CN206127417U - Coating machine rotary device - Google Patents
Coating machine rotary device Download PDFInfo
- Publication number
- CN206127417U CN206127417U CN201621260442.0U CN201621260442U CN206127417U CN 206127417 U CN206127417 U CN 206127417U CN 201621260442 U CN201621260442 U CN 201621260442U CN 206127417 U CN206127417 U CN 206127417U
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- China
- Prior art keywords
- axle
- cam
- cylinder
- ejection
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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Abstract
The utility model provides a coating machine rotary device, first cylinder pass through the cylinder pole and link with primary shaft top, primary shaft lower extreme and the linkage of first ejecting cam, and first graduation cam is led rail clamp with first cylinder and is closed, and first cylinder guide rail sets up on the secondary shaft, and first spring setting is in the well lower part of the primary shaft, and first graduation cam and first dish are fixed respectively with the primary shaft and are set up, the second cylinder passes through cylinder pole and the linkage of secondary shaft top, and the secondary shaft lower extreme is connected with the ejecting cam of second, and second graduation cam and second cylinder are led rail clamp and is closed, and second cylinder guide rail sets up epaxially at the third, and the second spring sets up in the well lower part of secondary shaft, second graduation cam and second dish and secondary shaft fixed setting respectively, the third dish sets up epaxially at the third. The utility model discloses a product simple structure, low in manufacturing cost, operation maintenance is convenient, reliable operation safety.
Description
Technical field
This utility model is related to the auxiliary device of coater, more particularly to a kind of indexing of three disk multi-station turning of coater is certainly
Dynamic bit selecting alignment device.
Background technology
Coater media disk, mask disk typically manually carry out bit selecting and the para-position of substrate and mask using experimenter.It is real
Test personnel's bit selecting, para-position operation frequently, research work efficiency is low.
Authorization Notice No. discloses a kind of vacuum coating equipment for the Chinese utility model patent of CN203613254U, including true
Empty cover and the vacuum system for making holding vacuum state inside vacuum (-tight) housing, are provided with umbrella stand and evaporation source, umbrella stand in vacuum (-tight) housing
Including the rotating disk and several work rests that can circumferentially rotate, work rest is connected by each axis of rotation one with rotating disk respectively, workpiece
Frame along rotating disk circumferentially in umbrella distribution, the vacuum coating equipment also including can make work rest with rotating disk is circumferentially rotated while rotate
The drive mechanism that the centrage of axle one is rotated.Coating Materials heating evaporation, Coating Materials are evaporated by the evaporation source of above-mentioned coater
After diffuse upward at work rest, be attached on the relatively low workpiece to be coated of temperature, formed thin film, the weak point of the coater
It is that evaporation source is located at the bottom of vacuum (-tight) housing, work rest is located at the top of vacuum (-tight) housing, causes workpiece (or substrate) apart from evaporation source
It is distant, therefore the not good problem of coating effects occurs.
Utility model content
Not enough in order to solve the problems, such as existing artificial bit selecting para-position, this utility model can improve plated film work there is provided one kind
Make efficiency, improve the percent of automatization of coater, circular index is fast to bit rate, the reliable coater rotary apparatuss of accurate positioning.
The purpose of this utility model is realized by below scheme：
A kind of coater rotary apparatuss, including including first axle, the first spring, first ejection cam, the first index cam,
First disk, the second axle, second spring, the first cylinder guide rail, second ejection cam, the second index cam, the second disk, the 3rd axle,
Second cylinder guide rail, the 3rd disk, the first cylinder, the second cylinder；First cylinder is linked with first axle top by cylinder rod,
First axle lower end is engaged with the first cylinder guide rail with the first ejection cam linkage, the first index cam, and the first cylinder guide rail is arranged
On the second axle, the first spring is arranged on the middle and lower part of first axle, and first axle is fixed with bolt with the first index cam, first point
Degree cam is fixed with bolt with the first disk；Second cylinder is linked by cylinder rod and the second axle top, the second axle lower end and
Second ejection cam linkage, the second index cam are engaged with the second cylinder guide rail, and the second cylinder guide rail is arranged on the 3rd axle, the
Two springs are arranged on the middle and lower part of the second axle, and the second axle is fixed with bolt with the second index cam, the second index cam and second
Disk is fixed with bolt；3rd disk is arranged on the 3rd axle lower end.
Preferably, first ring spring is around first axle one week, and second spring was around the second axle one week.
Preferably, the first cylinder guide rail, the second cylinder guide rail are provided with the gathering sill and inclination for axially extending
Cam surface；The quantity of gathering sill and inclined cam surface on the first cylinder guide rail is respectively 4-12；Second cylinder
The quantity of gathering sill and inclined cam surface on guide rail is respectively 4-12.
Preferably, first index cam, the second index cam are respectively provided with direction protrusion and index cam face；Described
The quantity of direction protrusion and index cam face on one division cam is respectively 4-12；Guiding on second index cam
The quantity in projection and index cam face is respectively 4-12.
Preferably, the first ejection cam and the second ejection cam are provided with ejection tooth；The lower end of ejection tooth is arranged
There is ejection cam surface；The ejection number of teeth amount of the first ejection cam and the second ejection cam is 4-12.
Preferably, the ejection cam surface, inclined cam surface can be engaged respectively with index cam face；The ejection tooth,
Direction protrusion can slide axially in gathering sill.
Preferably, the first axle is solid shafting；Second axle is hollow axle, is arranged on outside first axle；3rd axle is sky
Heart axle, is arranged on outside the second axle.
Preferably, first disk is evaporation porose disc, and a square evaporation apertures are provided with face；Second disk is mask support
Disk, above umbrella be evenly arranged with 4-12 square mask placement location；3rd disk be substrate tray, above umbrella uniformly set
It is equipped with 4-12 square substrates placement location.
Preferably, first index cam, the first disk and first axle are bolted；Second disk, the first post
Face guide rail is bolted respectively with the second axle；The second cylinder guide rail, the 3rd disk are bolted on the 3rd axle.
Preferably, first spring is fixed in first axle by axle spring collar；The second spring passes through axle
It is fixed on the second axle with spring collar.
Product machine simple structure of the present utility model, low cost of manufacture, convenient operating maintenance, reliable operation safety can
Plated film work efficiency is improved, the percent of automatization of coater is improved, circular index is fast to bit rate, accurate positioning reliability.This device
Substrate tray, mask pallet and the rotary index para-position for evaporating porose disc are realized by simple cylinder linear motion, greatly
The manual labor of scientific research and testing personnel is reduced, experiment work efficiency is improve, while the product of the application belongs to pioneering, can be given
Bring certain impact in coater rotation field.
Description of the drawings
Fig. 1 is the sectional view of this utility model device；
Fig. 2 is the stereo appearance figure of this utility model device.
Specific embodiment
Below in conjunction with the accompanying drawings, detailed explanation is carried out to this utility model.
In the present embodiment, first spring 2 surround first axle 1 one weeks, and second spring 7 surround the second axle 6 one weeks.It is described
First cylinder guide rail 8, the second cylinder guide rail 13 are provided with the gathering sill and inclined cam surface for axially extending；Described first point
Degree cam 4, the second index cam 10 are respectively provided with direction protrusion and index cam face；The first ejection cam and the second ejection are convex
Wheel is provided with ejection tooth；The lower end of ejection tooth is provided with ejection cam surface；The ejection cam surface, inclined cam surface can be with
Index cam face engages respectively；The ejection tooth, direction protrusion can slide axially in gathering sill.The first axle 1 is
Solid shafting；Second axle 6 is hollow axle, is arranged on outside first axle；3rd axle 12 is hollow axle, is arranged on the outside of the second axle 6.
First index cam 4, the first disk 5 are bolted with first axle 1；Second disk 11, the first cylinder guide rail 8 and
Two axles 6 are bolted respectively；The second cylinder guide rail 13, the 3rd disk 14 are bolted on the 3rd axle 12.Institute
State the first spring 2 to be fixed in first axle 1 by axle spring collar；The second spring 7 is fixed with spring collar by axle
On the second axle 6.The quantity of gathering sill and inclined cam surface on the first cylinder guide rail 8 is 8；The second cylinder guide rail
The quantity of gathering sill and inclined cam surface on 13 is 8.Direction protrusion and index cam face on first index cam 4
Quantity is 8；The quantity of direction protrusion and index cam face on second index cam 10 is 8.Described first
The ejection number of teeth amount of ejection cam 3 and the second ejection cam 9 is 8.A square evaporation is provided with first disk 5
Hole；Umbrella is evenly arranged with 8 square mask placement locations to second disk 11 above；Umbrella is evenly arranged with 3rd disk 14 above
8 square substrates placement locations.
The cylinder rod of the first cylinder 15 in coater rotary apparatuss of the present utility model presses 1 top of first axle once,
First axle 1 moves downward a cylinder stroke, and the ejection cam surface of the ejection tooth bottom of the first ejection cam 3 props up the first indexing
The index cam face of cam 4 is walked along the gathering sill of the first cylinder guide rail 8 on the second axle 6 downwards, when first point
After the direction protrusion of degree cam 4 deviates from the gathering sill of the first cylinder guide rail 8, in the work in above-mentioned ejection cam surface Yu index cam face
With under, the first index cam 4 rotates.Then, the index cam face of the first index cam 4 is convex with the inclination of the first cylinder guide rail 8
Wheel face engages, and under the resilience force effect after the first spring 2 is pressurized, the direction protrusion of the first index cam 4 is along the first cylinder
The inclined cam surface of guide rail 8 is slid up in the next gathering sill of cylinder guide rail, and the first index cam 4 have rotated one point
Degree, realizes that the first disk 5 on the first index cam 4 rotates an indexing.
The cylinder rod of second cylinder 16 presses 6 top of the second axle once, and the second axle 6 moves downward a cylinder row
Journey, the ejection cam surface of the ejection tooth bottom of the second ejection cam 9 prop up the index cam face of the second index cam 10 along peace
The gathering sill of the second cylinder guide rail 13 being mounted on the 3rd axle 12 is walked downwards, when the direction protrusion of the second index cam 10 is deviate from
After the gathering sill of the second cylinder guide rail 13, in the presence of above-mentioned ejection cam surface with index cam face, the second index cam 10
Rotation.Then, the index cam face of the second index cam 10 is engaged with the inclined cam surface of the second cylinder guide rail 13, in the second bullet
Under resilience force effect after spring 7 is pressurized, the tilting cam of the direction protrusion of the second index cam 10 along the second cylinder guide rail 13
Face upwards in the next gathering sill for slipping into cylinder guide rail, the second index cam 10 have rotated an indexing.Realize installed in the
The second disk 11 on two index cams 10 rotates an indexing.When second cylinder 16 presses down on the second 6 top of axle, installed in
The second disk 11 on two axles 6 downwardly against the first disk 5, as the downward ejecting force of cylinder and second spring 7 and the first spring 2 are received
The collective effect of the resilience force after pressure, the second disk 11 and the first disk 5 are fitted.When the ejection effect of cylinder 16 causes the second disk 11 to revolve
When turning indexing, the first disk 5 is simultaneously rotated identical indexing.Thus, the 3rd disk 14 does not rotate, 5 He of the second disk 11 and the first disk
Respective rotary index is realized by respective cylinder ejector respectively, you can realize the circular index automatic carry of three disk multistation
Para-position.
The above, only this utility model preferably specific embodiment, but protection domain of the present utility model is not
This is confined to, any those familiar with the art can be readily occurred in the technical scope that this utility model is disclosed
Change or replacement, should all cover within protection domain of the present utility model.Therefore, protection domain of the present utility model should
Should be defined by the protection domain of claims.
Claims (10)
1. a kind of coater rotary apparatuss, it is characterised in that including first axle, the first spring, the first ejection cam, the first indexing
Cam, the first disk, the second axle, second spring, the first cylinder guide rail, the second ejection cam, the second index cam, the second disk, the
Three axles, the second cylinder guide rail, the 3rd disk, the first cylinder, the second cylinder；First cylinder is by cylinder rod and first axle top
Linkage, first axle lower end are engaged with the first cylinder guide rail with the first ejection cam linkage, the first index cam, the first cylinder guide rail
It is arranged on the second axle, the first spring is arranged on the middle and lower part of first axle, first axle is fixed with bolt with the first index cam, the
One division cam is fixed with bolt with the first disk；Second cylinder passes through cylinder rod and the second axle top is linked, under the second axle
End is engaged with the second cylinder guide rail with the second ejection cam linkage, the second index cam, and the second cylinder guide rail is arranged on the 3rd axle
On, second spring is arranged on the middle and lower part of the second axle, and the second axle is fixed with bolt with the second index cam, the second index cam with
Second disk is fixed with bolt；3rd disk is arranged on the 3rd axle lower end.
2. coater rotary apparatuss according to claim 1, it is characterised in that first ring spring is around first axle one
In week, second spring surround the second axle one week.
3. coater rotary apparatuss according to claim 1, it is characterised in that the first cylinder guide rail, the second cylinder
Guide rail is provided with the gathering sill and inclined cam surface for axially extending；Gathering sill and inclination on the first cylinder guide rail is convex
The quantity of wheel face is respectively 4-12；The quantity of gathering sill and inclined cam surface on the second cylinder guide rail is respectively 4-12
It is individual.
4. coater rotary apparatuss according to claim 3, it is characterised in that first index cam, the second indexing
Cam is respectively provided with direction protrusion and index cam face；The quantity of direction protrusion and index cam face on first index cam
Respectively 4-12；The quantity of direction protrusion and index cam face on second index cam is respectively 4-12.
5. coater rotary apparatuss according to claim 4, it is characterised in that the first ejection cam and the second ejection
Cam is provided with ejection tooth；The lower end of ejection tooth is provided with ejection cam surface；The first ejection cam and the second ejection are convex
The ejection number of teeth amount of wheel is 4-12.
6. coater rotary apparatuss according to claim 5, it is characterised in that the ejection cam surface, inclined cam surface
Can be engaged with index cam face respectively；The ejection tooth, direction protrusion can slide axially in gathering sill.
7. coater rotary apparatuss according to claim 1, it is characterised in that the first axle is solid shafting；Second axle
For hollow axle, it is arranged on outside first axle；3rd axle is hollow axle, is arranged on outside the second axle.
8. coater rotary apparatuss according to claim 1, it is characterised in that first disk is evaporation porose disc, on face
It is provided with a square evaporation apertures；Second disk is mask pallet, above umbrella be evenly arranged with 4-12 square mask and put
Seated position；3rd disk be substrate tray, above umbrella be evenly arranged with 4-12 square substrates placement location.
9. coater rotary apparatuss according to claim 1, it is characterised in that first index cam, the first disk with
First axle is bolted；Second disk, the first cylinder guide rail are bolted respectively with the second axle；Second post
Face guide rail, the 3rd disk are bolted on the 3rd axle.
10. coater rotary apparatuss according to claim 1, it is characterised in that first spring is by axle spring
Collar is fixed in first axle；The second spring is fixed on the second axle by axle spring collar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621260442.0U CN206127417U (en) | 2016-11-10 | 2016-11-10 | Coating machine rotary device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621260442.0U CN206127417U (en) | 2016-11-10 | 2016-11-10 | Coating machine rotary device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206127417U true CN206127417U (en) | 2017-04-26 |
Family
ID=58562522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621260442.0U Withdrawn - After Issue CN206127417U (en) | 2016-11-10 | 2016-11-10 | Coating machine rotary device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206127417U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435507A (en) * | 2016-11-10 | 2017-02-22 | 北京帕托真空技术有限公司 | Rotating device for film coating machine |
-
2016
- 2016-11-10 CN CN201621260442.0U patent/CN206127417U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435507A (en) * | 2016-11-10 | 2017-02-22 | 北京帕托真空技术有限公司 | Rotating device for film coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170426 Effective date of abandoning: 20181120 |
|
| AV01 | Patent right actively abandoned |