CN206132652U - Utilize terahertz imaging detection layer form insulating material internal defect's device - Google Patents
Utilize terahertz imaging detection layer form insulating material internal defect's device Download PDFInfo
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- CN206132652U CN206132652U CN201621179739.4U CN201621179739U CN206132652U CN 206132652 U CN206132652 U CN 206132652U CN 201621179739 U CN201621179739 U CN 201621179739U CN 206132652 U CN206132652 U CN 206132652U
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Abstract
The utility model discloses an utilize terahertz imaging detection layer form insulating material internal defect's device, the device are used for under the circumstances of not damaging stratiform insulating material detecting the defect of its inside. Utilize terahertz imaging detection layer form insulating material internal defect's device includes: the terahertz is the emitter now, two lens, terahertz detector, two dimension scanning device and formation of image processing apparatus, terahertz emitter now is used for launching continuous frequency modulation terahertz wave, two lens are used for assembling the terahertz wave of terahertz emitter transmission now to need checking sample's surface, the terahertz wave behind the need checking sample surface reflection once more through receive by terahertz detector behind two lens and local oscillator signal mixing rather than inside after obtain an intermediate frequency signal, two dimension scanning device control terahertz emitter now scans need checking sample's surface in a settlement distance department surperficial apart from need checking sample.
Description
Technical field
The utility model relates to the use of THz wave carries out Non-Destructive Testing this technical field, in particular to one kind
The device of stratiform insulating materials internal flaw is detected using terahertz imaging.
Background technology
With the development of science and technology, increasing insulating materials is applied to Aero-Space, high-tension electricity and transports etc. concern
In the large-engineering of national security and the people's livelihood.The quality of such material concerns the reliability service of a whole set of big system, but, due to manufacture
Often there is more or less bubble or other defect in the reason for technique, this kind of material internal, so as to have impact on the property of material
Potential safety hazard and can be caused.
For the key areas such as the defects detection of laminated insulation material internal, particularly Aero-Space, existing X-ray skill
Art is for sheet-like materials poor contrast, while there is a certain degree of radiation injury to user of service；Infrared technique is to big portion
Insulating materials is divided to penetrate, it is impossible to detect internal flaw；Thermal wave technology is not suitable for heat-insulating material；Microwave technology is due to wavelength
Diffraction limit limit, be only suitable for detecting the defect of Centimeter Level size, and the defect generally in major part insulating materials is in millimeter
Magnitude, it is impossible to meet and require；Ultrasonic scanning image technology can detect defect, but sample must be placed in couplant,
For example it is placed in water, and for soft insulating materials, coupling efficiency is low.
The three-dimensional THz imaging technology for developing in recent years has flight time imaging, computer-aided tomography imaging, diffraction
The methods such as tomography, Fresnel lens imaging, holographic imaging and CW with frequency modulation catoptric imaging.Flight time imaging can give
Go out the three-dimensional structure of object surface appearance or different aspects, but it cannot show the unstratified structure distribution of interior of articles.Calculate
In machine aided tomography, the diameter of THz wave focus is needed less than the spatial resolution required by tomography, and it is burnt
The size more than the object to be imaged is needed deeply, and computer-aided tomography imaging cannot carry out perspective research to materials such as metals.
In Diffraction tomography, the spatial frequency of the picture of low frequency region is relatively low, and the THz wave signal to noise ratio used in high frequency region imaging
It is relatively low, so all there is a problem of in low frequency range and high frequency region second-rate.The lateral resolution of Fresnel lens three-dimensional imaging
By the diffraction limit of imaging system, longitudinal frame is limited by the spectral resolution of carrier wave；In addition, two things of object under test
The spacing of plane could cause respective picture not interfere with each other more than the depth of field of imaging system, therefore, image quality is also received
The impact of the depth of field of imaging system.Three-dimensional holography to very complicated target imaging, can not can not extract the spectrum letter of object
Cease, under any circumstance it can not all provide the accurate refractive index data for rebuilding target.
Utility model content
The utility model provides the device that a kind of utilization terahertz imaging detects stratiform insulating materials internal flaw, with not
The defect of its inside is detected in the case of damage stratiform insulating materials.
In order to achieve the above object, the utility model provides a kind of using in terahertz imaging detection stratiform insulating materials
The device of portion's defect, including：Terahertz sources source, two lens, terahertz detector, two-dimensional scanner and imaging dresses
Put, wherein：
The terahertz sources source is used for the continuous frequency modulation that changes between 325GHz～500GHz of tranmitting frequency scope too
Hertz wave, the THz wave of the terahertz sources source transmitting is t by the cycle that 325GHz is changed to 500GHzs；
Two lens are collimation lens and are set in parallel between the terahertz sources source and a testing sample, use
In the surface that the THz wave that the terahertz sources source is launched is converged to the testing sample, THz wave is described to be measured
Sample surfaces are launched；
The terahertz detector is arranged on the lower end in the terahertz sources source, and it is definite value with a frequency that it is internal
Local oscillation signal, the testing sample surface reflection after THz wave again pass by two lens after by the terahertz detection
Device is received and obtains an intermediate-freuqncy signal after the local oscillation signal mixing internal with it；
The two-dimensional scanner be used for control the terahertz sources source apart from testing sample surface one setting away from
The surface of the testing sample is scanned from the scanning accuracy for sentencing setting, the two-dimensional scanner is in every one scan position
It is Nt to put place's residence times, wherein N is the integer more than or equal to 1, and the two-dimensional scanner is defined and the testing sample
The parallel surface in surface is x-y plane and defines the direction vertical with x-y plane for z directions；
The imaging processing device is connected with the terahertz detector, the imaging processing device be used for receive it is described in
Frequency signal is simultaneously processed it, to obtain the one-dimensional image array of the one of scan position of correspondence, when the two-dimensional scan
Device is controlled after all scan positions that the terahertz sources source travels through the testing sample surface, and what is obtained is multiple one-dimensional
Imaging array constitutes a three-dimensional imaging data array, and the imaging processing device is according to the three-dimensional imaging data array output and is somebody's turn to do
The corresponding x-y directions image of testing sample, x-z directions image and y-z directions image.
In an embodiment of the present utility model, the testing sample is laminated insulation material.
In an embodiment of the present utility model, the scanning accuracy of the two-dimensional scanner is 0.5mm.
In an embodiment of the present utility model, tsFor 240 microseconds.
In an embodiment of the present utility model, the value of N is 50～300.
In an embodiment of the present utility model, the frequency of local oscillation signal is 13.530GHz～20.822GHz.
In an embodiment of the present utility model, the frequency of local oscillation signal is 10.833GHz～16.667GHz.
The device of the utilization terahertz imaging detection stratiform insulating materials internal flaw that the utility model is provided is by contrast
THz wave intensity and phase information, reconstruction defect size in the material, position and depth are especially suitable for detecting insulating materials
Internal defect, can in a non contact fashion and not destroying, do not dismantle, do not shut down in the case of whether detect inside insulating barrier
There is air blister defect, the impact to further assessment material quality to overall system security provides method and data are supported.
Description of the drawings
In order to be illustrated more clearly that the utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or the accompanying drawing to be used needed for description of the prior art is briefly described, it should be apparent that, drawings in the following description are only
It is some embodiments of the present utility model, for those of ordinary skill in the art, in the premise for not paying creative work
Under, can be with according to these other accompanying drawings of accompanying drawings acquisition.
Fig. 1 detects the knot of the device of stratiform insulating materials internal flaw for the utilization terahertz imaging that the utility model is provided
Structure schematic diagram；
Fig. 2 a～Fig. 2 d are the x-y directions image at the testing sample different depth of the embodiment of the utility model one.
Description of reference numerals：1- terahertz sources source；2- lens；3- terahertz detectors；4- two-dimensional scanners；5- into
As processing meanss；6- testing samples；
Specific embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is paid
The every other embodiment for being obtained, belongs to the scope of the utility model protection.
Fig. 1 detects the knot of the device of stratiform insulating materials internal flaw for the utilization terahertz imaging that the utility model is provided
Structure schematic diagram, as illustrated, the utilization terahertz imaging that the utility model is provided detects the dress of stratiform insulating materials internal flaw
Put including：1, two, terahertz sources source lens 2, terahertz detector 3, two-dimensional scanner 4 and imaging processing device 5, its
In：
Terahertz sources source 1 is used for the continuous frequency modulation Terahertz that tranmitting frequency scope changes between 325GHz～500GHz
Ripple, the THz wave of the transmitting of terahertz sources source 1 is t by the cycle that 325GHz is changed to 500GHzs；
Two lens 2 are collimation lens and are set in parallel between the testing sample 6 of terahertz sources source 1 and, use
In the surface that the THz wave that terahertz sources source 1 is launched is converged to testing sample 6, (now THz wave is without Terahertz
Detector 3), the THz wave after two lens 2 is changed into collimated signal and the collimated signal is vertical with testing sample 6,
THz wave is launched on the surface of testing sample 6；
Terahertz detector 3 is arranged on the lower end in terahertz sources source 1, and its internal local oscillator with a frequency for definite value is believed
Number, the surface of testing sample 6 reflection after THz wave again pass by two lens 2 after received by terahertz detector 3 and with
An intermediate-freuqncy signal is obtained after its internal local oscillation signal mixing；
Two-dimensional scanner 4 be used to controlling terahertz sources source 1 at the setpoint distance apart from the surface of testing sample 6 with
The scanning accuracy of setting is scanned to the surface of testing sample 6, two-dimensional scanner 4 stop at each scan position when
Between be Nts, wherein N is the integer more than or equal to 1, and it is x- that two-dimensional scanner 4 defines the surface parallel with the surface of testing sample 6
The y plane and definition direction vertical with x-y plane is z directions；
Imaging processing device 5 is connected with terahertz detector 3, and imaging processing device 5 is used for receiving intermediate frequency signal and to it
Processed, to obtain the one-dimensional image array of the one of scan position of correspondence, when the control Terahertz of two-dimensional scanner 4 is sent out
After penetrating all scan positions on the traversal testing sample surface of source 1, the multiple one-dimensional image arrays for obtaining constitute a three-dimensional imaging
Data array, imaging processing device 5 according to the three-dimensional imaging data array export x-y directions corresponding with the testing sample 6 into
As figure, x-z directions image and y-z directions image.
One-dimensional image array is that (maximum time window width is as t according to the time window width for settings) and time interval
Carry out data acquisition.Signal into terahertz detector 3 has two, one be fixed amplitude and frequency local oscillation signal,
It is constant due to propagating distance, therefore the time of arrival terahertz detector 3 is also constant, the signal can be with an Amplitude ＆ Phase frequency
The constant SIN function description of rate, another is that terahertz sources source 1 sends and reflexes to terahertz detection through testing sample 6
Device 3, equally can also be described with a SIN function, and only the amplitude of this SIN function is with the different positions of testing sample 6
The reflectivity changes put, frequency is mechanical periodicity.Two sinusoidal signals carry out coherent superposition, meeting in terahertz detector 3
There is sum of fundamental frequencies item and difference frequency term, according to actual physical meaning, using low pass filter difference frequency term is retained.Because local oscillation signal is all
It is constant, therefore the amplitude of difference frequency term is proportional to the reflectivity of pip, the frequency values of difference frequency term, that is, difference on the frequency and is proportional to
Electromagnetic wave reaches the time of terahertz detector 3 from pip, while being proportional to pip to the distance of terahertz detector 3.
Therefore the difference on the frequency of the output of terahertz detector 3 can just be converted into parasang (DU), as abscissa, Terahertz
The amplitude of the output of detector 3 is used as ordinate.
In the utility model, testing sample 6 can be laminated insulation material, or other materials, that is, using
The utility model can be detected in the case where material itself is not damaged to the defect inside multiple material.
Wherein, the scanning accuracy of two-dimensional scanner 4 can be set to 0.5mm, i.e., the surface of testing sample 6 per 0.5mm ×
Run-down on the area of 0.5mm.
Wherein, the THz wave of the transmitting of terahertz sources source 1 is t by the cycle that 325GHz is changed to 500GHzsCan be
240 microseconds, it is also possible to be set to other numerical value, can be according to actually detected needs depending on.
Wherein, the value of N can be 50～300, that is, what is scanned at each scan position on the surface of testing sample 6 is secondary
Number be 50～300 times, it is also possible to be set to other numerical value, can be according to actually detected needs depending on.
The frequency of the local oscillation signal used in the utility model is 13.530GHz～20.822GHz, or
10.833GHz～16.667GHz, can be according to actually detected needs depending on.
Fig. 2 a～Fig. 2 d are the x-y directions image at the testing sample different depth of the embodiment of the utility model one, from
4 for being wherein typical are obtained in the figure of 201 different aspects that continuous imaging is obtained.Fig. 2 a～different the depth of Fig. 2 d correspondences
At degree, from the point of view of overall imaging results, the big and small speck presented in figure is the bubble in testing sample 6 and lacks
Fall into.These defects have different shapes, different sizes, and are distributed at random in testing sample 6.Circle is used in figure
The defect for marking is larger defect.These defects are annular speck, and its length and width are about 2mm, thin compared to those
Little white luminous point, these defects seem very dazzling.These big air blister defects are main hidden when testing sample 6 is applied
Suffer from, if the volume of defect is excessive, material structure can be caused unstable, the danger of disintegration is even had under intense impact, to making
User causes irremediable economic loss, or even serious harm personal safety.White luminous point in figure and above-mentioned annular speck
Compare, volume is obviously reduced.It can be seen that the quantity of these white luminous points substantially will more than annular speck, but by
It is very small in their volume, so can't affect greatly to the performance of testing sample 6, belong to the reasonable model of defect
In enclosing.In figure, we can also find out a white and the alternate striped of black, and this is, by the striped for interfering generation, not belong to
In the defect of material.If but these bright fringes are too intensive, serious interference can be caused to result, it is difficult observation analysis and lacks
Sunken information, the problem of current interference fringe is also difficult to solve.
The information presented per width figure is made a concrete analysis of below：
(1) when detecting relative depth and being 12/201 (as shown in Figure 2 a), it can be seen that the upper left corner of testing sample 6 has
One significantly annular speck, the referred to herein as big defect in testing sample 6, are defect 1 by this flaw labeling.In this layer
In face, in addition to big defect mentioned above, other parts do not find that (chequered with black and white ripple is obvious big defect in result
The interference fringe of system).
(2) when detecting relative depth and being 58/201 (as shown in Figure 2 b), it can be seen that in this aspect, the lower right corner is more
Go out a significantly big defect, be marked as defect 2, and defect 1 mentioned above is yet suffered from.Compared with Fig. 2 a,
The shape of defect 1, size there occurs change.This just embodies the result of terahertz imaging layered weighting.Above-mentioned experiment shows,
12/201 depth different with 58/,201 two, the shape of defect 1 is different, and we can speculate that this defect is probably certain
Irregular solid.The appearance of defect 2 illustrates that the defect in testing sample 6 random may be distributed in every aspect,
The Defect Scanning that then clearly these can be hidden in into depths using the utility model out, and is carried out in depth direction to it
Positioning.Except the obvious defect of two above, experimental result is additionally shown in the right of defect 2 and occurs in that one piece of fuzzy region,
At this moment we cannot conclude whether it is defect, temporarily he is named as into hypothesis defect 3.
(3) when detecting relative depth and being 96/201 (as shown in Figure 2 c), it can be seen that the vacation that ultimate analysis goes out in (2)
Determine the defect that defect 3 is strictly necessary being, imaging results are substantially clear than Fig. 2 b in Fig. 2 c, illustrate to lack near this depth
Fall into big in 3 area of section ratio (2), and then it is concluded that the main positions of defect 3 are near 96/201 depth.And lack
Fall into 1 and defect 2 still exist, and size shape changes again, therefore deduces that and identical conclusion in (2), together
When can be seen that defect 1 have very long depth, 84 unit aspects have been run through at present, also illustrate that the irregular of defect 1
Property.
(4) when detecting relative depth and being 138/201 (as shown in Figure 2 d), it can be observed that defect 1, defect 2, defect 3
Area there occurs change again.As can be seen that in the aspect scope of (32～138)/201, the defect in the upper left corner is deposited always
, and shape changes.May infer that this defect is the spheroidal cavity of class to this, and it is very deep, so lack herein
Fall into prolong always and stay in different aspects.Fig. 2 a are different with the number of defect in Fig. 2 b, this demonstrate in this sample, defect
It is distributed in different depth.
The above analysis it is concluded that：There is many big and small defects (mainly gas in this testing sample 6
Bubble).Because the utility model can show the imaging results of different aspects in testing sample 6, therefore not only can qualitatively retouch
The position of defect distribution and the depth of depth and individual defect are stated, the quantitative geometry to defect of suitable referential can be more set up
Position carries out calculating expression.
The device of the utilization terahertz imaging detection stratiform insulating materials internal flaw that the utility model is provided is by contrast
THz wave intensity and phase information, reconstruction defect size in the material, position and depth are especially suitable for detecting insulating materials
Internal defect, can in a non contact fashion and not destroying, do not dismantle, do not shut down in the case of whether detect inside insulating barrier
There is air blister defect, the impact to further assessment material quality to overall system security provides method and data are supported.
One of ordinary skill in the art will appreciate that：Accompanying drawing is the schematic diagram of one embodiment, module in accompanying drawing or
Flow process is not necessarily implemented necessary to the utility model.
One of ordinary skill in the art will appreciate that：The module in device in embodiment can be according to embodiment description point
In being distributed in the device of embodiment, it is also possible to carry out respective change and be disposed other than in one or more devices of the present embodiment.On
Stating the module of embodiment can merge into a module, it is also possible to be further split into multiple submodule.
Finally it should be noted that：Above example only to illustrate the technical solution of the utility model, rather than a limitation；
Although being described in detail to the utility model with reference to the foregoing embodiments, it will be understood by those within the art that：
It still can modify to the technical scheme described in previous embodiment, or which part technical characteristic is equal to
Replace；And these modifications or replacement, do not make essence disengaging the utility model embodiment technical scheme of appropriate technical solution
Spirit and scope.
Claims (7)
1. a kind of utilization terahertz imaging detects the device of stratiform insulating materials internal flaw, it is characterised in that include：Terahertz
Emission source, two lens, terahertz detector, two-dimensional scanner and imaging processing devices, wherein：
The terahertz sources source is used for the continuous frequency modulation Terahertz that tranmitting frequency scope changes between 325GHz～500GHz
Ripple, the THz wave of the terahertz sources source transmitting is t by the cycle that 325GHz is changed to 500GHzs；
Two lens are collimation lens and are set in parallel between the terahertz sources source and a testing sample, for inciting somebody to action
The THz wave of the terahertz sources source transmitting converges to the surface of the testing sample, and THz wave is in the testing sample
Launch on surface；
The terahertz detector is arranged on the lower end in the terahertz sources source, and it is internal with the local oscillator that a frequency is definite value
Signal, the THz wave after the reflection of the testing sample surface is connect after again passing by two lens by the terahertz detector
Receive and obtain an intermediate-freuqncy signal after the local oscillation signal mixing internal with it；
The two-dimensional scanner is used to control the terahertz sources source at a setpoint distance on testing sample surface
The surface of the testing sample is scanned with the scanning accuracy for setting, the two-dimensional scanner is at each scan position
Residence time is Nts, wherein N is the integer more than or equal to 1, and the two-dimensional scanner is defined and the testing sample surface
Parallel surface is x-y plane and defines the direction vertical with x-y plane for z directions；
The imaging processing device is connected with the terahertz detector, and the imaging processing device is used to receive the intermediate frequency letter
Number and it is processed, to obtain the one-dimensional image array of the one of scan position of correspondence, when the two-dimensional scanner
After controlling all scan positions that the terahertz sources source travels through the testing sample surface, the multiple one-dimensional images for obtaining
Array constitutes a three-dimensional imaging data array, and the imaging processing device is to be measured with this according to the three-dimensional imaging data array output
The corresponding x-y directions image of sample, x-z directions image and y-z directions image.
2. utilization terahertz imaging according to claim 1 detects the device of stratiform insulating materials internal flaw, its feature
It is that the testing sample is laminated insulation material.
3. utilization terahertz imaging according to claim 1 detects the device of stratiform insulating materials internal flaw, its feature
It is that the scanning accuracy of the two-dimensional scanner is 0.5mm.
4. utilization terahertz imaging according to claim 1 detects the device of stratiform insulating materials internal flaw, its feature
It is, tsFor 240 microseconds.
5. utilization terahertz imaging according to claim 1 detects the device of stratiform insulating materials internal flaw, its feature
It is that the value of N is 50～300.
6. utilization terahertz imaging according to claim 1 detects the device of stratiform insulating materials internal flaw, its feature
It is that the frequency of local oscillation signal is 13.530GHz～20.822GHz.
7. utilization terahertz imaging according to claim 1 detects the device of stratiform insulating materials internal flaw, its feature
It is that the frequency of local oscillation signal is 10.833GHz～16.667GHz.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106525862A (en) * | 2016-10-27 | 2017-03-22 | 首都师范大学 | Method for detecting internal defect of layered insulating material by using terahertz imaging and apparatus thereof |
| CN109709046A (en) * | 2019-02-11 | 2019-05-03 | 叶志刚 | A kind of Terahertz cancer detection instrument |
| CN109959938A (en) * | 2019-04-10 | 2019-07-02 | 中国计量大学 | Polythene material terahertz time-domain spectroscopy imaging method based on synthetic aperture focusing |
| CN112041664A (en) * | 2018-07-20 | 2020-12-04 | 麦克赛尔株式会社 | Terahertz wave detection device, terahertz wave detection method, and terahertz wave detection system |
| CN114324345A (en) * | 2021-11-01 | 2022-04-12 | 清华大学深圳国际研究生院 | Material imaging method and device, terminal equipment and storage medium |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106525862A (en) * | 2016-10-27 | 2017-03-22 | 首都师范大学 | Method for detecting internal defect of layered insulating material by using terahertz imaging and apparatus thereof |
| CN106525862B (en) * | 2016-10-27 | 2023-10-27 | 北京远大恒通科技发展有限公司 | Method and device for detecting internal defects of layered insulating material by using terahertz imaging |
| CN112041664A (en) * | 2018-07-20 | 2020-12-04 | 麦克赛尔株式会社 | Terahertz wave detection device, terahertz wave detection method, and terahertz wave detection system |
| CN109709046A (en) * | 2019-02-11 | 2019-05-03 | 叶志刚 | A kind of Terahertz cancer detection instrument |
| CN109709046B (en) * | 2019-02-11 | 2021-07-02 | 叶志刚 | Terahertz cancer detector |
| CN109959938A (en) * | 2019-04-10 | 2019-07-02 | 中国计量大学 | Polythene material terahertz time-domain spectroscopy imaging method based on synthetic aperture focusing |
| CN114324345A (en) * | 2021-11-01 | 2022-04-12 | 清华大学深圳国际研究生院 | Material imaging method and device, terminal equipment and storage medium |
| CN114324345B (en) * | 2021-11-01 | 2024-01-12 | 清华大学深圳国际研究生院 | Material imaging method and device, terminal equipment and storage medium |
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