CN206224010U - A kind of photonic crystal nanometer fluid sensor - Google Patents
A kind of photonic crystal nanometer fluid sensor Download PDFInfo
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- CN206224010U CN206224010U CN201621292031.XU CN201621292031U CN206224010U CN 206224010 U CN206224010 U CN 206224010U CN 201621292031 U CN201621292031 U CN 201621292031U CN 206224010 U CN206224010 U CN 206224010U
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Abstract
The utility model belongs to sensor field, and disclose a kind of photonic crystal nanometer fluid sensor, including photoresist layer, silicon wafer substrate, first refractive index material film layers, second refraction materials film layer and polymeric material sealing layer, the top of the second refraction materials film layer is provided with the optical grating construction of square waveform, the optical grating construction includes multiple grooves and multiple is raised and they are alternately arranged, the photoresist layer, silicon wafer substrate, first refractive index material film layers and the second refraction materials film layer collectively form sensor base layer, flow inlet is provided with the sensor base layer and go out head piece sheet.This sensor is the nano fluid sensor based on photonic crystal, successfully solve the problems, such as that traditional photonic crystal sensors consumption detectable substance is excessive, detection time is long, measuring accuracy is not high, meanwhile, also eliminate the few problem of Conventional nano fluid sensor unitary function, structural instability, passage.
Description
Technical field
The utility model belongs to sensor field, more particularly, to a kind of photonic crystal nanometer fluid sensor.
Background technology
Photonic crystal and nanometer fluid passage be two classes in biochemistry, life science and medical field it is widely studied with
The emerging sensor of application.Photonic crystal be it is a kind of by different refractivity coefficient material constituted with periodic grating knot
Structure, its intermediate layer is made up of relative rate coefficient material higher.According to material, screen periods and photon crystal structure
Difference, and because of the presence of photon band gap so that photonic crystal can couple generation resonance and then change with the light wave of CF
The direction of propagation of resonance wave；Meanwhile, the light wave resonated with photonic crystal can strengthen the local electric field of optical grating construction.Photon is brilliant
Body sensor is detected with the reciprocation of analyte using surface grating region, is characterized in not disturbing analyte
Or destruction, can be realized without label detection according to the deviant of resonance crest.Professor Cunningham in the U.S. favorably uses up
Sub- crystal carries out a series of biochemical molecule detections (U.S.Patent 6,990,259 [P], U.S.Patent as sensor
7,742,662[P]).Nano fluid sensor has small volume, while during table bulk area than big, can promote nanometer fluid passage
The nanometer fluid passage inner surface of analyte grating in the short period of time tested.In the recent period, many research institutions, application
Patent prepared by nano-fluid, and carried out with nano fluid sensor biochemical analysis experiment (U.S.Patent 8,105,
471 [P]), the correlation properties of nano-fluid make it easier to carry out low concentration small molecule, protein, gene and DNA detection, have
The characteristics of accuracy of detection is high and time-consuming few.
But, the weak point of photonic crystal class sensor is not high to detect the more long, limit detectable concentration of required time, especially
It is the field that molecule combination is needed in bioprotein molecule, antigen and genetic test etc.；Meanwhile, nanometer fluid passage structure
Making requirement it is harsh, have that preparation difficulty is big, high cost, the low feature of yield rate.How high-precision low cost is produced completely
The nanometer fluid passage of sufficient demand is the key technology problem of nano-sensor development field.Meanwhile, how to improve low concentration small
Molecular Detection precision, reduction detection time are the main bugbears of current photonic crystal sensors field face.
Utility model content
For the disadvantages described above or Improvement requirement of prior art, the utility model provides a kind of photonic crystal nanometer fluid
Sensor, two kinds of technologies of photonic crystal and nanometer fluid passage are combined, and construct the nanometer based on photon crystal structure
Fluid sensor；Photonic crystal is integrated among nano-fluid, photonic crystal can be made full use of with nanometer fluid passage
Good characteristic, while detection zone is defined in the micro of nanometer fluid passage, being capable of more accurately detection study object
Correlation properties.
To achieve the above object, according to the utility model, there is provided a kind of photonic crystal nanometer fluid sensor, its feature
It is that photonic crystal nanometer fluid sensor includes the photoresist layer, the silicon wafer that are set gradually according to order from the bottom to top
Substrate, first refractive index material film layers, the second refraction materials film layer and polymeric material sealing layer, second refraction
The top of rate material film layers is provided with the optical grating construction of square waveform, and the optical grating construction includes multiple grooves and multiple projections simultaneously
And they are alternately arranged, the raised top contacts with the bottom face of the first refractive index material film layers, the photoetching
Glue-line, silicon wafer substrate, first refractive index material film layers and the second refraction materials film layer collectively form sensor base
Layer, is provided with the flow inlet that is connected with all grooves and goes out head piece on sensor base layer.
Preferably, the thickness h of described first refractive index material film layers1It is 1 μm -5 μm, the second refraction materials film
Layer thickness h2It is 50nm-500nm, noble metal film layer thickness h3It is 10nm-50nm, photosensitive material thin film layer thickness h4For
200nm-500nm, photoresist layer thickness h6It is 1 μm -3 μm.
Preferably, the first refractive index material is SiO2Or SiOxNy。
Preferably, the polymeric material is PDMS, PMMA or SU8 glue.
Preferably, the second refraction materials film is ZnS, Si3N4, TiO2, ZnO or tellurate glass.
In general, by the contemplated above technical scheme of the utility model compared with prior art, can obtain down
Row beneficial effect：
1) sensor prepared by is the nano fluid sensor based on photonic crystal, successfully solves traditional photon brilliant
Body sensor consumption detectable substance is excessive, the problem that detection time is long, measuring accuracy is not high, meanwhile, also eliminate Conventional nano stream
The few problem of body sensor unitary function, structural instability, passage；
2) prepare that sensor uses is associated materials and process program based on MEMS, and the dimensional accuracy of preparation is high, material
The chemical inertness of material is high, physical arrangement stabilization, can make prepared sensor and initial design with very high consistent
Property；
3) detected material can be directly entered all grooves by passing in and out head piece, send out the effective refractive index coefficient of sensor
Changing, so as to the huge table bulk area ratio for being dependent on nanometer fluid passage is used for quickly detecting, detects real-time, sensitivity
It is high；
4) there is significant humidification in the optical grating construction local area electric field of photonic crystal nanometer fluid sensor, work as utilization
When sensor carries out fluorescence analysis experiment, Fluorescence Increasing effect substantially, survey by the limting concentration for being advantageously implemented low concentration small molecule
Examination；
5) photonic crystal nanometer fluid sensor Stability Analysis of Structures, possess photonic crystal without label detection performance and local
Electric-field enhancing characteristic, while detection zone is defined in the micro of nanometer fluid passage.
Brief description of the drawings
Fig. 1 (a)~Fig. 1 (j) prepares each thing of the technique acquisition of photonic crystal nanometer fluid sensor for the utility model
The schematic diagram of body, wherein Fig. 1 (a)~Fig. 1 (d) are the schematic diagram for extracting nano-fluid circulation layer, and Fig. 1 (e)~Fig. 1 (g) is quarter
The schematic diagram of erosion nano-fluid circulation layer, Fig. 1 (h) is the schematic diagram for removing residue；Fig. 1 (i)~Fig. 1 (j) is to form import
With the process produced, Fig. 1 (k) is to eventually pass through the schematic diagram after encapsulation；
Fig. 2 (a)~Fig. 2 (c) is respectively front view, the right view of photonic crystal nanometer fluid sensor in the utility model
And upward view.
Fig. 3 is the axonometric drawing of photonic crystal nanometer fluid sensor in the utility model.
Fig. 4 is the SEM ESEM views of the photonic crystal nanometer fluid sensor of the utility model one embodiment：
A () is the optical grating construction figure that electron beam lithography photosensitive material is formed；B () is the noble metal film layer institute shape of reactive ion beam etching (RIBE)
Into metal grating structure；C photonic crystal light that () is formed by the second refraction materials film layer of reactive ion beam etching (RIBE)
Grid structure.
Fig. 5 is the reflection resonance wavelength collection of illustrative plates of photonic crystal nanometer fluid sensor in the utility model.
Specific embodiment
In order that the purpose of this utility model, technical scheme and advantage become more apparent, below in conjunction with accompanying drawing and implementation
Example, is further elaborated to the utility model.It should be appreciated that specific embodiment described herein is only used to explain
The utility model, is not used to limit the utility model.Additionally, institute in the utility model disclosed below each implementation method
As long as the technical characteristic being related to does not constitute conflict and can just be mutually combined each other.
A kind of 1~Fig. 3 of reference picture, photonic crystal nanometer fluid sensor, photonic crystal nanometer fluid sensor includes
Photoresist layer 14, silicon wafer substrate 1, the first refractive index material film layers 2, second set gradually according to order from the bottom to top
Refraction materials film layer 3 and polymeric material sealing layer 4, and their length and width is equal, second refraction
The top of rate material film layers 3 is provided with the optical grating construction of square waveform, and the optical grating construction includes that multiple grooves and multiple are raised
And they are alternately arranged, the raised top contacts with the bottom face of the first refractive index material film layers 2, the light
Photoresist layer 14, silicon wafer substrate 1, the refraction materials film layer 3 of first refractive index material film layers 2 and second collectively form sensing
Device base layer, is provided with the flow inlet 10 that is connected with all grooves and goes out head piece 11 on sensor base layer.
According to other side of the present utility model, the preparation of described photonic crystal nanometer fluid sensor is additionally provided
Method, comprises the following steps：
(1) deposition first refractive index material film layers 2：Reference picture 1 (a), using chemical vapour deposition technique, by first refractive
Rate material is deposited on the upper surface of silicon wafer substrate 1 and first refractive index material is paved with the upper surface of the silicon wafer substrate 1,
Thickness is obtained for h1First refractive index material film layers 2, wherein, the length of the silicon wafer substrate 1, width and height are respectively
It is a, b and h0；
(2) the second refraction materials film layer 3 is deposited：Reference picture 1 (b), using chemical vapour deposition technique, by the second refraction
Rate material is deposited on the upper surface of first refractive index material and the second refraction materials is paved with the first refractive index material thin
The upper surface of film layer 2, obtains thickness for h2The second refraction materials film layer 3, the second refraction materials film layer 3
Visible light wave range specific refractivity of the visible light wave range specific refractivity more than the first refractive index material film layers 2；
(3) sputter noble metal film layer 12：Reference picture 1 (c), cladding process is sputtered using electro beam physics, and noble metal is splashed
It is plated in the upper surface of the second refraction materials film layer 3 and the noble metal is paved with the second refraction materials film layer 3
Upper surface, obtain thickness for h3Noble metal film layer 12；
(4) gluing：Reference picture 1 (d), is spin-coated on photosensitive material the upper surface of noble metal film layer 12 and makes described photosensitive
Material is paved with the upper surface of the noble metal film layer 12, obtains thickness for h4Photosensitive material thin film layer 13, the photosensitive material
Material film layer 13, noble metal film layer 12 and the second refraction materials film layer 3 collectively form nano-fluid circulation layer；
(5) etching nano-fluid circulation layer：Reference picture 1 (e)~Fig. 1 (g), is etched, described by direction from top to bottom
The a plurality of groove 7 being parallel to each other is etched on nano-fluid circulation layer, the width of groove 7 is b1, so as in each side shape of groove 7
Raised into one, raised width is b2, all grooves 7 and all projections be collectively forming the optical grating construction of square waveform, wherein, it is described
The height of groove 7 is h5And h3+h4＜ h5＜ h2+h3+h4, i.e. the second non-eating thrown of refraction materials film layer, what it was etched
Partial height is h21, the height of non-etched portions is h22；Wherein, the etching of the second refraction materials film layer 3 highly influences
The effective refractive index coefficient for being ultimately formed sensor, therefore, different etching depth will produce different brilliant based on photon
The resonant wavelength of body, can be according to the change of etch thicknesses, the initial resonant wavelength needed for going setting；
(6) post-process：Reference picture 1 (h), removes photosensitive material thin film layer, and utilize noble metal solvent using organic solvent
The noble metal film layer 12 of removing；Wherein, photosensitive material thin film layer is for preparing required nanometer grating structure graph mould
Plate, noble metal film layer be for etch the second index film layer material, both at the material requested of preparation process,
It is not used to constitute sensor in itself, so technique will be disposed after completing again；
(7) etching is imported and exported：Reference picture 1 (i) and Fig. 1 (j)：Photoresist is spin-coated on the bottom of the silicon wafer substrate 1
Face is simultaneously paved with the lower surface of the silicon wafer substrate 1, so as to form thickness for h6Photoresist layer 14, the photoresist layer 14,
Silicon wafer substrate 1, the refraction materials film layer of first refractive index material film layers 2 and second collectively form sensor base layer,
Again by direction from bottom to up, photoresist is etched using photoetching process, using deep reaction ibl etched silicon wafer base
Bottom, using reactive ion beam etching (RIBE) method etching first refractive index material film layers 2 and first refractive index material film layers 3, etching
And sensor base layer described in eating thrown, so as to etch the influent stream connected with all grooves 7 on sensor base layer
Mouthfuls 10 and go out head piece 11 with all grooves 7 are connected, flow inlet 10, go out head piece 11 and all grooves 7 collectively form nanometer stream
Body passage；
(8) sealing-in：Reference picture 1 (k), enters in the upper surface paving one layer of polymeric material of the second refraction materials film layer 3
Row sealing-in, obtains polymeric material sealing layer 4, and the length and width of the polymeric material sealing layer 4 is respectively a and b.
Further, in step (5), using electron beam lithography, first etching and photosensitive material thin film layer 13 described in eating thrown, obtain
To a plurality of first groove, reactive ion beam method is recycled, in every the first groove etching and noble metal film layer described in eating thrown
12, a plurality of second groove is obtained, reactive ion beam etching (RIBE) method is then recycled, the second refraction materials film layer 3 is etched,
Obtain a plurality of 3rd groove, first groove of corresponding position, the second groove and the 3rd groove are collectively forming the groove
7, every groove 7 is exactly a passage for nano-fluid flowing, therefore optical grating construction has plurality of passages.
Further, the thickness h of described first refractive index material film layers 21It it is 1 μm -5 μm, the second refraction materials are thin
The thickness h of film layer 32It is 50nm-500nm, noble metal film 12 thickness h of layer3It is 10nm-50nm, photosensitive material thin film 13 thickness h of layer4
It is 200nm -500nm, the thickness h of photoresist layer 146It is 1 μm -3 μm.
Further, the first refractive index material is SiO2Or SiOxNy。
Further, the polymeric material is PDMS, PMMA or SU8 glue.
Further, second refraction materials are ZnS, Si3N4, TiO2, ZnO or tellurate glass.
Further, when a branch of coaxial, polarization white light beam vertical incidence sensor, the resonant wavelength of its reflection is set to
λ0, the cycle of the optical grating construction of square waveform is Λ (cycle of the cycle reference square wave of optical grating construction), then meet following relation：
Λ×neff=λ0
Further, the visible light wave range specific refractivity of the second refraction materials film layer 3 is ng, first refractive index material
The visible light wave range specific refractivity for expecting film layer 2 is nl, the visible light wave range specific refractivity of optical grating construction is nc, polymer
The visible light wave range specific refractivity of material layer is nupAnd effective visible light wave range folding of photonic crystal nanometer fluid sensor
Rate coefficient is penetrated for neff, and they meet following relation：
max{nl, nc, nup}<neff<ng
Wherein, max represents the maximum in be possible to value.
By above-mentioned relation formula, the interval range of the final effective refractive index coefficient of sensor is may indicate that, so that system
Author to the value of effective refractive index coefficient, and is had at the beginning of sensor is designed by its sensor resonant wavelength for being determined
Individual accurate valuation scope.
Further, the visible light wave range refraction coefficient of the second refraction materials film layer 3 is 1.8-2.8, described the
The visible light wave range specific refractivity of one refraction materials film layer 2 is 1.4-1.6, and the visible light wave range of the polymer is reflected
Rate coefficient is 1.4-1.6.
According to other side of the present utility model, a kind of photonic crystal nanometer fluid sensor is additionally provided, by described
Preparation method is made.
According to other side of the present utility model, additionally provide described photonic crystal nanometer fluid sensor test and receive
The method of rice fluid concentrations, comprises the following steps：
(1) nano-fluid is imported in the photonic crystal nanometer fluid sensor by flow inlet 10, then whole photon
The effective refractive index coefficient n of crystalline nanometric fluid sensor sensoreffCan rise；
(2) it is brilliant to photon using a branch of coaxial polarized white light vertical incidence after nano-fluid is completely into all grooves 7
The upper surface of body nano fluid sensor, using spectrometer with incident light identical path on receive reflecting light, then in light
A branch of resonance light wave is collected on spectrometer, the crest value of the light wave that resonates is λm, by λmThe frequency displacement variable quantity of value can then obtain nanometer
The concentration of fluid.
Fig. 4 is the surface sweeping electron microscope of the photonic crystal nanometer fluid sensor of the utility model embodiment, and Fig. 4 (a) is sense
The optical grating construction that luminescent material is formed after electron beam lithography, Fig. 4 (b) is precious metal material by institute after reactive ion beam etching (RIBE)
The optical grating construction of formation, Fig. 4 (c) is the screen periods structure formed after the reacted ion beam etching of the second refraction materials
Figure.
Fig. 5 is the resonant wavelength collection of illustrative plates of the photonic crystal nanometer fluid sensor of the utility model embodiment.As seen from the figure,
In the presence of two resonance spectrums of different frequency.When photonic crystal the second refraction materials film layer 3 thickness more than 300nm
When, its high order resonance spectrum can manifest.
As it will be easily appreciated by one skilled in the art that preferred embodiment of the present utility model is the foregoing is only, not
It is used to limit the utility model, all any modifications made within spirit of the present utility model and principle, equivalent and changes
Enter, should be included within protection domain of the present utility model.
Claims (5)
1. a kind of photonic crystal nanometer fluid sensor, it is characterised in that photonic crystal nanometer fluid sensor include according to
Photoresist layer, silicon wafer substrate, first refractive index material film layers, the second refractive index material that order from the bottom to top sets gradually
Material film layer and polymeric material sealing layer, the top of the second refraction materials film layer is provided with the grating knot of square waveform
Structure, the optical grating construction include multiple grooves and it is multiple raised and they be alternately arranged, the raised top and described the
One refraction materials film layer bottom face contact, the photoresist layer, silicon wafer substrate, first refractive index material film layers and
Second refraction materials film layer collectively forms sensor base layer, is provided with the sensor base layer equal with all grooves
The flow inlet of connection and go out head piece.
2. photonic crystal according to claim 1 nanometer fluid sensor, it is characterised in that described first refractive index material
Expect the thickness h of film layer1It is 1 μm -5 μm, the second refraction materials thin film layer thickness h2It is 50nm-500nm, noble metal film layer
Thickness h3It is 10nm-50nm, photosensitive material thin film layer thickness h4It is 200nm-500nm, photoresist layer thickness h6It is 1 μm -3 μm.
3. photonic crystal according to claim 1 nanometer fluid sensor, it is characterised in that the first refractive index material
It is SiO2Or SiOxNy。
4. photonic crystal according to claim 1 nanometer fluid sensor, it is characterised in that the polymeric material is
PDMS, PMMA or SU8 glue.
5. photonic crystal according to claim 1 nanometer fluid sensor, it is characterised in that second refraction materials
Film is ZnS, Si3N4, TiO2, ZnO or tellurate glass.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621292031.XU CN206224010U (en) | 2016-11-29 | 2016-11-29 | A kind of photonic crystal nanometer fluid sensor |
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| CN201621292031.XU CN206224010U (en) | 2016-11-29 | 2016-11-29 | A kind of photonic crystal nanometer fluid sensor |
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| CN206224010U true CN206224010U (en) | 2017-06-06 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106646681A (en) * | 2016-11-29 | 2017-05-10 | 华中科技大学 | Photonic crystal nano-fluid sensor, preparation method and application thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106646681A (en) * | 2016-11-29 | 2017-05-10 | 华中科技大学 | Photonic crystal nano-fluid sensor, preparation method and application thereof |
| CN106646681B (en) * | 2016-11-29 | 2018-04-10 | 华中科技大学 | A kind of photonic crystal nanometer fluid sensor, its preparation method and application |
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Granted publication date: 20170606 Termination date: 20191129 |