CN206192369U - Electric eddy sensor - Google Patents
Electric eddy sensor Download PDFInfo
- Publication number
- CN206192369U CN206192369U CN201621139090.3U CN201621139090U CN206192369U CN 206192369 U CN206192369 U CN 206192369U CN 201621139090 U CN201621139090 U CN 201621139090U CN 206192369 U CN206192369 U CN 206192369U
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- resistance
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- current vortex
- coil
- vortex sensor
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Abstract
The utility model discloses an electric eddy sensor, including the high frequency signal driving source, measuring -signal generating circuit and the output terminal that connect gradually, wherein, measuring -signal generating circuit includes anti -resonance circuit to ally oneself with resonance circuit including parallelly connected coil branch road and the capacitor branch circuit who sets up, wherein, the coil branch road is including the probe coil and the material gear regulating electrical resistance that establish ties, and coil branch road and capacitor branch circuit's one end and high frequency signal driving source are connected, other end ground connection. The utility model discloses the compensation of accessible material gear regulating electrical resistance changes and causes equivalent coil impedance change owing to treat the conductivity of the target material of measuring, and then changes electric eddy sensor's correlation index such as sensitivity, finally makes the resonance voltage output characteristic curve of different target materials unanimous along with displacement, overcomes the influence of different detectable material to the testing result.
Description
Technical field
The utility model is related to sensor field, in particular to a kind of current vortex sensor.
Background technology
Current vortex sensor is due to simple structure, and sensitivity is high, the advantages of strong antijamming capability, has been widely used for machine
The fields such as tool parameter measurement, petroleum transportation pipeline Non-Destructive Testing, Aero-Space.
At present, the working method of conventional current vortex sensor be divided into from principle determine frequency modulation method, frequency conversion modulation method and
Frequency modulation method.Wherein, Fig. 1 shows the circuit theory diagrams for determining frequency modulation method, and it has stability high, and it is excellent that parameter is easy to adjustment etc.
Point, is the design of main flow.
As shown in figure 1, current vortex sensor of the prior art includes：High-frequency signal injection source 1, divider resistance 3, output
Terminal 2 and antiresonant circuit.Wherein, the output end in high-frequency signal injection source 1 is connected by divider resistance 3 with lead-out terminal 2,
Can also connect a signal processing circuit 6 between divider resistance 3 and lead-out terminal 2.Additionally, the antiresonant circuit includes visiting
Head coil L and electric capacity C.
In commercial Application, same current vortex sensor is likely to be used for the position of the different equipment of measurement or part
Move, because the difference for detecting material can bring error.However, in the prior art, it is also no to enter line position for different materials
Move the general purpose transducer of detection.So, user when in use, for detecting different materials, it is necessary to change corresponding biography
Sensor, causes deficiency in economic performance, inefficiency.
Utility model content
A kind of current vortex sensor is provided in the utility model embodiment, to solve to detect different materials in the prior art
Material causes deficiency in economic performance, ineffective problem, it is necessary to change corresponding sensor.
To achieve the above object, the utility model embodiment provides a kind of current vortex sensor, including the height being sequentially connected
There is circuit and lead-out terminal in frequency signal driving source, measurement signal, wherein, measurement signal occurs circuit includes parallel resonance
Circuit, antiresonant circuit includes the path of winding and capacitive branch that are arranged in parallel, wherein, path of winding includes the probe of series connection
One end of coil and material gear regulation resistance, path of winding and capacitive branch is connected with high-frequency signal injection source, another termination
Ground.
Preferably, current vortex sensor also includes signal processing circuit, one end of path of winding and capacitive branch passes through
Signal processing circuit is connected with lead-out terminal.
Preferably, material gear regulation resistance is digital regulation resistance.
Preferably, material gear regulation resistance includes multiple gear resistance, wherein, multiple gear resistance and analog selection
Switch connection.
Preferably, antiresonant circuit also includes divider resistance, high-frequency signal injection source passes through divider resistance and coil
One end connection of branch road and capacitive branch.
The utility model can adjust resnstance transformer due to the conductivity variations of target material to be detected by material gear
And cause equivalent coil impedance variations, and then change the indexs of correlation such as the sensitivity of current vortex sensor, finally make different target
The resonance potential output characteristic curve of material is consistent with change in displacement, overcomes influence of the different detection materials to testing result.
Brief description of the drawings
Fig. 1 is fixed-frequency AM electric vortex sensor circuit structure chart of the prior art；
Fig. 2 is current vortex sensor equivalent circuit；
Fig. 3 is variation relation figure of the resonance potential amplitude with coil equivalent inductance；
Fig. 4 is the radial whirl intensive analysis figure under different conductivity targets；
Fig. 5 is impact analysis figure of the electrical conductivity to resonance potential；
Fig. 6 is the circuit theory diagrams of the current vortex sensor in the utility model；
Fig. 7 is target material on measurement result influence and the effect of series resistance.
Description of reference numerals：1st, high-frequency signal injection source；2nd, lead-out terminal；3rd, divider resistance；4th, probe coil；5th, material
Gear adjusts resistance；6th, signal processing circuit.
Specific embodiment
The utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings, but not as to this practicality
New restriction.
In order to realize the detection to different target material, inventor carries out the following studies：First, current vortex sensing
The metallic conductor of device approximately regards a short-circuited coil as, therefore can obtain the equivalent circuit of air-core transformer as shown in Figure 2
Figure.
Wherein, mutual inductance a M, R are defined between coil and metal conductor measured1It is coil resistance, L1It is coil electricity
Sense, R2It is conductor resistance, L2It is conductor inductance, U is driving source voltage.
According to equivalent circuit, from Kirchhoff's theorem：
Wherein, formula (1) coil equivalent inductance and internal resistance resistance be respectively：
From above-mentioned principle：The equivalent resistance of coil strengthens and increases with eddy current effect, and equivalent inductance is with eddy current effect
Enhancing and reduce.
Generally, inductance displacement sensitivity is more than the sensitivity of resistive displacement, therefore inventor uses inductance conduct
Measurement amount represents the change of displacement of targets, that is, think that inductance is the major parameter that influences resonance potential, and the change of resistance is time
Want factor of influence.
The voltage at LC two ends is：
Wherein, uLrCIt is coil and the voltage at electric capacity two ends, zLrCIt is coil and the parallel impedance of resonant capacitance, and
It is as shown in Figure 3 with the variation relation of displacement by being calculated resonance potential amplitude according to above-mentioned relation.
As shown in figure 3, the equivalent resistance Rs of coil increases successively from top to bottom in figure.Therefore, such as drawn a conclusion：
The left side of LC parallel resonance frequencies point, resonance potential amplitude as inductance increase is the increase of displacement and is increased, if coil etc.
Effect internal resistance is smaller, then resonance amplitude is bigger, that is to say, that the equivalent resistance of coil influences the size of resonance potential amplitude.
The output of current vortex sensor is related to the electromagnetic property of measured body, wherein electrical conductivity be a main influence because
Element.Fig. 4 shows the current vortex intensity radial distribution at the same displacement under different electrical conductivity materials, and wherein IACS is in the world
It is used for calculating the relative conductivity of other materials using the electrical conductivity 58.0MS/m of annealed copper as standard conductivity (IACS), than
Such as, the relative conductivity of aluminium is 60%.
On this basis, inventor had found in the case where electrical conductivity is unique variable, current vortex intensity and electrical conductivity into
Direct ratio, i.e. electrical conductivity are bigger, and current vortex intensity is stronger.And the size of current vortex intensity can influence the inductive reactance of measured body,
Therefore, according to formula (2) and then the value of the equivalent resistance that can change measuring coil.According to experiment, different electrical conductivity mesh can be measured
Resonance amplitude displacement curve variation relation under mark detection material is as shown in Figure 5.
It can be seen that, due to detect material the change for causing resonance potential, can by the series resistance of regulating winding go to
Disappear, finally ensure that resonance potential is consistent, that is, it is identical to be sent to the signal before signal processing circuit.
By the studies above of inventor, in order to eliminate the influence of material electric conductivity, can be connected in inductive branch
One adjustable resistance, for this utility model provides current vortex sensor as shown in Figure 6.
Fig. 6 is refer to, the current vortex sensor includes that the high-frequency signal injection source 1, measurement signal being sequentially connected occurs electricity
Road and lead-out terminal 2.Wherein, the measurement signal occurs circuit includes antiresonant circuit, the antiresonant circuit bag
The path of winding and capacitive branch being arranged in parallel are included, wherein, the path of winding includes the probe coil 4 and material gear of series connection
One end of regulation resistance 5, the path of winding and the capacitive branch is connected with the high-frequency signal injection source 1, another termination
Ground.Preferably, antiresonant circuit also includes divider resistance 3, and high-frequency signal injection source 1 passes through divider resistance 3 and path of winding
And one end connection of capacitive branch.Capacitive branch includes electric capacity C.
So, the utility model can adjust resistance 5 and compensate due to the conductance of target material to be detected by material gear
Rate changes and causes equivalent coil impedance variations, and then changes the indexs of correlation such as the sensitivity of current vortex sensor, finally makes not
Resonance potential output characteristic curve with target material is consistent with change in displacement, overcomes the different shadows for detecting materials to testing result
Ring, solve needs to change corresponding sensor when detecting different materials, causes deficiency in economic performance, ineffective to ask
Topic.
When using, material gear regulation resistance 5 can be adjusted to adjust phase with the target according to the target material of actual measurement
The gear resistance of matching, so as to the measurement result of different target material can be made unanimously, reaching can just be examined using same sensor
The purpose of multiple material is surveyed, and then improves efficiency, reduce measurement cost.
Preferably, the current vortex sensor also includes signal processing circuit 6, the path of winding and the capacitive branch
Described one end be connected with the lead-out terminal 2 by the signal processing circuit 6.
In a preferred embodiment, the material gear regulation resistance 5 in the utility model is digital regulation resistance, so may be used
Quickly and accurately to adjust control gear resistance by the way of data.In another embodiment, the material gear is adjusted
Economize on electricity resistance 5 includes multiple gear resistance, wherein, the multiple gear resistance is connected with analog selection switch.
Below, the material gear regulation resistance determination process of pair above-mentioned current vortex sensor of determination is described in detail：
First, this method needs to provide as the reference material and the target material as material to be tested of benchmark.
Secondly, determine that material gear adjusts the gear resistance of resistance, specifically include following steps：
(1) reference material test：
First, we will be using some reference material as reference.Because reference material is different, its resistivity is also different
, therefore the resistance of corresponding material gear regulation resistance is also different when producing resonance.
For this reason, it may be necessary to adjust the material gear regulation resistance 5 of current vortex sensor to produce stable resonance.Then so as to
Obtain the resonance amplitude in a certain displacement.Wherein, the displacement refer to current vortex sensor probe coil and reference material or
The distance between target material.
Then, above-mentioned displacement is constantly changed, so that the resonance amplitude under different displacements is obtained, such that it is able to draw out base
The resonance amplitude displacement curve of quasi- material, herein we term it the first resonance amplitude displacement curve.
(2) target material test：
After the resonance amplitude displacement curve for obtaining reference material, the utility model is sensed by above-mentioned current vortex
Device is tested target material, to obtain the resonance amplitude displacement curve of target material.Wherein, resonance amplitude displacement curve
Data acquisition and drawing process are similar with the acquisition process and mode of the resonance amplitude displacement curve of reference material, no longer go to live in the household of one's in-laws on getting married herein
State.
Unlike, it is necessary to constantly the material gear of regulation current vortex sensor adjusts resistance 5 during test
Resistance size, to obtain a plurality of second resonance amplitude displacement curve in the case of different resistances.
(3) the second resonance amplitude displacement curve for essentially coinciding is found out：
First resonance amplitude displacement curve is compared with a plurality of second resonance amplitude displacement curve, to find and first
That second resonance amplitude displacement curve for essentially coinciding in other words that resonance amplitude displacement curve switch is pressed close to the most.
(4) gear resistance is determined：
By the material corresponding to that second resonance amplitude displacement curve of coincidence corresponding with the first resonance amplitude displacement curve
The resistance of material gear regulation resistance 5 adjusts the gear resistance of resistance 5 as material gear corresponding with the target material.
Preferably, multiple target materials are tested, to obtain the gear resistance corresponding to different target material.
For example, the first material on the basis of a certain material, then measures amplitude during resonance stabilization, and draw one group of amplitude position
Move curve.Because the resonance amplitude displacement curve of different target materials is often different, when using, it is with the target material
Benchmark, the value of resistance 5 is adjusted by adjusting material gear, when making measurement other materials, under amplitude displacement curve and reference material
Essentially coincide.
So repeat to obtain the corresponding gear resistance of several target material, then by the different gear of gear resistance correspondence,
The final one-to-one corresponding (as shown in the table) for realizing target material and gear.
User when in use, only need to be adjusted to the detection that corresponding gear completes displacement, nothing according to detection target material
More emat sensor is needed, it is time saving, simple, easy to operate.
Fig. 7 shows target material on measurement result influence and the effect of series resistance.As shown in fig. 7, regulation series electrical
Resistance (i.e. material gear regulation resistance 5) can offset the change of target material, and then ensure that resonance potential displacement curve is consistent
, and then ensure that the sensor of design can be used for detecting multiple material.For example, path of winding series connection material gear regulation resistance
After 5, detection conductance is the resonance amplitude response curve of the target material of 80%IACS, is 50% with script detection electrical conductivity
The resonance amplitude response curve of the target material of IACS reaches unanimity, it is therefore not necessary to adjust the parameter of signal processing circuit, so that it may
So that sensor output is final consistent.
Because the resistivity of different reference materials is different, therefore, it is necessary to by material for the reference material having
Gear regulation resistance 5 is adjusted up, and some reference materials then need a person with the qualifications of a general and expect that gear regulation resistance 5 is adjusted downwards.To need
For situation about being adjusted up, if by material gear regulation resistance 5 be arranged to maximum when initial, cannot further to
Upper regulation.In order to avoid this problem, the utility model adjusts resistance 5 to produce in the material gear of regulation current vortex sensor
During the resonance of stabilization：By material gear regulation resistance 5 resistance adjust to positioned at material gear regulation resistance 5 maximum with most
Predetermined value between small value, adjusts material gear regulation resistance 5 to produce the resonance of stabilization on the basis of this predetermined value.
When carrying out actual test using the utility model, it is first determined the type of target material, then current vortex is sensed
The material gear regulation resistance 5 of device is adjusted to the gear resistance corresponding with the type of target material, so just using this reality
Target material is tested with the current vortex sensor in new.
Certainly, above is preferred embodiment of the present utility model.It should be pointed out that for the ordinary skill of the art
For personnel, on the premise of the utility model general principle is not departed from, some improvements and modifications can also be made, these improvement
Protection domain of the present utility model is also considered as with retouching.
Claims (5)
1. a kind of current vortex sensor, it is characterised in that including the high-frequency signal injection source (1), the measurement signal hair that are sequentially connected
Raw circuit and lead-out terminal (2), wherein, the measurement signal occurs circuit includes antiresonant circuit, the parallel resonance
Circuit includes the path of winding and capacitive branch that are arranged in parallel, wherein, the path of winding include the probe coil (4) of series connection and
One end of material gear regulation resistance (5), the path of winding and the capacitive branch is with the high-frequency signal injection source (1) even
Connect, the other end is grounded.
2. current vortex sensor according to claim 1, it is characterised in that the current vortex sensor also includes at signal
Described one end of reason circuit (6), the path of winding and the capacitive branch is defeated with described by the signal processing circuit (6)
Go out terminal (2) connection.
3. current vortex sensor according to claim 1, it is characterised in that it is number that the material gear adjusts resistance (5)
Word potentiometer.
4. current vortex sensor according to claim 1, it is characterised in that the material gear adjusts resistance (5) to be included
Multiple gear resistance, wherein, the multiple gear resistance is connected with analog selection switch.
5. current vortex sensor according to claim 1, it is characterised in that the antiresonant circuit also includes partial pressure electricity
Resistance (3), the high-frequency signal injection source (1) is by the divider resistance (3) and the path of winding and the capacitive branch
One end connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621139090.3U CN206192369U (en) | 2016-10-19 | 2016-10-19 | Electric eddy sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621139090.3U CN206192369U (en) | 2016-10-19 | 2016-10-19 | Electric eddy sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206192369U true CN206192369U (en) | 2017-05-24 |
Family
ID=58733530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621139090.3U Withdrawn - After Issue CN206192369U (en) | 2016-10-19 | 2016-10-19 | Electric eddy sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206192369U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106441378A (en) * | 2016-10-19 | 2017-02-22 | 珠海格力节能环保制冷技术研究中心有限公司 | Eddy current sensor, determining method of material level adjustment resistor of eddy current sensor, and test method |
| CN108981975A (en) * | 2018-05-23 | 2018-12-11 | 北京航空航天大学 | A kind of pressure sensor and distribution force measuring method |
| CN112729096A (en) * | 2020-12-30 | 2021-04-30 | 清华大学 | Metal film thickness measuring device for chemical mechanical polishing |
| CN114440753A (en) * | 2022-02-24 | 2022-05-06 | 电子科技大学 | Non-contact displacement measuring device based on eddy current principle |
| CN114473844A (en) * | 2021-12-31 | 2022-05-13 | 华海清科股份有限公司 | Film thickness measuring device |
-
2016
- 2016-10-19 CN CN201621139090.3U patent/CN206192369U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106441378A (en) * | 2016-10-19 | 2017-02-22 | 珠海格力节能环保制冷技术研究中心有限公司 | Eddy current sensor, determining method of material level adjustment resistor of eddy current sensor, and test method |
| CN106441378B (en) * | 2016-10-19 | 2019-03-05 | 珠海格力电器股份有限公司 | Eddy current sensor and material gear adjusting resistance determining method and testing method thereof |
| CN108981975A (en) * | 2018-05-23 | 2018-12-11 | 北京航空航天大学 | A kind of pressure sensor and distribution force measuring method |
| CN112729096A (en) * | 2020-12-30 | 2021-04-30 | 清华大学 | Metal film thickness measuring device for chemical mechanical polishing |
| CN114473844A (en) * | 2021-12-31 | 2022-05-13 | 华海清科股份有限公司 | Film thickness measuring device |
| CN114473844B (en) * | 2021-12-31 | 2023-09-29 | 华海清科股份有限公司 | Film thickness measuring device |
| CN114440753A (en) * | 2022-02-24 | 2022-05-06 | 电子科技大学 | Non-contact displacement measuring device based on eddy current principle |
| CN114440753B (en) * | 2022-02-24 | 2022-11-22 | 电子科技大学 | Non-contact displacement measuring device based on eddy current principle |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170524 Effective date of abandoning: 20190305 |