CN205888352U - Initiatively shield formula electric capacity along with high measuring device - Google Patents

Initiatively shield formula electric capacity along with high measuring device Download PDF

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Publication number
CN205888352U
CN205888352U CN201620676026.2U CN201620676026U CN205888352U CN 205888352 U CN205888352 U CN 205888352U CN 201620676026 U CN201620676026 U CN 201620676026U CN 205888352 U CN205888352 U CN 205888352U
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electric capacity
circuit
active shield
signal
layer
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CN201620676026.2U
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段发阶
李杨宗
叶德超
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Good Test (tianjin) Technology Co Ltd
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Good Test (tianjin) Technology Co Ltd
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Abstract

The utility model relates to an initiatively shield formula electric capacity along with high measuring device realizes for providing an initiatively shield formula electric capacity along with high measuring device that isolated environment changes cutting head, the isolated environment stray capacitance to the cable, through eliminating this two main error sources, and has designed remaining stray capacitance compensating circuit, automatic compensation with mate the surplus stray capacitance in the cable, improve measurement accuracy greatly. The technical scheme of the utility model comprises, initiatively shield formula electric capacity along with high measuring device comprises connecting piece, electric capacity gauge head, waits to cut the work piece and passes through metallic interconnect with the connecting piece, and is electrically conductive for a whole, as plate capacitor's an utmost point, the electric capacity gauge head is metal material, and does the insulating layer with the pottery between the connecting piece, as another utmost point of plate capacitor, still be provided with the initiative shielding layer, initiatively shield formula signal transmission cable, initiatively shield drive circuit, initiatively the shielding layer is hugged closely, is wrapped up in the connecting piece outside. The utility model discloses it closes with industrial area mainly to be applied to the numerical control machine.

Description

Active shield formula electric capacity is with height measurement device
Technical field
This utility model is related to numerical control machine processing technique field, is particularly used for the one of laser cutting device processing head Plant with height measurement device.
Background technology
During Laser cutting, in order that incision obtains maximum laser power it is ensured that kerf quality, laser is burnt Point need to be located at surface of the work about 1/3 thickness of slab.During Laser cutting sheet material, the radian lines of plate surface, flat The unfavorable factors such as whole degree, high temperature deformation, if cannot measuring the distance of cutting head and surface of the work in real time and keeping cutting-height In steady state value, cutting effect can be led to poor, or even be unable to reach qualified cutting standard.
So being cut the height to processing head for the surface of the work in the course of processing to preferably must be held in certain value, typically in 0.5mm- Between 1.5mm, this height is referred to as cutting-height.Therefore, cutting equipment must be equipped with a height measuring device, and passes through motor Control processing head, so that cutting-height is changed with change of workpiece, this height measuring device becomes with height measurement device.
At present, commonly used it is based on capacity based distance measuring principle with high measurement method.Laser Machining head and sheet material to be cut it Between formed a small capacity plate antenna, the distance between this electric capacity and pole plate is that cutting-height is relevant, by measuring pad between electricity Hold size to obtain cutting-height information.
Existing electric capacity is all coaxial-type with height measurement device, and the inferior position of the method is: in the course of processing, cutting head, biography The changes in stray capacitances of defeated signal cable local environment all can directly affect circuit noise, causes measurement error it is impossible to meet high Fast high-acruracy survey requires, and the length to transmission cable and prescription height, need to carry out field adjustable.In addition, it is partly existing With height measurement device, small capacitance conversion digital fre-quency signal is transmitted, improves the capacity of resisting disturbance of transmission signal cable, But still easily affected by environment noise in cutting head part.
Content of the invention
For overcoming the deficiencies in the prior art, this utility model aims to provide a kind of active shield formula electric capacity with height measurement device Realize isolation environment to change to cutting head, the stray capacitance to cable for the isolation environment, by eliminating this two main error source, and Devise remaining stray capacitance compensation circuit, automatically compensate and mate the remaining stray capacitance in cable, significantly improve measurement Precision.The technical solution adopted in the utility model is, active shield formula electric capacity with height measurement device, by connector, electric capacity gauge head Composition, workpiece to be cut is connected by metal with connector, and conductive is an entirety, as a pole of capacity plate antenna;Electric capacity gauge head It is to do insulating barrier with pottery between metal material, and connector, as another pole of capacity plate antenna;It is additionally provided with active shield Layer, active shield formula signal-transmitting cable, active shield drive circuit, active shield layer is close to, is wrapped in outside connector, main It is provided with insulating barrier between dynamic screen layer and connector;Active shield formula signal-transmitting cable is three coaxial configurations, including heart yearn, interior Screen layer, external shielding layer, inner insulating layer, external insulation layer, are inner insulating layer, internal shield and external screen between heart yearn and internal shield Covering between layer is external insulation layer, and heart yearn is connected to be exported with electric capacity gauge head, and internal shield is connected with active shield layer, and even It is connected to active shield drive circuit, external shielding layer is connected with connector, active shield drive circuit is used for making heart yearn and inner shield Isoelectric level between layer, active shield layer and gauge head.
Also include signal processing circuit, signal processing circuit by drive sensing and signal receiving circuit, electric capacity change-over circuit, Remaining stray capacitance auto compensatng circuit, signals collecting and output control circuit, digital processing unit several part composition;Electric capacity Change-over circuit is connected with described heart yearn, for measured capacitance is converted to voltage signal;Remaining stray capacitance auto compensatng circuit It is connected with electric capacity change-over circuit, for eliminating remaining stray capacitance influences;Signals collecting and output control circuit collection are derived from The voltage signal of electric capacity change-over circuit output;Digital processing unit output by described voltage signal represent with high measurement result or defeated Go out final control signal, control signal is used for electric machine controller and driver, the height being directly realized by laser cutting head is servo-actuated.
In remaining stray capacitance auto compensatng circuit, drain capacitance compensates by adjusting signal amplification factor circuit realiration, leakage Resnstance transformer passes through to adjust signal phase circuit realiration.
Active shield layer is conductive metal film or has certain thickness ferromagnetism steel plate;Active shield layer and connector it Between insulating barrier be insulating ceramics or insulating cement or ambroin.
Active shield drive circuit is made up of voltage follower circuit and Voltag driving circuit, and voltage follower circuit is quickly followed the tracks of The alternating voltage change of electric capacity gauge head, makes voltage magnitude, phase place completely the same, it is defeated that Voltag driving circuit improves voltage follower circuit Go out the driving force of signal.
Feature of the present utility model and beneficial effect are:
1) increase active shield layer, overcome the environmental change around electric capacity gauge head and flat board, especially humiture change is right The impact of precision;
2) active shield formula signal-transmitting cable overcomes the environmental changes such as humiture in signals transmission, vibration and leads to Measurement error;
3) circuit can automatically compensate because the cable that leads to limited by technique cannot 100% shielding remaining stray capacitance, enter one Step reduces noise.
Device, by above-mentioned design, compared with the current traditional scheme adopting, effectively reduces measurement noise, improves electricity Hold with high measurement accuracy, precision improves 1 order of magnitude than existing product.
Brief description:
Fig. 1 active shield formula electric capacity is with height measurement device schematic diagram.
In Fig. 1,1 is the capacitance sensor gauge head in laser cutting head, the 2 active shield layers designing for this utility model, 3 For active protected type signal-transmitting cable, 4 is circuitry for signal measurement, 5 insulating barriers.
Fig. 2 conventional coaxial formula cutting head electric capacity is with high measurement schematic diagram.
In Fig. 2,6 are and connector, threaded with laser cutting machine, 7 finger environmental disturbances, and 8 is workpiece to be cut.
The active shield formula electric capacity of Fig. 3 this utility model design with high measurement schematic diagram, (make by 2 protection of active shield layer With).
Fig. 4 active shield signal-transmitting cable structural representation.
Fig. 5 high-precision signal process circuit theory diagram.
In Fig. 5,9 refer to electric capacity gauge head sensing drives and signal receiving circuit, 10 finger electric capacity change-over circuits, 11 finger active shield Drive circuit, 12 refer to remaining stray capacitance compensation circuit, 13 finger signal collecting and controlling output circuits.
Fig. 6 active shield driving circuit principle block diagram.
In Fig. 6,14 finger voltage follower circuits, 15 finger Voltag driving circuits.
Fig. 7 remnants stray capacitance compensation circuit theory diagram.
In Fig. 7,16 refer to drain capacitance extracts circuit, and 17 is drain capacitance compensation circuit, and 18 extract circuit for ohmic leakage, and 19 is leakage Resnstance transformer circuit.
Specific embodiment
This utility model provides a kind of active shield formula electric capacity with height measurement device.This device is by increasing active shield layer Isolate environmental change to cutting head, the increase stray capacitance to cable for the active shield formula signal-transmitting cable isolation environment, led to Cross and eliminate this two main error source, and design corresponding active shield drive circuit, remaining spuious in signal processing circuit Capacitor compensating circuit, automatically compensates and mates the remaining stray capacitance in cable, significantly improve certainty of measurement.
For achieving the above object, design a kind of active shield formula electric capacity with height measurement device, comprising: capacitance sensor gauge head 1st, active shield layer 2, active shield formula signal-transmitting cable 3 and high-precision signal process circuit 4.
Traditional capacitance, with height measurement device, is shown in Fig. 2, and workpiece to be cut is connected by metal with connector, conductive whole for one Body, a pole as capacity plate antenna ().Electric capacity gauge head is to do insulating barrier with pottery between metal material, and connector, as Another pole of capacity plate antenna.When the distance of two interpolars changes, capacitance changes therewith, and signal processing electric capacity can be by capacitance Be converted to analog voltage or digital signal output, thus realizing electric capacity with high measurement.The electric field line of its two interpolar as shown in Fig. 2 Electric Field Distribution between environmental disturbances 7, such as aerial temperature and humidity, easily impact pole plate, namely measured capacitance.Therefore, in actual measurement Traditional measurement mode is affected greatly, to lead to focus on inaccurate, cut quality decline by ambient temperature and humidity.
This utility model increases in laser cutting head and devises active shield layer, sees Fig. 3, active shield layer and connector Between increase insulating barrier.Active shield layer can be conductive metal film or have certain thickness ferromagnetism steel plate.Increased insulation Layer can be insulating ceramics or insulating cement, ambroin.After increasing active shield layer 2, circuit passes through active shield formula signal and passes Internal shield in transmission cable 3 makes the current potential of active shield layer 2 equal with the current potential of electric capacity gauge head 1, then no electric field between the two, and two Electric field adjustment between pole plate is as shown in Figure 3.Active shield layer and workpiece to be cut produce protection electric field, fully wrapped around capacitive side head Electric field line and between workpiece for measurement.Now, environmental disturbances such as humiture change only can affect between active shield layer and workpiece to be cut Electric field and electric capacity, and do not affect tested electric field and electric capacity.
The active shield formula signal-transmitting cable 3 of the bright design of we, is shown in Fig. 4, and active shield signal-transmitting cable is same for three Axle construction, including heart yearn, internal shield, external shielding layer, inner insulating layer, external insulation layer.Wherein heart yearn is connected with electric capacity gauge head, and Connect to sense to electric capacity gauge head and drive and signal receiving circuit, internal shield is connected with active shield layer, and connect to active screen Cover drive circuit.External shielding layer is connected with connector, and connects to the plate Shangdi of signal processing circuit.Due to internal shield signal , between the two, there is not electric capacity, therefore extraneous environmental change such as (humiture, vibration) in current potential identical with heart yearn all the time (isoelectric level) Do not affect the transmission of measured signal, reduce measurement noise.
Described high-precision signal process circuit, is shown in Fig. 5, mainly realizes process and the output control of capacitive sensor signal Function.It includes, and electric capacity gauge head drives sensing and signal receives, electric capacity is changed, active shield drives, remaining stray capacitance is automatic Compensation, signals collecting and 5 modular units of output control.Measured capacitance is converted to voltage signal by electric capacity change-over circuit.Signal Collection and output control circuit can require output with high measurement result according to the control system of laser cutting machine, on circuit board Cpu using corresponding pid algorithm, can export final control signal, be supplied to electric machine controller and driving directly according to measurement result Device, the height being directly realized by laser cutting head is servo-actuated.Therefore, signals collecting and output control circuit can using but be not limited only to list The integrated processor such as piece machine, dsp, fpga realizes signal collecting and controlling output function.
Wherein, the isoelectric level protection of active shield layer and electric capacity gauge head realized by active shield drive circuit.Active shield drives Galvanic electricity routing voltage follow circuit and Voltag driving circuit composition, voltage follower circuit quickly follows the tracks of the alternating current of electric capacity gauge head Buckling, makes voltage magnitude, phase place completely the same.Voltag driving circuit improves the driving energy of voltage follower circuit output signal Power.Voltage follower circuit adopt amplifier follow circuit or Voltage Feedback follow circuit, Voltag driving circuit adopt driving chip or Transformator.
Wherein, (actual three is coaxial for the possible remaining stray capacitance influences of remaining stray capacitance auto compensatng circuit elimination Cable does not enable 100% shielding), show as containing drain capacitance and ohmic leakage signal in signal.Compensation circuit is extracted therein Drain capacitance and ohmic leakage signal are simultaneously compensated by corresponding circuit.Drain capacitance compensation circuit is passed through to adjust signal amplification factor Realize, ohmic leakage compensation circuit is passed through to adjust signal phase realization.
Further describe this utility model with instantiation below in conjunction with the accompanying drawings.
Design a kind of active shield formula electric capacity with height measurement device, comprising: capacitance sensor gauge head 1, active shield layer 2, Active shield formula signal-transmitting cable 3 and high-precision signal process circuit 4.
Increase insulating barrier between active shield layer and connector.Active shield layer using conductive metal film or has certain thickness The ferromagnetism steel plate of degree.Increased insulating barrier adopts insulating ceramics or insulating cement, ambroin.After increasing active shield layer 2, electricity Road makes active shield floor 2 and electric capacity gauge head 1 isoelectric level by the internal shield in active shield formula signal-transmitting cable 3, eliminates Electric capacity between the two.Active shield layer and workpiece to be cut produce protection electric field simultaneously, fully wrapped around capacitive side head and workpiece for measurement Between electric field.Then environmental disturbances such as humiture change only can affect the electric field between active shield layer and workpiece to be cut and electric capacity, and Do not affect tested electric field and electric capacity.
Active shield formula signal-transmitting cable 3 is three coaxial configurations, including heart yearn, internal shield, external shielding layer, interior insulation Layer, external insulation layer.Wherein heart yearn is connected with electric capacity gauge head, and connects to the sensing driving of electric capacity gauge head and signal receiving circuit, interior Screen layer is connected with active shield layer, and connects to active shield drive circuit.External shielding layer is connected with connector, and connect to The plate Shangdi of signal processing circuit.Due to internal shield signal potential identical with heart yearn all the time (isoelectric level), do not exist between the two Electric capacity, therefore extraneous environmental change such as (humiture, vibration) does not affect the transmission of measured signal, reduces measurement noise.
High-precision signal process circuit includes electric capacity gauge head and drives sensing and signal to receive 9, electric capacity conversion 10, active shield 11, remaining stray capacitance is driven automatically to compensate 12, signals collecting and output control 13 totally 5 modular units.Electric capacity change-over circuit Measured capacitance is converted to voltage signal by 10.Signals collecting and output control circuit 13 collection voltages signal, digital processing on plate Device requires output with high measurement result or directly according to measurement result according to the control system of laser cutting machine, using corresponding pid Algorithm, exports final control signal.Control signal can be used for electric machine controller and driver, is directly realized by the height of laser cutting head Degree is servo-actuated.Digital processing unit can adopt but be not limited only to the integrated processors such as single-chip microcomputer, dsp, fpga.
Active shield drive circuit realizes the isoelectric level protection of active shield layer and the isoelectric level protection of cable internal shield. Active shield drive circuit is made up of voltage follower circuit 14 and Voltag driving circuit 15, and voltage follower circuit 14 quickly follows the tracks of electricity Hold the alternating voltage change of gauge head, make voltage magnitude, phase place completely the same.It is defeated that Voltag driving circuit 15 improves voltage follower circuit Go out the driving force of signal.Voltage follower circuit 14 can adopt amplifier follow circuit or Voltage Feedback follow circuit, and voltage drives Circuit 15 can adopt driving chip or transformator.
Remaining stray capacitance auto compensatng circuit eliminates possible remaining stray capacitance influences, and (actual triaxial cable is not Enable 100% shielding), show as containing drain capacitance and ohmic leakage signal in signal.Compensation circuit extracts drain capacitance therein 16 and ohmic leakage signal 18 being compensated by corresponding circuit.Drain capacitance compensation circuit 17 is passed through to adjust signal amplification factor Realize, ohmic leakage compensation circuit 19 is passed through to adjust signal phase realization.

Claims (5)

1. a kind of active shield formula electric capacity, with height measurement device, is characterized in that, is made up of connector, electric capacity gauge head, workpiece to be cut It is connected by metal with connector, conductive is an entirety, as a pole of capacity plate antenna;Electric capacity gauge head is metal material, with Insulating barrier is done with pottery, as another pole of capacity plate antenna between connector;It is additionally provided with active shield layer, active shield formula letter Number transmission cable, active shield drive circuit, active shield layer is close to, is wrapped in outside connector, active shield layer be connected It is provided with insulating barrier between part;Active shield formula signal-transmitting cable is three coaxial configurations, including heart yearn, internal shield, external shield Layer, inner insulating layer, external insulation layer, are inner insulating layer between heart yearn and internal shield, are outer between internal shield and external shielding layer Insulating barrier, heart yearn is connected to be exported with electric capacity gauge head, and internal shield is connected with active shield layer, and connects to active shield Drive circuit, external shielding layer is connected with connector, and active shield drive circuit is used for making heart yearn and internal shield, active shield layer Isoelectric level and gauge head between.
2. active shield formula electric capacity as claimed in claim 1, with height measurement device, is characterized in that, also includes signal processing electricity Road, signal processing circuit compensates electricity automatically by driving sensing and signal receiving circuit, electric capacity change-over circuit, remaining stray capacitance Road, signals collecting and output control circuit, digital processing unit several part composition;Electric capacity change-over circuit is connected with described heart yearn, For measured capacitance is converted to voltage signal;Remaining stray capacitance auto compensatng circuit is connected with electric capacity change-over circuit, is used for Eliminate remaining stray capacitance influences;Signals collecting and output control circuit collection carry out the voltage letter that self-capacitance change-over circuit exports Number;Digital processing unit output by described voltage signal represent with high measurement result or export final control signal, control signal For electric machine controller and driver, the height being directly realized by laser cutting head is servo-actuated.
3. active shield formula electric capacity as claimed in claim 2, with height measurement device, is characterized in that, remaining stray capacitance is mended automatically Repay in circuit, drain capacitance compensates by adjusting signal amplification factor circuit realiration, ohmic leakage compensates by adjusting signal phase electricity Road is realized.
4. active shield formula electric capacity as claimed in claim 1, with height measurement device, is characterized in that, active shield layer is conductive gold Belong to thin film or there is certain thickness ferromagnetism steel plate;Insulating barrier between active shield layer and connector is insulating ceramics or insulation Glue or ambroin.
5. active shield formula electric capacity as claimed in claim 1, with height measurement device, is characterized in that, active shield drive circuit by Voltage follower circuit and Voltag driving circuit composition, voltage follower circuit quickly follows the tracks of the alternating voltage change of electric capacity gauge head, makes Voltage magnitude, phase place are completely the same, and Voltag driving circuit improves the driving force of voltage follower circuit output signal.
CN201620676026.2U 2016-06-28 2016-06-28 Initiatively shield formula electric capacity along with high measuring device Active CN205888352U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105945420A (en) * 2016-06-28 2016-09-21 善测(天津)科技有限公司 Active shielding type capacitor height-following measuring device
CN111421254A (en) * 2020-03-20 2020-07-17 大族激光科技产业集团股份有限公司 Follow-up height-adjusting sensor structure and measurement and control system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105945420A (en) * 2016-06-28 2016-09-21 善测(天津)科技有限公司 Active shielding type capacitor height-following measuring device
CN111421254A (en) * 2020-03-20 2020-07-17 大族激光科技产业集团股份有限公司 Follow-up height-adjusting sensor structure and measurement and control system

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