Preferably, the top of the sliding bar is provided with handle, and the charging aperture is additionally provided with opening near the side of sliding bar, Wherein more than the length of opening, and one end of sliding bar extends to the top of housing by opening to the length of handle.
Preferably, the baffle plate is provided with separate cavities, and described one end for drawing bin is extended in separate cavities, and draws bin Lateral wall is slidably connected with the inwall of separate cavities.
Preferably, the residing diameter with diameter greater than charging aperture in the top for drawing bin.
The beneficial effects of the utility model are:The Sapphire Substrate is facilitated to carry out nature cunning by the bin that draws of pyramidal structure Fall, while mitigating the damage to graphical sapphire substrate;Drive supporting plate to rotate by rotary electric machine, and then drive toilet seat Agitation cleaning is carried out, is easy to the same time to clean multiple Sapphire Substrates, cleaning effect is notable, while using slip Bar drives the second through hole on deflector freely to be docked with first through hole in reciprocating rotation in chute, acid after the completion of convenient cleaning Alkaline cleaner flows out from discharge outlet, effectively improves cleaning quality.The utility model layout is rationally, simple to operate, mitigates Damage to Sapphire Substrate, cleaning effect is notable, while effectively improving cleaning quality.
Brief description of the drawings
Fig. 1 be the utility model proposes a kind of graphical sapphire substrate soda acid cleaning device main view dissect structure Schematic diagram.
Fig. 2 be the utility model proposes a kind of graphical sapphire substrate soda acid cleaning device partial top structure Schematic diagram.
In figure:1 housing, 2 baffle plates, 3 toilet seats, 4 supporting plates, 5 grooves, 6 support bars, 7 charging apertures, 8 top covers, 9 draw bin, 10 sliding bars, 11 first through hole, 12 chutes, 13 deflectors, 14 second through holes, 15 discharging openings, 16 fixed plates, 17 rotating bars, 18 Support frame, 19 rotary electric machines.
Specific embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole Embodiment.
Reference picture 1-2, a kind of soda acid cleaning device of graphical sapphire substrate, including housing 1, housing 1 are cavity knot Structure, the top of housing 1 is provided with charging aperture 7, and the side inwall of charging aperture 7 is hinged with top cover 8, is installed on the top inwall of housing 1 Have and draw bin 9, the bottom inwall of housing 1 slidably connects supporting plate 4, and the top of supporting plate 4 is provided with cleaning by alignment pin Seat 3, toilet seat 3 is provided with multiple first through hole 11, and the top of toilet seat 3 is respectively equipped with the standing groove of arc and is vertically arranged Baffle plate 2, standing groove is located between baffle plate 2, and the side of toilet seat 3 offers the chute 12 being vertically arranged, and supporting plate 4 is near cleaning The side of seat 3 is provided with groove 5, groove 5 and is provided with horizontally disposed deflector 13, and deflector 13 is provided with multiple second through holes 14, and the second through hole 14 is engaged with first through hole 11, the bottom of supporting plate 4 and the bottom of housing 1 are equipped with interconnected Discharging opening 15, discharging opening 15 is corresponding with the through hole 14 of first through hole 11 and second respectively, and the cunning being vertically arranged is additionally provided with housing 1 Lever 10, one end of wherein sliding bar 10 extends to the top of housing 1, and the other end of sliding bar 10 passes through chute 12 and deflector 13 are fixedly connected, and the bottom both sides of housing 1 are equipped with the support bar 6 being vertically arranged, and are provided with horizontally disposed solid between support bar 6 Fixed board 16, the bottom of fixed plate 16 is provided with support frame 18, and support frame 18 is provided with rotary electric machine 19, the output of rotary electric machine 19 The rotating bar 17 being vertically arranged is connected with axle, and rotating bar 17 is fixedly connected with supporting plate 4.
Draw bin 9 for awl shape structure, the bottom for drawing bin 9 is provided with circular hole, and circular hole is located at the surface of toilet seat 3, Chute 12 is arcuate structure, and sliding bar 10 is slidably connected with the inwall of chute 12, the sliding length and first through hole of chute 12 11 and second through hole 14 cooperation apart from identical, the top of sliding bar 10 is provided with handle, and charging aperture 7 is near the side of sliding bar 10 Opening is additionally provided with, wherein the length of handle is more than the length of opening, and one end of sliding bar 10 extends to housing 1 by opening Top, baffle plate 2 is provided with separate cavities, and the one end for drawing bin 9 is extended in separate cavities, and draws the lateral wall and separate cavities of bin 9 Inwall be slidably connected, draw the residing diameter with diameter greater than charging aperture 7 in top of bin 9.
Operation principle:During work, the Sapphire Substrate is facilitated to carry out nature landing by the bin 9 that draws of pyramidal structure, while Mitigate the damage to graphical sapphire substrate;Graphical sapphire substrate enters in the arc standing groove on the top of toilet seat 3, puts Enter soda acid cleaning agent, drive supporting plate 4 to rotate by rotary electric machine 19, and then drive toilet seat 3 carries out agitation cleaning, just Multiple Sapphire Substrates are cleaned in the same time, cleaning effect is notable, while using sliding bar 10 in reciprocal in chute 12 Rotate, drive the second through hole 14 on deflector 13 freely to be docked with first through hole 11, soda acid cleaning agent after the completion of convenient cleaning Flowed out from discharging opening 15, effectively improve cleaning quality.
The above, only the utility model preferably specific embodiment, but protection domain of the present utility model is not Be confined to this, any one skilled in the art in the technical scope that the utility model is disclosed, according to this practicality New technical scheme and its utility model design are subject to equivalent or change, should all cover in operation model of the present utility model Within enclosing.

Claims (6)

1. a kind of soda acid cleaning device of graphical sapphire substrate, including housing(1), it is characterised in that the housing(1)For Cavity structure, housing(1)Top be provided with charging aperture(7), the charging aperture(7)Side inwall be hinged with top cover(8), it is described Housing(1)Top inwall on be provided with and draw bin(9), the housing(1)Bottom inwall slidably connect supporting plate(4), The supporting plate(4)Top toilet seat is provided with by alignment pin(3), the toilet seat(3)It is provided with multiple first through hole (11), the toilet seat(3)The top standing groove that is respectively equipped with arc and the baffle plate that is vertically arranged(2), the standing groove position In baffle plate(2)Between, the toilet seat(3)Side offer the chute being vertically arranged(12), the supporting plate(4)Near clear Wash seat(3)Side be provided with groove(5), the groove(5)Inside it is provided with horizontally disposed deflector(13), the deflector(13) It is provided with multiple second through holes(14), and the second through hole(14)With first through hole(11)It is engaged, the supporting plate(4)Bottom And housing(1)Bottom be equipped with interconnected discharging opening(15), the discharging opening(15)Respectively with first through hole(11)With Second through hole(14)It is corresponding, the housing(1)Inside it is additionally provided with the sliding bar being vertically arranged(10), wherein sliding bar(10)One End extends to housing(1)Top, sliding bar(10)The other end pass through chute(12)With deflector(13)It is fixedly connected, it is described Housing(1)Bottom both sides be equipped with the support bar being vertically arranged(6), the support bar(6)Between be provided with horizontally disposed solid Fixed board(16), the fixed plate(16)Bottom support frame is installed(18), support frame as described above(18)It is provided with rotary electric machine (19), the rotary electric machine(19)Output shaft on be connected with the rotating bar being vertically arranged(17), and rotating bar(17)With support Plate(4)It is fixedly connected.
2. the soda acid cleaning device of a kind of graphical sapphire substrate according to claim 1, it is characterised in that described to draw Bin(9)It is awl shape structure, it is described to draw bin(9)Bottom be provided with circular hole, and circular hole is located at toilet seat(3)Surface.
3. a kind of soda acid cleaning device of graphical sapphire substrate according to claim 1, it is characterised in that the cunning Groove(12)It is arcuate structure, and sliding bar(10)With chute(12)Inwall be slidably connected, chute(12)Sliding length and One through hole(11)With the second through hole(14)Cooperation apart from identical.
4. a kind of soda acid cleaning device of graphical sapphire substrate according to claim 1, it is characterised in that the cunning Lever(10)Top be provided with handle, the charging aperture(7)Near sliding bar(10)Side be additionally provided with opening, wherein handle Length is more than the length of opening, and sliding bar(10)One end housing is extended to by opening(1)Top.
5. a kind of soda acid cleaning device of graphical sapphire substrate according to claim 1, it is characterised in that the gear Plate(2)Separate cavities are provided with, it is described to draw bin(9)One end extend in separate cavities, and draw bin(9)Lateral wall with isolate The inwall in chamber is slidably connected.
6. the soda acid cleaning device of a kind of graphical sapphire substrate according to claim 1, it is characterised in that described to draw Bin(9)Top it is residing with diameter greater than charging aperture(7)Diameter.
CN201621417113.2U 2016-12-22 2016-12-22 A kind of soda acid cleaning device of graphical sapphire substrate Active CN206250163U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621417113.2U CN206250163U (en) 2016-12-22 2016-12-22 A kind of soda acid cleaning device of graphical sapphire substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621417113.2U CN206250163U (en) 2016-12-22 2016-12-22 A kind of soda acid cleaning device of graphical sapphire substrate

Publications (1)

Publication Number Publication Date
CN206250163U true CN206250163U (en) 2017-06-13

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CN201621417113.2U Active CN206250163U (en) 2016-12-22 2016-12-22 A kind of soda acid cleaning device of graphical sapphire substrate

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107808915A (en) * 2017-12-18 2018-03-16 惠州市烁达德高光电科技有限公司 A kind of cleaning device for LED substrate wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107808915A (en) * 2017-12-18 2018-03-16 惠州市烁达德高光电科技有限公司 A kind of cleaning device for LED substrate wafer

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