CN112067174A - Flexible capacitive touch sensor array - Google Patents

Flexible capacitive touch sensor array Download PDF

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Publication number
CN112067174A
CN112067174A CN202010470652.7A CN202010470652A CN112067174A CN 112067174 A CN112067174 A CN 112067174A CN 202010470652 A CN202010470652 A CN 202010470652A CN 112067174 A CN112067174 A CN 112067174A
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CN
China
Prior art keywords
capacitive touch
stretchable
touch sensor
bridge
array
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Pending
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CN202010470652.7A
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Chinese (zh)
Inventor
刘立滨
许诺
臧金良
汪震海
张斌
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Beijing Machinery Equipment Research Institute
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Beijing Machinery Equipment Research Institute
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Priority to CN202010470652.7A priority Critical patent/CN112067174A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/14Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors

Abstract

The application discloses a flexible capacitive touch sensor array, which belongs to the technical field of sensors, and comprises m rows by n columns of capacitive touch sensors, wherein m and n are positive integers; the capacitive touch sensors are prepared on the island-shaped structures, two adjacent capacitive touch sensors are connected through a bridge-shaped structure, and the bridge-shaped structure is used for processing a metal wire to form a signal channel; the island-shaped structure is not stretchable, and the bridge-shaped structure is stretchable; lead terminals are led out at the end of each row and each column of the array, and the lead terminals are used for reading sensor information. A signal channel is formed by the stretchable bridge-shaped structure, the requirement of an electronic circuit on the stretchability is met, the performance degradation problem of the sensor in the stretching process is solved by the aid of the non-stretchable island-shaped structure, on one hand, the stretching performance of the array is guaranteed, and on the other hand, the capacitive touch sensor is protected.

Description

Flexible capacitive touch sensor array
Technical Field
The invention belongs to the technical field of sensors, and relates to a flexible capacitive touch sensor array.
Background
In a human-computer interaction system, various human perceptions are simulated by utilizing an electronic technology, which is a prerequisite condition for realizing seamless connection of human and computer. Human beings realize interaction with the external environment through five senses, namely vision, hearing, smell, taste and touch. Hitherto, the simulation of visual, auditory, olfactory and gustatory functions has been successfully achieved by cameras, earphones, electronic noses and chemical sensors, respectively. However, the simulation of the touch sense is very difficult, which results in that the human-computer interaction system has very poor collection of the touch sense information. The human skin is the largest organ of the human body, and is also a very active, sensitive and high-elasticity sensing organ which mainly plays roles of protecting the body, discharging sweat, regulating temperature, sensing cold and heat, pressure and the like. This kind of multifunctional biological model is inspiring people to research and develop the corresponding electronic device, namely electronic skin, which is the form that can simulate skin: flexible, stretchable, and has tactile and other sensory functions.
Currently, the function of electronic skin is mainly achieved by three schemes: (1) the flexible piezoresistive sensor array is adopted, and because the piezoresistive sensor is very sensitive to deformation, the accuracy of the sensor is easily influenced by the flexibility and the stretching process of a device, so that the accuracy is lower, and the scheme monitors the resistance change and has high power consumption; (2) the touch sensor adopting the optical imaging method cannot realize the flexible and stretchable characteristics, is influenced by a light path and is thick, and cannot be paved on the surface of an object; (3) the capacitive touch sensor and other schemes are adopted, the traditional circuit design is adopted, the stretchable characteristic is not achieved, electrodes of the capacitive touch sensor are located on the same plane, and the design is complex.
Disclosure of Invention
In order to solve the problems that the accuracy of a sensor is easily influenced and the sensor does not have tensile property in the current scheme of electronic skin in the related art, the invention provides a flexible capacitive touch sensor array. The technical scheme is as follows:
there is provided a flexible capacitive touch sensor array comprising: the method comprises the following steps: m rows by n columns of capacitive touch sensors, wherein m and n are positive integers; the capacitive touch sensors are prepared on the island-shaped structures, two adjacent capacitive touch sensors are connected through a bridge-shaped structure, and the bridge-shaped structure is used for processing a metal wire to form a signal channel; the island-shaped structure is not stretchable, and the bridge-shaped structure is stretchable; lead terminals are led out at the end of each row and each column of the array, and the lead terminals are used for reading sensor information.
The signal channel is formed by the stretchable bridge-shaped structure, the requirement of an electronic circuit on the stretchability is met, the capacitive touch sensor is prepared by the non-stretchable island-shaped structure, the function and the precision of the capacitive touch sensor are not influenced by stretching and bending, and the problem of performance degradation of the sensor in the stretching process is solved; the metal wire is processed on the bridge-shaped structure, when the whole touch sensor array is stressed and stretched, the bridge-shaped structure is bent to replace the bending of the island-shaped structure, so that on one hand, the stretching performance of the array is ensured, and on the other hand, the sensor on the island-shaped structure is protected from being influenced.
Optionally, the capacitive touch sensor comprises an insulating film layer, a first conductive layer, and a second conductive layer; the first conducting layer and the second conducting layer are respectively arranged on two sides of the insulating film layer, the first conducting layer forms a first electrode, and the second conducting layer forms a second electrode; a fixed capacitor is formed between the first conductive layer and the second conductive layer; the insulating film layer is made of flexible materials.
The capacitor is formed between the first conducting layer and the second conducting layer which are arranged on two sides of the insulating film layer, and after certain voltage is applied between the two electrodes, electric field distribution is formed between the two electrodes, so that the fixed capacitor is formed.
Optionally, the first conductive layer and the second conductive layer are both semicircular structures.
Optionally, the first conductive layers of the capacitive touch sensors located in the same row of the array are sequentially connected by a stretchable wire on the bridge structure, and the second conductive layers of the capacitive touch sensors located in the same column of the array are sequentially connected by a stretchable wire on the bridge structure; the first conductive layer and the stretchable conductive wires connected with the first conductive layer are prepared on the first side of the insulating film layer, and the second conductive layer and the stretchable conductive wires connected with the second conductive layer are prepared on the second side of the insulating film layer.
Optionally, the thickness of the insulating film layer is less than 100 microns.
The insulating film layer is thin enough to ensure that enough detection capacitance is formed between the two electrodes.
Optionally, the first conductive layer and the second conductive layer are covered with passivation protection layers respectively.
Insulation and protection are achieved by covering with a passivating protective layer.
Optionally, the insulating film layer is made of at least one plastic material of PI, PET and PEN.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
FIG. 1 is a schematic diagram of a flexible capacitive touch sensor array provided by one embodiment of the present invention;
FIG. 2 is a schematic diagram of island structures and bridge structures provided by one embodiment of the present invention;
FIG. 3 is a schematic diagram of a capacitive touch sensor provided by one embodiment of the present invention;
FIG. 4 is a schematic diagram of the monitoring principle provided by one embodiment of the present invention when there is no object contact;
FIG. 5 is a schematic diagram of a monitoring principle provided by an embodiment of the invention when an object is in contact with the monitoring principle;
FIG. 6 is a schematic diagram of the electrical connections of a flexible capacitive touch sensor array provided by one embodiment of the present invention;
FIG. 7 is a schematic diagram of a flexible insulating film layer of a flexible capacitive touch sensor array provided by one embodiment of the present invention;
FIG. 8 is a schematic view of a first conductive layer of a flexible capacitive touch sensor array provided by one embodiment of the present invention;
FIG. 9 is a schematic diagram of a second conductive layer of a flexible capacitive touch sensor array provided by one embodiment of the invention.
Wherein the reference numbers are as follows:
1. a capacitive touch sensor; 2. an island structure; 3. a bridge-like structure; 4. a lead terminal; 5. an insulating thin film layer; 6. a first conductive layer; 7. a second conductive layer; 8. and passivating the protective layer.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the invention, as detailed in the appended claims.
The traditional touch sensor is a hard sensor, and the sensor is difficult to work normally in a stretching state or a flexible bending state. The flexible touch sensor array mainly comprises a flexible base material, an electronic circuit and a sensor array, and the sensor device is generally a hard device, so that the stretching capacity of the sensor array is limited, and the phenomena of performance degradation and precision reduction can occur along with the stretching of electronic skin. The electronic circuit cannot be stretched, and the signal reading is difficult. Electronic circuits in the array are channels for sensing information acquisition, and when the array is bent or stretched, the electronic circuits are disconnected or degraded due to deformation problems, so that the electronic skin function is disabled.
Aiming at the problems that the precision of a sensor is easily influenced and does not have the stretching performance in the current scheme of the electronic skin, the application provides a flexible capacitive touch sensor array, solves the realization of the flexibility and the stretching characteristic of a touch sensor and the problem of reading the touch information of the touch sensor array, provides an array design scheme with low complexity and easy realization, and can simulate the form and the function of the skin: the flexible and stretchable touch sensor has an array touch sensor and has a touch sensing function. The sensor can be attached to the surfaces of various objects due to the flexible stretching, so that the surfaces of the objects have touch feeling, the sensor can be applied to the fields of robots, human-computer interaction and medical health, on one hand, the stretching performance of the array is guaranteed, and on the other hand, the sensor on the island-shaped structure is protected from being influenced. The flexible capacitive touch sensor array provided by the present application is illustrated below in conjunction with fig. 1 and 5.
With combined reference to fig. 1 and 9, the flexible capacitive touch sensor array comprises: m rows by n columns of capacitive touch sensors 1, where m and n are both positive integers.
The capacitive touch sensors 1 are prepared on the island-shaped structures 2, two adjacent capacitive touch sensors 1 are connected through the bridge-shaped structures 3, and the bridge-shaped structures 3 are used for processing metal wires to form signal channels. The island structures 2 are not stretchable and the bridge structures 3 are stretchable. Lead terminals 4 are led out at the end of each row and each column of the array, and the lead terminals 4 are used for reading sensor information.
In the array, two adjacent island structures 2 in each row are connected through a transverse bridge structure 3, and two adjacent island structures 2 in each column are connected through a longitudinal bridge structure 3.
Exemplarily, in fig. 1, a 3 × 3 flexible capacitive tactile sensor array is shown, comprising 3 rows and 3 columns of capacitive tactile sensors 1, for each row and at the end of each column a lead terminal 4 is led out for the reading of the sensing information, at the intersection of each row and each column, a capacitive tactile sensor 1 is formed.
The whole array is mainly formed by combining a stretchable bridge-shaped structure 3 and a non-stretchable island-shaped structure 2, a signal channel is formed by utilizing the stretchable bridge-shaped structure 3, the requirement of an electronic circuit on the stretchability is met, and the problem of performance degradation of the sensor in the stretching process is solved by utilizing the non-stretchable island-shaped structure 2. The capacitive touch sensor 1 is prepared on the island-shaped structure 2, so that the function and the precision of the touch sensor are not influenced by stretching and bending, the metal wire is processed on the bridge-shaped structure 3, when the whole touch sensor array is stressed and stretched, the bridge-shaped structure 3 is bent to replace the bending of the island-shaped structure 2, on one hand, the stretching performance of the array is ensured, and on the other hand, the sensor on the island-shaped structure 2 is also protected from being influenced.
As shown in fig. 3, the capacitive touch sensor 1 includes an insulating film layer 5, a first conductive layer 6, and a second conductive layer 7.
The first conductive layer 6 and the second conductive layer 7 are provided on both sides of the insulating film layer 5, respectively, the first conductive layer 6 forming a first electrode, and the second conductive layer 7 forming a second electrode. A fixed capacitor is formed between the first conductive layer 6 and the second conductive layer 7; the insulating film layer 5 is a flexible material.
Optionally, the first conductive layer 6 and the second conductive layer 7 are both semicircular structures.
Illustratively, the first conductive layer 6 forms a semicircular first electrode on the front surface of the insulating film layer 5, the second conductive layer 7 forms a semicircular second electrode on the back surface of the insulating film layer 5, and a fixed capacitor is formed between the two electrodes.
With combined reference to fig. 1 and 3, the first conductive layers 6 of the capacitive touch sensors 1 located in the same row of the array are sequentially connected by a stretchable conductive line on the bridge structure, and the second conductive layers 7 of the capacitive touch sensors 1 located in the same column of the array are sequentially connected by a stretchable conductive line on the bridge structure; the first conductive layer 6 and the stretchable conductive wires connected to the first conductive layer 6 are prepared on a first side of the insulating film layer 5, and the second conductive layer 7 and the stretchable conductive wires connected to the second conductive layer 7 are prepared on a second side of the insulating film layer 5.
Illustratively, the first conductive layers 6 of the three capacitive tactile sensors 1 in the R1 th row are sequentially connected, and the lead terminal 4 is led out from the leftmost side, the first conductive layers 6 of the three capacitive tactile sensors 1 in the R2 th row are sequentially connected, and the lead terminal 4 is led out from the leftmost side, the first conductive layers 6 of the three capacitive tactile sensors 1 in the R3 th row are sequentially connected, and the lead terminal 4 is led out from the leftmost side, the second conductive layers 7 of the three capacitive tactile sensors 1 in the C1 th column are sequentially connected, and the lead terminal 4 is led out from the lowermost side, the second conductive layers 7 of the three capacitive tactile sensors 1 in the C2 th column are sequentially connected, and the lead terminal 4 is led out from the lowermost side, and the second conductive layers 7 of the three capacitive tactile sensors 1 in the C3 th column are sequentially connected, and the lead terminal 4 is led out from the lowermost.
Optionally, the thickness of the insulating film layer 5 is less than 100 micrometers, and the thickness is thin enough to ensure that a sufficient detection capacitance is formed between the two electrodes.
Optionally, the insulating film layer 5 is at least one plastic material of PI, PET, and PEN.
Referring to fig. 4 and 5 in combination, the first conductive layer 6 and the second conductive layer 7 are covered with a passivation protective layer 8 for insulation and protection, respectively.
Fig. 4 and 5 show cross-sectional views of the sensor with the first conductive layer 6 on one side of the insulating film layer 5 and the second conductive layer 7 on the other side of the insulating film layer 5, forming a capacitance between the two sides. After a certain voltage (alternating voltage or pulse voltage) is applied between the two electrodes, electric field distribution is formed between the two electrodes, and the capacitance between the two electrodes is a fixed capacitance existing in the system.
When an object approaches or releases the sensor, the electric field change on the surface can be changed, so that capacitance change and current change are formed between the two electrodes, and the contact condition can be detected through a detection circuit at the rear end according to the change of the capacitance and the current, so that the touch is realized.
Illustratively, fig. 6 shows a schematic diagram of the circuit connection corresponding to fig. 1.
Referring to fig. 7 to 9 in combination, schematic diagrams after the insulating thin film layer 5, the first conductive layer 6 and the second conductive layer 7 corresponding to the array of fig. 1 are separated are respectively shown. The first conducting layers 6 are prepared on the front surface of the insulating film layer 5 to form a semicircular first electrode, two adjacent first conducting layers 6 in the same row are connected through the stretchable conducting wire on the bridge-shaped structure 3, and the stretchable conducting wire belongs to the first conducting layers and is arranged on the front surface of the film of the bridge-shaped structure; the second conducting layers 7 are prepared on the back of the insulating film layer 5 to form semicircular second electrodes, two adjacent second conducting layers 7 in the same column are connected through the stretchable conducting wires on the bridge-shaped structures 3, and the stretchable conducting wires belong to the second conducting layers and are arranged on the back of the film of the bridge-shaped structures.
When the array is read, the capacitance value of the capacitive touch sensor 1 is tested in turn for each row or each column, whether an object is contacted is distinguished through the capacitance value, and the driving signal is an alternating current signal or a square wave signal.
Therefore, the island-bridge structure and the flexible touch sensor are combined and arrayed, the flexible arrayed touch sensor is realized, the island-bridge structures 2 are connected through the bridge-shaped structure 3, and the metal wires on the bridge-shaped structure 3 are connected with the electrodes on the two island-shaped structures 2 to form electrical communication.
The island-bridge structure is used, the flexible capacitive touch sensor is combined, a flexible and stretchable touch sensor array is formed, and the non-stretchable island structure ensures that the precision of the sensor is not influenced by stretching. The two electrodes of the capacitive touch sensor are distributed on the two sides of the insulating film layer, so that the process and design complexity is reduced, the cost is reduced, the structure is simple, and the sensing precision is high.
In practical applications, the solution in the present application may also use a fully flexible metal material or a fully flexible sensor.
In summary, the flexible capacitive touch sensor array provided by the application solves the requirement of an electronic circuit on the stretchability by forming the signal channel through the stretchable bridge-shaped structure, and the capacitive touch sensor is prepared by using the non-stretchable island-shaped structure, so that the function and the precision of the capacitive touch sensor are not influenced by stretching and bending, and the problem of performance degradation of the sensor in the stretching process is solved; the metal wire is processed on the bridge-shaped structure, when the whole touch sensor array is stressed and stretched, the bridge-shaped structure is bent to replace the bending of the island-shaped structure, so that on one hand, the stretching performance of the array is ensured, and on the other hand, the sensor on the island-shaped structure is protected from being influenced.
In addition, a capacitor is formed between the first conducting layer and the second conducting layer which are arranged on two sides of the insulating film layer, and after a certain voltage is applied between the two electrodes, electric field distribution is formed between the two electrodes, so that a fixed capacitor is formed.
In addition, the insulating film layer is thin enough to ensure that enough detection capacitance is formed between the two electrodes.
In addition, insulation and protection are achieved by covering with a passivation protective layer.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
It will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the invention is limited only by the appended claims.

Claims (7)

1. A flexible capacitive touch sensor array, comprising: m rows by n columns of capacitive touch sensors, wherein m and n are positive integers;
the capacitive touch sensors are prepared on the island-shaped structures, two adjacent capacitive touch sensors are connected through a bridge-shaped structure, and the bridge-shaped structure is used for processing a metal wire to form a signal channel;
the island structures are not stretchable and the bridge structures are stretchable;
lead terminals are led out at the end of each row and each column of the array, and the lead terminals are used for reading sensor information.
2. The flexible capacitive touch sensor array of claim 1, wherein the capacitive touch sensor comprises an insulating film layer, a first conductive layer, a second conductive layer;
the first conducting layer and the second conducting layer are respectively arranged on two sides of the insulating film layer, the first conducting layer forms a first electrode, and the second conducting layer forms a second electrode;
a fixed capacitor is formed between the first conductive layer and the second conductive layer;
the insulating film layer is made of flexible materials.
3. The flexible capacitive touch sensor array of claim 2, wherein the first and second conductive layers are each a semi-circular structure.
4. The array of flexible capacitive touch sensors of claim 3, wherein the first conductive layers of capacitive touch sensors located in a same row of the array are sequentially connected by a stretchable conductive wire on the bridge structure, and the second conductive layers of capacitive touch sensors located in a same column of the array are sequentially connected by a stretchable conductive wire on the bridge structure;
the first conductive layer and the stretchable conductive wires connected with the first conductive layer are prepared on a first side of the insulating film layer, and the second conductive layer and the stretchable conductive wires connected with the second conductive layer are prepared on a second side of the insulating film layer.
5. The flexible capacitive touch sensor array of claim 4, wherein the insulating film layer has a thickness of less than 100 microns.
6. The flexible capacitive touch sensor array of claim 5, wherein the first and second conductive layers are each covered with a passivation layer.
7. The flexible capacitive touch sensor array of any one of claims 2 to 6, wherein the insulating film layer is a plastic material selected from the group consisting of PI, PET and PEN.
CN202010470652.7A 2020-05-28 2020-05-28 Flexible capacitive touch sensor array Pending CN112067174A (en)

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CN112692438A (en) * 2020-12-17 2021-04-23 南京航空航天大学 Preparation method of addressing type ultrasonic transducer array and flexible matrix
CN112816107A (en) * 2020-12-31 2021-05-18 武汉大学 Variable-range capacitive flexible pressure sensor and preparation method thereof
CN114384274A (en) * 2021-12-23 2022-04-22 北京航空航天大学宁波创新研究院 Wireless acceleration sensor based on double-layer stretchable flexible circuit and preparation method

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CN112816107A (en) * 2020-12-31 2021-05-18 武汉大学 Variable-range capacitive flexible pressure sensor and preparation method thereof
CN112816107B (en) * 2020-12-31 2023-08-22 武汉大学 Variable range capacitive flexible pressure sensor and preparation method thereof
CN114384274A (en) * 2021-12-23 2022-04-22 北京航空航天大学宁波创新研究院 Wireless acceleration sensor based on double-layer stretchable flexible circuit and preparation method

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