CN205984890U - Scanning transmission electron microscope correlation analysis uses vacuum mobile device - Google Patents
Scanning transmission electron microscope correlation analysis uses vacuum mobile device Download PDFInfo
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- CN205984890U CN205984890U CN201620824660.6U CN201620824660U CN205984890U CN 205984890 U CN205984890 U CN 205984890U CN 201620824660 U CN201620824660 U CN 201620824660U CN 205984890 U CN205984890 U CN 205984890U
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Abstract
The utility model discloses a scanning transmission electron microscope correlation analysis uses vacuum mobile device, include the vacuum cavity that is connected with scanning electron microscope, its inside two -dimensional translation table and TEM sample rod eccentric sleeve, vacuum cavity front end and scanning electron microscope cavity flange joint, the vacuum cavity is provided with the external knob of two -dimensional translation table, cavity internally mounted has and is used for realizing the accurate two -dimensional translation table who selects of SEM electron beam imaging region, and TEM sample rod eccentric sleeve on and realizes the Z axle fine setting of imaging region. This device combines TEM's high -resolution formation of image to obtain with regional area high accuracy composition can obtain the appearance of sample and the advantage of composition on a large scale with SEM, the equal information of microstructure, composition, thing of the research sample that realization accurate positioning sample survey region, microcosmic, nanometer yardstick combined together, can be used to the preliminary test to TEM heating, circular telegram, liquid and integration sample rod simultaneously, guarantee TEM safety.
Description
Technical field
This utility model is related to a kind of scanning/transmission electron microscope (SEM/TEM) association analysiss platform.By TEM sample
Bar is arranged on this association analysiss platform, and this association analysiss platform is connected with SEM, can achieve to TEM sample bar front end
The accurate calibration of structure of verting, microcosmic is carried out to sample, microstructure that nanoscale combines, composition, the equal analysis of thing, right
Transmission electron microscope heating, the preliminary test of energising, liquid and its integrated specimen holder, to ensure the safety of transmission electron microscope.This practicality
New belong to scanning/transmission electron microscope vacuum fittingss field.
Background technology
Scanning/transmission electron microscope (hereinafter referred to as SEM/TEM) is that development of modern scientific technology institute is indispensable heavy
Want instrument.Ultramicroscope passes through electron gun accelerating the e-beam projection focusing on on sample, then receives electron beam and sample
The elastic scattering electrons of product effect generation, inelastic scattering electronics, backscattered electron, secondary electron, Auger electron, transmitted electron
Etc. electronic information, and the information such as X-ray, electromagnetic radiation of producing in visible, ultraviolet, infrared light region, it is that research material is micro-
The powerful of area's crystal structure, chemical composition, micro organization, chemical bond etc..Wherein, SEM and TEM image-forming principle and basic structure
The difference made, leads to SEM and TEM to have larger difference in terms of sample shape and size, scanning electron microscope generally can be with analysis ruler
The very little sample substantially not limited for tens of milliseconds, shape, and TEM sample typically requires that sample size is 3mm (diameter) and thickness is little
In 100 nanometers.TEM sample bar and its function of sample stage mainly carry TEM sample, and the verting and apply heat of complete paired samples
The outfield such as field, stress field, electric field, liquid environment function.
What TEM had can be in excellent properties one side of nanometer or even picoscale study sample material microstructure and composition
Face gives the probability that researchers observe material internal structure in atomic level, and on the other hand, its high-precision analysis
Imaging but limits it to a certain extent and can not test microstructure in large area for the large scale sample, become grading information
Application, and need sample to need viewing area thickness to be less than 100nm.And the mm size sample that SEM has on a large scale pattern and
The advantage of micro-nano rank component analyses, can make up transmission electron microscope analysis to sample requirement excessively harshness and areas imaging is less
Shortcoming.Therefore, carry out preanalysis if sample for use in transmitted electron microscope and sample stage are integrally positioned in SEM, obtained by SEM preanalysis
The sample entirety data such as microstructure and composition will greatly improve after in tem analysis specific region high-resolution imaging
The convenience obtaining with regional area high accuracy composition, realizes being accurately positioned sample survey region, microcosmic, nanoscale combine
The microstructure of study sample, composition, thing equivalent information.
Meanwhile, in the last few years, with the development of TEM and its original position (In-situ) technology, in TEM, sample is heated, apply
Plus stress, electric field or by sample be placed in liquid environment etc. in-situ observation its under single physical, chemical fields or coupling field action
Microstructure, structure, the differentiation of physical/chemical performance are the study hotspots of present physical, material, chemical field.And design and grind
Sending the specimen holder that can apply specific field to sample is the basis implementing TEM on-spot study.Wherein, these specific specimen holders exist
Need before actually used its stability, accuracy to be analyzed testing, however, transmission electron microscope is due to its less imaging area
Domain, strict imaging requirements and extremely accurate internal structure, are therefore unsuitable for these specific sample bar stability, safety
Property, the test of elaboration and demarcation.And the advantage that SEM imaging region is larger and the depth of field is deep, it is possible to achieve above-mentioned test and demarcation.
Further, can original position specimen holder realize controlled high accuracy pair to incline is acquisition material high-resolution imaging in TEM
And the premise of high accuracy analysis.The realization of Motor drive front end robot structure is generally passed through in verting of TEM sample bar β angle；Generally by
In the rigging error of mechanical mechanism and the driving error of motor, the actual situation of verting at sample stage β angle will inevitable and reason
There is certain deviation by calculating data, therefore, for obtaining the height of the high-quality high-resolution imaging of sample and intercrystalline misorientation
Precision analysis, simultaneously in order to ensure double to incline what structure operated in the small space that the devices such as TEM pole shoe, diaphragm, probe are constituted
Safety, needs us to carry out high-precision demarcation and test to double verting.And it is right to utilize SEM imaging morphology observation can achieve
The micro/nano level Accurate Calibration of sample stage β angle lapping gyration and reliability testing, for exploitation, double specimen holders that incline provide practicality in situ
Test platform.But because the scanning electron microscope of current use for laboratory is only applicable to millimeter, several centimeters rank size mostly
Sample, Electronic Speculum itself vacuum chamber less it is impossible to TEM sample bar is positioned over SEM within the chamber and SEM sample stage can not fix,
The TEM sample bar of moving long cylindrical shape.Therefore, design one kind in SEM, original position specimen holder pair is inclined, heats, apply
The device of the test of the functions such as stress field, electric field, liquid environment and analysis enters for test sample bar stability and to each function
Row Accurate Calibration is extremely beneficial, meanwhile, also can achieve be accurately positioned sample survey region, microcosmic, nanoscale combine
The microstructure of study sample, composition, thing equivalent information.
Content of the invention
The purpose of this utility model is to solve the above problems, and expands answering of small size cavity scanning electron microscope simultaneously
With scope, provide a kind of vacuum equipment for being combined TEM sample bar in SEM.This device can expand scanning electron microscope vacuum cavity,
Reach 10 in guarantee Electronic Speculum working vacuum degree-4-10-5On the premise of realize the horizontal two-dimension precise displacement to required observed object
And Z axis adjustment.Thus reaching the purpose that specimen holder front end and sample are carried out in the secure execution mode (sem with accurate surveying and in-situ test.
For achieving the above object, this utility model be employed technical scheme comprise that：
A kind of SEM/TEM association analysiss vacuum moving device it is characterised in that：It is connected including with scanning electron microscope flange
Outer vacuum cavity；Two-dimentional platform in outer vacuum cavity bottom is installed；Eccentric adjusting sleeve is used for fixation and the sealing of TEM sample bar 1.
Outer vacuum cavity includes open top formula casing main body, the dismountable observation window of removable seal lid 20 and closure upper end 19；
The insertion eccentric adjusting sleeve sealing of TEM sample bar is led to eccentric adjusting sleeve forward flange, eccentric adjusting sleeve cavity, eccentric adjusting sleeve rear flange behind front end
Cross bolt to interfix, eccentric adjusting sleeve is placed on two-dimentional platform by bush support；Two-dimentional platform includes mobile station from bottom to up successively
Substrate 11, X/Y direction translating rails 10, move horizontally plate 9 and bush support 8；Including two sets of pushing units, every nested structure is such as
Under：Catch bar 12 is installed on the microdrum front end being fixed on catch bar support, and differential tube rear end installs internal magnetic ring, with catch bar
Outer magnetic ring outside end socket forms driven rotating mechanism.Two sets of pushing units are respectively used to the X/Y direction translation of horizontal translation platform.Water
Flat movable plate is driven by the catch bar 12 with microdrum, the rotation driving rotation of the external magnet ring of internal magnetic ring 15 transit chamber 17
Turn, drive catch bar to carry out forward/backward reciprocating motion.
Described outer vacuum cavity is by finished metal sheet material integration welding fabrication；It is connected with scanning electron microscope
Rustless steel sealing flange is passed through welding and is connected with outer vacuum cavity, is bolted with scanning electron microscope flange.
Described removable seal lid is the metallic sealed cover of 10mm thickness, and diameter 105mm circular hole and diameter are reserved in centre
4 M6 screws at 40mm, the sealing for the observation window with safety glass/electrical interface flange is fixed.
Described removable seal lid is reserved circular hole and can be installed a diameter of 155mm observation window by screw, also can be replaced
Steel flange with electrical interface.
Described two-dimentional platform includes metal mobile station substrate, metal guide rail and slide block mechanism, metal mobile station and metal and props up
Frame, is fixed by screw each other.
The described linkage that promotes includes catch bar, the fixation being fixed on catch bar support that front end is contacted with mobile station
Sleeve and microdrum composition, microdrum precision 0.01mm.
Described promotion rod rear end microdrum is tightly fastened by screw with internal magnetic ring, installs outer magnetic outside catch bar end socket
Ring.
Described eccentric adjusting sleeve includes eccentric adjusting sleeve sealing front end, eccentric adjusting sleeve forward flange, eccentric adjusting sleeve cavity and powered
The eccentric adjusting sleeve rear flange of interface.The sealing of polish eccentric adjusting sleeve adopts stepped construction, rear end welded seal method inside front end
The blue connection being used for eccentric adjusting sleeve forward flange.
Described specimen holder is any surface finish the TEM sample bar with sealing ring, and this device is fexible unit.
Further, this utility model selects stainless steel material is outer vacuum cavity, each flange and eccentric adjusting sleeve material of main part,
Flange, equipped with the sealing ring of suitable dimension, is effectively guaranteed Electronic Speculum and the vacuum of vacuum cavity；For cavity wall thickness etc.
Parameter calculates through accurate measurement and empirical equation.Closure simultaneously, two-dimentional table apparatus select high duty metal.
Further, the design of eccentric adjusting sleeve makes specimen holder Z axis is adjustable in the secure execution mode (sem, and adjustable distance is ± 1cm it is ensured that SEM
Imaging and the degree of accuracy of test.
Further, being connected and sealing for eccentric adjusting sleeve and TEM sample bar, devise stagewise tube-in-tube structure, eccentric
Sleeve seal fore-end adopts the higher notch cuttype switching sleeve of machining accuracy, and this device can be by changing sleeve seal simultaneously
Front end and then realize the application of different size specimen holder.
Further, this utility model adopts microdrum and the design of interior outer magnetic ring, it is possible to achieve outside vacuum cavity
Passive rotation to internal microdrum being carried out by revolving outer magnet ring, promoting translation stage to realize 0.01mm thus realizing catch bar
The horizontal direction of precision moves, and adjustable distance is ± 0.5cm, is microcosmic imaging and the survey of specimen holder front end specific region in SEM
Examination creates objective condition.
Further, eccentric adjusting sleeve rear flange and observation window all can be replaced the Sealing Method with electrical interface of comparable size
Orchid, realizes β angle lapping in SEM for the TEM sample bar and the function such as turns, is energized, heating.
Brief description
Fig. 1 is entirety sectional view of the present utility model；
Fig. 2 is overall structure diagram of the present utility model；
Fig. 3 is eccentric adjusting sleeve structural representation；
Fig. 4 is overall assembling schematic diagram；
Wherein：1 be TEM sample bar 2 be eccentric adjusting sleeve sealing front end 3 be outer chamber adpting flange 4 be outer vacuum cavity
5 be eccentric adjusting sleeve forward flange 6 be eccentric adjusting sleeve cavity 7 be eccentric adjusting sleeve rear flange 8 be bush support 9 be move horizontally platform
10 be X/Y direction translating rails 11 be mobile station substrate 12 be catch bar 13 be fixes sleeve 14 be microdrum 15 be interior
Magnet ring 16 be catch bar end socket 17 be outer magnetic ring 18 be catch bar support 19 be observation window 20 be closure 21 be M8 spiral shell
Nail 22 is M6 screw.
Specific embodiment
Below, refer to the attached drawing, is further described to this utility model：
Referring to Fig. 1 and Fig. 2, behind TEM sample bar 1 insertion eccentric adjusting sleeve sealing front end 2 in this utility model, by eccentric adjusting sleeve
Sealing front end, eccentric adjusting sleeve forward flange 5, eccentric adjusting sleeve cavity 6, eccentric adjusting sleeve rear flange 7 pass sequentially through bolt and fix, wherein sample
Product bar 1 is commercialization TEM sample bar, and alternatively special TEM sample bar carries sealing ring.According to eccentric adjusting sleeve sealing front end 2
The variable-sized polish rustless steel sleeve of different specimen holder designs, each flange connection surface is accompanied with sealing ring.Eccentric bushing
Barrel chamber body 6 is placed on by bush support 8 and moves horizontally on platform 9 and the two-dimension translational platform of X/Y direction translating rails 10 composition, water
Flat mobile station 9 is made up of X/Y direction translation plates, and each translation plates and guide rail are fixed each other by screw, and be fixed on outer chamber
Mobile station substrate 11 on base plate is fixed by screw.Catch bar 12 is installed on the microdrum 14 being fixed on catch bar support 18
Front end, the outer magnetic ring 17 that differential tube rear end is installed outside internal magnetic ring 15, with catch bar end socket 16 forms driven rotating mechanism, forms one
Set X-direction pushing unit.Two sets of X/Y direction pushing unit is respectively used to the X/Y direction translation of horizontal translation platform.Closure 20 leads to
Cross bolt to fit tightly with outer vacuum cavity 4 upper flange surface, circular hole is reserved at closure center and screw is used for installing observation window 19.
Referring to Fig. 3, eccentric adjusting sleeve device in this utility model is as illustrated, wherein open on sleeve forward flange 5 flange face
Φ 28mm eccentric orfice, deviates 15mm with flange center.This device can be used for manually being rotatably mounted on inclined on bush support 8
The Z axis displacement of specimen holder realized by heart sleeve.Eccentric adjusting sleeve rear flange 7 is the flange with electrical interface, and by replacing observation window 19
For electrical interface flange, can achieve double to specimen holder incline, be energized, driving, heating, the test of function such as liquid environment and concrete fortune
With.
Specific embodiment of the present utility model is：
Referring to Fig. 4, during use, by eccentric adjusting sleeve sealing front end 2 paired for the insertion of TEM sample bar, pass through M6 afterwards
Bolt 22 is fixing with eccentric adjusting sleeve forward flange 5, order setting-up eccentricity sleeve cavity 6 and eccentric adjusting sleeve rear flange 7 afterwards.Adjust outer true
Cavity body body position and height, make the outer vacuum cavity adpting flange 3 with sealing ring align with SEM flange, solid by bolt
Fixed.Afterwards the eccentric adjusting sleeve of mounted carry sample bar is integrally placed on bush support 8, before rotating eccentricity sleeve makes specimen holder
After holding region height to be measured suitable, cover closure 20, electrical interface flange or observation window 19 are installed.Ensure under sealing fine status
Start SEM vacuum pump evacuation, treat that SEM vacuum reaches the 10 of use requirement-4-10-5After Pa, open electron beam and other are attached
Part carries out Observe and measure to specimen holder front end and sample.Realize the two dimension of specimen holder by the turn of the outer outer magnetic ring of catch bar end socket
Translation (± 5mm, precision 0.01mm), thus realizing TEM sample large-scale microstructure imaging and analyzing, carries band electrical interface
Flange can realize that specimen holder is double to incline simultaneously, heating, energising, stress such as applies at the test of function and the demarcation.
Claims (8)
1. a kind of SEM/TEM association analysiss vacuum moving device it is characterised in that：Including be connected with scanning electron microscope flange
Outer vacuum cavity；Two-dimentional platform in outer vacuum cavity bottom is installed；Eccentric adjusting sleeve is used for fixation and the sealing of TEM sample bar (1)；
Outer vacuum cavity includes open top formula casing main body, the dismountable observation window of removable seal lid (20) and closure upper end
(19)；TEM sample bar insertion eccentric adjusting sleeve sealing front end after with eccentric adjusting sleeve forward flange, eccentric adjusting sleeve cavity, eccentric adjusting sleeve after
Flange is interfixed by bolt, and eccentric adjusting sleeve is placed on two-dimentional platform by bush support；Two-dimentional platform includes from bottom to up successively
Mobile station substrate (11), X/Y direction translating rails (10), move horizontally plate (9) and bush support (8)；Promote single including two sets
Unit, every nested structure is as follows：Catch bar is installed on the microdrum front end being fixed on catch bar support, magnetic in the installation of differential tube rear end
Outer magnetic ring outside ring, with catch bar end socket forms driven rotating mechanism；Two sets of pushing units are respectively used to the X/Y of horizontal translation platform
Direction translates；Move horizontally plate to be driven by the catch bar (12) with microdrum, the external magnetic of internal magnetic ring (15) transit chamber
The rotation driving rotation of ring (17), drives catch bar to carry out forward/backward reciprocating motion.
2. SEM/TEM association analysiss vacuum moving device according to claim 1 it is characterised in that：Described is outer true
Cavity body (4) its material is sheet metal, and by welded chemical conversion type；The outer chamber connection method being connected with scanning electron microscope
Blue (3) are passed through welding and are tightly connected with outer vacuum cavity (4), are bolted with scanning electron microscope flange.
3. SEM/TEM association analysiss vacuum moving device according to claim 1 it is characterised in that：Closure (20)
For metallic sealed cover, middle reserved circular hole, the sealing for the observation window (19) with safety glass is fixed.
4. SEM/TEM association analysiss vacuum moving device according to claim 1 it is characterised in that：Removable seal
The reserved circular hole of lid installs diameter observation window or observation window replaces with the steel flange with electrical interface.
5. SEM/TEM association analysiss vacuum moving device according to claim 1 it is characterised in that：Outer chamber with sweep
Retouch Electronic Speculum cavity adpting flange and be furnished with sealing ring, be equipped with for putting at outer chamber and closure adpting flange, observation window gland
Put the groove of correspondingly-sized vaccum seal ring.
6. SEM/TEM association analysiss vacuum moving device according to claim 1 it is characterised in that：Microdrum precision
0.01mm.
7. SEM/TEM association analysiss vacuum moving device according to claim 1 is it is characterised in that eccentric adjusting sleeve seals
Stepped construction is adopted, rear end welded seal flange is used for the connection with eccentric adjusting sleeve cavity inside front end (2).
8. SEM/TEM association analysiss vacuum moving device according to claim 1 it is characterised in that：It is adapted to difference
Size, adapt to the specimen holder of different transmission electron microscopes, specimen holder any surface finish simultaneously carries sealing ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620824660.6U CN205984890U (en) | 2016-07-30 | 2016-07-30 | Scanning transmission electron microscope correlation analysis uses vacuum mobile device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620824660.6U CN205984890U (en) | 2016-07-30 | 2016-07-30 | Scanning transmission electron microscope correlation analysis uses vacuum mobile device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205984890U true CN205984890U (en) | 2017-02-22 |
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ID=58028776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620824660.6U Withdrawn - After Issue CN205984890U (en) | 2016-07-30 | 2016-07-30 | Scanning transmission electron microscope correlation analysis uses vacuum mobile device |
Country Status (1)
| Country | Link |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106098520A (en) * | 2016-07-30 | 2016-11-09 | 北京工业大学 | A kind of scanning/transmission electron microscope association analysis vacuum moving device |
| CN109461640A (en) * | 2018-11-30 | 2019-03-12 | 中国科学院金属研究所 | Transmission, scanning and focused ion beam Electronic Speculum universal sample bar and switching device |
| CN109839517A (en) * | 2017-11-28 | 2019-06-04 | 中国科学院金属研究所 | The conversion equipment of scanning or focused ion beam Electronic Speculum connection transmission electron microscope sample bar |
| CN111684564A (en) * | 2018-01-05 | 2020-09-18 | 亨尼茨公司 | Vacuum transfer assembly |
| CN112530772A (en) * | 2020-12-03 | 2021-03-19 | 无锡量子感知研究所 | Double-shaft linkage structure for vacuum motion platform in scanning electron microscope |
-
2016
- 2016-07-30 CN CN201620824660.6U patent/CN205984890U/en not_active Withdrawn - After Issue
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106098520A (en) * | 2016-07-30 | 2016-11-09 | 北京工业大学 | A kind of scanning/transmission electron microscope association analysis vacuum moving device |
| CN109839517A (en) * | 2017-11-28 | 2019-06-04 | 中国科学院金属研究所 | The conversion equipment of scanning or focused ion beam Electronic Speculum connection transmission electron microscope sample bar |
| CN109839517B (en) * | 2017-11-28 | 2023-10-10 | 中国科学院金属研究所 | Conversion device for connecting scanning or focusing ion beam electron microscope with transmission electron microscope sample rod |
| CN111684564A (en) * | 2018-01-05 | 2020-09-18 | 亨尼茨公司 | Vacuum transfer assembly |
| CN111684564B (en) * | 2018-01-05 | 2023-09-15 | 亨尼茨公司 | Vacuum transfer assembly |
| CN109461640A (en) * | 2018-11-30 | 2019-03-12 | 中国科学院金属研究所 | Transmission, scanning and focused ion beam Electronic Speculum universal sample bar and switching device |
| CN109461640B (en) * | 2018-11-30 | 2024-03-22 | 中国科学院金属研究所 | Universal sample rod for transmission, scanning and focusing ion beam electron microscope and switching device |
| CN112530772A (en) * | 2020-12-03 | 2021-03-19 | 无锡量子感知研究所 | Double-shaft linkage structure for vacuum motion platform in scanning electron microscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170222 Effective date of abandoning: 20171013 |
|
| AV01 | Patent right actively abandoned |