CN206192550U - Capacitanc tactile sensor with patterning micro -structure array - Google Patents
Capacitanc tactile sensor with patterning micro -structure array Download PDFInfo
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Abstract
The utility model discloses a capacitanc tactile sensor with patterning micro -structure array. By from last to lower in proper order the surperficial dimpling of fingerprint form, upper capacitor electrode basement, upper capacitor electrode, two -dimentional sinusoidal dimpling dielectric layer, the capacitor electrode of lower floor and range upon range of the forming of lower floor's capacitor electrode basement, it is amazing that the surperficial dimpling of fingerprint form plays to be used for to receive outside power, and upper and lower layer of capacitor electrode basement be as structure support, and the electrode pole piece series connection orientation on upper and lower layer of capacitor electrode is the quadrature and arranges to play the capacitor body that the dielectric layer three constitutes the sensor jointly with the sinusoidal dimpling of two dimension. The utility model discloses can be used for solving the high sensitivity real -time detection problem that the sensor was done all can to the multidimension, can use in fields such as the artifical artificial limb that expects much to sensitivity, the manipulators of performing the operation.
Description
Technical field
The utility model is related to flexible touch sensation sensor, more particularly, to a kind of electricity with metal layer array
Appearance formula touch sensor.
Background technology
In order that the work of robot and capacity are as close possible to the mankind, can be cooperated with the mankind, except needing
More accurately to move and operational control, in addition it is also necessary to a set of and close identification sensory perceptual system of the mankind.Generally, the control of robot
Mainly completed by the spatial positional information of mechanical part or in addition with the continuous feedback of certain image recognition information
's.And the appearance of touch sensor makes it that contact information of the mechanical part with external environment is increased on the basis of original, make
The phase mutual feedback obtained between mechanical part and control program is more perfect.Meanwhile, touch sensor also the mankind and robot it
Between set up new man-machine interface.It can be seen that the research of touch sensor is indispensable.Intelligent artificial limb is touch sensor application
One big field.Traditional artificial limb makes its rehabilitation efficacy and disabled repair ability have a greatly reduced quality for the missing of tactilely-perceptible ability.
Therefore touch sensor is set up for the tactilely-perceptible system of artificial limb and is significant.The introducing of touch sensor, can make
Artificial limb turns into a part for patient body, and effective information exchange is built between artificial limb and patient, artificial limb and environment
Channel, is that patient sets up tactilely-perceptible ability, realizes imitation biochemistry, the intellectuality of artificial limb.Meanwhile, touch sensor can be hand
Art manipulator provides highly sensitive tactilely-perceptible, and huge effect can be played in Minimally Invasive Surgery.
At present, touch sensor can be divided into following several according to its sensor mechanism：Resistance-type, condenser type, piezoelectric type, light
The sensor of formula and other forms, wherein capacitance type touch sensor are because of its good sensitivity and spatial resolution, by temperature
The characteristics of degree influence is small has obtained extensive concern.
Though existing touch sensor species is various, the requirement of small power Precision measurement is also not up in sensitivity, because
This, design is a kind of to have highly sensitive sensor particularly significant.
Utility model content
In order to make up missing of the prior art, the purpose of this utility model is to provide a kind of with metal layer
The capacitance type touch sensor of array, with high sensitivity feature.
The technical solution adopted in the utility model is：
Capacitance type touch sensor of the present utility model be mainly by finger print surface microprotrusion from top to bottom successively, on
Layer capacitance electrode basement, upper strata capacitance electrode, two dimension sine microprotrusion dielectric layer, lower floor's capacitance electrode and lower floor's capacitance electrode base
Bottom is closely laminated, and possesses multidimensional force measurement ability.Wherein, finger print surface microprotrusion is used to receive external force stimulation, on
Layer capacitance electrode basement, lower floor's capacitance electrode substrate are used as structural support, the electricity on upper strata capacitance electrode and lower floor's capacitance electrode
The pole pole piece series connection orthogonal thereto arrangement in direction, and the electric capacity master of sensor is collectively formed with two-dimentional sine microprotrusion dielectric layer three
Body, after finger print surface microprotrusion upper surface is subject to external force to stimulate, it is capacitance variations to be sensed by electric capacity main body, and and then
Size, the direction for obtaining institute's stress are changed by capacitance variations.
The upper strata finger print surface microprotrusion, capacitance electrode substrate, two dimension sine microprotrusion dielectric layer, lower layer capacitance electricity
Pole substrate using the material for possessing good flexibility, can specifically be manufactured using organic polymer.
The microprotrusion dielectric layer is the fexible film with two-dimensional quadrature sine wave pattern upper surface, single height of projection
6~10 μm, 65~75 μm of width, 55~60 μm of the average thickness of dielectric layer so that sensor can be strengthened and detected for multi-dimensional force
Sensitivity.Two-dimensional quadrature sine wave pattern upper surface refers to that upper surface is sine wave along the section of mutually orthogonal both direction
Shape.
Described finger print surface microprotrusion upper surface has the texture features close with fingertip skin, single projection
Highly 3~5 μm, 65~75 μm of width, 45~50 μm of the average thickness of dimpling aliquation so that can receive external force stimulates and improve
Stressing conditions.
The upper strata capacitance electrode is formed with lower floor's capacitance electrode by the arrangement of multi-piece electrode pole piece spaced array, upper strata electricity
The array arrangement mode of appearance electrodes pole piece is identical with the array arrangement mode of lower floor's capacitance electrode electrode plates so that upper strata
The each plate electrode pole piece of capacitance electrode is corresponding with a piece of electrode plates of lower floor's capacitance electrode immediately below it to form flat board electricity
Hold；All electrode plates are connected and are divided into the way of identical column direction is in series or in the way of identical line direction is in series
A plurality of electrode pad, the electrode plates series connection direction of upper strata capacitance electrode is connected direction phase with the electrode plates of lower floor capacitance electrode
Orthogonal (perpendicular).
In specific implementation, it is all connected in the signal acquisition device of outside per the end of strip electrode pole plate, in upper layer capacitance
Make disconnection process in the centre of every strip electrode pole plate of electrode and lower floor's capacitance electrode so that original to be divided into two per strip electrode pole plate
All electrode pads of upper strata capacitance electrode and lower floor's capacitance electrode are divided into four by electrode pad by four regions of corner
Part, so that all capacity plate antennas that will be formed between upper strata capacitance electrode and lower floor's capacitance electrode are divided into four parts, often
Individual part is all connected to an external signal sampler to travel through collection capacitance, and the efficiency of collection is improved with this.
The quantity of capacity plate antenna of the upper strata capacitance electrode with lower floor capacitance electrode on line direction and column direction is homogeneous
Together, comprising N rows × N row capacity plate antennas, and a multi-dimensional force detection unit is formed with every 2 row × 2 row capacity plate antenna, it is many
After dimension power detection unit is subject to external force stimulation, the capacitance of four capacity plate antennas therein changes, according to capacitance
Change is converted to the size and Orientation of institute's stress, real so as to stimulate the capacitance variations for triggering to be converted to by force information external force
Existing tactile sensing detection.
The utility model has an advantageous effect in that：
(1) using capacitance type touch sensor sensitivity characteristics good in itself and high flexibility two dimension sine microprotrusion dielectric layer
It is combined, makes touch sensor that there is high sensitivity, solves the problems, such as high sensitivity real-time detection of the sensor for multi-dimensional force,
Can be applied to fields such as sensitivity requirement artificial limb high, surgery mechanical hands.
(2) using the sensor surface microprotrusion having with fingertip skin similar grain pattern, improve sensor and receive
Stressing conditions when external force stimulates.
(3) using 2 row × 2 row electric capacity as a multi-dimensional force detection unit, the change of 4 electric capacity is converted to suffered outer
The size and Orientation of power.
(4) capacitance type touch sensor is manufactured using high flexibility organic polymer, sensor is possessed good flexibility, right
Curved surface is loaded has good adaptability.
Brief description of the drawings
Fig. 1 is that the utility model hierarchy splits stereogram.
Fig. 2 is the utility model finger print surface microprotrusion stereogram.
Fig. 3 is the utility model two dimension sine microprotrusion dielectric layer stereogram.
Fig. 4 is capacitance electrode plan and multi-dimensional force detection unit block plan on the utility model.
Fig. 5 is capacitance electrode plan and multi-dimensional force detection unit block plan under the utility model.
Fig. 6 is the upper and lower layer capacitance electrode arrangement stereogram of the utility model.
Fig. 7 is the profile of the capacitance type touch sensor that the utility model is ultimately formed.
Fig. 8 is the stereogram of the capacitance type touch sensor that the utility model is ultimately formed.
In figure：1st, finger print surface microprotrusion, 2, upper strata capacitance electrode substrate, 3, upper strata capacitance electrode, 4, two dimension it is sinusoidal
Microprotrusion dielectric layer, 5, lower floor's capacitance electrode, 6, lower floor's capacitance electrode substrate, 7, multi-dimensional force detection unit.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.
As shown in Fig. 1, Fig. 7, Fig. 8, capacitance type touch sensor of the present utility model is mainly by from top to bottom successively
Finger print surface microprotrusion 1, upper strata capacitance electrode substrate 2, upper strata capacitance electrode 3, two dimension sine microprotrusion dielectric layer 4, lower floor
Capacitance electrode 5 and lower floor capacitance electrode substrate 6 are closely laminated, and possess multidimensional force measurement ability.
Wherein as shown in figure 1, finger print surface microprotrusion 1 is used to receiving external force stimulation, upper strata capacitance electrode substrate 2,
Lower floor capacitance electrode substrate 6 as structural support, upper strata capacitance electrode 3 and the electrode plates side of series connection on lower floor capacitance electrode 5
To orthogonal thereto arrangement, and the electric capacity main body of sensor is collectively formed with the two-dimentional three of sine microprotrusion dielectric layer 4.
As shown in figure 3, microprotrusion dielectric layer 4 is the fexible film with two-dimensional quadrature sine wave pattern upper surface.Such as Fig. 2
Shown, the upper surface of finger print surface microprotrusion 1 has the texture features close with fingertip skin.Finger print table in Fig. 2
The upper surface of face microprotrusion is only to illustrate, and the actual upper surface of finger print surface microprotrusion 1 should be irregular form.
As shown in Figure 4, Figure 5, upper strata capacitance electrode 3 is arranged with lower floor's capacitance electrode 5 by multi-piece electrode pole piece spaced array
Cloth is formed, the array arrangement mode of the electrode plates of upper strata capacitance electrode 3 and the array arrangement side of the electrode plates of lower floor's capacitance electrode 5
Formula is identical so that each plate electrode pole piece of upper strata capacitance electrode 3 with its immediately below a piece of electrode plates phase of lower floor's capacitance electrode 5
It is correspondingly formed a capacity plate antenna；All electrode plates are in the way of identical column direction is in series or identical line direction is in series
Mode is connected and is divided into a plurality of electrode pad, electrode plates series connection direction and lower floor's capacitance electrode 5 of upper strata capacitance electrode 3
Electrode plates series connection direction is mutually orthogonal (perpendicular).The side that for example electrode plates of upper strata capacitance electrode 3 are in series with same column
Formula arrangement connection, then the electrode plates of lower floor's capacitance electrode 5 arrange connection in the way of mutually going together and be in series.Otherwise similarly.
As Figure 4-Figure 6, upper strata capacitance electrode 3 and capacity plate antenna of the lower floor's capacitance electrode 5 on line direction and column direction
Quantity all same, included in figure and be classified as example with 12 row × 12, and a multidimensional is formed with every 2 row × 2 row capacity plate antenna
Power detection unit 7, after multi-dimensional force detection unit 7 is subject to external force stimulation, the capacitance of four capacity plate antennas therein becomes
Change, the change according to capacitance is converted to the size and Orientation of institute's stress, so as to stimulate external force the capacitance variations for triggering to turn
It is changed to by force information, realizes that tactile sensing is detected.
As shown in fig. 6, in specific implementation, be all connected in the signal acquisition device of outside per the end of strip electrode pole plate,
On upper strata, capacitance electrode 3 makees disconnection process with the centre of every strip electrode pole plate of lower floor's capacitance electrode 5 so that original per strip electrode
Pole plate is divided into two strip electrode pole plates, by four regions of corner by all electrodes of upper strata capacitance electrode 3 and lower floor's capacitance electrode 5
Pole plate is divided into four parts, so that all capacity plate antennas that will be formed between upper strata capacitance electrode 3 and lower floor's capacitance electrode 5
It is divided into four parts, each part is all connected to an external signal sampler to travel through collection capacitance, is improved with this and adopted
The efficiency of collection.
Embodiment of the present utility model is as follows：
The making step for completing the capacitance type touch sensor with metal layer array is as follows：
(1) upper and lower layer capacitance electrode and substrate are manufactured using MEMS minute manufacturings technique.Wherein, substrate uses 25 μ m-thicks
PET film manufacture, upper and lower layer capacitance pole plate with copper be material by magnetron sputtering technique manufacture.
(2) PEGDA materials are used, it is micro- with finger print surface using 3D printing technique manufacture two dimension sine microprotrusion dielectric layer
It is raised.
(3) as shown in figure 8, each layer that will have been manufactured is pasted is assembled into touch sensor.After testing, transducer sensitivity is
0.03%/mN.
Each parameter of touch sensor in embodiment of the present utility model is：Gross thickness is about 200 μm, the length of side is for 10mm
Square, single electric capacity is the square of 500 μm of the length of side, and multi-dimensional force detection unit spatial resolution is 800 μm.Microprotrusion is situated between
In electric layer 4, single height of projection is 6~10 μm, and width is 65~75 μm, and the average thickness of dielectric layer is 45~50 μm.Fingerprint
In shape surface microprotrusion 1, single height of projection is 3~5 μm, and width is 65~75 μm, the average thickness of dimpling aliquation for 55~
60μm。
According to above step, the sensitivity of the touch sensor for manufacturing reaches 0.03%/mN to embodiment, with Gao Ling
The characteristics of sensitivity, high flexibility, set up for human body intelligent artificial limb tactilely-perceptible and be significant.
Touch sensor of the present utility model can serve as " the softness haptic perception sensitive skin " of robot, strengthen it in various rings
The fine, ability of complex job is completed under border, the intelligence degree of robot is greatly improved.In terms of biologic medical, tactile is passed
Sensor can be applied to high accuracy surgical operation robot and Minimally Invasive Surgery intelligence instrument field.
Claims (6)
1. a kind of capacitance type touch sensor with metal layer array, it is characterised in that：The condenser type tactile is passed
Sensor is mainly by finger print surface microprotrusion (1) from top to bottom successively, upper strata capacitance electrode substrate (2), upper layer capacitance electricity
Pole (3), two dimension sine microprotrusion dielectric layer (4), lower floor's capacitance electrode (5) and lower floor's capacitance electrode substrate (6) be closely laminated and
Into finger print surface microprotrusion (1) stimulates for receiving external force, upper strata capacitance electrode substrate (2), lower floor's capacitance electrode substrate
(6) as structural support, upper strata capacitance electrode (3) is connected the orthogonal thereto cloth in direction with the electrode plates in lower floor's capacitance electrode (5)
Put.
2. a kind of capacitance type touch sensor with metal layer array according to claim 1, its feature exists
In：The upper strata finger print surface microprotrusion (1), capacitance electrode substrate (2), two dimension sine microprotrusion dielectric layer (4), lower floor's electricity
Appearance electrode basement (6) is used possesses flexible material.
3. a kind of capacitance type touch sensor with metal layer array according to claim 1, its feature exists
In：The microprotrusion dielectric layer (4) is the fexible film with two-dimensional quadrature sine wave pattern upper surface, single height of projection 6
~10 μm, 65~75 μm of width, 55~60 μm of the average thickness of dielectric layer.
4. a kind of capacitance type touch sensor with metal layer array according to claim 1, its feature exists
In：Described finger print surface microprotrusion (1) upper surface has the texture features close with fingertip skin, single raised high
3~5 μm of degree, 65~75 μm of width, 45~50 μm of the average thickness of dimpling aliquation.
5. a kind of capacitance type touch sensor with metal layer array according to claim 1, its feature exists
In：The upper strata capacitance electrode (3) forms with lower floor's capacitance electrode (5) by the arrangement of multi-piece electrode pole piece spaced array, upper strata
The array arrangement mode of capacitance electrode (3) electrode plates is identical with the array arrangement mode of lower floor capacitance electrode (5) electrode plates,
So that each plate electrode pole piece of upper strata capacitance electrode (3) is relative with lower floor's capacitance electrode (5) a piece of electrode plates immediately below it
A capacity plate antenna should be formed；All electrode plates are in the way of identical column direction is in series or the side that is in series of identical line direction
Formula is divided into a plurality of electrode pad, the electrode plates series connection direction of upper strata capacitance electrode (3) and the electrode pole of lower floor's capacitance electrode (5)
Piece series connection direction is mutually orthogonal.
6. a kind of capacitance type touch sensor with metal layer array according to claim 1, its feature exists
In：The quantity of capacity plate antenna of the upper strata capacitance electrode (3) with lower floor's capacitance electrode (5) on line direction and column direction is homogeneous
Together, and with every 2 row × 2 row capacity plate antenna a multi-dimensional force detection unit (7) is formed.
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| CN108279085A (en) * | 2018-04-02 | 2018-07-13 | 中北大学 | A kind of array of pressure sensors and pressure wave test system |
| CN108680287A (en) * | 2018-03-19 | 2018-10-19 | 北京航空航天大学 | A kind of highly sensitive five degree of freedom arrayed tactile sensor |
| CN109323782A (en) * | 2018-10-26 | 2019-02-12 | 河北工业大学 | A kind of non-array formula super capacitor formula touch sensor and application |
| CN109883584A (en) * | 2017-12-06 | 2019-06-14 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible bionic touch sensor based on micro-structure and preparation method thereof |
| CN110039533A (en) * | 2019-04-17 | 2019-07-23 | 苏州柔性智能科技有限公司 | For detecting the multi-functional software manipulator of fruit maturity |
| CN110082010A (en) * | 2019-03-29 | 2019-08-02 | 中国科学院电子学研究所 | Flexible touch sensation sensor array and array scanning system applied to it |
| CN111829697A (en) * | 2020-06-17 | 2020-10-27 | 华中科技大学 | Flexible pressure sensor with convex hemispherical structure and preparation method thereof |
| WO2020224166A1 (en) * | 2019-05-07 | 2020-11-12 | 河北工业大学 | Electrical double-layer capacitive flexible tactile sensor and manufacturing method therefor |
| CN112067174A (en) * | 2020-05-28 | 2020-12-11 | 北京机械设备研究所 | Flexible capacitive touch sensor array |
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| CN109883584B (en) * | 2017-12-06 | 2022-05-20 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible bionic touch sensor based on microstructure and preparation method thereof |
| CN109883584A (en) * | 2017-12-06 | 2019-06-14 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible bionic touch sensor based on micro-structure and preparation method thereof |
| CN108680287B (en) * | 2018-03-19 | 2020-06-26 | 北京航空航天大学 | High-sensitivity five-degree-of-freedom array type touch sensor |
| CN108680287A (en) * | 2018-03-19 | 2018-10-19 | 北京航空航天大学 | A kind of highly sensitive five degree of freedom arrayed tactile sensor |
| CN108279085B (en) * | 2018-04-02 | 2020-03-10 | 中北大学 | Pressure sensor array and pressure wave test system |
| CN108279085A (en) * | 2018-04-02 | 2018-07-13 | 中北大学 | A kind of array of pressure sensors and pressure wave test system |
| CN109323782A (en) * | 2018-10-26 | 2019-02-12 | 河北工业大学 | A kind of non-array formula super capacitor formula touch sensor and application |
| CN109323782B (en) * | 2018-10-26 | 2023-09-08 | 河北工业大学 | Non-array super-capacitor type touch sensor and application thereof |
| CN110082010A (en) * | 2019-03-29 | 2019-08-02 | 中国科学院电子学研究所 | Flexible touch sensation sensor array and array scanning system applied to it |
| CN110039533A (en) * | 2019-04-17 | 2019-07-23 | 苏州柔性智能科技有限公司 | For detecting the multi-functional software manipulator of fruit maturity |
| WO2020224166A1 (en) * | 2019-05-07 | 2020-11-12 | 河北工业大学 | Electrical double-layer capacitive flexible tactile sensor and manufacturing method therefor |
| CN112067174A (en) * | 2020-05-28 | 2020-12-11 | 北京机械设备研究所 | Flexible capacitive touch sensor array |
| CN111829697A (en) * | 2020-06-17 | 2020-10-27 | 华中科技大学 | Flexible pressure sensor with convex hemispherical structure and preparation method thereof |
| CN112092018A (en) * | 2020-09-18 | 2020-12-18 | 浙江大学 | Touch sensor and manipulator |
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