CN205844668U - Electric light lumped modulator - Google Patents

Abstract

This utility model relates to a kind of electric light lumped modulator, including optical texture, electro-optical structure and electricity structure；Described electro-optical structure is used for producing electrooptic effect；Described optical texture is for producing corresponding modulation effect according to described electrooptic effect；Described electricity structure is for powering for described electro-optical structure；The type of drive of described electricity structure is single type of drive；Described electricity structure includes electrode, and described electrode is for receiving the signal of telecommunication of forward and/or reverse transfer.Electric light lumped modulator of the present utility model, by the type of drive of the electricity structure of lumped modulator is improved to single type of drive, the junction capacity of manipulator can be halved, series resistance doubles, can realize reducing energy consumption, reducing modulator size, reduction Insertion Loss, and improve the utilization ratio to driving voltage, and electro-optic bandwidth can be promoted, meet practical application request.

Description

Electric light lumped modulator

Technical field

This utility model relates to integrated opto-electronic technical field, particularly relates to a kind of electric light lumped modulator.

Background technology

The development trend taken along with speed-raising fall at present, mass communication and interconnection equipment update, silica-based transceiver system Have begun to commercialization, but system energy consumption is high, the pressure of communication, the infrastructure of interconnection is increased dramatically.Manipulator be optic communication, The significant components of transceiver in optical interconnection system, its energy consumption is only second to laser instrument, but manipulator self Insertion Loss too increases merit Consumption budget, so being to reduce the important tackling key problem object in the effort of energy consumption at present.

Electrooptic modulator is divided into lump type manipulator and travelling-wave-type manipulator according to whether there being terminal matching to load.At present The high-speed electro-optic modulator of silicon materials is travelling-wave-type, because its speed is the most significantly restricted in RC constant with drive source power cable Characteristic impedance, the most reports more than the device of 50Gbps speed.But, the utilization of driving voltage is imitated by travelling-wave-type manipulator Rate is low, there is the shortcoming that energy consumption is high, size is big, Insertion Loss is big.On the other hand, lumped modulator can more effectively utilize driving electricity Pressure, has the advantage that energy consumption is low, size is little, Insertion Loss is little, but the device electro-optical bandwidth of the silicon lumped modulator of report is only at present It is only below 15GHz.

Therefore, energy consumption is low, size is little, Insertion Loss is little how to be provided that one, and high to the utilization ratio of driving voltage, and The electrooptic modulator meeting the electro-optic bandwidth requirement in reality application becomes one of technical problem the most urgently to be resolved hurrily.

Utility model content

Can not take into account for the energy consumption existing for existing travelling-wave-type electrooptic modulator and lumped modulator, size, Insertion Loss Defect, the utility model proposes a kind of electric light lumped modulator, including optical texture, electro-optical structure and electricity structure；

Described electro-optical structure is used for producing electrooptic effect；Described optical texture is corresponding for producing according to described electrooptic effect Modulation effect；Described electricity structure is for powering for described electro-optical structure；

The type of drive of described electricity structure is single type of drive；

Described electricity structure includes electrode, and described electrode is for receiving the signal of telecommunication of forward and/or reverse transfer.

Alternatively, described electro-optical structure includes PN junction.

Alternatively, the type of described PN junction includes laterally tying type, inserting finger knot type and vertical junction type.

Alternatively, described PN junction is silicon PN junction or germanium PN junction.

Alternatively, described electro-optical structure includes the first modulation arm and second modulation arm of electric light lumped modulator；

Described first modulation arm and the second modulation arm composition are electrically connected.

Alternatively, the N++ polarity of described first modulation arm and described second modulation arm is respectively positioned in described electro-optical structure Between；The P++ polarity of described first modulation arm and described second modulation arm lays respectively at the both sides of described electro-optical structure；Described first The N++ polar organization of modulation arm and described second modulation arm is electrically connected；Or,

The P++ polarity of described first modulation arm and described second modulation arm is respectively positioned on the centre of described electro-optical structure；Described The N++ polarity of the first modulation arm and described second modulation arm lays respectively at the both sides of described electro-optical structure；Described first modulation arm It is electrically connected with the P++ polar organization of described second modulation arm.

Alternatively, it is electrically connected described in as electrical series relationship.

Alternatively, described optical texture includes interferometer.

Alternatively, described optical texture also includes the resonator cavity combined with described interferometer.

Alternatively, the type of described interferometer is Mach once moral Mach-Zehnder interferometer or Michelson Michelson interferometer.

Electric light lumped modulator of the present utility model, by being improved to the type of drive of the electricity structure of lumped modulator Single type of drive, can halve the junction capacity of manipulator, and series resistance doubles, and can realize reducing energy consumption, reducing manipulator chi Very little, reduction Insertion Loss, and improve the utilization ratio to driving voltage, and electro-optic bandwidth can be promoted, meet practical application request.

Accompanying drawing explanation

In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, the accompanying drawing in describing below is this Some embodiments of utility model, for those of ordinary skill in the art, on the premise of not paying creative work, also Other accompanying drawing can be obtained according to these accompanying drawings.

Fig. 1 is the schematic diagram of Dual Drive electric light lumped modulator in prior art；

Fig. 2 is the structural representation of the electric light lumped modulator of one embodiment of this utility model；

Fig. 3 is the schematic top plan view of the list driving electric light lumped modulator of one embodiment of this utility model；

Fig. 4 a is the structure of the Mach-Zahnder interference type list driving electric light lumped modulator of one embodiment of this utility model Schematic diagram；

Fig. 4 b is the knot of the Michelson's interferometer type list driving electric light lumped modulator of one embodiment of this utility model Structure schematic diagram；

Fig. 5 is the electric light lumped modulator equivalent circuit diagram of one embodiment of this utility model；

Wherein, C_JRepresent that the electric capacity of modulation arm directly produces contribution to Electro-optical Modulation；R represents modulation arm resistance；L represents tune The inductance of arm electrode processed；C₀Represent the electric capacity of the parts such as pad bondingpad；

Fig. 6 is the small-signal electric light S21 response diagram of the different structure electrooptic modulator of one embodiment of utility model.

Detailed description of the invention

For making the purpose of this utility model embodiment, technical scheme and advantage clearer, new below in conjunction with this practicality Accompanying drawing in type embodiment, is explicitly described the technical scheme in this utility model embodiment, it is clear that described reality Executing example is a part of embodiment of this utility model rather than whole embodiments.Based on the embodiment in this utility model, ability The every other embodiment that territory those of ordinary skill is obtained under not making creative work premise, broadly falls into this practicality new The scope of type protection.

The many employings of existing lumped modulator dual-driving-mode as shown in Figure 1 (PN junction in Fig. 1 be simplest laterally Knot, Metal represents that metal electrode, Contact represent metallic vias), its electro-optic bandwidth is only below 15GHz, it is impossible to meet The modulation rate practical application request application requirement higher than 28Gbps.Do not have owing to lumped modulator has travelling-wave modulator Can effectively utilize driving voltage, the advantage such as energy consumption is low, size is little and Insertion Loss is little, if it is possible to promote lumped modulator Electro-optic bandwidth, be allowed to meet application demand, then lumped modulator will be expected to substitute travelling-wave modulator, it is achieved be greatly reduced logical The purpose of the energy consumption of communication system.

Fig. 2 shows the structural representation of the electric light lumped modulator of one embodiment of this utility model；As in figure 2 it is shown, Described lumped modulator includes optical texture 10, electro-optical structure 20 and electricity structure 30；

Wherein, described electro-optical structure is used for producing electrooptic effect；Described optical texture is for producing according to described electrooptic effect Raw corresponding modulation effect；Described electricity structure is for powering for described electro-optical structure；

It is understood that above-mentioned electro-optical structure 20 is for directly producing electrooptic effect and the portion of modulation in manipulator Point, according to different electrooptic effects, it can show as the modulation to phase place to the effect of light field, to the change of polarization state and Modulation to amplitude (intensity)；Optical texture 10 is that the electrooptic effect that electro-optical structure 20 produces is changed into required modulation effect Part, such as phase-modulation can be converted into intensity modulated, modulation can be recommended by both arms and realize phase keying etc.；And Electricity structure 30 is the part for electro-optical structure 20 power supply.

The type of drive of electricity structure 30 is single type of drive；

Electricity structure 30 includes electrode (not shown), and described electrode is for receiving the electricity of forward and/or reverse transfer Signal.

It should be noted that the electrooptic modulator of the present embodiment is the electrode in lumped modulator, namely its electricity structure End does not set build-out resistor.

Specifically, single type of drive is a kind of type of drive being used for travelling-wave modulator in prior art, can be by The junction capacity of manipulator halves, and series resistance doubles, and can ensure that manipulator has bigger electro-optic bandwidth.

Electric light lumped modulator of the present utility model, by being improved to the type of drive of the electricity structure of lumped modulator Single type of drive, can halve the junction capacity of manipulator, and series resistance doubles, and can realize reducing energy consumption, reducing manipulator chi Very little, reduction Insertion Loss, and improve the utilization ratio to driving voltage, and electro-optic bandwidth can be promoted, meet practical application request.

Further, preferred as above-described embodiment, described electro-optical structure can include PN junction；The type bag of described PN junction Include and laterally tie type, insert finger knot type and vertical junction type.

It is understood that single type of drive that the present embodiment is used can be independent of modulation PN junction, the most above-mentioned list The lumped modulator of type of drive can use lateral knot, insert all kinds of PN electro-optical structures such as referring to knot, vertical junction, and this utility model is to this It is not defined.

Further, preferred as above-described embodiment, described PN junction be chosen as silicon PN junction or germanium PN junction etc. based on etc. from The electro-optical structure of sub-effect of dispersion.

It should be noted that the list that the present embodiment is provided drives electrooptic modulator to be also applicable to imitate based on other electric light Answer the manipulator of (linear electro-optic effect, Kerr effect and Franz-Keldysh effect, quantum confinement Stark effect), such as niobium Acid lithium manipulator and III-V semiconductor modulator.

Fig. 3 is the schematic top plan view of the list driving electric light lumped modulator of one embodiment of this utility model；Such as Fig. 3 institute Showing, on the basis of above-described embodiment, described electro-optical structure 20 may also include the first modulation arm 21 and second of electrooptic modulator Modulation arm 22；

Described first modulation arm and the second modulation arm composition are electrically connected.

It should be noted that above-mentioned single driving i.e. refers to only drive two modulation arm, and two with a microwave signal source The region of identical doping type (P or N) is linked together by the modulated structure of modulation arm.Single middle section driving electricity structure Dc bias (Vb seeing in Fig. 3) should be connect, but the present embodiment is also applied for central authorities and does not do situation about being electrically connected.Such as without Dc bias or Dc bias and driving is input between outside two electrodes (such as the P++ of both sides in Fig. 3) after Signal averaging.

As it is shown on figure 3, preferred as above-described embodiment, described first modulation arm 21 and the N+ of described second modulation arm 22 + polarity is respectively positioned on the centre of described electro-optical structure；The P++ polarity of the first modulation arm 21 and the second modulation arm 22 lays respectively at described The both sides of electro-optical structure；And the N++ polar organization of the first modulation arm 21 and the second modulation arm 22 is electrically connected (preferably electricity Series connection).

It is understood that due to the symmetry of electro-optical structure, above-mentioned first modulation arm 21 and the second modulation arm 22 can be made P++ polarity be respectively positioned on the centre of described electro-optical structure；The N++ polarity of the first modulation arm 21 and the second modulation arm 22 lays respectively at The both sides of described electro-optical structure；And the P++ polar organization of the first modulation arm 21 and the second modulation arm 22 is electrically connected (preferably Electrical series).

Further, preferred as above-described embodiment, optical texture 10 can include interferometer 11 (not shown).

On this basis, preferred as the present embodiment, it is humorous that optical texture 10 can also include with interferometer 11 combination Shake chamber 12.

Fig. 4 a is that the Mach once moral Mach-Zehnder interference-type list of one embodiment of this utility model drives electric light lump The structural representation of manipulator；As shown in fig. 4 a, the fine rule of this manipulator topmost and bottom is optical texture 10a, and side is divided Two square frames not marking RF+, RF-are electricity structures 20, electro-optical structure not shown in figure.

Fig. 4 b is that the Michelson Michelson interferometer type list of one embodiment of this utility model drives electric light lump to adjust The structural representation of device processed；As shown in Figure 4 b, the fine rule of this manipulator bottom is optical texture 10b, itself and lower section institute in Fig. 4 a The difference of the optical texture 10a shown is, this optical texture 10b is 4 port coupler parts, and two ports of its bottom are respectively For input, output port (sequentially interchangeable)；And be that three port devices are (the most normal shown in the optical texture 10a below Fig. 4 a See is Y-branch bonder and multi-mode interference coupler), but use four port coupler also may be used.

Further, above-mentioned Michelson's interferometer may also include reflecting element, and described reflecting element is positioned at described stepping The end of Ke Erxun interferometer；Wherein, described reflecting element can be photon crystal reflecting mirror or annular mirror loop mirror.

It should be noted that the Michelson's interferometer of above-mentioned employing and Mach-Zehnder interferometer are existing optics knot Structure, this is not limited by this utility model.

Fig. 5 is the electric light lumped modulator equivalent circuit diagram of one embodiment of this utility model；

It should be noted that the purpose of Fig. 5 is to aid in reader is more fully understood that the electric light lumped modulation of the present embodiment The bandwidth calculation method of device, its meaning can embody (connection in series-parallel dividing potential drop) in following formula (2).By lumped modulator Be equivalent to rlc circuit in parallel with electric capacity be those skilled in the art it should be recognized that knowledge, do not repeat at this.

Fig. 6 is the small-signal electric light S21 response diagram of the different structure electrooptic modulator of one embodiment of utility model.

The bandwidth analysis side of the electric light lumped modulator provided for this utility model is provided below in conjunction with Fig. 5, Fig. 6 Method.

As a example by the lateral knot modulated structure that silicon electrooptic modulator is conventional, the lumped modulation brachium example that this utility model provides As for M=0.5mm, its electrical parameter is exemplified as:

The electric capacity C of the parts such as pad bonding pad₀=26fF；Series resistance R=12.7 Ω；The electricity of modulation arm electrode Sense L=0.176nH, the electric capacity C of modulation arm_J=260fF, thus small-signal electro-optic bandwidth can be entered by below equation (1)～(4) Row calculates:

$\left|S_{21}\left(\mathrm{\ω}\right)\right|=\frac{1}{\left|S_{21}\left(0\right)\right|}\frac{1}{\mathrm{\ω}}|1-\exp \left({\mathrm{j\ωt}}_0\right)|\left|H\left(j\mathrm{\ω}\right){\mathrm{\Γ}}_t\left(\mathrm{\ω}\right)\right|---\left(1\right)$

$H\left(j\mathrm{\ω}\right)=\frac{\frac{1}{{\mathrm{j\ωC}}_J}}{j\mathrm{\ω}L+R+\frac{1}{{\mathrm{j\ωC}}_J}}---\left(2\right)$

${\mathrm{\Γ}}_t=\frac{2Z_l}{Z_l+Z_0}---\left(3\right)$

$\frac{1}{Z_l}=\frac{1}{j\mathrm{\ω}L+\frac{1}{{\mathrm{j\ωC}}_J}+R}+\frac{1}{\frac{1}{{\mathrm{j\ωC}}_0}}---\left(4\right)$

Wherein Z₀Microwave transmission line characteristic impedance used by driving element, standard cable is Z₀=50 Ω characteristic impedances, ω For small signal modulation angular frequency, t₀For the transmission of light wave-wave bag by the time needed for modulation arm, H (j ω) represents that rlc circuit is to electricity Hold the voltage transfering function of C (PN junction), Γ_tRepresent the voltage transmission coefficient caused due to Microwave Impedance mismatch, Z_lRepresent RLC electricity Road input impedance.Frequency domain S21 (ω) represents that output optical signal exists under the small-signal Sine Modulated signal of telecommunication modulation that frequency is ω Frequency component at ω frequency.Calculate the electro-optic bandwidth of gained as shown in Figure 6.Wherein, solid line is that traditional double drives electricity structure S21 response, three dB bandwidth is about 10.7GHz；Dotted line is that the list that this utility model uses drives electricity structure (except electricity structure Outward, other structures are the most constant) S21 response, owing to single driving can make resistance R double, junction capacity C_JHalve, its three dB bandwidth Expand to 17.9GHz, thus the practical application request application requirement of 28Gbps can be met.

It should be noted that the optical texture of the two manipulator is Mach-Zehnder interferometer.Due to Michelson Interferometer type electric light lumped modulator can light forward, back through modulation arm time all produce the modulation effect of accumulation, so A Mach half for zehnder type modulation arm length is only needed i.e. to can get identical modulation effect.Chain-dotted line is that single driving electricity structure steps The S21 response of Ke Erxun interferometer type electrooptic modulator, its three dB bandwidth rises to 23.9GHz, thus can meet 28Gbps's Practical application request application requirement.

It should be noted that in this article, the relational terms of such as first and second or the like is used merely to a reality Body or operation separate with another entity or operating space, and deposit between not necessarily requiring or imply these entities or operating Relation or order in any this reality.And, term " includes ", " comprising " or its any other variant are intended to Comprising of nonexcludability, so that include that the process of a series of key element, method, article or equipment not only include that those are wanted Element, but also include other key elements being not expressly set out, or also include for this process, method, article or equipment Intrinsic key element.In the case of there is no more restriction, statement " including ... " key element limited, it is not excluded that Including process, method, article or the equipment of described key element there is also other identical element.Term " on ", D score etc. refers to The orientation shown or position relationship for based on orientation shown in the drawings or position relationship, be for only for ease of description this utility model and Simplify and describe rather than indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration And operation, therefore it is not intended that to restriction of the present utility model.Unless otherwise clearly defined and limited, term " install ", " be connected ", " connection " should be interpreted broadly, and connects for example, it may be fixing, it is also possible to be to removably connect, or connect integratedly Connect；Can be to be mechanically connected, it is also possible to be electrical connection；Can be to be joined directly together, it is also possible to be indirectly connected to by intermediary, can To be the connection of two element internals.For the ordinary skill in the art, can understand as the case may be above-mentioned Term concrete meaning in this utility model.

In description of the present utility model, illustrate a large amount of detail.Although it is understood that, of the present utility model Embodiment can be put into practice in the case of not having these details.In some instances, be not shown specifically known method, Structure and technology, in order to do not obscure the understanding of this description.Similarly, it will be appreciated that open in order to simplify this utility model And help to understand in each utility model aspect one or more, above, exemplary embodiment of the present utility model is retouched In stating, each feature of the present utility model is grouped together in single embodiment, figure or descriptions thereof sometimes.

Last it is noted that various embodiments above is only in order to illustrate the technical solution of the utility model, rather than it is limited System；Although being described in detail this utility model with reference to foregoing embodiments, those of ordinary skill in the art should Understand: the technical scheme described in foregoing embodiments still can be modified by it, or to the most some or all of Technical characteristic carries out equivalent；And these amendments or replacement, do not make the essence of appropriate technical solution depart from this practicality new The scope of type each embodiment technical scheme, it all should be contained in the middle of the scope of description of the present utility model.

Claims (10)

1. an electric light lumped modulator, it is characterised in that include optical texture, electro-optical structure and electricity structure；

Described electro-optical structure is used for producing electrooptic effect；Described optical texture is for producing corresponding tune according to described electrooptic effect Effect processed；Described electricity structure is for powering for described electro-optical structure；

The type of drive of described electricity structure is single type of drive；

Described electricity structure includes electrode, and described electrode is for receiving the signal of telecommunication of forward and/or reverse transfer.

Manipulator the most according to claim 1, it is characterised in that described electro-optical structure includes PN junction.

Manipulator the most according to claim 2, it is characterised in that the type of described PN junction includes laterally tying type, inserting finger Knot type and vertical junction type.

Manipulator the most according to claim 2, it is characterised in that described PN junction is silicon PN junction or germanium PN junction.

Manipulator the most according to claim 2, it is characterised in that described electro-optical structure includes the of electric light lumped modulator One modulation arm and the second modulation arm；

Described first modulation arm and the second modulation arm composition are electrically connected.

Manipulator the most according to claim 5, it is characterised in that described first modulation arm and the N+ of described second modulation arm + polarity is respectively positioned on the centre of described electro-optical structure；The P++ polarity of described first modulation arm and described second modulation arm lays respectively at The both sides of described electro-optical structure；The N++ polar organization of described first modulation arm and described second modulation arm is electrically connected；Or,

The P++ polarity of described first modulation arm and described second modulation arm is respectively positioned on the centre of described electro-optical structure；Described first The N++ polarity of modulation arm and described second modulation arm lays respectively at the both sides of described electro-optical structure；Described first modulation arm and institute The P++ polar organization stating the second modulation arm is electrically connected.

Manipulator the most according to claim 6, it is characterised in that described in be electrically connected as electrical series relationship.

Manipulator the most according to claim 1, it is characterised in that described optical texture includes interferometer.

Manipulator the most according to claim 8, it is characterised in that described optical texture also includes combining with described interferometer Resonator cavity.

Manipulator the most according to claim 8 or claim 9, it is characterised in that the type of described interferometer is Mach Zeng De Mach-Zehnder interferometer or Michelson Michelson interferometer.