CN106153718A - A kind of piezoelectric crystal gas transducer with double working modes - Google Patents
A kind of piezoelectric crystal gas transducer with double working modes Download PDFInfo
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- CN106153718A CN106153718A CN201610688587.9A CN201610688587A CN106153718A CN 106153718 A CN106153718 A CN 106153718A CN 201610688587 A CN201610688587 A CN 201610688587A CN 106153718 A CN106153718 A CN 106153718A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/021—Gases
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
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Abstract
The invention discloses a kind of piezoelectric crystal gas transducer with double working modes, including quartz wafer and electrode, electrode includes the first metal electrode, the second metal electrode and the 3rd metal electrode, the front of quartz wafer is located at by first metal electrode and the second metal electrode, first metal electrode and the second metal electrode form staggered ring-type interdigitated electrode structure, the reverse side of quartz wafer is located at by 3rd metal electrode, and the 3rd metal electrode and the first metal electrode, the second metal electrode form upper and lower asymmetrical QCM electrode structure.The present invention uses three-electrode structure, can be combined together the piezoelectric resonator frequency measurement method of mass sensitive with resistance sensitive gas metering system；The first designed metal electrode and the second metal electrode have staggered ring-type interdigitated electrode structure, both ensure that the normal work of piezoelectric resonator body, and have reduced again the initial resistivity value of gas sensitive material in testing impedance, improve the signal noise ratio in testing impedance.
Description
Technical field
The present invention relates to a kind of piezoelectric crystal gas transducer, particularly relate to a kind of piezo-electric crystal with double working modes
Gas sensor.
Background technology
QCM (Quartz Crystal Mircrobalance, QCM) is a kind of in the sixties in 20th century
The novel Tiny Mass detecting instrument rising, its core component is QCM mass sensor.QCM mass sensor is a kind of non-
Often sensitive mass sensor, its quality determination can be as accurate as nanogram level.QCM mass sensor is by cutting quartz at AT
The high-resolution piezoelectric transducer of one that the upper and lower surface of wafer plates metal electrode and constitutes.In certain external condition
Under, when other materials of quartz crystal oscillator adsorption, the piezoelectric resonator frequency change according to quartz vibrator and the institute of plane of crystal
This principle that addendum matter mass change is directly proportional, the resonant frequency of quartz crystal oscillator will be with adsorbent quality size and
Produce skew.
It based on the piezoelectric crystal gas transducer of QCM, is the quartz-crystal resonator with top-bottom electrode structures.Work as metal
Electrode face finish has when having adsorbing sensitive materials film layer to certain gas, owing to gas molecule to be measured is in quartz-crystal
The surface that shakes is adsorbed, and causes quartz vibrator quality to change, causes the piezoelectric resonator frequency of QCM to change.At specific gas environment
Under, owing to the concentration of adsorbance gas molecule to be measured with environment is relevant, by the measurement of resonance frequency shift amount, i.e. available
The concentration of gas to be measured in gaseous environment.Due to qcm sensor, to have very high sensitivity, lower cost cheap, and tests
Device is simple, be easily achieved the many merits such as on-the-spot continuous detection so that extensively apply based on the piezo-electric type gas sensor of QCM
In all kinds of field of gas detection.
There is a prominent question in the application in above-mentioned conventional art: based on the performance of the piezo-electric type gas sensor of QCM
Affected by the sensitive materials characteristic that surface of metal electrode is modified.The particularly choosing to gas molecule to be measured for the gas sensitization material
Selecting property, directly affects the performance indications of the gas sensor based on QCM.
The surface gas film substrate material that general gas flow sensor uses, often has characterization of adsorption to multiple gases.
The organic polymer being used as surface-sensitive material as usual, although the good invertibity of its gas absorption, and sensitivity is higher, but choosing
Selecting property is poor, causes using organic polymer as the QCM gas sensor of surface-sensitive thin-film material to NO, NO2、NH3、CO、
CH4、SO2It is respectively provided with response characteristic etc. multiple gases.Owing to selectivity is not good, cause the piezo-electric type gas sensor based on QCM
Can be under relatively single atmosphere, it is achieved the purpose that specific gas concentration is measured.
Content of the invention
The purpose of the present invention is that provides one can realize mass-sensitive test pattern to solve the problems referred to above
The piezoelectric crystal gas transducer with double working modes with testing impedance pattern.
The present invention is achieved through the following technical solutions above-mentioned purpose:
A kind of piezoelectric crystal gas transducer with double working modes, including quartz wafer and electrode, described electrode bag
Include the first metal electrode, the second metal electrode and the 3rd metal electrode, described first metal electrode and described second metal electrode
Being located at the front of described quartz wafer, described first metal electrode and described second metal electrode form staggered ring-type interdigital electrode
Structure, described 3rd metal electrode is located at the reverse side of described quartz wafer, described 3rd metal electrode and described first metal electricity
Pole, described second metal electrode form upper and lower asymmetrical QCM electrode structure.The above-mentioned ring-type interdigital electricity that interlocks
Electrode structure and upper and lower asymmetrical QCM electrode structure are existing conventional electrodes structure, wherein, alternative ring
Shape interdigitated electrode structure refers to that two circular ring electrode are internal and external partition arrangement and pass through linear conductor by multiple circles of same electrode
Ring is connected, and then disconnects the annulus of another electrode at linear conductor and another electrode crossing；Upper and lower asymmetrical quartz-crystal
The extraction linear conductor of two electrodes that body micro-nanobalance electrode structure criticizes face lays respectively at both sides and point-blank, reverse side
The extraction linear conductor of two electrodes drawing linear conductor and front of the 3rd metal electrode be mutually perpendicular to and be positioned at front
Two electrodes extraction linear conductor between.
The design principle of said structure of the present invention is:
For some, there are the sensitive materials of gas adsorbability so that it is when absorbing the gas of variety classes variable concentrations, its
Resistance changes.Necessarily cause the mass change of gas sensitization substance film owing to absorbing gas, then in same test simultaneously
Under the gas with various concentration conditions of environment, the piezoelectric crystal gas transducer designed by the present invention can get two groups of output data.
Select particular kind of gas sensitization material so that for different tested gases, under conditions of gas absorption is identical in quality, quick
The resistance change of sense material is different.Gas sensor of the present invention, the quality of its output changes data and resistance changes number
According to the input quantity as sensor function so that the unitary sensing equation of conventional piezoelectric crystal gas sensor becomes binary sensing
Equation group, can solve two unknown numbers so that gas sensor of the present invention can be real under more complicated atmosphere
The now mensuration to two kinds of specific gas concentrations.
As preferably, described first metal electrode, described second metal electrode and described 3rd metal electrode are gold electrode
Or platinum electrode.
The outer side covers of described first metal electrode, described second metal electrode and described 3rd metal electrode has gas quick
Sense material film.
Described quartz wafer is that AT cuts quartz wafer.
In described first metal electrode and described second metal electrode, the center of circle of each annulus is overlapping.
The beneficial effects of the present invention is:
The present invention forms three-electrode structure by increasing an electrode to quartz-crystal resonator so that piezo-electric type gas passes
Sensor, while obtaining the positively related frequency shift (FS) with adsorbed gas quality, can get the resistance related to gas absorption amount and changes
Become such that it is able to the piezoelectric resonator frequency measurement method of mass sensitive is combined one with resistance sensitive gas metering system
Rise；The first designed metal electrode and the second metal electrode have staggered ring-type interdigitated electrode structure, both ensure that piezoelectricity was humorous
The normal work of vibration body, reduces again the initial resistivity value of gas sensitive material in testing impedance, improves in testing impedance
Signal noise ratio；Sensor freely can switch between testing impedance pattern and quality test pattern so that the spy of sensor
Survey data class to increase.
Brief description
Fig. 1 is the front view structure schematic diagram of the piezoelectric crystal gas transducer with double working modes of the present invention；
Fig. 2 is the backsight structural representation of the piezoelectric crystal gas transducer with double working modes of the present invention；
Fig. 3 is the A-A cutaway view Amplified image in Fig. 1.
Detailed description of the invention
The invention will be further described below in conjunction with the accompanying drawings:
As shown in Figure 1, Figure 2 and Figure 3, the piezoelectric crystal gas transducer with double working modes of the present invention includes stone
English wafer 1 and electrode, described electrode includes the first metal electrode the 3rd, the second metal electrode 2 and the 3rd metal electrode 4, the first metal
The front of quartz wafer 1 is located at by electrode 3 and the second metal electrode 2, and the first metal electrode 3 and the second metal electrode 2 form staggered
Ring-type interdigitated electrode structure, in the first metal electrode 3 and the second metal electrode 2, the center of circle of each annulus is overlapping, the 3rd metal electrode 4
Being located at the reverse side of quartz wafer 1, the 3rd metal electrode 4 and the first metal electrode the 3rd, the second metal electrode 2 forms asymmetric up and down
QCM electrode structure, the outer side covers of the first metal electrode the 3rd, the second metal electrode 2 and the 3rd metal electrode 4
There is gas sensitive material film 5；First metal electrode the 3rd, the second metal electrode 2 and the 3rd metal electrode 4 are gold electrode or platinum electricity
Pole；Quartz wafer 1 cuts quartz wafer for AT；Gas sensitive material film 5 has characterization of adsorption to specific gas, and in absorption
After different specific gas there is different changes in its electrical conductivity, is current material film；First metal electrode the 3rd, the second metal electricity
Pole 2 and the 3rd metal electrode 4 use the method for physical vapour deposition (PVD) to be molded on quartz wafer 1.Gas sensitive material film 5 is then
Gas sensitive material use the mode of drop-coating, spraying process, vacuum sputtering or diauxic growth self assembly at quartz wafer 1
Tow sides form film.
During use, by conducting resinl by the first metal electrode the 3rd, the second metal electrode 2 and the 3rd metal electrode 4 respectively with not
Connect with wire, and wire extraction both may be used.
In conjunction with Fig. 1, Fig. 2 and Fig. 3, two kinds of works of the piezoelectric crystal gas transducer with double working modes of the present invention
Operation mode is as follows:
1st, mode of operation 1, i.e. mass-sensitive test pattern: now the first metal electrode the 3rd, the second metal electrode 2 is by outward
Portion's wire is connected, and becomes with the 3rd metal electrode 4 and quartz wafer 1 forms the quartz-crystal resonator with top-bottom electrode structures.
This resonator, in the case of applied voltage, can occur resonance under a CF, and this frequency is gas sensor natural resonance
Frequency f0.The test philosophy of gas sensing, i.e. QCM test philosophy.When the first metal electrode the 3rd, the second metal electricity
When the gas sensitive material film 5 on pole 2 and the 3rd metal electrode 4 surface adsorbs specific gas so that quartz-crystal resonator table
The mass change of face electrode adsorption, causes resonator resonant frequency f0Shift and become f1, and resonance frequency shift amount Δ f=
f1-f0, it is directly proportional to the gaseous mass that gas sensitive material absorbs.Again due to gas sensitive material adsorbed gas quality, with sensing
In device local environment, the concentration of this gas is directly proportional, therefore can be calculated the concentration of specific gas in residing gaseous environment.
2nd, mode of operation 2, i.e. testing impedance pattern: now the 3rd metal electrode 4 table does not works, the first metal electrode the 3rd,
Two metal electrodes 2 form interdigital to electrode.Gas sensitive material film when the first metal electrode the 3rd, the second metal electrode 2 surface
During 5 absorption specific gas, cause the resistivity of this material to change, and resistivity change can be by testing the first metal electrode
3rd, the impedance between the second metal electrode 2 obtains.Owing to the resistivity of gas sensitive material film 5 changes and absorption specific gas
The proportional relation of amount, and adsorbance is directly proportional to the concentration of this specific gas in environment, therefore can be calculated residing for sensor
The concentration of the specific gas in gaseous environment.
During gas test, this piezoelectric crystal gas transducer freely can switch under above-mentioned two pattern.In view of gas
When body sensitive material film 5 absorbs gas with various, the quality causing changes, resistance changes difference, under double test patterns, gas
Sensor has than traditional more preferable selectivity of the gas sensor based on QCM.
Above-described embodiment is presently preferred embodiments of the present invention, is not the restriction to technical solution of the present invention, as long as
The technical scheme that can realize on the basis of above-described embodiment without creative work, is regarded as falling into patent of the present invention
Rights protection in the range of.
Claims (5)
1. there is a piezoelectric crystal gas transducer for double working modes, including quartz wafer and electrode, it is characterised in that: institute
State electrode and include the first metal electrode, the second metal electrode and the 3rd metal electrode, described first metal electrode and described second
The front of described quartz wafer is located at by metal electrode, and described first metal electrode and described second metal electrode form staggered ring-type
Interdigitated electrode structure, described 3rd metal electrode is located at the reverse side of described quartz wafer, described 3rd metal electrode and described the
One metal electrode, described second metal electrode form upper and lower asymmetrical QCM electrode structure.
2. the piezoelectric crystal gas transducer with double working modes according to claim 1, it is characterised in that: described
One metal electrode, described second metal electrode and described 3rd metal electrode are gold electrode or platinum electrode.
3. the piezoelectric crystal gas transducer with double working modes according to claim 1 and 2, it is characterised in that: institute
The outer side covers stating the first metal electrode, described second metal electrode and described 3rd metal electrode has gas sensitive material thin
Film.
4. the piezoelectric crystal gas transducer with double working modes according to claim 1 and 2, it is characterised in that: institute
Stating quartz wafer is that AT cuts quartz wafer.
5. the piezoelectric crystal gas transducer with double working modes according to claim 1 and 2, it is characterised in that: institute
The center of circle stating each annulus in the first metal electrode and described second metal electrode is overlapping.
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| CN201610688587.9A CN106153718B (en) | 2016-08-18 | 2016-08-18 | A kind of piezoelectric crystal gas transducer with double working modes |
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| CN201610688587.9A CN106153718B (en) | 2016-08-18 | 2016-08-18 | A kind of piezoelectric crystal gas transducer with double working modes |
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| CN106153718B CN106153718B (en) | 2018-09-18 |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106706859A (en) * | 2017-01-20 | 2017-05-24 | 中国工程物理研究院总体工程研究所 | Gas sensor temperature compensation device and method |
| CN107290241A (en) * | 2017-07-31 | 2017-10-24 | 成都信息工程大学 | A kind of QCM humidity sensors and preparation method thereof |
| CN107290392A (en) * | 2017-07-31 | 2017-10-24 | 成都信息工程大学 | A kind of QCM humidity sensors of high stability low humidity detection and preparation method thereof |
| CN107340317A (en) * | 2017-06-19 | 2017-11-10 | 天津大学 | A kind of Gas Distinguishing Method, gas sensor and gas identification device |
| CN109374731A (en) * | 2018-11-14 | 2019-02-22 | 江苏科技大学 | A kind of quartz crystal microbalance of annular indium-tin oxide electrode |
| CN110361287A (en) * | 2018-04-10 | 2019-10-22 | 黄显核 | A kind of quartz crystal microbalance mass sensor that mass sensitivity is uniform |
| CN111554756A (en) * | 2020-05-15 | 2020-08-18 | 京东方科技集团股份有限公司 | Photoelectric detector and display substrate |
| CN112277493A (en) * | 2020-10-28 | 2021-01-29 | 中科传感技术(青岛)研究院 | Transfer printing method for bottom electrode of multilayer piezoelectric ceramic piece |
| CN113155664A (en) * | 2021-04-26 | 2021-07-23 | 东南大学 | High-sensitivity weak gas detection device and detection method thereof |
| US11906416B2 (en) | 2020-12-29 | 2024-02-20 | Stmicroelectronics S.R.L. | MEMS microparticle sensor |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106706859A (en) * | 2017-01-20 | 2017-05-24 | 中国工程物理研究院总体工程研究所 | Gas sensor temperature compensation device and method |
| CN107340317A (en) * | 2017-06-19 | 2017-11-10 | 天津大学 | A kind of Gas Distinguishing Method, gas sensor and gas identification device |
| CN107290241A (en) * | 2017-07-31 | 2017-10-24 | 成都信息工程大学 | A kind of QCM humidity sensors and preparation method thereof |
| CN107290392A (en) * | 2017-07-31 | 2017-10-24 | 成都信息工程大学 | A kind of QCM humidity sensors of high stability low humidity detection and preparation method thereof |
| CN107290241B (en) * | 2017-07-31 | 2023-07-14 | 成都信息工程大学 | QCM humidity sensor and preparation method thereof |
| CN110361287A (en) * | 2018-04-10 | 2019-10-22 | 黄显核 | A kind of quartz crystal microbalance mass sensor that mass sensitivity is uniform |
| CN109374731B (en) * | 2018-11-14 | 2021-07-13 | 江苏科技大学 | Quartz crystal microbalance with annular indium tin oxide electrode |
| CN109374731A (en) * | 2018-11-14 | 2019-02-22 | 江苏科技大学 | A kind of quartz crystal microbalance of annular indium-tin oxide electrode |
| CN111554756A (en) * | 2020-05-15 | 2020-08-18 | 京东方科技集团股份有限公司 | Photoelectric detector and display substrate |
| CN111554756B (en) * | 2020-05-15 | 2022-04-15 | 京东方科技集团股份有限公司 | Photoelectric detector and display substrate |
| CN112277493A (en) * | 2020-10-28 | 2021-01-29 | 中科传感技术(青岛)研究院 | Transfer printing method for bottom electrode of multilayer piezoelectric ceramic piece |
| US11906416B2 (en) | 2020-12-29 | 2024-02-20 | Stmicroelectronics S.R.L. | MEMS microparticle sensor |
| CN113155664A (en) * | 2021-04-26 | 2021-07-23 | 东南大学 | High-sensitivity weak gas detection device and detection method thereof |
| CN113155664B (en) * | 2021-04-26 | 2022-03-04 | 东南大学 | High-sensitivity weak gas detection device and detection method thereof |
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