CN205984316U - Transparent conductive thin film of long -life high reliability - Google Patents
Transparent conductive thin film of long -life high reliability Download PDFInfo
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- CN205984316U CN205984316U CN201620526331.3U CN201620526331U CN205984316U CN 205984316 U CN205984316 U CN 205984316U CN 201620526331 U CN201620526331 U CN 201620526331U CN 205984316 U CN205984316 U CN 205984316U
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- Prior art keywords
- transparent conductive
- flexible
- high reliability
- long
- conductive film
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Abstract
The utility model provides a prevent moisture, gas escape in the flexible transparent substrate, guarantee transparent conductive thin film performance and life's transparent conductive thin film of long -life high reliability, it be on one side of flexible basement unevenness have the siO2 thin layer on the surface, transparent conducting film has on the siO2 thin layer. Because the siO2 thin layer is combined closely with flexible basement, played the effect of separation to moisture and gaseous leaking, slow down or stoped interior moisture -bearing of flexible transparent substrate and gaseous effusion, effectively reduced moisture and gaseous corrosive effects to surperficial transparent conducting film, guaranteed transparent conductive thin film's life and performance. Simultaneously, because the combining closely of this compact siO2 thin layer and flexible basement, the adhesion of deposit film has been improved.
Description
Technical field
This utility model is related to a kind of flexible transparent conductive film.
Background technology
Flexible transparent conductive film, due to characteristics such as its distinctive flexible, frivolous, high-transmission rates, is widely used in flexible aobvious
Show, the field such as thin-film solar cells, intelligent fenestrated membrane, touch screen.
Flexible transparent conductive film generally comprises flexible and transparent substrate and is attached to flexible and transparent substrate by magnetron sputtering
On transparency conducting layer.It is inevitably present a number of moisture, gas due in flexible and transparent substrate.In electrically conducting transparent
Layer magnetron sputtering deposition coating process in, the intrabasement moisture of flexible and transparent, gas are constantly waved due to the effect of fine vacuum
Issue, thus impact is produced on the deposition process of transparency conducting layer, deposition quality.In addition, making in flexible transparent conductive film
With during, As time goes on, the moisture that still remains in flexible and transparent substrate, gas also will gradually escape, to surface
Transparency conducting layer plays corrosiveness, and the lighter makes conductive layer performance change.Severe one, the adhesive force of impact conductive layer.
Utility model content
The purpose of this utility model is to provide one kind to prevent the intrabasement moisture of flexible and transparent, gas effusion it is ensured that transparent
The long-life high reliability transparent conductive film of conductive film serviceability and service life.
Long-life high reliability transparent conductive film of the present utility model, is the rough table in flexible substrates side
SiO is had on face2Thin layer, in SiO2Transparency conducting layer is had on thin layer.
The beneficial effect of this transparent conductive film：This SiO2Thin layer is combined closely with flexible substrates, to moisture and gas
Leaking of body serves the effect of obstruct, slows down or prevents moisture content and the effusion of gas in flexible and transparent substrate, effectively drop
Low moisture and gas are to the corrosiveness of surface transparent conductive layer it is ensured that the service life of transparent conductive film and usability
Energy.Due to this fine and close SiO2Thin layer is combined closely with flexible substrates, improves the adhesion property of deposition film.
Above-mentioned long-life high reliability transparent conductive film, the recess on the uneven surface of flexible substrates the deepest for 0.8-
1.2nm.
Above-mentioned long-life high reliability transparent conductive film, flexible substrates are pet layer, and transparency conducting layer is AZO layer.
Above-mentioned long-life high reliability transparent conductive film, the rough surface of flexible substrates side is by brightness
Light electric discharge obtains.Glow discharge is simple to operate, is easily controlled.
Above-mentioned long-life high reliability transparent conductive film, transparency conducting layer thickness is 20-30nm.
This utility model provides a kind of preparation method of long-life high reliability transparent conductive film, party's legal system simultaneously
Standby transparent conductive film, the quality of transparency conducting layer deposition is higher, forms film thickness concordance preferably, ensure that simultaneously
Transparent conductive film serviceability and service life.
The preparation method of long-life high reliability transparent conductive film described in the utility model, is to flexible substrates one
Side surface carries out glow discharge process so that flexible substrates one side surface forms roughness；Will by reaction magnetocontrol sputtering
Si material forms SiO in rough flexible substrates one side surface2Thin layer；Transparent material of leading is existed by magnetron sputtering
SiO2On thin layer.
The beneficial effect of this preparation method：Due to when sputtering conductive layer, flexible substrates being attached to SiO2Thin film
Layer, fine and close SiO2 thin layer serves the effect of obstruct, reduces or prevent moisture content and gas in flexible and transparent substrate
Leaking, it is possible to improving the quality of transparency conducting layer deposition, forming film thickness concordance preferable.
The preparation method of above-mentioned long-life high reliability transparent conductive film, carries out glow discharge to flexible substrates surface
During process, oxygen flow 50sccm, argon flow amount 350sccm, power 2KW/cm2, vacuum reaches 4 * 10-3Torr, during process
Between the 10-20 second.Using glow discharge, flexible substrates surface is processed, method simply controlled so that flexible substrates surface shape
Become the deep continuous groove of 0.8-1.2nm.
The preparation method of above-mentioned long-life high reliability transparent conductive film, when magnetron sputtering is carried out to Si, argon stream
Amount 500sccm, magnetron sputtering power 12.0KW/cm2, the oxygen flow of introducing is 12sccm, the sputtering time 10-20 second.
The preparation method of above-mentioned long-life high reliability transparent conductive film, to transparent lead material magnetron sputtering when, oxygen
Throughput 2sccm, argon flow amount 450sccm, magnetron sputtering power 5.0KW/cm2.
Brief description
Fig. 1 is the schematic diagram of long-life high reliability transparent conductive film.
Specific embodiment
Long-life high reliability transparent conductive film shown in Figure 1 is uneven in PET flexible substrates 1 side
Surface on there is SiO2Thin layer 2, in SiO2Electrically conducting transparent AZO layer 3 is had on thin layer.The uneven surface of flexible substrates
Recess the deepest be about 1nm.
The preparation method of this long-life high reliability transparent conductive film is that PET flexible and transparent substrate material surface is ionized
Aura is processed, and forms countless Microscopic grooves；Again Si material is sputtered at flexible and transparent substrate material surface by room temperature magnetic control
Groove and substrate surface formed the transparent SiO of a thin layer2, lead material by transparent successively（TCO）Room temperature magnetic control sputters at above-mentioned shape
The transparent SiO becoming2In aspect.
Concrete processing method is as follows：
To PET flexible and transparent substrate material surface glow discharge from process, oxygen flow 50sccm, argon flow amount
350sccm, power 2KW/cm2, vacuum reaches 4 * 10-3Torr, the process time 10-20 second；Form depth on flexible substrates surface
The countless Microscopic grooves of about 1nm.
In independent magnetron sputtering cabin, with Si target as negative electrode, flexible and transparent substrate is anode, argon flow amount 500sccm,
Magnetron sputtering power 12.0KW/cm2, Si target, the basad motion of the Si sputtering are bombarded by Ar+；It is simultaneously introduced oxygen flow
For 12sccm, so that the Si atom of high-speed motion and oxygen collision is combined, form the SiO of of short duration high temperature2Molecules strike is after treatment
In flexible and transparent substrate material surface groove, the sputtering time 10-20 second, and gradually form one layer of fine and close SiO2Thin film.
In independent magnetron sputtering cabin, with AZO target as negative electrode, flexible and transparent substrate is anode, oxygen flow 2sccm,
Argon flow amount 450sccm, magnetron sputtering power 5.0KW/cm2, AZO target is bombarded by Ar+, and basad motion, in SiO2Thin film
The transparency conducting layer of formation of deposits one 20-30nm on layer.
Advantage of the present utility model：
1st, this fine and close SiO2Thin layer is combined closely with flexible substrates, to moisture content and gas in flexible and transparent substrate
Leak and serve the effect of obstruct.
2nd, due to fine and close SiO2The effect that thin layer intercepts, reduces or stops moisture content and gas in flexible and transparent substrate
Leak, improve transparency conducting layer deposition quality, formed film thickness concordance preferable.
3rd, due to this fine and close SiO2Thin layer is combined closely with flexible substrates, improves the tack of deposition film
Energy.
4th, this utility model changes flexible and transparent substrate surface pattern, material composition, improves surface transparent conductive layer
Quality, extends service life.
Claims (5)
1. long-life high reliability transparent conductive film, is characterized in that：The rough surface of flexible substrates side has
There is SiO2Thin layer, in SiO2Transparency conducting layer is had on thin layer.
2. long-life high reliability transparent conductive film as claimed in claim 1, is characterized in that：The uneven table of flexible substrates
The recess in face the deepest for 0.8-1.2nm.
3. long-life high reliability transparent conductive film as claimed in claim 1, is characterized in that：Flexible substrates are pet layer, thoroughly
Bright conductive layer is AZO layer.
4. long-life high reliability transparent conductive film as claimed in claim 1, is characterized in that：Flexible substrates side concavo-convex
Uneven surface is obtained by glow discharge.
5. long-life high reliability transparent conductive film as claimed in claim 1, is characterized in that：Transparency conducting layer thickness is
20-30nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620526331.3U CN205984316U (en) | 2016-06-02 | 2016-06-02 | Transparent conductive thin film of long -life high reliability |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620526331.3U CN205984316U (en) | 2016-06-02 | 2016-06-02 | Transparent conductive thin film of long -life high reliability |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205984316U true CN205984316U (en) | 2017-02-22 |
Family
ID=58020450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620526331.3U Expired - Fee Related CN205984316U (en) | 2016-06-02 | 2016-06-02 | Transparent conductive thin film of long -life high reliability |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205984316U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109612383A (en) * | 2018-12-25 | 2019-04-12 | 国家纳米科学中心 | A kind of strain transducer and preparation method thereof |
| WO2019205335A1 (en) * | 2018-04-23 | 2019-10-31 | 南方科技大学 | Composite material with enhanced interface and application thereof |
-
2016
- 2016-06-02 CN CN201620526331.3U patent/CN205984316U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019205335A1 (en) * | 2018-04-23 | 2019-10-31 | 南方科技大学 | Composite material with enhanced interface and application thereof |
| CN109612383A (en) * | 2018-12-25 | 2019-04-12 | 国家纳米科学中心 | A kind of strain transducer and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170222 Termination date: 20210602 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |