CN206040676U - Chain wet etching machine - Google Patents

Chain wet etching machine Download PDF

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Publication number
CN206040676U
CN206040676U CN201621022011.0U CN201621022011U CN206040676U CN 206040676 U CN206040676 U CN 206040676U CN 201621022011 U CN201621022011 U CN 201621022011U CN 206040676 U CN206040676 U CN 206040676U
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CN
China
Prior art keywords
rolling sleeve
roller
etching machine
roller bearing
chain type
Prior art date
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Active
Application number
CN201621022011.0U
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Chinese (zh)
Inventor
周军
党继东
刘东续
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Funing atlas sunshine Power Technology Co., Ltd
CSI Cells Co Ltd
Original Assignee
CSI Solar Technologies Inc
CSI GCL Solar Manufacturing Yancheng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by CSI Solar Technologies Inc, CSI GCL Solar Manufacturing Yancheng Co Ltd filed Critical CSI Solar Technologies Inc
Priority to CN201621022011.0U priority Critical patent/CN206040676U/en
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Publication of CN206040676U publication Critical patent/CN206040676U/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Rolling Contact Bearings (AREA)

Abstract

The utility model discloses a chain wet etching machine, including air -drying groove transmission device, should air -dry last gyro wheel and bottom roller that groove transmission device set up including the cooperation, it includes that roller bearing, cover locate and roll epaxial roller set to go up the gyro wheel, the clearance has between roller bearing and the roller set, go up the gyro wheel and roll the wheel clearance cooperation down, follow clearance between last gyro wheel and the bottom roller when passing through when the substrate, it is feasible constitute the line contact between roller set and the substrate. The utility model discloses with setting the gapped structure of utensil between roller bearing and the roller set to for the power that acts on battery surface becomes roller set by the current whole gyro wheel of going up, thus greatly reduced the power on battery surface acts on, reduce the piece volume, the problem that influences the substrate outward appearance because of the gyro wheel seal has been solved simultaneously.

Description

A kind of chain type wet-method etching machine
Technical field
The utility model is related to technical field of solar cell manufacturing, and in particular to a kind of chain type wet-method etching machine.
Background technology
In recent years, photovoltaic generation is to enable semi-conductor electronic device to effectively absorb solar radiation using solar energy, And the direct generation of electricity mode of electric energy is transformed into, it is the main flow of current solar power generation.Currently, the usually said sunshine of people Generating is exactly solar energy power generating, also known as solar cell power generation, and its core component is solar battery sheet.
The manufacture process of existing solar battery sheet is divided into making herbs into wool-diffusion-etching-PECVD plated films-serigraphy-survey Examination sorting.Wherein, the PN junction of silicon chip back side and silicon chip side is removed in the effect of etching procedure, reaches the mesh in front and insulating backside 's.Existing etching procedure typically adopts chain type wet-method etching machine, existing chain type wet-method etching owner to include drying tank, the One rinsing bowl, descaling bath, the second rinsing bowl, air-dried groove etc.;Wherein, air-dry in groove and be provided with air-dried groove transmission mechanism, the air-dried groove Transmission mechanism includes the upper wheel scroll-up and scroll-down wheel being equipped with;The upper roller includes roller bearing, spacer sleeve answering on roller bearing Several rolling sleeves, for increasing friction force, are additionally provided with the friction bulge loop of protrusion on each rolling sleeve(Rubber ring).In existing structure Roller bearing and rolling sleeve are structure as a whole, and the power for now acting on battery surface is larger, easily cause the increase of amount of debris; Roller bearing and rolling sleeve are Split type structure, but point contact is still adopted between rolling sleeve and roller, therefore roller and silicon chip table The frictional force in face is big, it is impossible to thoroughly solve rolling wheel stamp to cell piece(Substrate)The impact of outward appearance.
On the other hand, in order to solve solar module attenuation problem, anti-PID techniques, example be increased in battery bit end Silicon chip surface as after etching is aoxidized using ozone, then into PECVD filming process.
However, practical application finds, during air-drying, silicon chip is air-drying meeting in groove to existing chain type wet-method etching machine Rubbed by upper and lower roller, this frictionally damage can increase during air-drying, after carrying out later process oxidation, meeting Obvious rolling wheel stamp is formed on cell piece surface, extreme influence is caused to cell piece outward appearance.
The content of the invention
The purpose of this utility model is to provide a kind of chain type wet-method etching machine.
To achieve the above object of the invention, the technical solution adopted in the utility model is:A kind of chain type wet-method etching machine, including Air-dried groove transmission mechanism, the air-dried groove transmission mechanism include upper roller and the bottom roller being equipped with;
The upper roller includes roller bearing, the rolling sleeve being sheathed on roller bearing;There is between the roller bearing and rolling sleeve gap;
The upper roller and bottom roller gap coordinate, and when gap of the substrate between upper roller and bottom roller passes through, make Obtain linear contact lay is constituted between the rolling sleeve and substrate.
Above, linear contact lay is constituted between the rolling sleeve and substrate, refer to that the outer surface of rolling sleeve is planar structure, its When contacting with substrate, between rolling sleeve and substrate, constitute linear contact lay, so can with increasing friction force, reduce by prior art because Point contacts and needs larger pressure to maintain frictional force.When the outer surface of the rolling sleeve is provided with the form friction pattern of parallel circular ring structure During reason, dotted line linear contact lay between rolling sleeve and substrate, is constituted.
Preferably, outside diameter 3 ~ 5 mm of the inner circle of the cross section of the rolling sleeve with diameter greater than roller bearing cross section.
Above, there is between the roller bearing and rolling sleeve gap, the size in this gap is extremely important, and gap is too small easily Fragment is produced, and gap is crossed conference and produces shake, can also increase amount of debris, therefore, the utility model defines the horizontal stroke of rolling sleeve The gap of outside diameter 3 ~ 5 mm of the inner circle in section with diameter greater than roller bearing cross section, i.e. rolling sleeve inner surface and roller bearing outer surface For 3 ~ 5mm.
Above, the length of side of the length of the rolling sleeve more than substrate.
In above-mentioned technical proposal, the rolling sleeve is continuous structure, and whole piece is sheathed on the roller bearing.
Preferably, the length of the rolling sleeve is 900 ~ 1000 mm.
Preferably, the weight of the rolling sleeve is 100 ~ 150 grams.
Corresponding another kind of technical scheme, the rolling sleeve is segmental structure, and spacer sleeve is located on roller bearing, and each The roller bearing of rolling sleeve both sides is provided with rolling sleeve spacer pin.
Preferably, the length of the rolling sleeve is 180 ~ 200 mm.
Preferably, the weight of the rolling sleeve is 20 ~ 30 grams.
Preferably, the position of the rolling sleeve and the position of substrate transfer are corresponding.
Additionally, when upper roller has multigroup, the position of the rolling sleeve spacer pin on each upper roller should correspond, position On same straight line, so just can ensure that substrate is walked by linear transport, without shifting.
Preferably, the rolling sleeve is squeegee set.
Preferably, the outer surface of the rolling sleeve is provided with the friction texture of parallel circular ring structure, and the annulus and roller bearing The cross section of set is parallel.
As above-mentioned technical proposal is used, the utility model has following advantages compared with prior art:
1. the utility model will be configured with the structure in gap between roller bearing and rolling sleeve so that act on substrate surface Power rolling sleeve is become by existing whole upper roller, thus greatly reduce the power for acting on battery surface, reduce amount of debris; Meanwhile, the utility model eliminates rubber convex ring of the prior art, and makes rolling sleeve and the direct linear contact lay of substrate into, increases The lifting surface area of substrate, reduces the frictional force of upper roller and substrate surface, and solving affects substrate's appearance because of rolling wheel stamp Problem, achieves significant effect;
2. rolling sleeve can be arranged to segmental structure by the utility model, further reduce rolling sleeve and act on substrate surface Power, reduce amount of debris;
3. the utility model can arrange the friction texture of parallel circular ring structure in the outer surface of rolling sleeve, prevent substrate inclined Leave the right or normal track;
4. simple structure of the present utility model, it is easy to prepare, cost is relatively low, be suitable to popularization and application.
Description of the drawings
Fig. 1 is the schematic diagram of air-dried groove in the utility model embodiment one.
Fig. 2 is the structural representation of upper roller in Fig. 1.
The side view of the use state of roller bearing and rolling sleeve in Fig. 3 the utility model embodiment one.
Wherein:1st, upper wheel rolling;2nd, lower whorl rolling;3rd, roller bearing;4th, rolling sleeve;5th, rolling sleeve spacer pin.
Specific embodiment
Below in conjunction with the accompanying drawings and embodiment is further described to the utility model:
Embodiment one:
Referring to shown in Fig. 1 ~ 3, a kind of chain type wet-method etching machine, including air-dried groove transmission mechanism, the air-dried groove transmission mechanism Including the upper roller 1 and bottom roller 2 that are equipped with;
The upper roller includes 5 rolling sleeves 4 of the roller bearing 3, spacer sleeve on roller bearing;The position that wherein roller housing is located The position that correspondence substrate transfer is located, it is ensured that substrate is moved linearly substantially along the stop zone of roller housing in transmitting procedure, is kept away Exempt between substrate ranks, to produce lamination phenomenon;
There is between the roller bearing and rolling sleeve gap, and the inner circle of the cross section of rolling sleeve is with diameter greater than roller bearing cross section 4 mm of outside diameter;
The roller bearing of each rolling sleeve both sides is provided with rolling sleeve spacer pin 5.Due to including multiple upper rollers, therefore on each The rolling sleeve spacer pin position of roller corresponds, it is ensured that each roller housing is arranged in a linear substantially along substrate transfer direction.Rolling The white space of the region correspondence substrate transfer array between axle sleeve spacer pin.
The rolling sleeve is squeegee set.
The length of the rolling sleeve is 190 mm.The weight of the rolling sleeve is 25 grams.
The outer surface of the rolling sleeve is provided with the friction texture of parallel circular ring structure.
In etching process, the substrate for being etched away the back side and edge knot is dried into groove is air-dried, and substrate is upper and lower Space under the squeezing action of roller between upper roller and bottom roller passes through, wherein bottom roller be driving wheel, upper roller be from Driving wheel, driving wheel are rotated in the presence of motor, drive substrate and upper roller movement.

Claims (10)

1. a kind of chain type wet-method etching machine, including air-dried groove transmission mechanism, it is upper that the air-dried groove transmission mechanism includes being equipped with Roller (1) and bottom roller (2);It is characterized in that:
The upper roller includes roller bearing (3), the rolling sleeve (4) being sheathed on roller bearing;Between having between the roller bearing and rolling sleeve Gap;
The upper roller and bottom roller gap coordinate, when gap of the substrate between upper roller and bottom roller passes through so that institute State.
2. chain type wet-method etching machine according to claim 1, it is characterised in that:The inner circle of the cross section of the rolling sleeve is straight Outside diameter 3 ~ 5 mm of the footpath more than roller bearing cross section.
3. chain type wet-method etching machine according to claim 1, it is characterised in that:The length of the rolling sleeve is more than substrate The length of side.
4. chain type wet-method etching machine according to claim 1, it is characterised in that:The rolling sleeve be continuous structure, whole piece It is sheathed on the roller bearing.
5. chain type wet-method etching machine according to claim 4, it is characterised in that:The weight of the rolling sleeve is 100 ~ 150 Gram.
6. chain type wet-method etching machine according to claim 1, it is characterised in that:The rolling sleeve is segmental structure, is spaced It is sheathed on roller bearing, and the roller bearing of each rolling sleeve both sides is provided with rolling sleeve spacer pin (5).
7. chain type wet-method etching machine according to claim 6, it is characterised in that:The weight of the rolling sleeve is 20 ~ 30 grams.
8. chain type wet-method etching machine according to claim 6, it is characterised in that:The position of the rolling sleeve and substrate transfer Position it is corresponding.
9. chain type wet-method etching machine according to claim 1, it is characterised in that:The rolling sleeve is squeegee set.
10. chain type wet-method etching machine according to claim 1, it is characterised in that:The outer surface of the rolling sleeve is provided with flat The friction texture of row circular ring structure, and the annulus is parallel with the cross section of rolling sleeve.
CN201621022011.0U 2016-08-31 2016-08-31 Chain wet etching machine Active CN206040676U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201621022011.0U CN206040676U (en) 2016-08-31 2016-08-31 Chain wet etching machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201621022011.0U CN206040676U (en) 2016-08-31 2016-08-31 Chain wet etching machine

Publications (1)

Publication Number Publication Date
CN206040676U true CN206040676U (en) 2017-03-22

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201621022011.0U Active CN206040676U (en) 2016-08-31 2016-08-31 Chain wet etching machine

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CN (1) CN206040676U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107256909A (en) * 2017-07-26 2017-10-17 昊诚光电(太仓)有限公司 One kind catches up with water installations and wool-weaving machine
CN112512294A (en) * 2020-10-30 2021-03-16 佛山市坦斯盯科技有限公司 Be applied to feeding mechanism of AOI equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107256909A (en) * 2017-07-26 2017-10-17 昊诚光电(太仓)有限公司 One kind catches up with water installations and wool-weaving machine
CN107256909B (en) * 2017-07-26 2023-11-10 太仓市哲泰天产品设计有限公司 Catch up with water device and wool making machine
CN112512294A (en) * 2020-10-30 2021-03-16 佛山市坦斯盯科技有限公司 Be applied to feeding mechanism of AOI equipment

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CP03 Change of name, title or address
CP03 Change of name, title or address

Address after: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province

Patentee after: CSI Cells Co.,Ltd.

Patentee after: Funing atlas sunshine Power Technology Co., Ltd

Address before: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province

Patentee before: CSI Cells Co.,Ltd.

Patentee before: CSI-GCL SOLAR MANUFACTURING (YANCHENG) Co.,Ltd.