CN206085033U - Manipulator assembly - Google Patents
Manipulator assembly Download PDFInfo
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- CN206085033U CN206085033U CN201621086142.5U CN201621086142U CN206085033U CN 206085033 U CN206085033 U CN 206085033U CN 201621086142 U CN201621086142 U CN 201621086142U CN 206085033 U CN206085033 U CN 206085033U
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- 230000001360 synchronised effect Effects 0.000 claims abstract description 98
- 230000005540 biological transmission Effects 0.000 claims description 16
- 238000009434 installation Methods 0.000 claims description 2
- 230000033001 locomotion Effects 0.000 abstract description 15
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
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- 229910052744 lithium Inorganic materials 0.000 description 1
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Abstract
The utility model discloses a manipulator assembly, include the N level manipulator of following same orientation and arranging in proper order, the manipulator of looks adjacent level passes through connecting portion telescopic connection. Drive arrangement drive first order mechanical arm movement, first hold -in range motion on the first clamping jaw pulling first order manipulator, and then first hold -in range drives two synchronous pulley of second clamping jaw towards the first order manipulator on on the first order manipulator orientation motion, the second clamping jaw drives the 2nd mechanical arm movement, analogizes with this. The extension elongation of N level manipulator is adjusted as required to accessory drive's motion distance as required in this scheme, and then the extending distance of control N level manipulator, and the adjustment is the whole length of N level manipulator, can not increase it and in the space that vertical orientation took, for manipulator assembly among the prior art, not receive the restriction in vertical orientation space, has improved the commonality that the manipulator used.
Description
Technical Field
The utility model relates to a lithium cell production technical field, in particular to manipulator assembly.
Background
A robot assembly is a component used to grasp a workpiece. The manipulator assembly realizes arbitrary position and azimuth motion in snatching the space through designing a plurality of degrees of freedom, and the degree of freedom of manipulator assembly is more, and the flexibility of manipulator assembly is big more, and the commonality is wider.
The manipulator assembly among the prior art mainly adjusts the regulation of its position and position through a plurality of degrees of freedom, but at the in-process that manipulator assembly position and position were adjusted, its whole length can not change, when the length of manipulator assembly at the horizontal direction shortens, its space that occupies must increase in the vertical direction, when the length increase of horizontal direction, its space that occupies must reduce in the vertical direction, cause the manipulator assembly can not use in the narrow and small position in vertical direction space, influence the commonality of manipulator assembly.
Therefore, how to improve the versatility of the robot assembly becomes a technical problem to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
In view of this, the present invention provides a robot assembly to improve the versatility of the robot assembly.
In order to achieve the above object, the utility model provides a following technical scheme:
a manipulator assembly comprises N-level manipulators which are sequentially arranged along the same direction, wherein the first level manipulator of the N-level manipulators is installed on a vertical installation plate through a driving device, and the N-level manipulators are in telescopic connection through a connecting part, wherein N is more than or equal to 3, and N is a positive integer;
the connecting portion includes:
the first synchronous belt wheel and the second synchronous belt wheel are arranged on the same side of the manipulator, the first synchronous belt wheel is positioned at the head end of the manipulator, the second synchronous belt wheel is positioned at the tail end of the manipulator, and a first synchronous belt is sleeved on the first synchronous belt wheel and the second synchronous belt wheel;
one end of the first clamping jaw is connected with the first synchronous belt, the other end of the first clamping jaw is fixedly connected with the manipulator at the previous stage, the connecting position of the first clamping jaw and the first synchronous belt is close to the second synchronous belt wheel when the manipulator at the N stage is not extended, one end of the first clamping jaw arranged on the manipulator at the first stage is connected with the first synchronous belt, the other end of the first clamping jaw is connected with the vertical mounting plate, and only the first clamping jaw is arranged on the manipulator at the N stage;
and one end of the second clamping jaw is connected with the first synchronous belt, the other end of the second clamping jaw is connected with the next-stage manipulator, and when the N-stage manipulator is not extended, the connecting position of the second clamping jaw and the first synchronous belt is close to the first synchronous belt wheel.
Preferably, in the robot assembly, the robot assembly further includes:
one end of the vertical mounting plate is connected with the vertical mounting plate in a sliding mode, the other end of the vertical mounting plate is connected with the guide plate fixedly connected with the first-stage manipulator, and a first sliding block matched with a first guide rail of the vertical mounting plate is arranged on the guide plate.
Preferably, in the above robot assembly, the first clamping jaw is a stepped clamping jaw, the shape of the first clamping jaw is the same as that of the guide plate, the first clamping jaw is arranged in parallel with the guide plate, and the first clamping jaw is located below the guide plate.
Preferably, in the robot assembly, the first clamping jaw is a U-shaped clamping jaw.
Preferably, in the robot assembly, the two adjacent stages of the robot are slidably engaged with the second slider through the second rail.
Preferably, in the robot assembly, the number of the second rails is two, and the two second rails are arranged in parallel.
Preferably, in the robot assembly, the number of the N-stage robot is 3.
Preferably, in the robot assembly, the driving means includes:
the output end of the servo motor is provided with a third synchronous belt wheel;
the screw rod is provided with a fourth synchronous belt wheel matched with the third synchronous belt wheel, and second synchronous belts are arranged on the third synchronous belt wheel and the fourth synchronous belt wheel;
the sliding block is arranged on the lead screw and is fixedly connected with the first-stage manipulator.
Preferably, in the above manipulator assembly, the N-stage manipulators are N-stage manipulators sequentially arranged in a horizontal direction, and further include N-stage vertical manipulators arranged perpendicular to the N-stage manipulators, the first-stage manipulator of the N-stage vertical manipulator is in transmission connection with the nth-stage manipulator of the N-stage manipulator through the connecting part, and the adjacent-stage vertical manipulator of the N-stage vertical manipulator is in transmission connection with the connecting part; or the N-level mechanical arm is N-level mechanical arms which are sequentially arranged along the vertical direction, and the mechanical arm also comprises N-level horizontal mechanical arms which are vertically arranged with the N-level mechanical arms, the first-level mechanical arm of the N-level horizontal mechanical arm is in transmission connection with the Nth-level mechanical arm of the N-level mechanical arm through the connecting part, and the adjacent-level horizontal mechanical arm of the N-level horizontal mechanical arm is in transmission connection with the connecting part.
According to the above technical scheme, the utility model provides a manipulator assembly, include the N level manipulator of following same direction and arranging in proper order, N level manipulator includes N manipulators, and first order manipulator passes through drive arrangement to be fixed on vertical mounting panel, and adjacent level's manipulator passes through connecting portion expansion joint. The connecting part comprises a first synchronous belt wheel, a second synchronous belt wheel, a first synchronous belt, a first clamping jaw and a second clamping jaw. The driving device drives the first-stage mechanical arm to move, the first synchronous belt on the first-stage mechanical arm is pulled by the first clamping jaw to move, then the first synchronous belt drives the second clamping jaw on the first-stage mechanical arm to move towards the direction of the second synchronous belt wheel on the first-stage mechanical arm, the second clamping jaw drives the second mechanical arm to move, the motion state of the first clamping jaw on the second mechanical arm is the same as that of the first-stage mechanical arm, the first synchronous belt on the second mechanical arm is pulled by the first clamping jaw on the second mechanical arm to move, then the second clamping jaw on the second mechanical arm and connected with the first synchronous belt is driven to move, the second clamping jaw drives the third mechanical arm to move, and so on. Can control drive arrangement's movement distance as required in this scheme, and then control the reach of N level manipulator, adjust the reach of N level manipulator as required, and the adjustment be the whole length of N level manipulator, can not increase its space that occupies in vertical direction, for manipulator assembly among the prior art, do not receive the restriction in vertical direction space, improved the commonality that the manipulator used.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a robot assembly provided in an embodiment of the present invention.
1. The device comprises a first synchronous belt pulley, a second synchronous belt pulley, a first synchronous belt, a second synchronous belt pulley, a third synchronous belt, a fourth synchronous belt and a first clamping jaw.
Detailed Description
The utility model discloses a manipulator assembly to improve the commonality that manipulator assembly used.
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a robot assembly according to an embodiment of the present invention.
The utility model discloses a manipulator assembly, include the N level manipulator of arranging in proper order along same direction, N level manipulator includes N manipulators, and adjacent manipulator sets up along same direction.
A first-stage manipulator of the N-stage manipulator is mounted on the vertical mounting plate through a driving device, the driving device provides telescopic power for the N-stage manipulator, N is more than or equal to 3 in the scheme, N is a positive integer, and specifically N is 3, 4, 5, 6 or 7 … ….
The N-level manipulator is stretched through the connecting part.
Connecting portion include in this scheme: the clamping jaw clamping device comprises a first synchronous pulley 1, a second synchronous pulley 2, a first synchronous belt 3, a first clamping jaw 4 and a second clamping jaw, wherein the first clamping jaw 4 and the second clamping jaw are located on the first synchronous belt 3. The specific connection structure is as follows:
the first synchronous belt pulley 1 and the second synchronous belt pulley 2 are arranged on the same side of the manipulator, the first synchronous belt pulley 1 is arranged at the head end of the manipulator, the second synchronous belt pulley 2 is arranged at the tail end of the manipulator, namely the first synchronous belt pulley 1 and the second synchronous belt pulley 2 are respectively positioned at two ends of the manipulator, and a first synchronous belt 3 is sleeved on the first synchronous belt pulley 1 and the second synchronous belt pulley 2;
one end of a first clamping jaw 4 is connected with a first synchronous belt 3, the other end of the first clamping jaw is fixedly connected with a manipulator at the previous stage, when the manipulator at the N stage is not extended, the connecting position of the first clamping jaw 4 and the first synchronous belt 3 is close to a second synchronous belt wheel 2, namely the connecting position of the first clamping jaw 4 and the first synchronous belt 3 is close to the tail end of the manipulator, and it needs to be explained here that the manipulator at the previous stage is not arranged on the first manipulator, so that one end of the first clamping jaw 4 on the manipulator at the first stage is connected with the first synchronous belt 3, and the other end of the first clamping jaw; the Nth-stage manipulator is not provided with a next-stage manipulator, so that only the first clamping jaw 4 is arranged on the Nth-stage manipulator, and the second clamping jaw is not arranged on the Nth-stage manipulator;
one end of the second clamping jaw is connected with the first synchronous belt 3, the other end of the second clamping jaw is connected with the next-stage manipulator, when the N-stage manipulator is not extended, the connecting position of the second clamping jaw and the first synchronous belt 3 is close to the first synchronous belt wheel 1, namely the connecting position of the first synchronous belt 3 of the second clamping jaw is close to the head end of the manipulator.
The middle-level mechanical arms are provided with connecting parts.
The driving device drives the first-stage mechanical arm to move, the first-stage mechanical arm moves relative to the first clamping jaw 4, the first clamping jaw 4 is fixed on the vertical mounting plate and cannot move, the first synchronous belt 3 is pulled to move, the first synchronous belt 3 drives the second clamping jaw connected with the first synchronous belt to move, and the second clamping jaw drives the second-stage mechanical arm connected with the second synchronous belt to move;
the second-stage mechanical arm moves to drive the first clamping jaw 4 arranged on the second-stage mechanical arm to move, the second-stage mechanical arm moves relative to the first clamping jaw 4 of the second-stage mechanical arm, the motion state of the first clamping jaw 4 of the second-stage mechanical arm is the same as that of the first-stage mechanical arm, the first synchronous belt 3 arranged on the second-stage mechanical arm is pulled to move, the first synchronous belt 3 drives the second clamping jaw on the second-stage mechanical arm connected with the first synchronous belt to move, and the second clamping jaw on the second-stage mechanical arm drives the third-stage first mechanical arm connected with the second synchronous belt to move;
and so on.
The telescopic mechanism has the advantages that the telescopic mechanism realizes the telescopic effect of the N-level manipulator through the connecting part, the connecting positions of the first clamping jaw 4 and the second clamping jaw and the first synchronous belt 3 are unchanged in the telescopic process of the N-level manipulator, but the positions of the first clamping jaw 4 and the second clamping jaw relative to the first synchronous belt wheel 1 and the second synchronous belt wheel 2 can be changed.
The N level manipulator that this scheme provided has realized concertina movement through connecting portion, at flexible in-process, the flexible direction of N level manipulator is the same, can realize the regulation of N level manipulator length in a direction, and the accommodation process of length does not occupy the space with flexible direction vertically direction, when N level manipulator arranges along the horizontal direction promptly, the flexible space that does not occupy vertical direction of N level manipulator for N level manipulator can use in the narrow and small position in vertical space, the commonality of manipulator assembly has been improved.
The N-level manipulator can also shorten the stretching time of the N-level manipulator, and the working efficiency is improved to a certain extent.
In order to guarantee the stability of first order manipulator work, the manipulator assembly that this scheme provided still includes:
one end is connected with the vertical mounting plate in a sliding mode, the other end is fixedly connected with the guide plate of the first-stage manipulator, and a first sliding block matched with a first guide rail of the vertical mounting plate is arranged on the guide plate.
First order manipulator passes through deflector and vertical mounting panel sliding fit, and sliding fit realizes through first guide rail and first slider.
This kind of mode of setting has reduced the energy loss of drive arrangement drive first order manipulator, has played the effect of energy saving, and first guide rail and first slider have played the guide effect to the motion of first order manipulator, have improved the stability of first order manipulator motion, have improved the use strength of manipulator assembly simultaneously.
The first clamping jaw 4 in the scheme has two embodiments:
firstly, the first clamping jaw 4 is a stepped clamping jaw, the shape of the first clamping jaw 4 is the same as that of a guide plate, the first clamping jaw 4 is arranged in parallel with the guide plate, the first clamping jaw 4 is positioned below the guide plate, and the clamping jaw is mainly used between a vertical mounting plate and a first-stage manipulator and used for compensating the height difference between the vertical mounting plate and the first-stage manipulator;
the second kind, first clamping jaw 4 is U type clamping jaw, and two vertical boards of U type clamping jaw are connected with manipulator and the first synchronous belt 3 that correspond respectively, and this kind of first clamping jaw 4 mainly is used in between two adjacent manipulators of parallel arrangement.
In order to further improve the stability of the use of the manipulator assembly, the adjacent two stages of manipulators are in sliding fit with the second sliding block through the second track, the stretching difficulty of the manipulator assembly can be reduced to a certain extent, the second guide rail and the second sliding block play a role in guiding the stretching of the manipulators, and the stretching stability of the manipulators is improved.
Preferably, the number of the second tracks is two, the two second tracks are arranged in parallel, and the number of the corresponding second sliding blocks is also two and is respectively matched with the second tracks correspondingly. The two guide rails are arranged in the embodiment, so that the stability of the telescopic motion of the manipulator assembly is further improved.
The utility model discloses a concrete embodiment, the progression of N level manipulator is 3 levels, and this manipulator assembly includes three manipulators of arranging along same direction promptly, once flexible in-process, can realize 3 synchronous flexible of manipulator.
Specific embodiments of the drive device:
the driving device comprises a servo motor, a lead screw and a slide block.
The output end of the servo motor is provided with a third synchronous belt wheel, a fourth synchronous belt wheel matched with the third synchronous belt wheel is arranged on the screw rod, a second synchronous belt is sleeved on the third synchronous belt wheel and the fourth synchronous belt wheel, the sliding block is in threaded connection with the screw rod, and the sliding block is fixedly connected with the first-stage manipulator.
The servo motor rotates to drive the third synchronous belt pulley to rotate, so that the fourth synchronous belt pulley rotates to drive the screw rod to transmit, and the screw rod drives the sliding block to move, so that the first-stage manipulator moves.
The N-level mechanical arm can be an N-level mechanical arm which is sequentially arranged along the horizontal direction, the tail end of the N-level mechanical arm which is sequentially arranged along the horizontal direction can be further connected with an N-level vertical mechanical arm which is vertically arranged with the N-level mechanical arm, a first-level mechanical arm of the N-level vertical mechanical arm is in transmission connection with an Nth-level mechanical arm of the N-level mechanical arm through a connecting part, adjacent-level vertical mechanical arms of the N-level vertical mechanical arm are in transmission connection through the connecting part, the transmission mode of the transmission mode is the same as the motion mode of the N-level mechanical arms which are arranged along.
The N-level mechanical arm can also be an N-level mechanical arm which is sequentially arranged along the vertical direction, the tail end of the N-level mechanical arm which is sequentially arranged along the vertical direction can be further connected with an N-level horizontal mechanical arm which is vertically arranged with the N-level mechanical arm, a first-level mechanical arm of the N-level horizontal mechanical arm is in transmission connection with an Nth-level mechanical arm of the N-level mechanical arm through a connecting part, an adjacent-level horizontal mechanical arm of the N-level horizontal mechanical arm is in transmission connection with the connecting part, the transmission mode of the transmission mode is the same as the motion mode of the N-level mechanical arm which is.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. A manipulator assembly is characterized by comprising N-level manipulators which are sequentially arranged along the same direction, wherein the first level manipulator of the N-level manipulators is installed on a vertical installation plate through a driving device and is in telescopic connection through a connecting part, N is more than or equal to 3, and N is a positive integer;
the connecting portion includes:
the manipulator comprises a first synchronous belt wheel (1) and a second synchronous belt wheel (2) which are arranged on the same side of the manipulator, wherein the first synchronous belt wheel (1) is positioned at the head end of the manipulator, the second synchronous belt wheel (2) is positioned at the tail end of the manipulator, and a first synchronous belt (3) is sleeved on the first synchronous belt wheel (1) and the second synchronous belt wheel (2);
one end of the first clamping jaw (4) is connected with the first synchronous belt (3), the other end of the first clamping jaw is fixedly connected with the manipulator at the previous stage, the connecting position of the first clamping jaw (4) and the first synchronous belt (3) is close to the second synchronous belt wheel (2) when the manipulator at the N stage is not extended, one end of the first clamping jaw (4) arranged on the manipulator at the first stage is connected with the first synchronous belt (3), the other end of the first clamping jaw is connected with the vertical mounting plate, and the manipulator at the N stage is only provided with the first clamping jaw (4);
and one end of the second clamping jaw is connected with the first synchronous belt (3), the other end of the second clamping jaw is connected with the next-stage manipulator, and when the N-stage manipulator is not extended, the connecting position of the second clamping jaw and the first synchronous belt (3) is close to the first synchronous belt wheel (1).
2. The robot assembly of claim 1, further comprising:
one end of the vertical mounting plate is connected with the vertical mounting plate in a sliding mode, the other end of the vertical mounting plate is connected with the guide plate fixedly connected with the first-stage manipulator, and a first sliding block matched with a first guide rail of the vertical mounting plate is arranged on the guide plate.
3. The robot assembly according to claim 2, characterized in that the first jaw (4) is a stepped jaw, the first jaw (4) is shaped the same as the guiding plate, the first jaw (4) is arranged parallel to the guiding plate, and the first jaw (4) is located below the guiding plate.
4. The robot assembly according to claim 2, characterized in that the first jaw (4) is a U-shaped jaw.
5. The robot assembly of claim 1, wherein adjacent two stages of robots are slidably engaged by the second track and the second slide.
6. The robot assembly of claim 5, wherein the number of the second rails is two, and the two second rails are arranged in parallel.
7. The robot assembly of claim 1, wherein the number of stages of the N-stage robot is 3 stages.
8. The robot assembly of claim 1, wherein the drive means comprises:
the output end of the servo motor is provided with a third synchronous belt wheel;
the screw rod is provided with a fourth synchronous belt wheel matched with the third synchronous belt wheel, and second synchronous belts are arranged on the third synchronous belt wheel and the fourth synchronous belt wheel;
the sliding block is arranged on the lead screw and is fixedly connected with the first-stage manipulator.
9. The robot assembly of claim 1,
the N-stage mechanical arm is N-stage mechanical arms which are sequentially arranged along the horizontal direction, and the N-stage vertical mechanical arm is also arranged perpendicular to the N-stage mechanical arm, the first-stage mechanical arm of the N-stage vertical mechanical arm is in transmission connection with the Nth-stage mechanical arm of the N-stage mechanical arm through the connecting part, and the adjacent-stage vertical mechanical arm of the N-stage vertical mechanical arm is in transmission connection with the connecting part;
or,
the N-level manipulator is N-level manipulators which are sequentially arranged along the vertical direction, and the manipulator further comprises N-level manipulators which are vertically arranged with the N-level manipulators, wherein the N-level manipulators are in transmission connection with the first-level manipulator of the N-level manipulator and the Nth-level manipulator of the N-level manipulator through the connecting part, and the adjacent-level horizontal manipulator of the N-level manipulator is in transmission connection with the adjacent-level horizontal manipulator of the N-level manipulator through the connecting part.
Priority Applications (1)
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CN201621086142.5U CN206085033U (en) | 2016-09-27 | 2016-09-27 | Manipulator assembly |
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CN201621086142.5U CN206085033U (en) | 2016-09-27 | 2016-09-27 | Manipulator assembly |
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CN206085033U true CN206085033U (en) | 2017-04-12 |
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CN201621086142.5U Expired - Fee Related CN206085033U (en) | 2016-09-27 | 2016-09-27 | Manipulator assembly |
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Cited By (8)
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CN107552670A (en) * | 2017-10-25 | 2018-01-09 | 安徽工程大学 | A kind of punching press feeding robot |
CN107685459A (en) * | 2017-09-25 | 2018-02-13 | 沈阳蓝英工业自动化装备股份有限公司 | A kind of all steel fetus conveying robot for curing department |
CN108381522A (en) * | 2018-03-27 | 2018-08-10 | 苏州奥兰迪尔自动化设备有限公司 | A kind of CD detection device |
CN109319459A (en) * | 2018-10-16 | 2019-02-12 | 珠海市广浩捷精密机械有限公司 | A kind of compact speed straight line module device and application method |
WO2019137123A1 (en) * | 2018-01-15 | 2019-07-18 | 苏州精濑光电有限公司 | Carrying mechanism |
CN110181493A (en) * | 2019-04-29 | 2019-08-30 | 广东工业大学 | A kind of right angle coordinate manipulator of folding telescopic structure |
CN110473821A (en) * | 2019-08-21 | 2019-11-19 | 北京北方华创微电子装备有限公司 | Cassette extending apparatus and semiconductor processing equipment |
CN111071793A (en) * | 2020-01-07 | 2020-04-28 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Multifunctional carrying mechanism of plant factory three-dimensional operation robot |
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2016
- 2016-09-27 CN CN201621086142.5U patent/CN206085033U/en not_active Expired - Fee Related
Cited By (12)
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CN107685459A (en) * | 2017-09-25 | 2018-02-13 | 沈阳蓝英工业自动化装备股份有限公司 | A kind of all steel fetus conveying robot for curing department |
CN107685459B (en) * | 2017-09-25 | 2024-03-22 | 沈阳蓝英工业自动化装备股份有限公司 | All-steel tire blank carrying manipulator for vulcanization workshop |
CN107552670A (en) * | 2017-10-25 | 2018-01-09 | 安徽工程大学 | A kind of punching press feeding robot |
CN107552670B (en) * | 2017-10-25 | 2023-10-20 | 安徽工程大学 | Stamping feeding robot |
WO2019137123A1 (en) * | 2018-01-15 | 2019-07-18 | 苏州精濑光电有限公司 | Carrying mechanism |
CN108381522A (en) * | 2018-03-27 | 2018-08-10 | 苏州奥兰迪尔自动化设备有限公司 | A kind of CD detection device |
CN109319459A (en) * | 2018-10-16 | 2019-02-12 | 珠海市广浩捷精密机械有限公司 | A kind of compact speed straight line module device and application method |
CN109319459B (en) * | 2018-10-16 | 2023-05-02 | 珠海广浩捷科技股份有限公司 | Compact double-speed linear module equipment and application method |
CN110181493A (en) * | 2019-04-29 | 2019-08-30 | 广东工业大学 | A kind of right angle coordinate manipulator of folding telescopic structure |
CN110473821A (en) * | 2019-08-21 | 2019-11-19 | 北京北方华创微电子装备有限公司 | Cassette extending apparatus and semiconductor processing equipment |
CN110473821B (en) * | 2019-08-21 | 2022-05-27 | 北京北方华创微电子装备有限公司 | Wafer boat extending device and semiconductor processing equipment |
CN111071793A (en) * | 2020-01-07 | 2020-04-28 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Multifunctional carrying mechanism of plant factory three-dimensional operation robot |
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Granted publication date: 20170412 Termination date: 20200927 |