CN206223679U - Photomask detection device - Google Patents
Photomask detection device Download PDFInfo
- Publication number
- CN206223679U CN206223679U CN201621170674.7U CN201621170674U CN206223679U CN 206223679 U CN206223679 U CN 206223679U CN 201621170674 U CN201621170674 U CN 201621170674U CN 206223679 U CN206223679 U CN 206223679U
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- light shield
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- 238000001514 detection method Methods 0.000 title claims abstract description 108
- 238000012937 correction Methods 0.000 claims abstract description 62
- 239000002245 particle Substances 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 26
- 230000008569 process Effects 0.000 claims description 24
- 238000004020 luminiscence type Methods 0.000 claims description 18
- 238000010586 diagram Methods 0.000 claims description 15
- 238000012545 processing Methods 0.000 abstract description 5
- 230000009471 action Effects 0.000 description 6
- 238000005498 polishing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Abstract
The utility model discloses a light shield detection device contains rotation platform, load-bearing platform, image acquisition module and detection processing module. One side of the rotating platform is provided with a light-emitting unit. The bearing platform is arranged on one surface of the rotating platform, which is provided with the light-emitting unit, the bearing platform bears the photomask, and the light-emitting unit irradiates one surface of the photomask, which corresponds to the rotating platform. The image capturing module corresponds to the other side of the photomask and is positioned above the bearing platform so as to collect a pre-correction image of the photomask. The detection processing module receives and judges whether the photomask in the image before correction accords with a preset placing position, if not, a correction signal is generated, the rotating platform horizontally rotates for a correction angle according to the correction signal, if so, a detection signal is generated, the image acquisition module acquires a full-width detection image of the photomask, the detection processing module acquires photomask information by receiving and reading a bar code icon on the full-width detection image, and particles in the full-width detection image are detected to generate detection information.
Description
Technical field
The utility model is related to a kind of light shield detection means, more particularly to a kind of placement that can be by rotatable platform to light shield
Position is corrected, and utilizes large area backlight polishing mode, and the full width for gathering clearly light shield detects what image was detected
Light shield detection means.
Background technology
For existing semiconductor element manufacturing technology, the circuit pattern of semiconductor element is by circuit diagram by light shield
Case is transferred to what is formed on the surface of wafer.
Due to the microminiaturization of semiconductor element, during semiconductor element is manufactured, the defect of light shield will shadow significantly
The quality of the circuit pattern of silicon wafer surface is rung, for example, causes the distortion or deformation of circuit pattern；It is most common at present to cause light
The reason for cover defect is that the surface of light shield has particulate.
Hold above-mentioned, how before the use of light shield, the attached fine-grained light shield in surface is detected, will be that this correlation is produced
Industry needs the big problem of for thinking deeply and solving badly.
Utility model content
The purpose of this utility model is to provide a kind of light shield detection means, and be used to solve in background technology to be faced asks
Topic.
In order to realize the above object the utility model provides a kind of light shield detection means, comprising rotatable platform, carry flat
Platform, image acquisition module and detection process module.The one side of rotatable platform sets luminescence unit.Carrying platform is located at rotatable platform
It is provided with the one side of luminescence unit, carrying platform carries light shield, and luminescence unit irradiates the one side of light shield correspondence rotatable platform.Shadow
As the another side of acquisition module correspondence light shield, and positioned at the top of carrying platform, with image before the correction for gathering light shield.Receive simultaneously
Judge whether the light shield in the preceding image of correction meets default placement location, correction signal is produced if not meeting, make rotatable platform
Correction angle is rotated according to level correction signal, detection signal is produced if meeting, image acquisition module is gathered the complete of light shield
Width detects image, receives and reads the bar code diagram on full width detection image and obtain light shield information, and detects that full width is detected
Particulate in image is producing the detection process module of detection information, its connection rotatable platform and image acquisition module.
It is preferred that at least two neighbouring corners on light shield can respectively have positioning to illustrate.
It is preferred that light shield detection means can also detect image and detection information comprising full width is received, and detection is shown according to this
The display module of picture, its connecting detection processing module.
It is preferred that light shield detection means can also include conveying, its connection rotatable platform makes rotatable platform along conveying
Guide rail shift reciprocately.
It is preferred that luminescence unit can be backlight.
It is preferred that correction angle can be 0 to 360 degree.
It is preferred that detection information can be comprising particles position, particle size or its combination.
In sum, before the correction that light shield detection means of the present utility model is gathered by image acquisition module image and
Image after the correction of subsequent acquisition, so that detection process module judges according to this, so as to have correction light shield to correct placement position
Effect；Further, large area polishing is carried out to light shield by luminescence unit, can makes to detect image to the full width of light shield collection
It is apparent, so as to reach the purpose of Precision measurement, and have the advantages that to promote detection efficiency.
Brief description of the drawings
Fig. 1 is the schematic diagram of light shield detection means of the present utility model.
Fig. 2 is the block diagram of light shield detection means of the present utility model.
Fig. 3 is the schematic diagram of the light shield of light shield detection means of the present utility model.
Symbol description
100：Light shield detection means
101：Bar code is illustrated
102：Positioning diagram
110：Rotatable platform
111：Luminescence unit
120：Carrying platform
121：Light shield
130：Image acquisition module
140：Detection process module
150：Display module
160：Conveying.
Specific embodiment
For sharp auditor understands feature of the present utility model, content and advantage and its effect to be reached, hereby by this reality
With new cooperation schema, and expression-form in conjunction with the embodiments describes as follows, and the accompanying drawing used in it in detail, and its purport is only
It is used to illustrate and aiding in illustrating book, the actual proportions after may not being applied for the utility model and precisely configuration, therefore should not be with regard to appended
Accompanying drawing ratio and configuration relation understand, interest field of the limitation the utility model on actually implementing.
Advantage of the present utility model, feature and the technical method for reaching will enter with reference to exemplary embodiments and institute's accompanying drawings
Row is more fully described and is easier to understand, and the utility model or can realize in different forms, therefore not it is understood that only limiting
In embodiments set forth herein, on the contrary, for art tool usually intellectual, the embodiment for being provided will
Make this exposure more thoroughly with comprehensively and intactly pass on category of the present utility model, and the utility model will only be attached
Claim is defined.
Refer to Fig. 1 and schematic diagram that 2, Fig. 1 are light shield detection means of the present utility model；Fig. 2 is of the present utility model
The block diagram of light shield detection means.As illustrated, light shield detection means 100 of the present utility model contains rotatable platform 110, holds
Carrying platform 120, image acquisition module 130 and detection process module 140.Wherein, rotatable platform 110 is used to drive carrying platform
120 together rotate to be corrected, and image acquisition module 130 is then in the corresponding image of each phase acquisition, and detection process module
140 are electrically connected with the rotatable platform 110 and image acquisition module 130, and produce corresponding signal to be used for controlling in each stage
The action of rotatable platform processed 110, image acquisition module 130 or other module components.
In more detail, the one side of the rotatable platform 110 that light shield detection means 100 of the present utility model is included is provided with
Luminescence unit 111；Luminescence unit 111 can be backlight, carry out large area polishing with to light shield 121, but be not limited thereto.
Carrying platform 120 is provided with the one side of luminescence unit 111 located at rotatable platform 110, and carrying platform 120 carries light
Cover 121, light shield 121 is apart from the certain distance of luminescence unit 111, and luminescence unit 111 then irradiates the corresponding rotatable platform of light shield 121
110 one side.
The another side of the correspondence light shield 121 of image acquisition module 130, and positioned at the top of carrying platform 120, for gathering light
Image before the correction of cover 121；However, image acquisition module 130 is not only to image before the acquisition correction of light shield 121, then image
Acquisition module 130 will gather full width detection image to light shield 121；Image acquisition module 130 can also be in collection full width detection shadow
The image after at least one correction of collection as before；This will be described in detail in subsequent content.
Whether the light shield 121 that detection process module 140 receives and judges to correct in preceding image meets default placement location, if
Do not meet, produce correction signal, make rotatable platform 110 according to correction signal, horizontally rotate correction angle, correction angle be 0 to
360 degree；Detection signal is produced if meeting, image acquisition module 130 is gathered the full width detection image of light shield 121, at detection
The bar code diagram that reason module 140 is received and read on full width detection image obtains light shield information, and detects that full width detects image
In particulate producing detection information.
After rotatable platform 110 horizontally rotates correction angle, the light shield 121 that image acquisition module 130 can be after acquisition correction
Correction after image, when detection process module 140 receive and judge correction after image in light shield 121 meet default placement location
When, detection signal will be produced so that the full width that image acquisition module 130 gathers light shield 121 detects image；If after correction in image
Light shield 121 when not meeting default placement location, will again produce correction signal to rotatable platform 110.Therefore, when detection process mould
When block 140 judges that the light shield 121 before correction does not meet default placement location, need to perform and be rotated by rotatable platform 110 at least one times
Correction, then correction to default placement is judged whether for detection process module 140 with image after the acquisition correction of image acquisition module 130
The corrective action of position, can complete the correction of the placement location of light shield 121；In other words, in the placement location of correction light shield 121
Trimming process in, rotatable platform 110 will perform rotation at least one times, and image acquisition module 130 is then gathered at least one times
Image after correction.
In practical operation light shield detection means 100 of the present utility model, need to be by mechanical arm or artificial method of shipment
Light shield 121 to be detected is put as on carrying platform 120；Regardless of whether being with mechanical arm or artificial transport, the phase of light shield 121
Placement location for carrying platform 120 is all possible to error.
Therefore, the utility model light shield detection means 100 needs first to be corrected detection to light shield 121；First, image capture
Module 130 by gather light shield 121 correction before image；Detection process module 140 will receive what image acquisition module 130 was gathered
Image before correction, and judgement is analyzed to image before correction.Wherein, if judged result its meet default placement location, i.e. light
When the placement location of cover 121 does not have error, detection process module 140 will be corresponded to and produce detection signal, and detection is believed
Image acquisition module 130 number is sent to, image acquisition module 130 will gather full width detection shadow to light shield 121 according to detection signal
Picture, and it is supplied to detection process module 140 to be tested and analyzed full width detection image.
If judged result is not for when meeting default placement location, then it represents that placement position of the light shield 121 with respect to carrying platform 120
Put and there is error, therefore need to be corrected；Detection process module 140 will correspondence produce correction signal, and transmit correction signal to turn
Moving platform 110, a correction angle is rotated to order about rotatable platform 110 according to correction signal.Image acquisition module 130 will rotated
Platform 110 rotate after, to image after the acquisition correction of light shield 121 after correction, and provide correction after image give detection process module
140 carry out discriminatory analysis.
Further, if the judged result after correction is for when meeting default placement location, then it represents that correction is completed, at detection
Correspondence is produced detection signal by reason module 140, and to carry out subsequent detection action, the detection is acted in above-mentioned middle explanation, therefore not
Repeated again.If judged result does not still meet default placement location, above-mentioned corrective action, this corrective action need to be again performed
Comprising image after producing correction signal, rotating a correction angle and acquisition correction for actions such as analysis judgements.
When image after image, correction before image acquisition module 130 is to the acquisition correction of light shield 121 or full width detection image,
Luminescence unit 111 is beaten the irradiation that the one side of the corresponding luminescence unit 111 (or rotatable platform 110) of light shield 121 carries out large area
Light.
Detection process module 140 is in reading full width and detecting image (or before correction after image, correction image) positioned at light
Bar code diagram on cover 121, and then the light shield information of correspondence light shield 121 is obtained, light shield information can include light shield title, class
The relevant informations such as type, size, and then detection process module 140 can take the detection pattern of corresponding these light shield information to examine full width
Image is surveyed to be detected.
After processing module to be detected 140 is to full width detection Image detection, correspondence is produced into detection information, detection information can
Comprising the particles position on light shield 121, particle size or its combination, and other relevant informations.Above are only this practicality
One of them new is illustrated, should not be as limit.
Additionally, as described in Figure 2, light shield detection means 100 of the present utility model is also wrapped in addition to comprising said elements and module
Containing display module 150, display module 150 is electrically connected with detection process module 140, and then can receive full width detection image and detection
Information, and detection picture is shown according to this；Testing staff can carry out associative operation in picture is detected.
On the other hand, light shield detection means 100 of the present utility model can more be included in addition to comprising said elements and module
Conveying 160, its connection rotatable platform 110, so that rotatable platform 110 can be along the shift reciprocately of conveying 160.
Fig. 3 is referred to, it is the schematic diagram of the light shield of light shield detection means of the present utility model.As illustrated, light shield 121
On bar code diagram 101 be available for detection process module 140 read so that obtains correspondingly light shield 121 light shield information；Light shield 121
At least two neighbouring corners can be respectively equipped with positioning diagram 102 so that detection process module 140 can be according to shadow before correction
At least two shown in the image positions of positioning diagram 102 as in or after correction, judge whether light shield 121 meets default putting
Seated position.
In sum, before the correction that light shield detection means of the present utility model is gathered by image acquisition module image and
Image after the correction of subsequent acquisition, so that detection process module judges whether light shield is located at correct placement location according to this；Enter one
Step ground, large area polishing is carried out by luminescence unit to light shield, so that can be apparent to the full width detection image of light shield collection,
So as to reach the purpose of Precision measurement, and have functions that to promote detection efficiency.
Embodiment described above is only that, to illustrate technological thought of the present utility model and feature, its purpose makes to be familiar with this
The personage of skill will appreciate that content of the present utility model and implements according to this, can not limit power of the present utility model with this certainly
Profit is required, i.e., should probably covered new in this practicality according to the spiritual impartial change made disclosed in the utility model or modification
In the scope of the claims of type.
Claims (7)
1. a kind of light shield detection means, it is characterised in that include：
Rotatable platform, it is simultaneously provided with luminescence unit；
Carrying platform, is to be located at the rotatable platform to be provided with the one side of the luminescence unit, and the carrying platform carries light shield,
And the luminescence unit is the one side of the irradiation light shield correspondence rotatable platform；
Image acquisition module, is the another side of the correspondence light shield, and positioned at the top of the carrying platform, to gather the light
Image before the correction of cover；And
Receive and judge whether the light shield before the correction in image meets default placement location, school is produced if not meeting
Positive signal, makes the rotatable platform rotate correction angle according to the level correction signal, and detection signal is produced if meeting, and makes
The image acquisition module gathers the full width detection image of the light shield, receives and read the bar shaped on the full width detection image
Code is illustrated and obtains light shield information, and detects the particulate in the full width detection image to produce the detection process mould of detection information
Block, connects the rotatable platform and the image acquisition module.
2. light shield detection means as claimed in claim 1, it is characterised in that at least two neighbouring corners on the light shield
Place, is respectively equipped with positioning diagram.
3. light shield detection means as claimed in claim 1, it is characterised in that its also comprising receive the full width detection image and
The detection information, and the display module of detection picture is shown according to this, connect the detection process module.
4. light shield detection means as claimed in claim 1, it is characterised in that it also includes conveying, connects the rotation
Platform, so that the rotatable platform is along the conveying shift reciprocately.
5. light shield detection means as claimed in claim 1, it is characterised in that the luminescence unit is backlight.
6. light shield detection means as claimed in claim 1, it is characterised in that the correction angle is 0 to 360 degree.
7. light shield detection means as claimed in claim 1, it is characterised in that the detection information includes particles position, particulate
Size or its combination.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104217914 | 2015-11-09 | ||
| TW104217914U TWM516174U (en) | 2015-11-09 | 2015-11-09 | Mask inspection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206223679U true CN206223679U (en) | 2017-06-06 |
Family
ID=55640140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621170674.7U Active CN206223679U (en) | 2015-11-09 | 2016-10-26 | Photomask detection device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN206223679U (en) |
| TW (1) | TWM516174U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109187549A (en) * | 2018-07-26 | 2019-01-11 | 上海工程技术大学 | A kind of detection method for backing layer edging defect detection station after rearview mirror |
| CN113155836A (en) * | 2021-05-06 | 2021-07-23 | 艾斯尔光电(南通)有限公司 | Photomask surface quality detection method based on visual detection technology |
| CN114180300A (en) * | 2020-09-15 | 2022-03-15 | 株式会社斯库林集团 | Workpiece receiving device, workpiece conveying device, inspection device, placement support method, and inspection method |
| WO2022142364A1 (en) * | 2021-01-04 | 2022-07-07 | 长鑫存储技术有限公司 | Method and apparatus for correcting placement error of mask |
| CN116969153A (en) * | 2018-11-29 | 2023-10-31 | 深圳宜美智科技股份有限公司 | FPC board switching system and corresponding FPC board outward appearance detects machine |
-
2015
- 2015-11-09 TW TW104217914U patent/TWM516174U/en unknown
-
2016
- 2016-10-26 CN CN201621170674.7U patent/CN206223679U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109187549A (en) * | 2018-07-26 | 2019-01-11 | 上海工程技术大学 | A kind of detection method for backing layer edging defect detection station after rearview mirror |
| CN116969153A (en) * | 2018-11-29 | 2023-10-31 | 深圳宜美智科技股份有限公司 | FPC board switching system and corresponding FPC board outward appearance detects machine |
| CN114180300A (en) * | 2020-09-15 | 2022-03-15 | 株式会社斯库林集团 | Workpiece receiving device, workpiece conveying device, inspection device, placement support method, and inspection method |
| WO2022142364A1 (en) * | 2021-01-04 | 2022-07-07 | 长鑫存储技术有限公司 | Method and apparatus for correcting placement error of mask |
| CN114721226A (en) * | 2021-01-04 | 2022-07-08 | 长鑫存储技术有限公司 | Method and device for correcting photomask placement error |
| CN114721226B (en) * | 2021-01-04 | 2023-08-25 | 长鑫存储技术有限公司 | Photomask placement error correction method and device |
| CN113155836A (en) * | 2021-05-06 | 2021-07-23 | 艾斯尔光电(南通)有限公司 | Photomask surface quality detection method based on visual detection technology |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM516174U (en) | 2016-01-21 |
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