CN206232843U - A kind of seed rod adjusts chuck - Google Patents
A kind of seed rod adjusts chuck Download PDFInfo
- Publication number
- CN206232843U CN206232843U CN201621347989.4U CN201621347989U CN206232843U CN 206232843 U CN206232843 U CN 206232843U CN 201621347989 U CN201621347989 U CN 201621347989U CN 206232843 U CN206232843 U CN 206232843U
- Authority
- CN
- China
- Prior art keywords
- seed rod
- seed
- screw
- chuck
- regulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a kind of seed rod and adjusts chuck, head is adjusted including seed rod, it is shaped as the different double end sleeve of diameter, upper and lower barrel is respectively provided with screw, the seed rod regulation head upper end insertion ceramic bar, is fixed by screw, lower end insertion seed rod, fastened by set screw, the seed rod end is embedded in seed crystal.It is big that the utility model solves current seed rod regulation chuck regulation difficulty, stability is poor, and seed rod has the risk for coming off higher after temperature distortion, reduce seed rod adjustment work difficulty, the circular runout at seed crystal tip in growth course, seed rod case accident caused by part temperature distortion when crystal growth is greatly decreased are eliminated to a greater extent.
Description
Technical field
The utility model is related to Czochralski crystal to manufacture field, more particularly to a kind of seed rod regulation chuck.
Background technology
Method of crystal growth by crystal pulling technology needs to be adjusted seed rod after seed rod is installed every time, to ensure to be given birth in crystal
Seed crystal alignment crucible center in growth process, and seed crystal tip keeps stabilization when rotating, and does not deflect.Existing seed rod is adjusted
Section chuck when using regulation difficulty it is big, stability is poor, and seed rod has the wind for coming off higher after adjusting chuck temperature distortion
Danger.
Utility model content
The utility model provides a kind of seed rod regulation chuck, can solve the problem that during method of crystal growth by crystal pulling, and chuck is adjusted
Section difficulty is big, use the caducous problem of unstable and seed crystal.
The technical scheme that the utility model is used is：A kind of seed rod adjusts chuck, including seed rod regulation head, its shape
Shape is the different double end sleeve of diameter, and upper and lower barrel is respectively provided with screw, and the seed rod regulation head upper end insertion ceramic bar leads to
Fastened by screw is crossed, insertion seed rod in lower end is fastened by set screw, and the seed rod end is embedded in seed crystal.
Further, the seed rod regulation head lower end sets double screw, and the seed rod is by double set screw
Fastening.
Further, every 3 structures of the set screw are in a row, and every 120 ° set one, and circumferentially direction is uniformly distributed.
After adopting the above technical scheme, the beneficial effects of the utility model are：The utility model is tight by set screw
Gu, seed rod adjustment work difficulty is reduced, the circular runout at seed crystal tip in growth course is eliminated to a greater extent, and
Seed rod case accident caused by part temperature distortion when reducing crystal growth.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model embodiment one；
Fig. 2 is the structural representation of seed crystal regulation head in the utility model embodiment one；
Fig. 3 is the structural representation of seed crystal regulation head in the utility model embodiment two.
Wherein, 1- ceramic bars, 2- seed rods regulation head, 3- set screws, 4- seed rods, 5- seed crystals.
Specific embodiment
Embodiment one
A kind of seed rod adjusts chuck, as shown in figure 1, including seed rod regulation first 2, as shown in Fig. 2 it is shaped as diameter
Different double end sleeves, upper and lower barrel is respectively provided with screw, and the seed rod adjusts first 2 upper end insertion ceramic bar 1, by spiral shell
Silk fastening, ceramic bar 1 has good heat-proof quality, is prevented from scalding, and seed rod adjusts first 2 lower end insertion seed rod 4, leads to
Cross 3 set screws 3 to fasten, 3 every 120 ° of set screw sets one, and circumferentially direction is uniformly distributed, the insertion of the end of seed rod 4
Seed crystal 5.
Embodiment two
A kind of seed rod adjusts chuck, including seed rod regulation first 2, as shown in figure 3, it is shaped as the different double end of diameter
Sleeve, upper and lower barrel is respectively provided with screw, and the seed rod adjusts first 2 upper end insertion ceramic bar 1, is fixed by screw, ceramics
Bar 1 has good heat-proof quality, is prevented from scalding, lower end insertion seed rod 4, is fastened by double set screw 3, often arranges
Comprising 3 set screws 3, by every 120 ° one circumferentially direction be uniformly distributed, the end of the seed rod 4 insertion seed crystal 5.
Claims (3)
1. a kind of seed rod adjusts chuck, it is characterised in that adjust head including seed rod, it is shaped as the different Two-head of diameter
Cylinder, upper and lower barrel is respectively provided with screw, and the seed rod regulation head upper end insertion ceramic bar is fixed by screw, lower end insertion
Seed rod, is fastened by set screw, and the seed rod end is embedded in seed crystal.
2. a kind of seed rod according to claim 1 adjusts chuck, it is characterised in that the seed rod regulation head lower end sets
Double screw is put, the seed rod is fastened by double set screw.
3. a kind of seed rod according to claim 1 and 2 adjusts chuck, it is characterised in that every 3 structures of set screw
In a row, every 120 ° set one, and circumferentially direction is uniformly distributed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621347989.4U CN206232843U (en) | 2016-12-09 | 2016-12-09 | A kind of seed rod adjusts chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621347989.4U CN206232843U (en) | 2016-12-09 | 2016-12-09 | A kind of seed rod adjusts chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206232843U true CN206232843U (en) | 2017-06-09 |
Family
ID=58978182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621347989.4U Active CN206232843U (en) | 2016-12-09 | 2016-12-09 | A kind of seed rod adjusts chuck |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206232843U (en) |
-
2016
- 2016-12-09 CN CN201621347989.4U patent/CN206232843U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE112014003795B4 (en) | Silicon single crystal pulling device | |
| CN105803520A (en) | Automatic tailing method for CZ-80 single crystal furnace | |
| CN209873178U (en) | Single crystal furnace capable of reducing crystal defects | |
| CN103290470A (en) | Diameter transitional czochralski silicon growing method | |
| CN103422162A (en) | Single crystal furnace thermal field structure for square sapphire generation | |
| JP5029637B2 (en) | Manufacturing method of semiconductor single crystal | |
| CN110512279A (en) | It can be improved the single crystal growing furnace ending method of ending success rate | |
| TWI683042B (en) | Mono-crystalline silicon growth apparatus | |
| WO2013065204A1 (en) | SiC SINGLE CRYSTAL MANUFACTURING METHOD | |
| CN206232843U (en) | A kind of seed rod adjusts chuck | |
| JP5228671B2 (en) | Method for growing silicon single crystal | |
| DE102020127337B4 (en) | semiconductor crystal growth device | |
| CN103590109B (en) | Czochralski crystal growing furnace magnetic field device and use the crystal pulling method of this magnetic field device | |
| CN206858692U (en) | A kind of seed crystal clamping device and seed crystal | |
| CN109680330B (en) | Single crystal furnace capable of reducing crystal defects | |
| DE102011014821A1 (en) | Producing a single crystal according to float-zoning method, comprises heating crystalline raw material rod to form floating-zone, moving the floating zone from bottom to top for the growth of a single crystal ingot below the floating zone | |
| DE112010004657B4 (en) | Single-crystal manufacturing apparatus and a single-crystal production method | |
| CN208949444U (en) | A kind of growth apparatus of c to sapphire crystal | |
| CN204251771U (en) | A kind of sapphire crystal growth device | |
| CN112301425A (en) | Large-argon flow crystal pulling method for large-size monocrystalline silicon rod | |
| CN210711819U (en) | Large-size crystal growth single crystal furnace | |
| CN202744655U (en) | Graphite heater for preparing monocrystalline silicon by czochralski method | |
| CN214572344U (en) | VGF method growth indium phosphide single crystal quartz tube and anchor clamps thereof | |
| CN208087780U (en) | A kind of support device drawing silicon single crystal for zone-melting process | |
| CN219032461U (en) | Crucible for silicon carbide single crystal growth and silicon carbide single crystal growth system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |