CN205920956U - Prealignment mechanism and motion platform device - Google Patents
Prealignment mechanism and motion platform device Download PDFInfo
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- CN205920956U CN205920956U CN201620387262.2U CN201620387262U CN205920956U CN 205920956 U CN205920956 U CN 205920956U CN 201620387262 U CN201620387262 U CN 201620387262U CN 205920956 U CN205920956 U CN 205920956U
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Abstract
The utility model discloses a prealignment mechanism and motion platform device, wherein prealignment mechanism includes: be 2 benchmark positioning unit and corresponding the setting at every that the L type set up tight unit is pressed from both sides to the self -adaptation of benchmark positioning unit opposite side, the self -adaptation is pressed from both sides tight unit and is included: a drive arrangement and setting element, a drive arrangement includes: a linear guide, setting are in first slider and self -adaptation pressure device on the linear guide, self -adaptation pressure device with first slider is connected, and has adjustable moving distance, the setting element sets up on the first slider. The utility model discloses a self -adaptation pressure device's automation mechanized operation has replaced manual adjustment operation among the prior art, has the degree of automation height, reduces intensity of labour, save time, improvement prealignment work efficiency's beneficial effect.
Description
Technical field
This utility model is related to a kind of prealignment mechanism and motion table apparatus, belongs to microelectronic manufacturing technology field.
Background technology
In current informationized society, display is just play more and more important role in the life of people.Current
Field of display, be the new of representative with oled (OLED, organic light-emitting diode)
Flat faced display will provide more preferable display picture for people, and produce huge shadow to existing display industry general layout
Ring.Oled has ultra-thin, actively luminous, high brightness, high-contrast, wide viewing angle, wide operating temperature range, low-power consumption, low because of it
Cost, all solid state the advantages of, be a significant development direction of flat pannel display and lighting field.According to the process requirements of oled,
Because the life-span of oled chip is highly prone to the impact of oxygen, aqueous vapor, often it is encapsulated in confined air using laser package technique
Between in, to isolate external environment condition it is therefore desirable to be used for completing laser package technique using corresponding laser package equipment.Sports platform
Device is one of laser package device core device, wherein, prealignment operation on sports platform for the substrate, encapsulation matter will be had influence on
Amount and yield.
In prior art, the operation of substrate prealignment is to carry out base by the mechanical grip mode of four groups of clamping and positioning assemblies
Plate prealignment.Every group of clamping and positioning assembly is by driving cylinder, connector, driving base plate, positioning bearing, fixed plate and positioning bearing
Regulating bolt forms, and its motion principle is that positioning bearing is arranged in fixed plate, and fixed plate is bolted on driving base plate
On, drive base plate to be installed on the piston of driving cylinder by connector, and cylinder body is fixed on prealignment platform, therefore pass through
Moving forward and backward of cylinder piston can drive moving forward and backward of positioning bearing.Four direction clamping and positioning assembly is respectively to middle fortune
The dynamic position securing the base to need.Because the substrate of different batches has certain overall dimensions error, need by positioning
Bearing regulating bolt positions the front and back position of bearing to manually adjust, to be clamped to substrate positioning.
The substrate prealignment mechanism of prior art, the substrate of different batches weak to the foozle adaptability of substrate itself,
Need according to foozle situation, manually adjust the stroke of clamping and positioning assembly, cause operational loaded down with trivial details and quality risk, increase
Labor intensity, and the waste with man-hour are added.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of adjustment of automatization to adapt to substrate manufacture error, raising
The prealignment mechanism of prealignment efficiency and motion table apparatus.
To achieve these goals, this utility model adopts the following technical scheme that and is achieved:
A kind of prealignment mechanism, comprising: in l type setting 2 origin reference location units and be correspondingly arranged at each described base
The self adaptation clamping unit of certainly bit location opposite side；Described self adaptation clamping unit includes: first driving means and keeper, institute
State first driving means to include: first straight line guide rail, the first slide block being arranged on described first straight line guide rail and self adaptation pressure
Power apparatus, described self-adaptive pressure device is connected with described first slide block, and has adjustable movement stroke；Described keeper sets
Put on described first slide block.
Preferably, described self-adaptive pressure device includes: the first driving cylinder and air relief valve；Described first driving cylinder
Cylinder rod connects on rear side of described first slide block, and the air cavity of described first driving cylinder is connected with described air relief valve.
Preferably, described air relief valve adopts overflow-type precise pressure-reducing valve.
Preferably, described air relief valve is arranged in the air inlet pipeline of described first driving cylinder.
Preferably, described origin reference location unit includes: the second driving means and being arranged in described second driving means
Keeper.
Preferably, described second driving means include: the second driving cylinder, the second connecting plate and 2 be arranged in parallel
Two line slideways；Described second connecting plate two ends are connected with the second slide block on second straight line guide rail each described, and with described
The cylinder rod of the second driving cylinder connects, and described keeper is arranged on described second slide block.
Preferably, described self adaptation clamping unit also includes the 3rd driving means, specifically includes: the 3rd driving cylinder,
One connecting plate and 2 the 3rd line slideways be arrangeding in parallel；Described first connecting plate two ends and each described 3rd line slideway
On the 3rd slide block connect, and be connected with the cylinder rod of described 3rd driving cylinder, described first driving means are arranged on described the
On three slide blocks.
Preferably, described keeper is using positioning bearing.
A kind of motion table apparatus, comprising: base seat, the sports platform being arranged on described base seat and described prealignment machine
Structure, the origin reference location unit of described prealignment mechanism and self adaptation clamping unit are arranged on four sides position of described sports platform.
Compared with prior art, the technical solution of the utility model: by 2 origin reference location units and corresponding 2 from
Adapt to clamping unit and substrate is fixed on prealignment station, meanwhile, the self-adaptive pressure device of described self adaptation clamping unit drives
Keeper on movable slider and slide block moves on first straight line guide rail, makes keeper have adjustable movement travel, with right
The foozle of different substrate carries out adaptive compensation, eliminates the impact to prealignment mechanism for the foozle.By self-adaptive pressure
The automation mechanized operation of device, instead of in prior art and manually adjusts operation, have high degree of automation, reduce labor intensity,
Save man-hour, the beneficial effect of raising prealignment work efficiency.
Brief description
Fig. 1 is the schematic diagram before motion table apparatus prealignment described in this utility model one embodiment；
Fig. 2 is schematic diagram during motion table apparatus prealignment described in this utility model one embodiment.
Shown in figure: 100, glass substrate；101st, self adaptation clamping unit；102nd, origin reference location unit；110th, the first drive
Dynamic device；120th, the second driving means；130th, the 3rd driving means；140th, position bearing；111st, first straight line guide rail；112nd,
One slide block；113rd, the first driving cylinder；114th, air relief valve；121st, second straight line guide rail；122nd, the second slide block；123rd, the second driving
Cylinder；124th, the second connecting plate；131st, the 3rd line slideway；132nd, the 3rd slide block；133rd, the 3rd driving cylinder；134th, first even
Fishplate bar.
Specific embodiment
Below in conjunction with the accompanying drawings this utility model is described in detail:
This utility model will be described to explain structure of the present utility model with preferred embodiment and viewpoint, for only using
Bright and be not used to limit claim of the present utility model, therefore, in addition to the preferred embodiment in description, this practicality is new
Type also can extensively be rendered in other embodiment.
Prealignment mechanism of the present utility model is applicable to various motion table apparatus, for example, can set for laser package
The scenes such as the prealignment of standby middle sports platform, but be not limited, and, for prealignment operation, can be applied in other
In the prealignment operation of technical field.The present embodiment, gives taking the prealignment of glass substrate in microelectronics technology 100 as a example
The implementation of prealignment mechanism of the present utility model and motion table apparatus is described.
As shown in Figure 1-2, motion table apparatus of the present utility model, comprising: base seat, the fortune being arranged on described base seat
Dynamic platform and prealignment mechanism.
Specifically, described prealignment mechanism, comprising: 2 origin reference location units 102 of setting and being correspondingly arranged in l type
The self adaptation clamping unit 101 of each described origin reference location unit opposite side, origin reference location unit 102 He of described prealignment mechanism
Self adaptation clamping unit 101 is arranged on four sides position of described sports platform.It should be noted that due to described 2 origin reference locations
The structure of unit 102 is identical, and the structure of corresponding 2 self adaptation clamping units 101 is also identical, below only to a motion edge of table
The self adaptation clamping unit 101 of the origin reference location unit 102 of position and its opposite side is described in detail.
Further, described self adaptation clamping unit 101 includes: first driving means 110, the 3rd driving means 130 and
Keeper.Specifically,
Described first driving means 110 include: first straight line guide rail 111, be arranged on described first straight line guide rail 111
First slide block 112 and self-adaptive pressure device, described self-adaptive pressure device is connected with described first slide block 112, and have can
Adjust movement travel；Described keeper is arranged on described first slide block 112；
Described 3rd driving means 130 include: the 3rd driving cylinder 133, the first connecting plate 134 and 2 be arranged in parallel
3rd line slideway 131；The 3rd slide block 132 on described first connecting plate 134 two ends and each described 3rd line slideway 131
Connect, and be connected with the cylinder rod of described 3rd driving cylinder 133, described first driving means 110 are arranged on described 3rd slide block
On 132.
In Fig. 1-2, taking the self adaptation clamping unit 101 of described one side of sports platform position as a example, described 3rd slide block 132
Quantity be 2, correspond be arranged on each described 3rd line slideway 131, the quantity of described first driving means 110
Quantity be 2, correspond be arranged on described 3rd slide block 132.
Preferably, described self-adaptive pressure device includes: the first driving cylinder 113 and air relief valve 114；Described first driving
The cylinder rod of cylinder 113 connects on rear side of described first slide block 112, the air cavity of described first driving cylinder 113 and described air relief valve 114
Connect.For example, described air relief valve 114 adopts overflow-type precise pressure-reducing valve, is arranged on entering of described first driving cylinder 113
In air pipe.
Further, described origin reference location unit 102 includes: the second driving means 120 drive with being arranged on described second
Keeper on device 120.
Specifically, described second driving means 120 include: the second driving cylinder 123, the second connecting plate 124 are parallel with 2
The second straight line guide rail 121 of setting；On described second connecting plate 124 two ends and each described second straight line guide rail 121 second
Slide block 122 connects, and is connected with the cylinder rod of described second driving cylinder 123, and described keeper is arranged on described second slide block 122
On.
Preferably, above-mentioned keeper is all using positioning bearing 140.
The operation principle of prealignment mechanism of the present utility model is described with reference to Fig. 1-2:
When the first driving cylinder 113 zero load of described self adaptation clamping unit 101, in the cylinder in the presence of air pressure,
The cylinder rod of the first driving cylinder 113 is in stretches out extreme position, i.e. the movement travel of piston is maximum.When the first driving cylinder
113 driving the first slide blocks 112 move, and the positioning bearing 140 to the first slide block 112 promotes glass substrate 100 and described benchmark
During positioning bearing 140 contact of positioning unit 102, reliable for guaranteeing positioning, it is desirable to have certain pressure, but the setting palpus of pressure
Guarantee glass substrate 100 in maximum material size, do not have pressure distortion to affect.As with the glass substrate of 370mm × 470mm
As a example 100, according to semi d12-95 standard (semi, semiconductor equipment material industry association, semiconductor
Equipment and materials international), its maximum material size is 370.2mm × 470.3mm, minimum
Entity size is 369.8mm × 469.7mm, and maximum positioning stroke is δ x=0.4mm, δ y=0.6mm.
In glass substrate 100 positioning motion, vertical employing air-flotation type supporting construction, the frictional force of generation is approximately zero,
Through test, in 5n, the frictional force of glass substrate 100 is negligible cylinder rod thrust.Home row due to glass substrate 100
Journey less (δ x=0.4mm, δ y=0.6mm), operation frequency is low, and once the gas pressure change causing is little within about every 2 minutes,
The change of temperature is negligible, and therefore, described glass substrate 100 follows law of conservation of energy in positioning motion.
Known according to law of conservation of energy, cylinder rod promotes 100 works of glass substrate to be equal to cylinder interior gas change in volume
And produce energy, that is,
Fx*sx=px*a*x............... (1)
Fy*sy=py*a*y................ (2)
Wherein,
The pushing force that fx:x direction top glass substrate 100 is subject to, the motion of the first driving cylinder 113 cylinder rod on sx:x direction
Stroke, the setting air pressure of overflow-type precise pressure-reducing valve, a: the first driving cylinder in the first driving cylinder 113 gas circuit on px:x direction
The effective area of 113 pistons, the movement travel of the first driving cylinder 113 piston on x:x direction；
The pushing force that fy:y direction top glass substrate 100 is subject to, the motion of the first driving cylinder 113 cylinder rod on sy:y direction
Stroke, the setting air pressure of overflow-type precise pressure-reducing valve in the first driving cylinder 113 gas circuit on py:y direction, first on y:y direction
The movement travel of driving cylinder 113 piston.
Because all directions physical characteristics of glass substrate 100 are identical, so, position fixing process must ensure fx=fy；And
And, the cylinder rod of the first driving cylinder 113 and piston, directly using being rigidly connected, are arranged on the first driving on x direction and y direction
The specification of cylinder 113 is identical, and piston effective area a is identical, it may therefore be assured that px=py.
When the first driving cylinder 113 is unloaded or glass substrate 100 is least material size, sx=x=δ x=0mm；sx
=x=δ y=0mm, i.e. fx=fy；
When glass substrate 100 is maximum material size, sx=x=δ x=0.4mm；Sy=y=δ y=0.6mm, that is,
Fx=fy；
When the glass substrate 100 of different batches is respectively between least material size and maximum material size, δ x=
0～0.4mm；δ y=0～0.6mm；Now, constant for the pushing force in guarantee x, y direction, i.e. fx=fy is accurate by overflow-type
The control and regulation of air relief valve, the redundancy gas in the first driving cylinder 113 is discharged from the overfall of overflow-type precise pressure-reducing valve,
That is, by the movement travel x of the first driving cylinder 113 piston on x direction, adjust x direction on the first driving cylinder 113 cylinder rod and
The movement travel of the first slide block 112 connecting, by the movement travel y of the first driving cylinder 113 piston on y direction, adjusts y side
The movement travel of the first slide block 112 of the first driving cylinder 113 cylinder rod and connection upwards.
In actual application, in described first driving cylinder 113, the initial position of piston is arranged on makes described first drive
Cylinder 113 cylinder rod of taking offence is in the position at range midpoint, and that is, piston can carry out the motion that moves forward and backward, sliding to adjust first
The position of bearing 140 is positioned on block 112.
The work process of prealignment mechanism of the present utility model is described with reference to Fig. 1-2:
Described motion table apparatus prealignment operation before, that is, before glass substrate 100 feeding or before discharging, described origin reference location
Unit 102 and self adaptation clamping unit 101 are in avoidance position, the feeding in order to glass substrate 100 or discharging operations.Institute
State in self adaptation clamping unit 101, the cylinder rod of described first driving cylinder 113 is in the point midway of range.
After expecting over the glass substrate 100, in the presence of the second driving cylinder 123, the second slide block 122 drives and is arranged on it
On positioning bearing 140 move to positioning datum position, the repeatability precision of motion is less than 5um；Then, in the 3rd driving cylinder
In the presence of 133, the 3rd slide block 132 drives the first driving means 110 being disposed thereon close to glass substrate 100, described
Glass substrate 100 is pushed to the locating shaft of corresponding origin reference location unit 102 by the positioning bearing 140 in first driving means 110
Hold 140.Wherein, described glass substrate 100 has a nominal design size, there is not the design size of foozle.3rd
The movement travel of driving cylinder 133 is set as reaching the glass plate side of nominal design size and positioning reliable.
When the size of glass substrate 100 is equal to nominal design size, now, there is not foozle.First drive gas
Cylinder 113 cylinder rod does not need to move, and movement travel is 0, and the inlet chamber gas of the first driving cylinder 113 is constant, and air pressure is constant.
When glass substrate 100 is when being smaller in size than nominal design size, now, there is the foozle that size diminishes.The
The cylinder rod stroke of one driving cylinder 113 needs corresponding increase, the inlet chamber make-up gas of the first driving cylinder 113, and volume increases,
Pressure is constant.
When the size of glass substrate 100 is more than nominal design size, now, there is the foozle becoming large-sized.The
The cylinder rod stroke of one driving cylinder 113 needs corresponding minimizing, and the air inlet intracavity gas volume of the first driving cylinder 113 needs accordingly
Reduce, the pushing force for keeping cylinder rod is constant, redundancy gas is discharged from the overfall of overflow-type precise pressure-reducing valve.Preferably, overflow
The setting air pressure of streaming precise pressure-reducing valve, determines according to the design of typical glass substrate 100 manufacturing tolerance and assembling and setting.
By the gas volume adjustment of above-mentioned first driving cylinder 113, thus it is possible to vary determining in cylinder rod and the first slide block 112
The stroke of position bearing 140, to supplement the change in size that glass substrate 100 is caused due to fabrication error, makes described prealignment mechanism
Adapt to the change in size of glass substrate 100, realize reliable location.
Motion table apparatus of the present utility model pass through 2 origin reference location units 102 and corresponding 2 self adaptation clamping units
Substrate is fixed on prealignment station by 101, and meanwhile, the self-adaptive pressure device of described self adaptation clamping unit 101 drives slide block
And the keeper on slide block moves on first straight line guide rail 111, keeper is made to have adjustable movement travel, with to difference
The foozle of substrate carries out adaptive compensation, eliminates the impact to prealignment mechanism for the foozle.
The foozle that prealignment mechanism of the present utility model is adapted to includes that glass substrate 100 is bigger than normal, less than normal, rhombus,
Trapezoidal equidimension change, but be not limited.The automatization behaviour by self-adaptive pressure device for the described self adaptation clamping unit 101
Make, instead of in prior art and manually adjust operation, there is high degree of automation, reduce labor intensity, save man-hour, improve in advance
The beneficial effect of alignment work efficiency.
Claims (9)
1. a kind of prealignment mechanism is it is characterised in that include: 2 origin reference location units of setting and be correspondingly arranged at every in l type
The self adaptation clamping unit of individual described origin reference location unit opposite side；Described self adaptation clamping unit includes: first driving means and
Keeper, described first driving means include: first straight line guide rail, the first slide block being arranged on described first straight line guide rail and
Self-adaptive pressure device, described self-adaptive pressure device is connected with described first slide block, and has adjustable movement stroke；Described
Keeper is arranged on described first slide block.
2. prealignment mechanism according to claim 1 is it is characterised in that described self-adaptive pressure device includes: the first drive
Take offence cylinder and air relief valve；The cylinder rod of described first driving cylinder connects on rear side of described first slide block, described first driving cylinder
Air cavity is connected with described air relief valve.
3. prealignment mechanism according to claim 2 is it is characterised in that described air relief valve adopts the accurate decompression of overflow-type
Valve.
4. prealignment mechanism according to claim 2 is it is characterised in that described air relief valve is arranged on described first drive gas
In the air inlet pipeline of cylinder.
5. prealignment mechanism according to claim 1 is it is characterised in that described origin reference location unit includes: the second driving
Device and the keeper being arranged in described second driving means.
6. prealignment mechanism according to claim 5 is it is characterised in that described second driving means include: the second driving
The second straight line guide rail that cylinder, the second connecting plate and 2 be arranged in parallel；Described second connecting plate two ends are straight with each described second
The second slide block on line guide rail connects, and is connected with the cylinder rod of described second driving cylinder, and described keeper is arranged on described the
On two slide blocks.
7. prealignment mechanism according to claim 1 is it is characterised in that described self adaptation clamping unit also includes the 3rd drive
Dynamic device, specifically includes: the 3rd line slideway that the 3rd driving cylinder, the first connecting plate and 2 be arranged in parallel；Described first even
Fishplate bar two ends are connected with the 3rd slide block on the 3rd line slideway each described, and connect with the cylinder rod of described 3rd driving cylinder
Connect, described first driving means are arranged on described 3rd slide block.
8. the prealignment mechanism according to any one in claim 1-7 is it is characterised in that described keeper is using positioning
Bearing.
9. a kind of motion table apparatus are it is characterised in that include: base seat, the sports platform being arranged on described base seat and pre- right
Quasi- mechanism, the origin reference location unit of described prealignment mechanism and self adaptation clamping unit are arranged on four sides of described sports platform
Position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620387262.2U CN205920956U (en) | 2016-04-29 | 2016-04-29 | Prealignment mechanism and motion platform device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620387262.2U CN205920956U (en) | 2016-04-29 | 2016-04-29 | Prealignment mechanism and motion platform device |
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| Publication Number | Publication Date |
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| CN205920956U true CN205920956U (en) | 2017-02-01 |
Family
ID=57875995
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| CN201620387262.2U Active CN205920956U (en) | 2016-04-29 | 2016-04-29 | Prealignment mechanism and motion platform device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109920750A (en) * | 2017-12-12 | 2019-06-21 | 北京创昱科技有限公司 | The device that diode mounting tool and diode and solar cell module integrate |
| CN111332788A (en) * | 2020-03-12 | 2020-06-26 | 徐州谷阳新能源科技有限公司 | Film taking and positioning method for automatic film coating equipment |
| CN113172348A (en) * | 2021-04-08 | 2021-07-27 | 大族激光科技产业集团股份有限公司 | Clamping alignment device and laser processing equipment |
-
2016
- 2016-04-29 CN CN201620387262.2U patent/CN205920956U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109920750A (en) * | 2017-12-12 | 2019-06-21 | 北京创昱科技有限公司 | The device that diode mounting tool and diode and solar cell module integrate |
| CN111332788A (en) * | 2020-03-12 | 2020-06-26 | 徐州谷阳新能源科技有限公司 | Film taking and positioning method for automatic film coating equipment |
| CN113172348A (en) * | 2021-04-08 | 2021-07-27 | 大族激光科技产业集团股份有限公司 | Clamping alignment device and laser processing equipment |
| CN113172348B (en) * | 2021-04-08 | 2023-11-24 | 深圳市大族半导体装备科技有限公司 | Clamping alignment device and laser processing equipment |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |