CN206203407U - 一种芯片光刻机的光刻版自动送取料装置 - Google Patents
一种芯片光刻机的光刻版自动送取料装置 Download PDFInfo
- Publication number
- CN206203407U CN206203407U CN201621288105.2U CN201621288105U CN206203407U CN 206203407 U CN206203407 U CN 206203407U CN 201621288105 U CN201621288105 U CN 201621288105U CN 206203407 U CN206203407 U CN 206203407U
- Authority
- CN
- China
- Prior art keywords
- suction disc
- reticle
- suction
- negative
- mouthful
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201621288105.2U CN206203407U (zh) | 2016-11-29 | 2016-11-29 | 一种芯片光刻机的光刻版自动送取料装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201621288105.2U CN206203407U (zh) | 2016-11-29 | 2016-11-29 | 一种芯片光刻机的光刻版自动送取料装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN206203407U true CN206203407U (zh) | 2017-05-31 |
Family
ID=58748242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201621288105.2U Active CN206203407U (zh) | 2016-11-29 | 2016-11-29 | 一种芯片光刻机的光刻版自动送取料装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN206203407U (zh) |
-
2016
- 2016-11-29 CN CN201621288105.2U patent/CN206203407U/zh active Active
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104209723B (zh) | 一种电子产品显示屏外边框安装设备 | |
CN104808364B (zh) | 一种液晶显示器偏光片贴附装置 | |
CN104960304B (zh) | 一种全自动电池电芯贴保护膜机 | |
CN203611549U (zh) | 网印机的印刷台面装置 | |
CN103922252B (zh) | 快速加盖机 | |
CN102998172B (zh) | 塑料片材拉伸试验机的片材夹具 | |
CN206203407U (zh) | 一种芯片光刻机的光刻版自动送取料装置 | |
CN107472582A (zh) | 面膜自动分取装置及全自动面膜折叠包装机 | |
CN109702802A (zh) | 一种独立分块吸附平台、控制电路及控制方法 | |
CN106742225B (zh) | 自动贴膜装置的工作方法 | |
CN206510431U (zh) | 一种3d打印机 | |
CN106672616A (zh) | 一种芯片光刻机的光刻版自动送取料装置 | |
CN205767564U (zh) | 光敏树脂3d打印机控制装置 | |
CN204462202U (zh) | 通用假压测试治具 | |
CN106742226B (zh) | 一种正负压切换自动贴膜装置 | |
CN209079225U (zh) | 光固化3d打印机 | |
CN206244054U (zh) | 一种芯片光刻机的光刻版取料装置 | |
CN204736522U (zh) | 一种贴合机构 | |
CN204389838U (zh) | 便携式显示屏组合装置 | |
CN207104713U (zh) | 一种夹具 | |
CN106042601A (zh) | 一种高效触控屏压合机 | |
CN206589458U (zh) | 一种中空产品定位装置 | |
CN208165364U (zh) | 一种试管装料装置 | |
CN207275183U (zh) | 一种真空定位贴膜纸夹具 | |
CN210835583U (zh) | 一种纳米模板用拼板压印机 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 215600 Fuxin Road, Zhangjiagang economic and Technological Development Zone, Suzhou, Jiangsu 2 Patentee after: Jiangsu jinyuda Semiconductor Co.,Ltd. Address before: 215600 Fuxin Road, Zhangjiagang economic and Technological Development Zone, Suzhou, Jiangsu 2 Patentee before: SUZHOU JYD INDUSTRIAL Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
CP03 | Change of name, title or address |
Address after: 215600 Fuxin Road, Zhangjiagang economic and Technological Development Zone, Suzhou, Jiangsu 2 Patentee after: SUZHOU JYD INDUSTRIAL Co.,Ltd. Address before: 215600 Zhangjiagang jinyuda Electronic Technology Co., Ltd., No.2, Fuxin Road, Zhangjiagang Economic and Technological Development Zone, Suzhou City, Jiangsu Province Patentee before: ZHANGJIAGANG JINYUDA ELECTRONIC TECHNOLOGY Co.,Ltd. |
|
CP03 | Change of name, title or address |