A kind of cutting machine with sensor
Technical field
The present invention relates to a kind of cutting machine with sensor.
Background technology
Cutting machine is a kind of quasiconductor post package key equipment, and its effect is Device singulation to be become single unit or incites somebody to action
Large scale material separation becomes small-size materials.And cutting and positioning device be a kind of by positioning reaching the one of cutting processing size
Plant device.Each company is to cutting mach positioning, how using welding the positioning tool cutting non-inductive equipment, this fixed now
The low name of machining accuracy of position frock, yield rate is low, and relatively costly, in cutting process, laser is contacted with workpiece, by several
The feed motion in individual direction completes cutting process, due to remaining the dust producing during a large amount of cutting in cutting zone, can cause relatively
Big measurement error, these measurement error can make depth of cut size uncontrollable, situations such as cause device not exclusively discrete.
Content of the invention
The present invention proposes a kind of cutting machine with sensor, and the machining accuracy solving product in prior art is low, becomes
Product rate is low, the problems such as relatively costly.
The technical scheme is that and be achieved in that:
A kind of cutting machine with sensor, including axially-movable module and the laser being fixed on axially-movable module front end
Head, fixes a displacement transducer by the laser cutting head of described laser head, the displacement measurement end of institute's displacement sensors with described
The cut end of laser cutting head is highly concordant.Described axially-movable module includes base plate, slide attachment plate, described slide attachment plate
It is fixed on described base plate front end, described laser head is fixed on described slide attachment plate front end.
As the preferred version of the present invention, described base plate is fixedly arranged at the front end with least one pair of linear slide rail, and described slide block connects
Plate rear end is fixed with slide block cushion block, and described slide block cushion block is corresponding with described linear slide rail to be engaged.
As the preferred version of the present invention, described linear slide rail and described slide attachment plate pass through Flat-head internal hexagonal bolt and
Alignment pin positions and fixes, and described base plate side is fixed with the first fixed seat, and described first fixed seat is connected to for one time described
On linear slide rail.
As the preferred version of the present invention, described slide block cushion block is further fixed on a sensing chip.
As the preferred version of the present invention, described base plate front end is provided with a clamping plate type shaft coupling, described clamping plate type shaft coupling
Upper end connects a retainer, and a servo motor is fixed in described retainer upper end, and described clamping plate type shaft coupling lower end connects a screw mandrel,
Described screw mandrel passes through described slide attachment plate, by clamping plate type shaft coupling and retainer, the rotation of servo motor can be passed to
Screw mandrel, and drive the slide attachment plate being socketed on screw mandrel, so that slide attachment plate is moved up and down.
As the preferred version of the present invention, a fixed plate is fixed in described slide attachment plate front end, and described fixed plate lower end sets
There is a sensor fixed seat, described sensor fixed seat lower end connects a sensor connecting base, and institute's displacement sensors are fixed on
On described sensor connecting base.
As the preferred version of the present invention, described laser cutting head rear end connects a Manual micromatic device.
Beneficial effect
The cutting machine long service life of sensor is carried in the present invention, will be concordant with laser cutting head for sensor fixation, greatly
Improve greatly machining accuracy.
Brief description
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
Have technology description in required use accompanying drawing be briefly described it should be apparent that, drawings in the following description be only this
Some embodiments of invention, for those of ordinary skill in the art, without having to pay creative labor, also may be used
So that other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is perspective view of the present invention;
Fig. 2 is invention main structure diagram shown in Fig. 1;
Fig. 3 is invention side structure schematic view described in Fig. 1.
In figure, base plate 1, slide attachment plate 2, slide block cushion block 3, fixed plate 4, the first fixed seat 5, sensing chip 6, clamping plate type joins
Axial organ 7, sensor fixed seat 8, sensor connecting base 9, retainer 10, displacement transducer 11, servo motor 12, linear slide rail
13, laser head 14, Flat-head internal hexagonal bolt 15, alignment pin 16, sucker body 17, precise mobile platform 18, Manual micromatic device
19.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation description is it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of not making creative work
Embodiment, broadly falls into the scope of protection of the invention.
Referring to Fig. 1-Fig. 3, the present invention carries the cutting machine of sensor, including base plate 1, slide attachment plate 2 and laser head 14,
Slide attachment plate 2 is fixed on base plate 1 front end, and laser head 14 is fixed on described slide attachment plate 2 front end, and the laser of laser head 14 is cut
Cut and by head, fix a displacement transducer 11, the displacement measurement end of institute's displacement sensors 11 and the cut end of described laser cutting head
Highly concordant.Base plate 1 is fixedly arranged at the front end with least one pair of linear slide rail 13, and slide attachment plate 2 rear end is fixed with slide block cushion block 3, sliding
Block cushion block 3 engaging corresponding with linear slide rail 13.
Linear slide rail 13 passes through Flat-head internal hexagonal bolt 15 with slide attachment plate 2 and alignment pin 16 positions and fixes, base plate
First fixed seat 5 is fixed with side, the first fixed seat 5 is connected on described linear slide rail 13.Also solid on slide block cushion block 3
Surely there is a sensing chip 6.Base plate 1 front end is provided with a clamping plate type shaft coupling 7, and described clamping plate type shaft coupling 7 upper end connects a retainer
10, a servo motor 12 is fixed in described retainer upper end, and described clamping plate type shaft coupling 7 lower end connects a screw mandrel, and described screw mandrel is worn
Cross described slide attachment plate 2, by clamping plate type shaft coupling 7 and retainer 10, the rotation of servo motor 12 can be passed to screw mandrel,
And drive the slide attachment plate 2 being socketed on screw mandrel, so that slide attachment plate 2 is moved up and down.
A fixed plate 4 is fixed in slide attachment plate 2 front end, and fixed plate lower end is provided with a sensor fixed seat 8, and sensor is fixed
Seat 8 lower end connects a sensor connecting base 9, and displacement transducer 11 is fixed on described sensor connecting base 9, after laser cutting head
End connects a Manual micromatic device 19.
It is made to go out laser when laser head 14 is controlled by software, laser arrives after the focus lamp in laser head 14 focuses on
Reach on the tool product of sucker body 17, the laser action after focusing is cut on sucker body 17, (laser head 14 and suction
Cutting distance between disk body 17 tool is to be determined by the effect of test product, when the best results of cutting products
When, its cutting spacing be d1) due to the thickness of product and size be skimble-scamble, if changing in addition after having cut a kind of product
A kind of product, can pass to screw mandrel by the rotation of servo motor 12, and drive the slide attachment plate 2 being socketed on screw mandrel, make
Slide attachment plate 2 moves up and down thus driving laser head 14 to move up and down with the spacing of product b is d2, and this mode is that exist by mistake
The i.e. d1>d2 or d1<d2 of difference, this error is largely to have impact on the cut quality of product and need to expend very big manpower
Going to adjust this highly makes its d2=d1.
In order to solve this puzzlement, displacement transducer 11 is increased on this device, it is solid that displacement transducer 11 passes through sensor
Connecting to slide attachment plate 2, manually micromatic setting 19 is micro- manually for reservation 8, laser head 14, Manual micromatic device 19
Transferring to adjust displacement transducer 11 makes effective depth that it detects relatively uniform with the focal height of laser head 14 laser (displacement passes
What sensor 11 detected is the effective depth of the product that product reaches on sucker body 17), and now displacement transducer 11 is detected
The signal data c1 of effective depth feeds back on software, (when when first time d1 is detected, can detect another by 11
Effective detection data c1, feeds back to software data now by displacement transducer 11, remembers this data, d1 and c1 in software
It is relative) after changing product, the rotation of servo motor 12 can pass to screw mandrel, and drives the slide block being socketed on screw mandrel even
Fishplate bar 2, makes slide attachment plate 2 move up and down, data c1 being set by software, so that displacement transducer 11 moves to software
The c1 data of middle storage, because c1 is relative with d1, the continuous circulation of the d2=d1 after the product now changed is da=d1 (a
=2.3.4.5.6 ... ...), thus ensure that no matter cutting the product of any different-thickness, the same cutting effect can be ensured
Really.
Include a precise mobile platform with the adapting device of cutting machine cooperation and be installed on described precise mobile platform
Sucker body, the described cutting machine with sensor is above described precise mobile platform.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all essences in the present invention
Within god and principle, any modification, equivalent substitution and improvement made etc., should be included within the scope of the present invention.