CN102967522B - Quartz crystal microbalance (QCM) mass sensor - Google Patents
Quartz crystal microbalance (QCM) mass sensor Download PDFInfo
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- CN102967522B CN102967522B CN201210460481.5A CN201210460481A CN102967522B CN 102967522 B CN102967522 B CN 102967522B CN 201210460481 A CN201210460481 A CN 201210460481A CN 102967522 B CN102967522 B CN 102967522B
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Abstract
To improve the homogeneity of mass sensitivity of a quartz crystal microbalance (QCM) mass sensor, the invention provides a QCM mass sensor with an asymmetric electrode structure, belonging to the technical field of electronics. The QCM mass sensor comprises a round quartz wafer and metal electrodes respectively arranged on the upper and lower surfaces of the round quartz wafer, wherein the lower metal electrode is a round electrode with the radius being m; the upper metal electrode is a point-ring shaped electrode and is formed by a ring shaped electrode (with the inner radius being n and the outer radius being m) and a point electrode (with the radius being g) concentric with the ring shaped electrode; and g is smaller than n. The QCM mass sensor has the beneficial effects that the upper metal electrode of the existing QCM mass sensor with a ring shaped electrode structure is improved and the distribution curve of mass sensitivity of the QCM mass sensor is improved to three peak pattern by adding a smaller point electrode in the ring shaped electrode, so the homogeneity of mass sensitivity distribution of the QCM mass sensor is improved on the basis of ensuring higher absolute mass sensitivity and then the repeatability of results of measurements of the QCM mass sensor is improved.
Description
Technical field
The invention belongs to electronic technology field, relate to QCM (Quartz Crystal Microbalance) (Quartz Crystal Mircrobalance, QCM), especially QCM mass sensor.
Background technology
QCM (Quartz Crystal Microbalance) (Quartz Crystal Mircrobalance, QCM) is a kind of novel Tiny Mass detecting instrument rising in the sixties in 20th century, and its core component is QCM mass sensor.QCM mass sensor is a kind of very sensitive mass sensor, and its quality determination can be as accurate as nanogram level, in the test problems of the subjects such as physics, chemistry, biology, medical science, has obtained application.Under certain external condition, in the time of other material of quartz crystal oscillator adsorption, be varied to this principle of direct ratio according to the appended material mass of the frequency change of quartz vibrator and plane of crystal, the resonance frequency of quartz crystal oscillator will change along with the size of adsorbent quality.QCM mass sensor is exactly the quartz-crystal resonator with top-bottom electrode structures in fact.Quartz-crystal resonator can the resonance frequency with it vibrate because of piezoelectric effect under dynamic excitation, QCM mass sensor utilizes this characteristic of quartz-crystal resonator exactly, at quartz crystal resonator electrode adsorption one deck test substance, the quality signal of test substance is converted into frequency signal detects.QCM has very high sensitivity, good selectivity, required with low cost, and proving installation simple, be easy to realize the many merits such as on-the-spot continuous detecting, so be subject to countries in the world scientists' great attention, it has been widely used in the detection field of quality, density, concentration etc.
But there is a prominent question in QCM: the repeatability of measurement result is very low in application.For obtaining compared with the measurement result of high duplication, points for attention when people have proposed many QCM uses, as make the whole electrode surface that is distributed in QCM of the even rigidity of sample, the method that can realize the distribution of the even rigidity of sample mainly contains vacuum coating, plating etc., and operating process is not only loaded down with trivial details but also efficiency is very low.
At present, it has been recognized that, the inconsistent of QCM mass sensor mass sensitivity distribution curve is to cause the low main cause of its measurement result repeatability.Theory and practice all proves, the conventional QCM mass sensor with round electrode structure (m-m type) showing as Fig. 1, its mass sensitivity distribution curve is bell-shaped (or Gaussian) as shown in Figure 2, this has just produced the inconsistent of QCM mass sensor mass sensitivity distribution curve, has brought the low problem of measurement result repeatability.
The QCM mass sensor being evenly distributed in order to obtain mass sensitivity, researchist has carried out this to the electrode structure of QCM mass sensor and has entered, as designed asymmetric circular n-m type electrode, oval-shaped electrode etc., but this all can not solve inconsistent the brought low problem of measurement result repeatability due to QCM mass sensor mass sensitivity distribution curve.
Person has proposed to have a kind of QCM mass sensor of asymmetry electrode structure foreign study, as shown in Figure 3,4, its top electrode is that (round loop electrode inside radius is n to a kind of annular electrode, and external radius is m), and its bottom electrode remains the circular electrode that an external radius is m.Have the QCM mass sensor of kind electrode structure, its mass sensitivity distribution curve is bimodal shape, and the depression of bimodal is significantly, if depression can be filled, the mass sensitivity that can obtain local uniform distributes.For the depression of bimodal is filled, scientists has been done a lot of discussions.1996, the people such as Youbok Lee find, can be by reducing electrode quality load factor, the depression that makes bimodal reduces (Y.Lee, F.Josse, " Radial dependence of mass sensitivity for modified-electrode quartz resonators ", Proc.IEEE Ultrason.Symp, vol.1, pp.321-325,1996.), its mass sensitivity distribution curve providing as shown in Figure 5.Plate back frequency when minimum at resonator as seen, its mass sensitivity distribution curve has the trend reaching unanimity, but absolute mass sensitivity peaks declines to some extent (being decrease resolution), especially its fatal deficiency is: due to R value too little (be the plating of wafer return frequency too little), only have the method by reducing thickness of electrode to reduce electrode quality load factor, but, even if being as thin as, electrode exceedes achieved technological limits, the depression of bimodal is still obvious.Visible, by the thickness that reduces electrode, the depression of bimodal is filled, this is infeasible in practice.
Summary of the invention
In order to improve the homogeneity of QCM mass sensor mass sensitivity, the invention provides the QCM mass sensor with a kind of asymmetry electrode structure, this QCM mass sensor can not reduce on the basis of absolute mass sensitivity substantially, improve the homogeneity of mass sensitivity, thereby improve the repeatability of QCM measurement result, reach the object that improves QCM measuring accuracy.
Technical solution of the present invention is as follows:
A kind of QCM (Quartz Crystal Microbalance) mass sensor, as shown in Figure 6,7, comprises circular quartz wafer 1, and described circular quartz wafer 1 upper and lower surface has respectively upper metal electrode 2 and lower metal electrode 3.Normal three through the normal of circular quartz wafer 1 geometric center and the normal of upper metal electrode 2 geometric centers of process and lower metal electrode 3 geometric centers of process keeps overlapping.The round electrode that described lower metal electrode 3 is m for Radius.Described upper metal electrode 2 is a little-ring electrode, forms by a ring electrode 21 with the concentric point electrode 22 of ring electrode 21.The inside radius of described ring electrode 21 is that n, external radius are m, and the radius of described point electrode 22 is g, and g<n.
QCM mass sensor provided by the invention, its essence is metal electrode in make into a little-ring-type of circular upper metal electrode of the QCM mass sensor with asymmetry electrode structure shown in Fig. 3,4.In its mid point-ring-type, as shown in Figure 7, wherein g, n, m represent respectively the radius of central point electrode 22, inside radius and the external radius of ring electrode 21 to metal electrode structure.It has three class regions as can be seen from Fig. 7: be respectively non-electrode district (U district), partial electrode district (P district) and full electrode district (E district), its cutoff frequency is used respectively f
u, f
pand f
erepresent.According to falling into theoretical requirement, the operating frequency range of this QCM mass sensor is f
e<f<f
p<f
u.Under this operating frequency range, the solution of the particle displacement amplitude of this QCM mass sensor is:
Continuous at r=g, n, m place by particle displacement and strain, can obtain the boundary continuity equation group that six linear homogeneous equations form, select any five equations in system of equations can obtain particle displacement amplitude constant C
1, C
2, C
3, C
4, C
5, C
6proportionate relationship.
Like this, just obtain the expression of A (r), can have been obtained the mass sensitivity S of this QCM mass sensor by following formula
f(r) expression:
(2) C in formula
fit is the mass sensitivity constant of QCM mass sensor.
Fig. 8 is the comparison schematic diagram of the mass sensitivity of the QCM mass sensor of have a little-ring electrode structure provided by the invention and the QCM mass sensor of common ring-type electrode structure.As can be seen from Figure 8, adopt the QCM mass sensor of point-ring electrode structure, the inconsistent degree of its mass sensitivity distribution curve has reduced half, and this repeatability that simultaneously means its measurement will double.
In sum, QCM mass sensor provided by the invention, substantially not reducing on the basis of absolute mass sensitivity, can improve the homogeneity of mass sensitivity, thereby improves the repeatability of QCM measurement result, reaches the object that improves QCM measuring accuracy.
Brief description of the drawings
Fig. 1 is the longitudinal cross-section schematic diagram that routine has the QCM mass sensor of upper and lower symmetrical circle electrode structure (m-m type).
Fig. 2 is the mass sensitivity distribution curve of the QCM mass sensor of structure shown in Fig. 1.
Fig. 3 is the longitudinal cross-section schematic diagram with the QCM mass sensor of ring electrode structure.
Fig. 4 is the upper metal electrode structure schematic diagram shown in Fig. 3 with the QCM mass sensor of ring electrode structure.
Fig. 5 is the mass sensitivity curve shown in Fig. 3 with the QCM mass sensor of ring electrode structure.Its distribution around electrode centers point is bimodal shape, and along with reducing of R, its mass sensitivity distribution curve has the trend reaching unanimity, but R value is at this moment too little, has exceeded achieved technological limits.
Fig. 6 is the longitudinal cross-section schematic diagram of the QCM mass sensor of have a little-ring electrode structure provided by the invention.
Fig. 7 is the upper metal electrode structure schematic diagram of the QCM mass sensor of have a little-ring electrode structure provided by the invention.
Fig. 8 is the mass sensitivity curve comparison shown in the QCM mass sensor of have a little-ring electrode structure provided by the invention and Fig. 3 with the QCM mass sensor of ring electrode structure.Wherein solid line is the mass sensitivity curve shown in Fig. 3 with the QCM mass sensor of ring electrode structure, and dotted line is the mass sensitivity curve of the QCM mass sensor of have a little-ring electrode structure provided by the invention.As can be seen from Figure 8, the QCM mass sensor of have a little-ring electrode structure provided by the invention, is ensureing, under the prerequisite of higher absolute mass sensitivity, by forming three peak-shaped curves, to have improved the homogeneity of the mass sensitivity of QCM mass sensor.
In note: Fig. 4 and Fig. 7, all only indicate electrode district, do not marked the electrode outlet line of electric action.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is conducted further description.
A kind of QCM mass sensor, as shown in Figure 6,7, comprises circular quartz wafer 1, and described circular quartz wafer 1 upper and lower surface has respectively upper metal electrode 2 and lower metal electrode 3.Normal three through the normal of circular quartz wafer 1 geometric center and the normal of upper metal electrode 2 geometric centers of process and lower metal electrode 3 geometric centers of process keeps overlapping.The round electrode that described lower metal electrode 3 is m for Radius.Described upper metal electrode 2 is a little-ring electrode, forms by a ring electrode 21 with the concentric point electrode 22 of ring electrode 21.The inside radius of described ring electrode 21 is that n, external radius are m, and the radius of described point electrode 22 is g, and g<n.
Described upper metal electrode 2 and lower metal electrode 3 materials are gold or chromium+gold (taking metallic chromium layer as basic unit, Gold plated Layer again on metallic chromium layer, to increase the adhesion of gold on quartz substrate), and thickness is 10
-7rice.
The radius g of described point electrode 22 is in the scope of 0.4 millimeter to 1.2 millimeters; The inside radius n of described ring electrode 21 is in the scope of 1.6 millimeters to 3.2 millimeters, and external radius m is in the scope of 2.5 millimeters to 5.0 millimeters.
The diameter of quartz wafer 1 is in 8.0mm arrives the scope of 14.0mm.
Described quartz wafer 1 is for AT cuts quartz wafer, and its corner cut scope is from 35 ° of 1' to 35 ° of 12'.
The title frequency of described QCM mass sensor is 5MHz, 10MHz or 11MHz, and work overtone number of times is fundamental frequency, 3 overtones or 5 overtones.
According to technique scheme, cut 35 ° of 8', nominal frequency taking corner cut as AT and make QCM mass sensor as 10MHz, overtone number of times as the quartz wafer (thickness is about 0.1648mm) of fundamental frequency.Wherein quartz wafer diameter is 8.7mm, and upper and lower metal electrode material is selected gold, and upper/lower electrode thickness is for being 10
-7rice (1000 dust).In upper metal electrode, the radius g=0.45mm of point electrode 22, inside radius n=2.12mm, the external radius m=2.85mm of ring electrode 21.
Select same quartz wafer to make another to have the QCM mass sensor of ring electrode structure, as the comparative example of the QCM mass sensor of above-mentioned making, (difference of the two is only upper metal electrode, the present invention has increased a concentric point electrode in ring electrode, all parameters such as all the other materials, size are all identical, and the radius of the inside and outside electrode of the upper electrode rings of comparative example's ring electrode is also identical).
According to the mass sensitivity distribution curve of the QCM mass sensor of the have a little-ring electrode structure of the QCM mass sensor with ring electrode structure of above-mentioned specifications parameter design and the present invention's design as shown in Figure 8.
As seen from Figure 8, the mass sensitivity distribution curve with the QCM mass sensor of ring electrode structure is bimodal shape, bimodal between the maximum difference of mass sensitivity be about 2.5 × 10
11hz/Kg; The mass sensitivity distribution curve of the QCM mass sensor of have a little-ring electrode structure provided by the invention is three peak shapes, and the maximum difference of three peak-to-peak mass sensitivity narrows down to about 1.25 × 10
11hz/Kg., from Fig. 8, also can find out that the QCM mass sensor of have a little-ring electrode structure provided by the invention has ensured higher absolute mass sensitivity meanwhile.Therefore, the QCM mass sensor of have a little-ring electrode structure provided by the invention, ensureing under the prerequisite of higher absolute mass sensitivity, the inconsistent degree of mass sensitivity distribution curve has approximately reduced half, in other words, the QCM mass sensor of have a little-ring electrode structure provided by the invention, the repeatability of its measurement will approximately double.
Claims (9)
1. a QCM (Quartz Crystal Microbalance) mass sensor, comprise circular quartz wafer (1), described circular quartz wafer (1) upper and lower surface has respectively upper metal electrode (2) and lower metal electrode (3), keeps overlapping through the normal three of the normal of circular quartz wafer (1) geometric center and the normal of process upper metal electrode (2) geometric center and process lower metal electrode (3) geometric center; It is characterized in that the round electrode that described lower metal electrode (3) is m for Radius; Described upper metal electrode (2) is a little-ring electrode, by a ring electrode (21) and point electrode (22) formation concentric with ring electrode (21); The inside radius of described ring electrode (21) is that n, external radius are m, and the radius of described point electrode (22) is g, and g<n.
2. QCM (Quartz Crystal Microbalance) mass sensor according to claim 1, is characterized in that, described upper metal electrode (2) and lower metal electrode (3) material are gold or chromium+gold, and thickness is 10-7 rice.
3. QCM (Quartz Crystal Microbalance) mass sensor according to claim 1 and 2, is characterized in that, the radius g of described point electrode (22) is in the scope of 0.4 millimeter to 1.2 millimeters; The inside radius n of described ring electrode (21) is in the scope of 1.6 millimeters to 3.2 millimeters, and external radius m is in the scope of 2.5 millimeters to 5.0 millimeters.
4. QCM (Quartz Crystal Microbalance) mass sensor according to claim 1 and 2, is characterized in that, the diameter of described quartz wafer (1) is in 8.0mm arrives the scope of 14.0mm.
5. QCM (Quartz Crystal Microbalance) mass sensor according to claim 3, is characterized in that, the diameter of described quartz wafer (1) is in 8.0mm arrives the scope of 14.0mm.
6. QCM (Quartz Crystal Microbalance) mass sensor according to claim 1 and 2, is characterized in that, described quartz wafer (1) is for AT cuts quartz wafer, and its corner cut scope is from 35 ° of 1' to 35 ° of 12'.
7. QCM (Quartz Crystal Microbalance) mass sensor according to claim 3, is characterized in that, described quartz wafer (1) is for AT cuts quartz wafer, and its corner cut scope is from 35 ° of 1' to 35 ° of 12'.
8. QCM (Quartz Crystal Microbalance) mass sensor according to claim 4, is characterized in that, described quartz wafer (1) is for AT cuts quartz wafer, and its corner cut scope is from 35 ° of 1' to 35 ° of 12'.
9. QCM (Quartz Crystal Microbalance) mass sensor according to claim 1 and 2, is characterized in that, the title frequency of described QCM (Quartz Crystal Microbalance) mass sensor is 5MHz, 10MHz or 11MHz, and work overtone number of times is fundamental frequency, 3 overtones or 5 overtones.
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| CN106153718A (en) * | 2016-08-18 | 2016-11-23 | 中国工程物理研究院总体工程研究所 | A kind of piezoelectric crystal gas transducer with double working modes |
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