CN205928720U - Arm for silicon rod - Google Patents
Arm for silicon rod Download PDFInfo
- Publication number
- CN205928720U CN205928720U CN201620915335.0U CN201620915335U CN205928720U CN 205928720 U CN205928720 U CN 205928720U CN 201620915335 U CN201620915335 U CN 201620915335U CN 205928720 U CN205928720 U CN 205928720U
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- China
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- silicon rod
- mechanical arm
- jaw
- clamping plate
- arm according
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Abstract
The utility model discloses an arm for silicon rod, it includes the support, sets up anchor clamps and power unit on the support, anchor clamps include the clamping jaw, the clamping jaw includes relative two splint that set up and can make relative motion, wherein, the length of two splint is greater than the distance between two support arms of silicon rod to make the clamping jaw can grasp two support arms of silicon rod simultaneously. This arm is adopted, cellular silicon rod and the silicon rod of concentric these two kinds of type of furnaces of circular silicon rod in the large -scale reducing furnace can be safely, swiftly dismantled to improve the efficiency of furnace of tearing open in the polycrystalline silicon production.
Description
Technical field
This utility model belongs to technical field of polysilicon production and in particular to a kind of silicon rod mechanical arm.
Background technology
In polysilicon production process, consume most so that dismounting stove process portion and becoming because polycrystalline silicon rod weight is very heavy
Take one of operation of manpower, under the overall situation of automatic industrial requires, each production of polysilicon producer is all in dismounting stove both at home and abroad
In this link the various automatization of active development tear bar device open, to reduce manpower consumption, raise labour efficiency.
At present, production of polysilicon producer both domestic and external major part during stove torn open by reduction furnace has realized mechanization.Such as,
External Wa Ke company tears bar device open using advanced integration, but this to tear bar device open relatively costly, and by reduction furnace apparatus structure
The restriction made, application is less；And domestic production of polysilicon producer all carries out tearing open rod using mechanical arm, the mechanical arm being adopted is tied
Structure is substantially similar, and it is simple and practical, but the mechanical arm that most of production of polysilicon producers are used at present is actual with it
All can there are some unmatched phenomenons in applying working condition, and there is larger gap and the equipment of user's actual need between.Than
Polycrystalline silicon rod can not be carried out remove from multiple directions as, the fixture in mechanical arm in tearing rod motion open, turn over height fixture
Degree of amplitude modulation is little etc..
Specifically, due to polycrystalline silicon rod (abbreviation silicon rod) be shaped as inverted U-shaped, silicon rod include two parallel
Support arm and located at two support arm tops for connecting the crossbeam of two support arms, the disposing way of silicon rod is existing laterally to be put,
Have and vertically put, wherein when silicon rod is laterally put, in the face of the silicon rod that the operator of silicon rod now sees is in inverted U-shaped；
When silicon rod is vertically put, in the face of the silicon rod that the operator of silicon rod now sees is in digital " 1 " font.Existing large-scale reduction furnace
In generally there are concentric circles silicon rod (arrangement mode of silicon rod be concentric circles) and cellular silicon rod (arrangement mode of silicon rod be
Cellular) silicon rod of two kinds of type of furnaces, wherein concentric circles silicon rod is laterally to put, and cellular silicon rod is vertically to put, for upper
For stating the silicon rod of two kinds of arrangement modes, due to being limited by fixture length in mechanical arm, existing mechanical arm often can only be torn open
Except the silicon rod laterally put, and the silicon rod vertically put cannot be removed, that is, cellular silicon rod can only take the mode of artificial unloading
To remove it is seen that existing mechanical arm can not be removed to silicon rod from multiple directions.
Because existing mechanical arm can only remove the silicon rod laterally put, therefore in the reduction furnace removing honeycomb arrangement
Silicon rod when it is necessary to first artificial unloading front 6 is to cellular silicon rod, to reserve the space changing mechanical arm position, make silicon rod relatively
Horizontal in mechanical arm, just can remove remaining other silicon rod.
Utility model content
Technical problem to be solved in the utility model is for deficiencies of the prior art, provides one kind can
Remove the silicon rod mechanical arm of the silicon rod vertically put.
Solve this utility model technical problem and be employed technical scheme comprise that this silicon rod mechanical arm includes support, is arranged on
Fixture on support and actuating unit, described fixture includes jaw, and described jaw includes being oppositely arranged and can perform relative motion
Two clamping plate, wherein, the length of described two clamping plate is more than the distance between two support arms of silicon rod, so that jaw can press from both sides simultaneously
Handle two support arms of silicon rod.
Preferably, the length of described clamping plate is 230mm～450mm.The length of further preferably described clamping plate is
385mm.
Preferably, the width of described clamping plate is 130mm～200mm.The width of further preferably described clamping plate is
185mm.
It is further preferred that described fixture also includes being capable of the pressure cap of pressure holding silicon rod middle cross beam, pressure cap adopts rotary structure.
Preferably, described jaw adopt multiple, multiple jaws are separately positioned in different vertical heights.
Preferably, described clamping plate includes gripper shoe and the setting liner for contacting on the supporting plate with silicon rod, described
Liner is made using polyurethane methyl acid esters.
Preferably, described actuating unit adopts pneumatic mechanism.
It may further be preferable that actuating unit also includes switching mechanism, described switching mechanism can order about jaw upset, from
And so that the silicon rod that jaw clamps is overturn as the state that crouches from vertical state.
In existing mechanical arm, the length of jaw is only 150mm, and the distance between the two of single silicon rod support arms are
220mm is it is seen that for the silicon rod vertically put, existing mechanical arm is inadequate because of the length of jaw, is not enough to two of silicon rod
Support arm clamps simultaneously, and therefore existing mechanical arm cannot remove the silicon rod vertically put；And mechanical arm of the present utility model, its
The more existing mechanical arm of length of jaw increased and a lot (increases to 230mm～450mm from 150mm) so that jaw can be simultaneously
Clamp two support arms of silicon rod, can be used for two support arms clamping the silicon rod vertically put, therefore this mechanical arm is a kind of
Silicon rod " dual-purpose type " mechanical arm that is horizontal and being vertically arranged two kinds of disposing ways can be met.Because the fixture in this mechanical arm can be torn open simultaneously
Except cellular silicon rod and concentric circles silicon rod, the therefore reduction furnace for honeycomb arrangement it is not necessary to the first front 6 pairs of silicon of manual demolition
Rod or manually replacing fixture.
This mechanical arm can also be by increasing the width (being widened to 130～200mm from 125mm) of jaw further, can
Increase the contact area of jaw and silicon rod, make the fixture can stronger clamping silicon rod.
Due to also there is pressure cap in the fixture of this mechanical arm so that pressure cap can fix the horizontal stroke of silicon rod in any position
Beam, meanwhile, is clamped two support arms of silicon rod by jaw, is clamped the crossbeam of silicon rod by pressure cap, in joining of jaw and pressure cap
So that fixture can meet and can securely clamp silicon rod in any position under closing, thus further enhancing mechanical arm pair
The clamping force of silicon rod and clamping stability.
Further, since this mechanical arm has switching mechanism so that it becomes a kind of mechanical arm of " parallel, vertical " type, because
And polycrystalline silicon rod smoothly can be put into the bottom of polycrystalline silicon rod.
The beneficial effects of the utility model are as follows：
Using this mechanical arm, can safely and quickly dismantle the cellular silicon rod in large-scale reduction furnace and concentric circles silicon
The silicon rod of excellent both type of furnaces.By using this mechanical arm, it is possible to increase tear the efficiency of furnace open in production of polysilicon, and then improve
Automaticity, can save labour force simultaneously, and shortens the non-online production time, increase the yield of polysilicon.
Brief description
Fig. 1 is the structural representation of the support of mechanical arm in this utility model embodiment；
Fig. 2 is the structural representation (now silicon rod is in vertical state) of the fixture of mechanical arm in this utility model embodiment；
Fig. 3 be mechanical arm in this utility model embodiment fixture upset after structural representation (now silicon rod be in sleeping
State)；
Fig. 4 is the structural representation of the silicon rod that mechanical arm clamping is laterally put in this utility model embodiment；
Fig. 5 is the structural representation of the silicon rod that mechanical arm clamping is vertically put in this utility model embodiment.
In figure：1- lifts by crane guide chain 2- supporting leg 3- pressure cap 4- clamping plate 5- linear slide rail 6- fixture 7- support arm 8- crossbeam
Specific embodiment
With reference to the accompanying drawing in this utility model, clear, complete description is carried out to the technical solution of the utility model,
Obviously, the embodiments described below are a part of embodiments of the present utility model, rather than whole embodiments.Based on this reality
With the embodiment in new, those of ordinary skill in the art obtained on the premise of not making creative work all its
His embodiment, broadly falls into the scope of this utility model protection.
This utility model provides a kind of silicon rod mechanical arm, and it includes support, the fixture being arranged on support and controls
The actuating unit of clamp movement, described fixture includes jaw, and described jaw includes two folders being oppositely arranged and performing relative motion
Plate, the length of described two clamping plate is more than the distance between two support arms of silicon rod, so that jaw can clamp silicon rod simultaneously
Two support arms.
Embodiment：
As Figure 1-3, this utility model silicon rod mechanical arm includes support, the fixture being arranged on support and control
The actuating unit of clamp movement processed.
Described support includes supporting leg 2 and the column being arranged on supporting leg.Lifting guide chain 1 is additionally provided with column, by using
The suspension hook of driving is sling and is lifted by crane guide chain 1, such that it is able to whole mechanical arm of slinging.By setting lifting guide chain 1 on support, with side
Just using driving mobile device, thus manpower can be saved, reduce maintenance load.
Wherein, column is fixed on supporting leg 2, and the bottom of supporting leg 2 is enclosed with protective case, to prevent supporting leg from scratching reduction Factory Building
In epoxy gravity flow level ground ground.In the present embodiment, protective case is made up of the polyurethane material of 10mm using thickness.
The surface of fixture adopts plastic-blasting to process, and to ensure not pollute polysilicon product, and also can guarantee that fixture will not be by
The corrosive gas at production of polysilicon scene is corroded.
Fixture includes jaw, and jaw is on column.In the present embodiment, fixture includes 6 jaws, and 6 jaws set respectively
Put on different stem height.Each jaw includes a linear slide mechanism and be oppositely arranged and can perform relative motion two
Individual clamping plate 4.Described linear slide mechanism includes horizontally disposed linear slide rail 5 and be arranged on linear slide rail 5 two
Slide block, two clamping plate are separately positioned on two slide blocks, and such two slide blocks just can drive two clamping plate to make on linear slide rail respectively
Relatively slide.
In the present embodiment, slide block adopts the linear slide block of silver on Taiwan.To make slide block by using 304L rustless steel
Sealing gland, can effectively solve the problem that the steel ball causing because of abrasion come off, oils and fatss pollution condition, to improve the ruggedness of consumable accessory.
Preferably, each clamping plate 4 includes gripper shoe and the setting liner for contacting on the supporting plate with silicon rod, described interior
Lining is made using macromolecular material.In the present embodiment, liner is made using polyurethane methyl acid esters, and this material has preferable point
Sub- stability, oxidation resistance is strong, and corrosion-resistant, can contact with silicon rod for a long time and not produce pollution, and have anti abrasive
Advantage.
Preferably, described fixture also includes pressure cap 3.The crossbeam 8 including two support arms 7 and connecting two support arms due to silicon rod,
Jaw is used for two support arms 7 of clamping, and pressure cap 3 is then used for pressure holding crossbeam 8.By the common cooperation of jaw and pressure cap so that whole
Individual fixture can securely clamp silicon rod in any position.In the present embodiment, pressure cap 3 adopts rotary structure, that is, press
Cap 3 is freely rotatable, parallel with the long side of pressure cap with the crossbeam that ensures silicon rod, strengthens the clamping force to silicon rod for the mechanical arm further
And clamping stability.
Described actuating unit is used for providing driving force and controling power for the fixture in mechanical arm.Preferably, actuating unit
Also include switching mechanism, described switching mechanism can order about jaw and overturn from vertical direction as horizontal direction, you can make fixture from
The vertical position of Fig. 2 overturns the horizontal level for Fig. 3 that is to say, that making 6 jaws from being in different vertical heights upset
Highly go up for being in same level, so that the silicon rod of jaw clamping overturns as the state that crouches from vertical state.
In the present embodiment, actuating unit adopts pneumatic mechanism.Make fixture can carry out positioning using Pneumatic clamping mode,
Clamping.Due to the particularity of polysilicon product, very high to the purity requirements of product, the pollution to oily matter is particularly sensitive,
And common actuating unit typically requires and adopts oily matter, therefore, by actuating unit is used as using pneumatic mechanism, can be very
Evade well the risk of oiliness pollution.
In the present embodiment, when designing this actuating unit, need to take into full account the CT4 reducing Factory Building in production of polysilicon enterprise
Hydrogen explosive-proof grade and 100,000 grades of air cleaning cleanings require, and make whole actuating unit all adopt pneumatic behaviour using instrument air
Make, to improve safety.Specifically, the power source in the present embodiment is all using more than 0.7MPa instrument supply gas supply, to gas
The requirement of body is as follows：(1) solid granulates maximum particle size 5 (μm), the largest particles density 5 (mg/m3)；(2) water content
Maximum pressure dew point -20 (DEG C)；(3) oil content maximum oil concentration 1 (mg/m3).Gas source and folder are connected using gas source pipe
Tool.Wherein, the gas source pipe of difference in functionality is made a distinction using different colors, such as, can be using navy blue gas source pipe as total
Enter source of the gas, after the filter that gas source is carried by mechanical arm and surge tank, the source of the gas pipeline entering each branch line is done work；Will
Gas source pipe azury provides energy, makes power gas source pass through gas azury as power gas source, the driving force for mechanical arm
Source capsule reaches each kinematic pair in mechanical arm；Using white gas source pipe as controlling source of the gas, by operated pneumatic valve control machinery arm
In each kinematic pair motion so that mechanical arm can complete operations instruction.Wire size can be indicated on each gas source pipe, with convenient
Maintenance and maintenance.The selection of gas source pipe should ensure that all gas source pipes in two years can not be aging, and, for the gas source pipe exposing,
Using detachable overcoat, it should be protected, to prevent from smashing or to scratch.
In the present embodiment, switching mechanism is only 0.2m after can making jaw upset from the ground.So, polycrystalline silicon rod just can be suitable
Put into the bottom of silicon rod case, such that it is able to reduce the impact of the PU material to silicon rod case, to extend the use longevity of silicon rod case sharply
Life, and avoid silicon rod collision friction each other, to improve the exterior quality of product surface.Specifically, led by increase
Arm cylinder stroke, thus 0.2m from the ground after the upset of mechanical arm jaw can be made, by adjusting the locking nut of principal arm cylinder, permissible
Change the liftoff height of jaw, the occurrence of in order to meet all kinds of.
In the present embodiment, in single jaw, the length of two clamping plate is more than the distance between two support arms of silicon rod, so that
Jaw can clamp two support arms of silicon rod simultaneously.The distance between two support arms due to single silicon rod are 220mm, therefore will
The length of clamping plate is arranged in the range of 230mm～450mm.In the present embodiment, the length of clamping plate can be set to 385mm.This
Sample, this jaw just can clamp two support arms of silicon rod simultaneously, and that is, this mechanical arm can be used for clamping the silicon rod vertically put
Two support arms, therefore this mechanical arm are that a kind of to meet silicon rod horizontal and be vertically arranged two kinds of disposing way " dual-purpose type " mechanical arms.
Preferably, in order to increase the contact area of jaw and silicon rod, make fixture can stronger clamping silicon rod, by clamping plate
Width be arranged in the range of 130mm～200mm, to increase the contact area of jaw and silicon rod.In the present embodiment, can will press from both sides
The width of plate is set to 185mm.
Step using this mechanical arm is as follows：
First, sling the lifting guide chain 1 of mechanical arm using the suspension hook of driving, by mechanical arm be positioned over chassis of reducing furnace with
Front precalculated position；
Then, the supporting leg 2 of mechanical arm is fixed on ground, and confirms the lower section foreign of mechanical arm, then by with special
Spanner turns screw thread and adjusts four angles of supporting leg to parastate；
Carry out again unloaded operation (unloaded operation must be carried out once when every time using mechanical arm, with guarantee gas circuit unobstructed,
Precise control, prevents mechanical arm from occurring in formally using unexpected), after confirming that zero load is normal, the practical operation step of load is：
Silicon rod focusing-clamping-block-lift-move-overturn-uncap-discharge, checks for gas leakage, and whether joint motion is flexible；
Fixture 6 is moved to before silicon rod；
Adjust clamping plate 4 and linear slide rail 5, clamping plate 4 is placed in silicon rod both sides, clamping silicon rod is controlled by actuating unit, and
Push pressure cap 3, so that pressure cap utilizes Pneumatic pressure pressure holding to live the crossbeam 8 of silicon rod, then lift fixture 6, thus can be by silicon rod from also
Take off on former furnace hearth plate.Specifically, as shown in figure 4, when the silicon rod laterally put using fixture clamping, being in differing heights
Jaw clamps a support arm 7 of silicon rod respectively, and for 6 jaws in the present embodiment, wherein 3 jaws clamp silicon rod
One support arm, in addition another support arm of 3 jaw clamping silicon rods；As shown in figure 5, when the silicon vertically put using fixture clamping
When excellent, each jaw all clamps two support arms of silicon rod simultaneously；
Finally, fixture 6 is turned over turn 90 degrees after (position shown in Fig. 3) move down and put into hopper (silicon rod case), then pass through gas
Dynamic control operation is to unload silicon rod.
Then, repeat the above steps, up in reduction furnace, all silicon rods are all removed and are finished.
Jaw length due to the more former mechanical arm of the length of the jaw of the mechanical arm in the present embodiment increased 156%, that is,
385mm is risen to by original 150mm, therefore both can be used to clamp the silicon rod laterally put it is also possible to vertically put to clamp
The silicon rod put, that is, disclosure satisfy that the clamping that two kinds of different directions are put；And the width of the jaw of the more former mechanical arm of width of jaw
Increased 48%, 185mm is widened to by original 125mm such that it is able to increase the contact area of fixture and silicon rod, make the fixture can
More firmly to clamp silicon rod.
The above is only preferred implementation of the present utility model it is noted that common skill for the art
For art personnel, on the premise of without departing from this utility model principle, some improvements and modifications can also be made, these improve and
Retouching also should be regarded as protection domain of the present utility model.
Claims (10)
1. a kind of silicon rod mechanical arm, the fixture including support, being arranged on support and actuating unit, described fixture includes
Jaw, described jaw includes two clamping plate being oppositely arranged and performing relative motion it is characterised in that the length of described two clamping plate is big
The distance between two support arms in silicon rod, so that jaw can clamp two support arms of silicon rod simultaneously.
2. silicon rod mechanical arm according to claim 1 it is characterised in that the length of described clamping plate be 230mm～
450mm.
3. silicon rod mechanical arm according to claim 2 is it is characterised in that the length of described clamping plate is 385mm.
4. silicon rod mechanical arm according to claim 2 it is characterised in that the width of described clamping plate be 130mm～
200mm.
5. silicon rod mechanical arm according to claim 4 is it is characterised in that the width of described clamping plate is 185mm.
6. the silicon rod mechanical arm according to any one of claim 1-5 is it is characterised in that described fixture also includes pressing
Hold the pressure cap of silicon rod middle cross beam, pressure cap adopts rotary structure.
7. silicon rod mechanical arm according to claim 6 it is characterised in that described jaw adopt multiple, multiple jaws divide
It is not arranged in different vertical heights.
8. silicon rod mechanical arm according to claim 6 is it is characterised in that described clamping plate includes gripper shoe and is arranged on
The liner being contacted with silicon rod is used on fagging, described liner is made using polyurethane methyl acid esters.
9. silicon rod mechanical arm according to claim 6 is it is characterised in that described actuating unit adopts pneumatic mechanism.
10. silicon rod mechanical arm according to claim 9 is it is characterised in that actuating unit also includes switching mechanism, described
Switching mechanism can order about jaw upset, so that the silicon rod of jaw clamping overturns as the state that crouches from vertical state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620915335.0U CN205928720U (en) | 2016-08-22 | 2016-08-22 | Arm for silicon rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620915335.0U CN205928720U (en) | 2016-08-22 | 2016-08-22 | Arm for silicon rod |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205928720U true CN205928720U (en) | 2017-02-08 |
Family
ID=57948644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620915335.0U Active CN205928720U (en) | 2016-08-22 | 2016-08-22 | Arm for silicon rod |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205928720U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110654613A (en) * | 2019-09-24 | 2020-01-07 | 湖南湘典食品有限公司 | Automatic equipment that piles up of prefabricated dish assembly line |
| CN112904054A (en) * | 2021-02-04 | 2021-06-04 | 上海泽丰半导体科技有限公司 | Clamping jaw type probe clamp and probe clamping equipment |
| CN115557504A (en) * | 2022-11-08 | 2023-01-03 | 新特能源股份有限公司 | Efficient and intelligent rod-detaching cleaning method for reduction furnace |
-
2016
- 2016-08-22 CN CN201620915335.0U patent/CN205928720U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110654613A (en) * | 2019-09-24 | 2020-01-07 | 湖南湘典食品有限公司 | Automatic equipment that piles up of prefabricated dish assembly line |
| CN110654613B (en) * | 2019-09-24 | 2021-07-09 | 湖南湘典食品有限公司 | Automatic equipment that piles up of prefabricated dish assembly line |
| CN112904054A (en) * | 2021-02-04 | 2021-06-04 | 上海泽丰半导体科技有限公司 | Clamping jaw type probe clamp and probe clamping equipment |
| CN115557504A (en) * | 2022-11-08 | 2023-01-03 | 新特能源股份有限公司 | Efficient and intelligent rod-detaching cleaning method for reduction furnace |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |