CN206018170U - Two-dimensional micro-rotation platform of fine sighting telescope - Google Patents

Two-dimensional micro-rotation platform of fine sighting telescope Download PDF

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Publication number
CN206018170U
CN206018170U CN201620838562.8U CN201620838562U CN206018170U CN 206018170 U CN206018170 U CN 206018170U CN 201620838562 U CN201620838562 U CN 201620838562U CN 206018170 U CN206018170 U CN 206018170U
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China
Prior art keywords
piezoelectric ceramics
stage body
layer
yawing axis
mirror
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Expired - Fee Related
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CN201620838562.8U
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Chinese (zh)
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钟博文
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Suzhou University
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Suzhou University
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Abstract

The utility model relates to a two-dimensional micro-rotation platform of fine sighting telescope, including the columnar stage body, stage body one end is connected with through two-layer flexible hinge mechanism and is used for fixing the fine sighting telescope move the mesa, the stage body is internal to be equipped with the drive move the mesa and carry out two-dimensional micro-pivoted piezoceramics with its mutually perpendicular's two deflection axles. The utility model discloses a flexible hinge and piezoceramics's structure for moving the mesa and can rotating or swing with double-phase vertically deflection axle, can making the precision sighting telescope fix a position at required angle, realize the accurate of star ground laser link and aim.

Description

A kind of essence takes aim at two-dimentional micro- rotatable platform of mirror
Technical field
The utility model is related to a kind of micro- rotating mechanism, more particularly to a kind of essence takes aim at two-dimentional micro- rotatable platform of mirror.
Background technology
With the development of science and technology, all urgent in fields such as Ultra-precision Turning, microelectronic engineering, bioengineering, nanometer technologies Need submicron order even nano level precision positioning technology.Most typical application is the manufacture production of nano-device.Nanometer Device includes nano electron device and nano photoelectric device, can be widely applied to electronics, optics, micro-mechanical device, new meter Calculation machine etc., is current new material and most dynamic research field in new device research field, and components and parts miniaturization, intelligence Energyization, highly integrated etc. mainstream development direction.Nano-device is due to being worth with potential great market and national defence so that its The method of design and manufacture, approach, technique etc. become the focus of the research of numerous scientists, government and large enterprise and investment.Institute It is trend of the times to greatly develop precision positioning technology, is embodying for Creative Science and Technology Co. Ltd's progress.
The terminal essence of laser link takes aim at mirror, needs to laser accurate tracking and fine sight, therefore, in the course of work In, need to make essence take aim at mirror around X-axis, the minor rotation of Y-axis.At present, make essence take aim at mirror to compare around the structure of X-axis, the minor rotation of Y-axis Complexity, and the precision for aiming at does not reach requirement with resolution ratio.
In view of above-mentioned defect, the design people, actively research and innovation in addition, takes aim to founding a kind of essence of new structure Two-dimentional micro- rotatable platform of mirror so as to more the value in industry.
Utility model content
For solving above-mentioned technical problem, the purpose of this utility model be to provide a kind of high accuracy, high-resolution, micrometric displacement, Accurate positioning, high frequency response, stability and good reliability, realize that the essence of the fine sight of star ground laser link takes aim at two-dimentional micro- turn of mirror Moving platform.
Essence of the present utility model takes aim at two-dimentional micro- rotatable platform of mirror, and including the stage body of column, described stage body one end passes through two Layer flexure hinge mechanism is connected with the dynamic table top for taking aim at mirror for fixing the essence, be provided with the stage body driving dynamic table top with Its orthogonal two yawing axis carries out the piezoelectric ceramics of two-dimentional micro- rotation.
Further, flexure hinge mechanism described in two-layer includes two flexible hinges, two flexible hinges in wherein a layer Line and other one layer in two flexible hinges line parallel with two yawing axis respectively;The piezoelectric ceramics is two, respectively It is located on two yawing axis and the distance in the crosspoint of two yawing axis of distance is equal.
Further, flexure hinge mechanism described in two-layer includes three with the equally distributed flexibility of the stage body axial line Hinge, three flexible hinges in wherein a layer respectively with other one layer in three flexible hinges be in 60 ° of angles;The piezoelectricity Pottery is three, is uniformly distributed along the stage body axial line, and one of piezoelectric ceramics is located on yawing axis of dynamic table top, Two other piezoelectric ceramics is located at the both sides of another yawing axis of dynamic table top, and the friendship of three two yawing axis of piezoelectric ceramics distance The distance of crunode is equal.
Further, flexure hinge mechanism described in two-layer includes four with the equally distributed flexibility of the stage body axial line Hinge, four flexible hinges in wherein a layer respectively with other one layer in four flexible hinges be in 30 ° of angles;The piezoelectricity Pottery be four, two adjacent with two sheets of flexible linkage respectively flexible hinges of each piezoelectric ceramics be in 30 ° of angles, four The individual piezoelectric ceramics is located on two yawing axis of the dynamic table top respectively and the distance in the crosspoint of two yawing axis of distance is equal.
Further, the stage body other end is connected with bottom, is connected with and offsets with the piezoelectric ceramics in the bottom Pre-loading screw.
Further, mounting flange is also arranged with the stage body.
By such scheme, the utility model at least has advantages below:
1st, by the structure of flexible hinge and piezoelectric ceramics so that dynamic table top can with two perpendicular yawing axis rotations or Swing, essence can be made to take aim at mirror and be positioned at required angle, realize the fine sight of star ground laser link;
2nd, by flexible hinge and the structure of piezoelectric ceramics, micro- rotation of dynamic table top is realized, positioning precision is high, resolution ratio Height, accurate positioning, high frequency response, stability and good reliability.
Described above is only the general introduction of technical solutions of the utility model, in order to better understand skill of the present utility model Art means, and being practiced according to the content of specification, with preferred embodiment of the present utility model and coordinate accompanying drawing detailed below Describe in detail bright as after.
Description of the drawings
Fig. 1 is the structure sectional view of the utility model embodiment one;
Fig. 2 is the location diagram of one piezoelectric ceramics of embodiment and flexible hinge;
Fig. 3 is the structure sectional view of the utility model embodiment two;
Fig. 4 is the location diagram of two piezoelectric ceramics of embodiment and flexible hinge;
Fig. 5 is the structure sectional view of the utility model embodiment three;
Fig. 6 is the location diagram of three piezoelectric ceramics of embodiment and flexible hinge.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below Embodiment is used for the utility model to be described, but is not limited to scope of the present utility model.
Embodiment one
Referring to Fig. 1 and Fig. 2, a kind of essence takes aim at two-dimentional micro- rotatable platform of mirror, and including the stage body 11 of column, 11 one end of stage body leads to Cross two sheets of flexible linkage and be connected with the dynamic table top 12 that mirror is taken aim at for fixing essence, be provided with the dynamic table top 12 of driving with which in stage body 11 Orthogonal two yawing axis carry out the piezoelectric ceramics 14 of two-dimentional micro- rotation.Two sheets of flexible linkage includes two flexible hinges 13, the line of two flexible hinges 13 in wherein a layer and other one layer in two flexible hinges 13 line respectively with two deflection Axle;Piezoelectric ceramics 14 is two, distinguishes just to two lines and the distance in two line crosspoint of distance is equal.When one of pressure During 14 output displacement of electroceramics, the flexible hinge 13 of equivalent layer produces elastic deformation, and dynamic table top 12 produces certain deflection, when removing Disappear the driving power supply of piezoelectric ceramics 14, and flexible hinge 13 resets under the effect of elastically-deformable restoring force, and dynamic table top 12 returns to original Beginning position.As two yawing axis are mutually perpendicular to so that two deflections of two-dimensional directional are separate.
The utility model is connected with bottom 15 in 11 other end of stage body, is connected with and offsets with piezoelectric ceramics 14 in bottom 15 Pre-loading screw 16.The utility model, by pre-loading screw 16, is that piezoelectric ceramics 14 provides enough pretightning forces, and piezoelectricity can be avoided to make pottery Kinematic error caused by gap of the porcelain 14 in installation process.Pre-loading screw 16 can adopt fine thread, make pre-loading screw 16 Screwed hole and piezoelectric ceramics 14 keep absolute upright, ensure that piezoelectric ceramics 14 will not be subject in addition to vertical direction Power, protects piezoelectric ceramics 14 to a certain extent, reduces the loss of piezoelectric ceramics 14;Had using fine thread locking anti- Effect of shaking is good, can be with the advantage of precise fine-adjustment pretightning force, while gap of the piezoelectric ceramics 14 in installation process can be avoided to be made Into kinematic error and piezoelectric ceramics damage.
For convenience of the utility model is installed on relevant device, the utility model is also arranged with Method for Installation on stage body 11 Blue 17.
Used as preferred embodiment of the present utility model, the utility model can also arrange some set holes 18 in bottom, with Just sleeve pipe is installed, is conveniently passed through the power line of piezoelectric ceramics 14, and displacement transducer is installed, controlled by displacement transducer Deflection angle.
Embodiment two
Referring to Fig. 3 and Fig. 4, a kind of essence takes aim at two-dimentional micro- rotatable platform of mirror, and including the stage body 21 of column, 21 one end of stage body leads to Cross two sheets of flexible linkage and be connected with the dynamic table top 22 that mirror is taken aim at for fixing essence, be provided with the dynamic table top 22 of driving with which in stage body 21 Orthogonal two yawing axis carry out the piezoelectric ceramics 24 of two-dimentional micro- rotation.Two sheets of flexible linkage includes three with stage body The equally distributed flexible hinge 23 of 21 axial lines, three flexible hinges 23 in wherein a layer respectively with other one layer in three Flexible hinge 23 is in 60 ° of angles;Piezoelectric ceramics 24 is three, is uniformly distributed along 21 axial line of stage body, one of piezoelectric ceramics On 24 yawing axis for being located at dynamic table top 22, two other piezoelectric ceramics is located at the two of another yawing axis of dynamic table top 22 Side, and the distance in the crosspoint of three 24 distance of piezoelectric ceramics, two yawing axis is equal.
When 24 output displacement of piezoelectric ceramics being located therein on yawing axis, or other yawing axis both sides its In 24 output displacement of piezoelectric ceramics when, the flexible hinge 23 of equivalent layer produces elastic deformation, and dynamic table top 22 produces certain Deflection, when the driving power supply for cancelling piezoelectric ceramics 24, flexible hinge 23 reset under the effect of elastically-deformable restoring force, moves table top 22 return to home position.As two yawing axis are mutually perpendicular to so that two deflections of two-dimensional directional are separate.
By arranging three piezoelectric ceramics in the embodiment, it is possible to achieve with the rotation that yawing axis do a direction, With the swing that another yawing axis does both direction, more use demands are realized.
The utility model is connected with bottom 25 in 21 other end of stage body, is connected with and offsets with piezoelectric ceramics 24 in bottom 25 Pre-loading screw 26.The utility model, by pre-loading screw 26, is that piezoelectric ceramics 24 provides enough pretightning forces, and piezoelectricity can be avoided to make pottery Kinematic error caused by gap of the porcelain 24 in installation process.Pre-loading screw 26 can adopt fine thread, make pre-loading screw 26 Screwed hole and piezoelectric ceramics 24 keep absolute upright, ensure that piezoelectric ceramics 24 will not be subject in addition to vertical direction Power, protects piezoelectric ceramics 24 to a certain extent, reduces the loss of piezoelectric ceramics 24;Had using fine thread locking anti- Effect of shaking is good, can be with the advantage of precise fine-adjustment pretightning force, while gap of the piezoelectric ceramics 24 in installation process can be avoided to be made Into kinematic error and piezoelectric ceramics damage.
For convenience of the utility model is installed on relevant device, the utility model is also arranged with Method for Installation on stage body 21 Blue 27.
Used as preferred embodiment of the present utility model, the utility model can also arrange some set holes 28 in bottom, with Just sleeve pipe is installed, is conveniently passed through the power line of piezoelectric ceramics 24, and displacement transducer is installed, controlled by displacement transducer Deflection angle.
Embodiment three
Referring to Fig. 5 and Fig. 6, a kind of essence takes aim at two-dimentional micro- rotatable platform of mirror, and including the stage body 31 of column, 31 one end of stage body leads to Cross two sheets of flexible linkage and be connected with the dynamic table top 32 that mirror is taken aim at for fixing essence, be provided with the dynamic table top 32 of driving with which in stage body 31 Orthogonal two yawing axis carry out the piezoelectric ceramics 34 of two-dimentional micro- rotation.Two sheets of flexible linkage includes four with stage body The equally distributed flexible hinge 33 of 31 axial lines, four flexible hinges 33 in wherein a layer respectively with other one layer in four Flexible hinge 33 is in 30 ° of angles;Piezoelectric ceramics 34 is four, and each piezoelectric ceramics 34 is adjacent with two sheets of flexible linkage respectively Two flexible hinges 33 be in 30 ° of angles, four piezoelectric ceramics 34 are located on two yawing axis of dynamic table top 32 respectively and distance two is inclined The distance in the crosspoint of rotating shaft is equal.
When two 34 successive output displacement of piezoelectric ceramics being located therein on yawing axis, or on other yawing axis Two 14 successive output displacements of piezoelectric ceramics when, the flexible hinge 33 of equivalent layer produces elastic deformation, moves table top 32 and produces one Fixed deflection, when the driving power supply for cancelling piezoelectric ceramics 34, flexible hinge 33 resets under the effect of elastically-deformable restoring force, moves Table top 32 returns to home position.As two yawing axis are mutually perpendicular to so that two deflections of two-dimensional directional are separate.
By arranging four piezoelectric ceramics in the embodiment, it is possible to achieve with the swing that two yawing axis do both direction, Realize more use demands.
The utility model is connected with bottom 35 in 31 other end of stage body, is connected with and offsets with piezoelectric ceramics 34 in bottom 35 Pre-loading screw 36.The utility model, by pre-loading screw 36, is that piezoelectric ceramics 34 provides enough pretightning forces, and piezoelectricity can be avoided to make pottery Kinematic error caused by gap of the porcelain 34 in installation process.Pre-loading screw 36 can adopt fine thread, make pre-loading screw 36 Screwed hole and piezoelectric ceramics 34 keep absolute upright, ensure that piezoelectric ceramics 34 will not be subject in addition to vertical direction Power, protects piezoelectric ceramics 34 to a certain extent, reduces the loss of piezoelectric ceramics 34;Had using fine thread locking anti- Effect of shaking is good, can be with the advantage of precise fine-adjustment pretightning force, while gap of the piezoelectric ceramics 34 in installation process can be avoided to be made Into kinematic error and piezoelectric ceramics damage.
For convenience of the utility model is installed on relevant device, the utility model is also arranged with Method for Installation on stage body 31 Blue 37.
Used as preferred embodiment of the present utility model, the utility model can also arrange some set holes 38 in bottom, with Just sleeve pipe is installed, is conveniently passed through the power line of piezoelectric ceramics 34, and displacement transducer is installed, controlled by displacement transducer Deflection angle.
The above is only preferred embodiment of the present utility model, is not limited to the utility model, it is noted that For those skilled in the art, on the premise of without departing from the utility model know-why, can also do Go out some improvement and modification, these improvement and modification also should be regarded as protection domain of the present utility model.

Claims (6)

1. a kind of essence takes aim at two-dimentional micro- rotatable platform of mirror, it is characterised in that:Including the stage body of column, described stage body one end passes through two Layer flexure hinge mechanism is connected with the dynamic table top for taking aim at mirror for fixing the essence, be provided with the stage body driving dynamic table top with Its orthogonal two yawing axis carries out the piezoelectric ceramics of two-dimentional micro- rotation.
2. essence according to claim 1 takes aim at two-dimentional micro- rotatable platform of mirror, it is characterised in that:Flexible hinge machine described in two-layer Structure includes two flexible hinges, the line of two flexible hinges in wherein a layer and other one layer in two flexible hinges line point Not parallel with two yawing axis;The piezoelectric ceramics be two, respectively be located at two yawing axis on and two yawing axis of distance intersection The distance of point is equal.
3. essence according to claim 1 takes aim at two-dimentional micro- rotatable platform of mirror, it is characterised in that:Flexible hinge machine described in two-layer Structure includes three with the equally distributed flexible hinge of the stage body axial line, three flexible hinges in wherein a layer respectively with Three flexible hinges in other one layer are in 60 ° of angles;The piezoelectric ceramics is three, uniformly divides along the stage body axial line Cloth, one of piezoelectric ceramics are located on yawing axis of dynamic table top, and two other piezoelectric ceramics is located at the another of dynamic table top The both sides of bar yawing axis, and the distance in the crosspoint of three two yawing axis of piezoelectric ceramics distance is equal.
4. essence according to claim 1 takes aim at two-dimentional micro- rotatable platform of mirror, it is characterised in that:Flexible hinge machine described in two-layer Structure includes four with the equally distributed flexible hinge of the stage body axial line, four flexible hinges in wherein a layer respectively with Four flexible hinges in other one layer are in 30 ° of angles;The piezoelectric ceramics be four, each piezoelectric ceramics respectively with two-layer In flexure hinge mechanism, two adjacent flexible hinges are in 30 ° of angles, and four piezoelectric ceramics are respectively positioned at the dynamic table top The distance on the two yawing axis and crosspoint of two yawing axis of distance is equal.
5. the essence according to any one of claim 1-4 takes aim at two-dimentional micro- rotatable platform of mirror, it is characterised in that:The stage body is another One end is connected with bottom, is connected with the pre-loading screw offseted with the piezoelectric ceramics in the bottom.
6. the essence according to any one of claim 1-4 takes aim at two-dimentional micro- rotatable platform of mirror, it is characterised in that:On the stage body Mounting flange is also arranged with.
CN201620838562.8U 2016-08-04 2016-08-04 Two-dimensional micro-rotation platform of fine sighting telescope Expired - Fee Related CN206018170U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112415888A (en) * 2020-11-24 2021-02-26 东方红卫星移动通信有限公司 Fine aiming mirror double-position ring switching control method and control system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112415888A (en) * 2020-11-24 2021-02-26 东方红卫星移动通信有限公司 Fine aiming mirror double-position ring switching control method and control system

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20170315

Termination date: 20200804