CN206161204U - Capacitive pressure sensor of vertical dynamic electricity utmost point - Google Patents
Capacitive pressure sensor of vertical dynamic electricity utmost point Download PDFInfo
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- CN206161204U CN206161204U CN201621122952.1U CN201621122952U CN206161204U CN 206161204 U CN206161204 U CN 206161204U CN 201621122952 U CN201621122952 U CN 201621122952U CN 206161204 U CN206161204 U CN 206161204U
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- capacitive pressure
- moving electrode
- electrode
- pressure transducer
- dynamic electricity
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Abstract
The utility model provides a capacitive pressure sensor of vertical dynamic electricity utmost point, the influence of extremely conducting oneself with dignity of dynamic electricity that had solved present capacitive pressure sensor, it is big to produce the nonlinearity, and the scheduling problem hang down to the precision, including the matching can, and matees fixed electrode, tubulose extraction electrode, the dynamic electricity utmost point that package assembly is in the same place and draws the pressure mouth, and its technical essential is: two the dynamic electricity extremely utilizes the graded seal ring that has the blade weld bond publicly to weld the seat and draw that to press a mouthful centre gripping to tighten fixed with having, with blade weld bond welded fastening on the matching can of collar extension in the having of fixed electrode together to make the pressurized displacement direction of two dynamic electricities utmost point perpendicular with the direction of gravity, through the tubulose extraction electrode interconnect of lead wire with the dynamic electricity utmost point, constitutes the capacitive pressure sensor that dynamic electricity that two capacitive pressure sensor were standing extremely connected in parallel mutually. Its structural design is reasonable, has not only effectively avoided the dynamic electricity influence of extremely conducting oneself with dignity, reduces the nonlinearity, lets gauge pressure measurements put forward high resolution and precision moreover, still can make effective measuring range expand to the little direction that declines by a wide margin.
Description
Technical field
The utility model is related to a kind of capacitive pressure transducer, particularly a kind of moving electrode for allowing capacitance pressure transducer,
Stand, i.e. multiple capacitive pressure transducers that the pressurized direction of displacement of moving electrode is vertical with gravity direction or moving electrode stands are in parallel
Vertical moving electrode capacitive pressure transducer.It can be widely applied to microelectronics, uranium enrichment etc. and needs high reliability, little micro
The high-acruracy survey of journey.
Background technology
The principle of existing capacitive pressure transducer, is mostly based on plane-parallel capacitor.Such capacitive pressure transducer
It is in advantage in terms of little micro-pressure measurement.Capacitive pressure transducer is provided with fixed electrode and moving electrode, after moving electrode is pressurized, relatively
Be subjected to displacement in fixed electrode, make electric capacity that relative change to occur, to its enhanced processing after, corresponding to pressure, capacitive pressure transducer
There is output.Moving electrode typically makes of invar property film, can regard as periphery fixed, pressurized can move freely.Such as Fig. 4
Shown single capacitive pressure transducer, although moving electrode is very thin, pressure whole or decomposable asymmetric choice net that moving electrode deadweight is produced
When the pressure component for going out overlaps with gravity direction, sensor is produced a very large impact.If Fig. 4 is for the level used time of moving electrode 1, from
Beijing South Maxpower Technology Co. Ltd produce maximum pressure value be：Moving electrode thickness is multiplied by the proportion of moving electrode material.With minimum range as 0～1.5kPa（It is dry
Formula）As a example by capacitive pressure transducer, moving electrode is thick 80 μm or so, and the pressure that can be produced is 8Pa～10Pa or so to the maximum, and its is relative
Impact is 0.5%F.S～0.6%F.S to the maximum；For the capacitive pressure transducer that minimum range is 0～100Pa, moving electrode thickness is
50 μm or so, it is 5Pa or so that gravity energy produces maximum pressure, and maximum effect has reached 5%F.S.Equally, for minimum range is exhausted
Electric capacity absolute pressure transducer to pressure 15Pa, moving electrode is also 20 μ m-thicks, also produces the pressure of 2Pa, and no matter the electric capacity is exhausted
Upwards or downward to the pressurized direction of displacement of moving electrode of pressure sensor, the non-linear of ± 2Pa is very big.This impact is leaned on
Electronic circuit amendment is impossible.For the moving electrode effect of weight of existing capacitive pressure transducer, do not cause and set
Meter and the attention of user.For gauge pressure（Relatively large air pressure）Capacitive pressure transducer, after installation, such as moving electrode is horizontal
During state, necessarily lead to null drift, it is basic regardless of its impact just with the potentiometer zeroising on circuit.Also by taking Fig. 4 as an example, electricity
When the range for holding pressure sensor is 0～100Pa, the thickness of moving electrode 1 is 50 μm can produce the non-linear of 5%F.S.Namely
Persuade the pressurized direction of displacement of electrode 1 to be to move up and down, when band collar extension and downward weld nest impulse mouth 18, from impulse mouth malleation is applied
Power, the pressure direction that this pressure direction is produced with moving electrode deadweight is contrary.The tension force of moving electrode is ignored with electrostatic field electrostatic force
It is not-time, the pressure of 0～5Pa or so, due to there is inertia, moving electrode is not subjected to displacement at all.It is referred to as dead band in engineering, or
Say it is maximum it is distinguishable be 5Pa pressure above.If allowing impulse mouth upwards, when moving electrode is the level of state, the sensor is for 0
When～-5Pa is measured, still do not know.∣ ± 5Pa ∣ are irresistible non-linear.From the mechanics that capacitive pressure transducer is pressurized
Analysis is reached a conclusion：If the pressurized direction of displacement of moving electrode can be allowed vertical with gravity direction（It is orthogonal）Or moving electrode stand it is multiple
When capacitive pressure transducer is in parallel, it is possible to which whole greatly reduces moving electrode effect of weight.
Utility model content
The purpose of this utility model is to provide a kind of capacitive pressure transducer of vertical moving electrode, solves existing electric capacity
The moving electrode effect of weight of pressure sensor, generation is non-linear big, the low problem of precision, its reasonable in design, not only effectively
Moving electrode effect of weight is avoided, has reduced non-linear, and allowed gauge pressure measurement to improve resolution ratio and precision, can also make effectively measurement
Scope to little micro- direction significantly extends.
The technical scheme that the utility model is adopted is：The capacitive pressure transducer of the vertical moving electrode includes that matching is outer
Shell, the fixed electrode fitted together with matching can, tubulose extraction electrode, moving electrode and impulse mouth, is characterized in that：Two
The moving electrode tightens fixation using the graded seal ring with cutting edge weld bond with the clamping of public weld nest impulse mouth, and determines electricity
Cutting edge weld bond on the matching can with interior collar extension of pole is welded and fixed together, and allows the pressurized displacement side of two moving electrodes
To vertical with gravity direction, the tubulose extraction electrode of moving electrode is connected with each other by lead, constitutes two capacitive pressure sensings
The capacitive pressure transducer that the moving electrode that device stands is in parallel.
It is fixed with the described with public weld nest impulse mouth of two pressurized direction of displacement moving electrodes vertical with gravity direction
It is assembled in the shielding case with bubble and scale, the end with public weld nest impulse mouth is connected with by bellows extension
Using impulse mouth is installed, levelling gear is provided with using installation impulse mouth, receiving for moving electrode is made by adjustment bolt fine setting
Pressure direction of displacement is vertical with gravity direction.
The moving electrode welds together with fixed electrode under inert gas shielding.
Clamp the graded seal ring with cutting edge weld bond of moving electrode and carry what public weld nest impulse mouth was adopted
Material is identical with the material of moving electrode.
The utility model has the advantage that and good effect is：Because two moving electrodes of the present utility model are using with sword
The graded seal ring of mouth weld bond tightens fixation with the clamping of public weld nest impulse mouth, the matching with interior collar extension with fixed electrode
Cutting edge weld bond on shell is welded and fixed together, and is to allow moving electrode to stand to use, and makes the pressurized direction of displacement of moving electrode and gravity side
To vertical, so its reasonable in design, has effectively avoided moving electrode effect of weight.Gauge pressure measurement is particularly allowed to improve resolution ratio
And precision, as absolute pressure measurement, non-linear effects are also eliminated, improve precision.But, for range is in 0～200Pa
Following capacitive pressure transducer, during measurement, the relative capacity variable quantity of single capacitive pressure transducer as shown in Figure 4 is too
It is little, in order to improve the electric capacity relative variation of sensor, two capacitive pressure transducer parallel connections are allowed, as shown in figure 1, not only allowing
Electrode stands, and, capacitance change is multiplied, and makes sensitivity be multiplied, and makes the relatively single capacitive pressure sensing of range
For device, in the case where the range upper limit is constant, effective range can also significantly extended to little micro- direction.Therefore, allow many
The moving electrode of individual capacitive pressure transducer capacitive pressure transducer in parallel all stands, and is superimposed can beneficial effect, gives full play to
Go out the due function of capacitive pressure transducer.
For range is in the capacitive pressure transducer of 0～below 200Pa, if only by Fig. 1, allow impulse mouth downwards or
The function of installing upwards is also imperfect, is assembled in the shielding case with bubble and scale, with public weld nest impulse
The end of mouth extends to be connected with to use by bellows installs impulse mouth, and on using installation impulse mouth levelling gear is provided with,
Make the pressurized direction of displacement of moving electrode vertical with gravity direction by adjustment bolt fine setting, make structure as shown in Figure 3, it is beneficial
Effect can be more preferable.
In sum, the utility model solves the moving electrode effect of weight of existing capacitive pressure transducer, produces non-
It is linear big, the low problem of precision.
Description of the drawings
The utility model is further described below in conjunction with accompanying drawing.
Fig. 1 is a kind of structural representation that the capacitive pressure transducer by two same sizes of the present utility model is constituted；
Fig. 2 is I mplifying structure schematic diagram of Fig. 1；
Fig. 3 is a kind of structural representations of the Fig. 1 with shielding case and levelling gear；
Fig. 4 is a kind of structural representation of single capacitive pressure transducer；
Fig. 5 is II mplifying structure schematic diagram of Fig. 4.
Number explanation in figure：1 moving electrode, 2 conductive membrane layers, 3 insulating film layers, 4 sapphire insulators, 5 tubuloses draw electricity
Pole, 6 matching cans, 7 brazing layers, 8 graded seal rings, 9 use with public weld nest impulse mouth, 10 installs impulse mouth, 11 ripples
Pipe, 12 supports, 13 adjustment bolts, 14 anti-return nuts, 15 shielding cases, 16 air-bubble levels, 17 leads, 18 band collar extension weld nest impulses
Mouthful.
Specific embodiment
Concrete structure of the present utility model is described in detail according to Fig. 1～5.The capacitive pressure transducer bag of the vertical moving electrode
Matching can 6 is included, the part such as fixed electrode, tubulose extraction electrode 5, moving electrode 1 and impulse mouth for fitting together with matching can 6.
Wherein conductive membrane layer 2 is coated with the parabola of the sapphire insulator 4 of fixed electrode, on conductive membrane layer 2 dielectric film is coated with
Layer 3；Fixed electrode plate is by conductive membrane layer 2, insulating film layer 3, the sapphire insulator 4 of soldering matched seal, tubulose extraction electrode
5th, matching can 6 is constituted.Two moving electrodes 1 are using the graded seal ring 8 with cutting edge weld bond and carry public weld nest impulse mouth 9
Fixation is tightened in clamping, is welded and fixed together with the cutting edge weld bond on the matching can 6 with interior collar extension of fixed electrode, and allows two
The pressurized direction of displacement of individual moving electrode 1 is vertical with gravity direction.To improve welding quality, above-mentioned moving electrode 1 is clamped to be tightened admittedly
After fixed, weld together under inert gas shielding with fixed electrode.The graded seal ring with cutting edge weld bond of clamping moving electrode 1
8 is identical with the material of moving electrode 1 with the material adopted with public weld nest impulse mouth 9, is all using same invar property
Corrosion-resistant nickel-base alloy（Inconel X-750）Make.The tubulose extraction electrode 5 of moving electrode 1 is connected with each other by lead 17,
The capacitive pressure transducer that the moving electrode 1 that two capacitive pressure transducers of composition stand is in parallel.
In order to ensure to such as 10-3The measurement of below Pa is accurately reliable, as shown in Fig. 3, will be fixed with two pressurized displacements
The public weld nest impulse mouth 9 of band of the direction moving electrode 1 vertical with gravity direction is assembled in the shielding with bubble and scale 16
In shell 15, the end with public weld nest impulse mouth 9 extends to be connected with to use by bellows 11 installs impulse mouth 10, is using
Install and be provided with levelling gear on impulse mouth 10, the pressurized direction of displacement and gravity of moving electrode 1 are made by the fine setting of adjustment bolt 13
Direction is vertical.
Levelling gear is mainly by adjustment bolt 13, the anti-return nut 14, ripple with 90 degree of distributions being arranged on support 12
Pipe 11, air-bubble level 16 etc. are constituted.Concrete operation step is as follows：After using the installation downward or upward of impulse mouth 10 is installed,
It is finely adjusted with four adjustment bolts 13 being arranged on support 12, i.e., is withstood on public weldering two-by-two to rotation with adjustment bolt 13
On seat impulse mouth 9, what a direction is first adjusted, screw anti-return nut 14, then adjust another direction, make the pressurized displacement of moving electrode
Direction is vertical with gravity direction.From being arranged on the air-bubble level 16 in the relative shell plane of public weld nest impulse mouth 9（Water
Leveling ruler to be become reconciled and have setting on multiple instruments equipment）Determine whether to mix up, it is ensured that moving electrode stands.When impulse mouth is installed upwards,
The bubble situation of air-bubble level 16 can be observed with a small reflector, is adjusted.
It is the structure of single capacitive pressure transducer shown in Fig. 4, with collar extension and weld nest impulse mouth 18 and moving electrode 1, transition
The material of welding ring 8 is identical, is all that the corrosion-resistant nickel-base alloy of invar property makes.On graded seal ring 8 therein, matching can 6
Cutting edge weld bond is both provided with, interior collar extension is provided with matching can 6, be both reserved expansion clearance, be also to vacuumize between air flue
Gap, to buffer swelling stress and welded stress.
Claims (4)
1. a kind of capacitive pressure transducer of vertical moving electrode, including matching can, with matching can is fitted together electricity is determined
Pole, tubulose extraction electrode, moving electrode and impulse mouth, it is characterised in that：Two moving electrodes are using the mistake with cutting edge weld bond
Cross welding ring and tighten fixation with the clamping of public weld nest impulse mouth, with the sword on the matching can with interior collar extension of fixed electrode
Mouth weld bond is welded and fixed together, and makes the pressurized direction of displacement of two moving electrodes vertical with gravity direction, will be dynamic by lead
The tubulose extraction electrode of electrode is connected with each other, the capacitive pressure that the moving electrode that two capacitive pressure transducers of composition stand is in parallel
Sensor.
2. the capacitive pressure transducer of vertical moving electrode according to claim 1, it is characterised in that：Be fixed with two it is pressurized
The described of the direction of displacement moving electrode vertical with gravity direction is assembled in bubble and scale with public weld nest impulse mouth
Shielding case in, the end with public weld nest impulse mouth by bellows extend be connected with using install impulse mouth, using
Install and be provided with levelling gear on impulse mouth, make the pressurized direction of displacement of moving electrode and gravity direction hang down by adjustment bolt fine setting
Directly.
3. the capacitive pressure transducer of vertical moving electrode according to claim 1, it is characterised in that：The moving electrode with it is fixed
Electrode welds together under inert gas shielding.
4. the capacitive pressure transducer of vertical moving electrode according to claim 1, it is characterised in that：The band of clamping moving electrode
Have the graded seal ring of cutting edge weld bond and the material adopted with public weld nest impulse mouth with the material phase of moving electrode
Together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621122952.1U CN206161204U (en) | 2016-10-14 | 2016-10-14 | Capacitive pressure sensor of vertical dynamic electricity utmost point |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621122952.1U CN206161204U (en) | 2016-10-14 | 2016-10-14 | Capacitive pressure sensor of vertical dynamic electricity utmost point |
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| CN206161204U true CN206161204U (en) | 2017-05-10 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106289593A (en) * | 2016-10-14 | 2017-01-04 | 沈阳市传感技术研究所 | The capacitive pressure transducer of vertical moving electrode |
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2016
- 2016-10-14 CN CN201621122952.1U patent/CN206161204U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106289593A (en) * | 2016-10-14 | 2017-01-04 | 沈阳市传感技术研究所 | The capacitive pressure transducer of vertical moving electrode |
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