CN206192948U - Moisture measurement device and lamb wave sensor - Google Patents
Moisture measurement device and lamb wave sensor Download PDFInfo
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- CN206192948U CN206192948U CN201621242876.8U CN201621242876U CN206192948U CN 206192948 U CN206192948 U CN 206192948U CN 201621242876 U CN201621242876 U CN 201621242876U CN 206192948 U CN206192948 U CN 206192948U
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- lamb wave
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Abstract
The utility model discloses a moisture measurement device and lamb wave sensor, wherein, this lamb wave sensor includes: the silicon substrate layer, the ground electrode layer sets up on the silicon substrate layer, the piezoelectric membrane sets up on the ground electrode layer, interdigital electrode sets up on the piezoelectric membrane, wherein, the bottom coating on silicon substrate layer has the hydrophilic material layer, is used for absorbing moisture in the gas. The utility model discloses a silicon substrate layer bottom coating hydrophilic material layer at the lamb wave sensor for during moisture in measuring the air current, because absorption moisture leads to the quality to take place the transform, and then arouses vibration frequency's change, owing to can measure the moisture in the gas, realize the application of lamb wave sensor in moisture measurement.
Description
Technical field
The utility model is related to field of measuring technique, and in particular to a kind of device for measuring moisture and Lamb wave sensor.
Background technology
Moisture mainly uses capacitance method, electrolysis and dew point method etc. in domestic measurement high-purity gas at present.But with
The high speed development of electronics industry, chemical industry, certainty of measurement, the speed of these methods cannot meet more and more tighter gradually
The ultramicron water analysis demand of lattice, concentration as little as 10-9 volume fractions (ppbv) rank.
Inventor has found, piezoelectric acoustic transducer (such as blue nurse (Lamb) wave sensor) is in detection sensitivity, selective, micro-
The aspects such as the analysis of amount sample amounts, response time, volume possess unique advantage, meet ultramicron moisture in high-end manufacturing industry gas
Rapidly, continuously, on-line analysis and monitoring requirements.Inventor has been found that existing piezoelectric transducer possesses in measuring gas
A kind of pressure based on single Lamb wave device disclosed in the basis of moisture, such as Chinese patent literature CN105241505A
With flow velocity multiparameter measuring device and method, wherein, Lamb wave sensor be sequentially provided with from bottom to up layer-of-substrate silicon, ground electrode,
Alumina dielectric film and interdigital electrode.Although the Lamb wave sensor can be used for measuring the flow velocity and pressure of fluid, but
But cannot be used for detecting the moisture in gas.
Utility model content
The technical problems to be solved in the utility model is the moisture that existing Lamb wave sensor cannot be measured in gas,
So as to provide a kind of device for measuring moisture and Lamb wave sensor.
A kind of one side of the utility model embodiment, there is provided Lamb wave sensor, for measuring the moisture in gas,
The Lamb wave sensor includes：Layer-of-substrate silicon；Ground electrode layer, is arranged in the layer-of-substrate silicon；Piezoelectric membrane, is arranged on institute
State on ground electrode layer；Interdigital electrode, is arranged on the piezoelectric membrane；Wherein, the bottom of the layer-of-substrate silicon is coated with hydrophilic
Property material layer, for absorbing the moisture in the gas.
Alternatively, the piezoelectric membrane is aluminum nitride piezoelectric film.
Alternatively, the ground electrode layer is the titanium bed of material or the molybdenum materials bed of material.
Alternatively, the bottom of the layer-of-substrate silicon is provided with etching tank, wherein, the hydrophilic materials are coated in described
In etching tank.
Alternatively, the hydrophilic materials are one below：Layer of nanomaterial, polyethylene organic film, fibrous material
Layer, graphene oxide composite material layer.
A kind of another aspect of the utility model embodiment, there is provided device for measuring moisture, including：Runner base, thereon
Set fluted, the bottom portion of groove is provided with gas flow；Lamb wave sensor, is arranged in the groove；Runner upper plate,
It is covered on the runner base.
Alternatively, the bottom of the layer-of-substrate silicon of the Lamb wave sensor is towards the gas flow.
Alternatively, the position for being contacted with the Lamb wave sensor in the groove side sets seal member.
Alternatively, the seal member is sealing ring, wherein, the groove outside is provided with annular groove, for setting
Sealing ring is stated, the depth of the height more than the annular groove of the sealing ring, the sealing ring connects with the Lamb wave sensor
Touch, form sealing.
Alternatively, also include：Circuit board, is covered on the runner upper plate；Spring probe, its one end and the circuit board
Electrical connection, the other end is through the runner upper plate and extends and forms spring contact, wherein, the spring contact and the Lamb wave
Interdigital electrode and ground electrode the layer electrical connection of sensor.
According to the utility model embodiment, hydrophilic material is coated by the layer-of-substrate silicon bottom of Lamb wave sensor
Layer so that in the moisture in measuring air-flow, cause quality to convert due to absorbing moisture, and then cause the change of vibration frequency
Change, due to the moisture in gas can be measured, realize application of the Lamb wave sensor in moisture measurement.In addition, this practicality
The Lamb wave sensor that new embodiment is provided relative to other piezoelectric transducers, with high excellent of small volume, sensitivity
Gesture.
Brief description of the drawings
In order to illustrate more clearly of the utility model specific embodiment or technical scheme of the prior art, below will be right
The accompanying drawing to be used needed for specific embodiment or description of the prior art is briefly described, it should be apparent that, describe below
In accompanying drawing be some implementation methods of the present utility model, for those of ordinary skill in the art, do not paying creativeness
On the premise of work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is a schematic diagram for specific example of Lamb wave sensor in the utility model embodiment；
Fig. 2 is an explosive view for specific example of device for measuring moisture in the utility model embodiment；
Fig. 3 shows the internal structure schematic diagram of runner base in Fig. 2；
Fig. 4 is a flow chart for specific example of moisture measuring method in the utility model embodiment；
Fig. 5 is the flow chart of another specific example of moisture measuring method in the utility model embodiment；
Fig. 6 is a flow chart for specific example of gas humidity measuring method in the utility model embodiment；
Fig. 7 is the flow chart of another specific example of gas humidity measuring method in the utility model embodiment.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with accompanying drawing, it is clear that described
Embodiment is a part of embodiment of the utility model, rather than whole embodiments.Based on the embodiment in the utility model, this
The every other embodiment that field those of ordinary skill is obtained under the premise of creative work is not made, belongs to this practicality
Novel protected scope.
It is term " " center ", " on ", D score, "left", "right", " perpendicular, it is necessary to explanation in description of the present utility model
Directly ", the orientation or position relationship of the instruction such as " level ", " interior ", " outward " are, based on orientation shown in the drawings or position relationship, to be only
Described with simplified for the ease of description the utility model, must had rather than the device or element for indicating or implying meaning specific
Orientation, with specific azimuth configuration and operation, therefore it is not intended that to limitation of the present utility model.
, it is necessary to explanation, unless otherwise clearly defined and limited, term " is pacified in description of the present utility model
Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or integratedly
Connection；Can mechanically connect, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary,
Two connections of element internal are can also be, can be wireless connection, or wired connection.For the common skill of this area
For art personnel, concrete meaning of the above-mentioned term in the utility model can be understood with concrete condition.
As long as additionally, technical characteristic involved in the utility model different embodiments disclosed below is each other
Not constituting conflict can just be combined with each other.
The utility model embodiment provides a kind of Lamb wave sensor, and the Lamb wave sensor can be used for measuring gas
In moisture, specifically, can be used for measure gas relative humidity.
As shown in figure 1, the Lamb wave sensor includes：Set gradually from top to bottom layer-of-substrate silicon 91, ground electrode layer 93,
Piezoelectric membrane 94 and interdigital electrode 95.Ground electrode layer 93 is arranged in layer-of-substrate silicon 91；Piezoelectric membrane 94 is arranged on ground electrode layer
On 93；Interdigital electrode 95 is arranged on piezoelectric membrane 94.Further, the bottom of layer-of-substrate silicon 91 is coated with hydrophilic materials
92, for absorbing the moisture in gas.When the moisture in measuring gas, the hydrophilic materials 92 and air flow contacts,
Hydrophilic materials 92 have stronger water imbibition, by the moisture absorption in air-flow, cause its quality to increase.
Because the Lamb wave sensor of the utility model embodiment includes upper/lower electrode (ground electrode layer 93 and interdigital electrode
95, may each be plane electrode) and folder piezoelectric membrane 94 between them, when voltage is applied on electrode, piezoelectric membrane
94 produce mechanical deformation due to inverse piezoelectric effect, and particle occurs elastic vibration in piezoelectric membrane 94, and formation is propagated in it
Elastic mechanical ripple, then roundtrip forms mechanical resonant ripple between electrodes, and then interdigital electrode passes through direct piezoelectric effect
The mechanical oscillation that will be transmitted are transformed into electric signal and transfer out.When hydrophilic materials 92 and air flow contacts, and absorb air-flow
In moisture when, its quality changes, and causes and produce in Lamb wave sensor mechanical oscillation to change, such as vibration frequency hair
Raw skew, based on the principle, can exactly detect the moisture in air-flow.
According to the utility model embodiment, hydrophilic material is coated by the layer-of-substrate silicon bottom of Lamb wave sensor
Layer so that in the moisture in measuring air-flow, cause quality to convert due to absorbing moisture, and then cause the change of vibration frequency
Change, due to the moisture in gas can be measured, realize application of the Lamb wave sensor in moisture measurement.In addition, this practicality
The Lamb wave sensor that new embodiment is provided relative to other piezoelectric transducers, with high excellent of small volume, sensitivity
Gesture.
The hydrophilic materials 92 of the utility model embodiment can be applied directly to the bottom of layer-of-substrate silicon 91, it is also possible to
It is as shown in figure 1, be provided with etching tank in the bottom of layer-of-substrate silicon 91, hydrophilic materials 92 to be coated in etching tank.
Layer-of-substrate silicon 91 primarily serves supporting role, wherein, the thickness of the layer-of-substrate silicon at corrosion groove location is no more than
10um, to improve the mass sensitivity that Lamb wave sensor vibrates to piezoelectric membrane.
Alternatively, the piezoelectric membrane of the utility model embodiment is aluminum nitride piezoelectric film.Aluminum nitride piezoelectric film has
High sensitivity, such that it is able to improve the accuracy of moisture measurement.
Alternatively, ground electrode layer is the titanium bed of material or the molybdenum materials bed of material.The titanium bed of material or the molybdenum materials bed of material are conducive to nitridation
The growth that aluminium piezoelectric membrane sputtering sedimentation thereon is, the aluminium nitride film for obtaining and the titanium bed of material or the knot of the molybdenum materials bed of material
Conjunction intensity is high, and organization structure of film is uniform.
Alternatively, hydrophilic materials are one below：Layer of nanomaterial, polyethylene organic film, fibrous material layer, oxygen
Graphite alkene composite layer.Wherein, layer of nanomaterial can preferably CNT or nano-titanium dioxide film, wherein,
CNT is divided into two kinds, and one kind is modification carboxyl, and a kind of is modification amino, because amino and hydrone form hydrogen bond, because
The water absorbing properties of the CNT of this modification amino are good, have preferable suction-operated to hydrone, improve the essence of moisture measurement
Degree.
The utility model embodiment additionally provides a kind of device for measuring moisture, as shown in Fig. 2 the device for measuring moisture bag
Include：Runner base 4, is provided with groove 11, and the bottom of groove 11 is provided with gas flow 5；Lamb wave sensor 9, is arranged on
In groove 11；Runner upper plate 3, is covered on runner base 4.
The Lamb wave sensor that Lamb wave sensor 9 is provided by the utility model above-described embodiment, wherein, Lamb wave is passed
The bottom of the layer-of-substrate silicon of sensor 9 is towards gas flow.Specifically as shown in figure 3, Lamb wave sensor 9 is arranged on groove 11,
Chamber is formed in groove, bottom portion of groove is set by air admission hole and venthole, and gas enters from the interface 14 being connected with outside gas circuit
Enter or flow out, the gas in chamber is contacted with the hydrophilic materials on the bottom of Lamb wave sensor 9, so as to be inhaled by it
Receive.
In order to ensure the air-tightness of device for measuring moisture, it is to avoid Lamb wave sensor 9 is subject to the moisture in ambient atmos to do
Disturb, the device for measuring moisture of the utility model embodiment, the position contacted with Lamb wave sensor in groove side sets sealing
Part.Due to that can there is gap between groove side and Lamb wave sensor, by setting seal member so that Lamb wave is sensed
The hydrophilic materials of device 9 other gases, only contact with test gas, so as to reduce interference, improve the precision for detecting.
Alternatively, seal member is sealing ring, wherein, as shown in figure 3, the outside of groove 11 is provided with annular groove 12, it is used for
Sealing ring is set, and the depth of the height more than annular groove 12 of sealing ring, sealing ring is contacted with Lamb wave sensor 9, forms sealing.
Specifically, as described in Figure 2, sealing ring 8 is arranged in annular groove, and forms sealing with the edge of Lamb wave sensor 9, simply outer
Boundary's gas cannot be contacted with hydrophilic materials.
As shown in Fig. 2 the device for measuring moisture of the utility model embodiment also includes：Circuit board 2, is covered in runner upper plate
On 3；Spring probe 10, its one end is electrically connected with circuit board 2, and the other end is through runner upper plate 3 and extension forms spring contact, its
In, spring contact is electrically connected with interdigital electrode and the ground electrode layer of Lamb wave sensor 9.
The device for measuring moisture of the utility model embodiment is described in detail according to Fig. 2 and Fig. 3.
As shown in Fig. 2 the device for measuring moisture includes：Circuit board 2, runner upper plate 3, runner base 4, spring probe 10.
There is the gas flow 5 for designing, the groove 11 of placement Lamb wave sensor 9 on runner base 4, sealing ring is disposed
The interface 14 of annular groove 12 (as shown in Figure 3), Up/down base threaded connection hole 13 (as shown in Figure 3) and outside gas circuit connection is (such as
Shown in Fig. 3) and the location hole of alignment pin is installed, wherein, screw 6 is through threaded connection hole 13 by runner base 4 and device
Seat 3 is hinged.As shown in figure 3, gas flow 5 passes through the groove 11 for installing Lamb wave sensor 9.
Lamb wave sensor 9 is used to measure moisture in gas, its etching tank coating hydrophilic materials.
There is probe location hole, the location hole of measuring circuit plate 2, the location hole and screwed hole of alignment pin on runner upper plate 3,
Wherein, screw 1 enters the screwed hole through measuring circuit plate 2.
Circuit board 2 is covered in the runner upper plate 3, and it has the interface being connected with external testing instrument.
Its one end of spring probe 10 is electrically connected with circuit board 2, and the other end is through the described device seat of honour 3 and continues to extend shape
Into spring contact；Sealing ring 8 is arranged in the annular groove 12 of the base of device.
According to the utility model embodiment, measurement device is used as by using Lamb wave sensor, and in Lamb wave sensing
The etching tank backside coating hydrophilic materials of device measure the moisture in high-purity gas, with small volume, sensitivity
Advantage more than high, the low, pattern of loss.
The utility model embodiment additionally provides a kind of moisture measuring method, and the method is used for the water that above-described embodiment is provided
Divide measurement apparatus, as shown in figure 4, the moisture measuring method includes：
Step S401, under test gas are passed through in the gas flow of device for measuring moisture.
Step S402, is coated in the moisture during the hydrophilic materials of Lamb wave sensor bottom absorb under test gas.
Step S403, Lamb wave sensor excites lower generation electric signal under test gas, exports electric signal, wherein, telecommunications
Number for represent hydrophilic materials absorb under test gas in moisture after Lamb wave sensor generation vibration signal.
As shown in Figures 2 and 3, measurement gas is passed through in gas flow 5, measurement gas enters into the formation of the bottom of groove 11
Is contacted with the hydrophilic materials for being coated in Lamb wave sensor bottom in chamber, it is hydrophilic by the moisture absorption under test gas
Property material layer quality change, cause and produce in Lamb wave sensor mechanical oscillation to change, such as vibration frequency occurs
Skew, the electric signal that Lamb wave sensor is measured changes, therefore is analyzed by the change to the electric signal, Ke Yijian
Measure the moisture in air-flow.
In the utility model embodiment, hydrophilic materials have certain water suction saturation degree, when its water suction reaches saturation
When, it is impossible to reabsorb moisture.Thus, in the utility model embodiment, the electric signal for detecting during just gas is passed through,
Changed with the time, that is to say that the frequency of vibration signal is varied over, when water suction saturation is reached, kept
Stabilization.Therefore, electric signal during detection hydrophilic materials water suction saturation, the standard for analyzing the moisture under test gas
True property is high.
Alternatively, the utility model embodiment additionally provides another optional implementation method, as shown in figure 5, the moisture
Measuring method includes：
Step S501, dry gas are passed through in the gas flow of device for measuring moisture, are coated with hydrophilic materials
Lower generation reference electrical signal is excited in the dry gas in Lamb wave sensor, wherein, the reference electrical signal is used to reflect
It is coated with the reference frequency of generation under excite of the Lamb wave sensor in dry gas of hydrophilic materials.
Step S502, under test gas are passed through in the gas flow of device for measuring moisture.
Step S503, is coated in the moisture during the hydrophilic materials of Lamb wave sensor bottom absorb under test gas.
Step S504, Lamb wave sensor excites lower generation electric signal under test gas, exports electric signal, wherein, telecommunications
Number for represent hydrophilic materials absorb under test gas in moisture after Lamb wave sensor generation vibration signal.
The step of step S502 to step S504 is with described in Fig. 4 S401 to S403 are identical, referring specifically to above-mentioned steps.
In the utility model embodiment, by the corresponding benchmark of the dry gas for first being obtained with device for measuring moisture measurement frequently
Rate, then recycles measurement to obtain the corresponding frequency of under test gas, and the frequency is utilized with benchmark frequently in order to externally measured instrument
The corresponding relation between variable quantity and gas humidity between rate determines the humidity of under test gas.
The utility model embodiment additionally provides a kind of gas humidity measuring method, and the method can be used for and above-mentioned moisture
The externally measured instrument of measurement apparatus electrical connection, such as Network Analyzer.As shown in fig. 6, the method includes：
Step S601, obtains the electric signal that device for measuring moisture is detected, and electric signal is used to represent that hydrophilic materials are inhaled
The vibration signal of Lamb wave sensor generation after moisture in receipts under test gas.
The water that the electric signal is provided for the device for measuring moisture of the utility model embodiment using the utility model embodiment
The electric signal that point measuring method is detected, referring specifically to the description of above-described embodiment.
Step S602, the frequency of the vibration signal that Lamb wave sensor is generated is determined according to electric signal.
Step S603, according to corresponding between gas relative humidity and the frequency of the vibration signal that Lamb wave sensor is generated
Relation, determines the relative humidity of under test gas.
Externally measured instrument obtains the vibration signal of Lamb wave sensor generation according to the electric signal for detecting, analysis, can
Including its phase, amplitude, to be then calculated its frequency, further the frequency according to vibration signal determines under test gas
Relative humidity.
In the present embodiment, the gas of different humidity can be measured previously according to the instrument of measurement gas humidity, obtained
To the accurate rh value of gas with various, then these gases are each led into above-mentioned device for measuring moisture, obtained
The frequency of the vibration signal of the corresponding Lamb wave sensor generation of gas of different humidity, that is to say between frequency and relative humidity
Corresponding relation, formed relation curve.When the relative humidity measurement of under test gas is carried out, it is only necessary to according to Lamb wave sensor
The electric signal for detecting, analyzes its vibration frequency, you can find out the relative humidity of under test gas.
Another interchangeable implementation method is to use frequency variation, as shown in fig. 7, gas humidity measuring method bag
Include：
Step S701, obtains the electric signal that device for measuring moisture is detected, and electric signal is used to represent that hydrophilic materials are inhaled
The vibration signal of Lamb wave sensor generation after moisture in receipts under test gas.
Step S702, the frequency of the vibration signal that Lamb wave sensor is generated is determined according to electric signal.
Step S701 and S702 is identical with the step S601 and S602 shown in Fig. 6, referring specifically to being described above.
Step S703, determines the variable quantity between the frequency and reference frequency of the vibration signal of Lamb wave sensor generation,
Wherein, reference frequency is the frequency of Lamb wave sensor vibration signal of generation under the exciting of dry gas.
Step S704, according to the corresponding relation between gas relative humidity and variable quantity, determines the relatively wet of under test gas
Degree.
By dry gas pass through above-mentioned device for measuring moisture when, the frequency of the vibration signal of generation as reference frequency,
It is exactly the Lamb wave sensor for being coated with hydrophilic materials, when hydrophilic materials do not absorb moisture, Lamb wave sensor
The frequency of the vibration signal of generation under the exciting of air-flow.The gas for predefining different humidity causes Lamb wave sensor to generate
Vibration signal frequency and reference frequency between variable quantity, and then find out corresponding between gas humidity and frequency variation
Relation, can so reduce the influence that hydrophilic materials coating processes are caused, and improve the accuracy of measurement.The alternative solution
Gas humidity determination mode is similar with aforesaid way, repeats no more here.
According to the utility model embodiment, ultramicron moisture detecting method is developed using the high sensitivity of AlN piezoelectric membranes
Lamb wave sensor is made full use of in detection sensitivity, selectivity, micro-example quantitative analysis, response time, volume with instrument
Etc. aspect unique advantage, meet in high-end manufacturing industry gas ultramicron moisture rapidly, continuously, on-line analysis and monitoring requirements.
The exploitation of the above method and device, will drive the preparation industry of piezoelectric film sensor part, lift domestic high-end moisture analyser
Competitiveness commercially, meets Te Qi manufacturers, chemical industry manufacturer, special gas terminal user, natural gas transportation business, micro-nano technology business
Demand.
Obviously, above-described embodiment is only intended to clearly illustrate example, and not to the restriction of implementation method.It is right
For those of ordinary skill in the art, can also make on the basis of the above description other multi-forms change or
Change.There is no need and unable to be exhaustive to all of implementation method.And the obvious change thus extended out or
Among changing still in the protection domain of the application.
Claims (10)
1. a kind of Lamb wave sensor, it is characterised in that for measuring the moisture in gas, the Lamb wave sensor includes：
Layer-of-substrate silicon；
Ground electrode layer, is arranged in the layer-of-substrate silicon；
Piezoelectric membrane, is arranged on the ground electrode layer；
Interdigital electrode, is arranged on the piezoelectric membrane；
Wherein, the bottom of the layer-of-substrate silicon is coated with hydrophilic materials, for absorbing the moisture in the gas.
2. Lamb wave sensor according to claim 1, it is characterised in that the piezoelectric membrane is that aluminium nitride piezoelectricity is thin
Film.
3. Lamb wave sensor according to claim 1, it is characterised in that the ground electrode layer is the titanium bed of material or molybdenum
Material layer.
4. Lamb wave sensor according to claim 1, it is characterised in that the bottom of the layer-of-substrate silicon is provided with corrosion
Groove, wherein, the hydrophilic materials are coated in the etching tank.
5. the Lamb wave sensor according to any one of Claims 1-4, it is characterised in that the hydrophilic materials are
One below：Layer of nanomaterial, polyethylene organic film, fibrous material layer, graphene oxide composite material layer.
6. a kind of device for measuring moisture, it is characterised in that including：
Runner base, is provided with groove, and the bottom portion of groove is provided with gas flow；
Lamb wave sensor described in any one of claim 1 to 5, is arranged in the groove；
Runner upper plate, is covered on the runner base.
7. device for measuring moisture according to claim 6, it is characterised in that the layer-of-substrate silicon of the Lamb wave sensor
Bottom is towards the gas flow.
8. device for measuring moisture according to claim 6, it is characterised in that passed with the Lamb wave in the groove side
The position of sensor contact sets seal member.
9. device for measuring moisture according to claim 8, it is characterised in that the seal member is sealing ring, wherein, institute
State groove outside and be provided with annular groove, for setting the sealing ring, the depth of the height more than the annular groove of the sealing ring
Degree, the sealing ring is contacted with the Lamb wave sensor, forms sealing.
10. device for measuring moisture according to claim 6, it is characterised in that also include：
Circuit board, is covered on the runner upper plate；
Spring probe, its one end is electrically connected with the circuit board, and the other end is through the runner upper plate and extends to form elastic touching
Head, wherein, the spring contact is electrically connected with interdigital electrode and the ground electrode layer of the Lamb wave sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201621242876.8U CN206192948U (en) | 2016-11-15 | 2016-11-15 | Moisture measurement device and lamb wave sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621242876.8U CN206192948U (en) | 2016-11-15 | 2016-11-15 | Moisture measurement device and lamb wave sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106770642A (en) * | 2016-11-15 | 2017-05-31 | 中国科学院苏州生物医学工程技术研究所 | Device for measuring moisture and method, Lamb wave sensor and gas humidity measuring method |
| WO2019061795A1 (en) * | 2017-09-26 | 2019-04-04 | 中国科学院苏州生物医学工程技术研究所 | Lamb wave sensor, biodetection chip and rapid screening system |
-
2016
- 2016-11-15 CN CN201621242876.8U patent/CN206192948U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106770642A (en) * | 2016-11-15 | 2017-05-31 | 中国科学院苏州生物医学工程技术研究所 | Device for measuring moisture and method, Lamb wave sensor and gas humidity measuring method |
| WO2019061795A1 (en) * | 2017-09-26 | 2019-04-04 | 中国科学院苏州生物医学工程技术研究所 | Lamb wave sensor, biodetection chip and rapid screening system |
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