CN205825905U - A kind of device of non-contact measurement bearing spheroid geometric parameter - Google Patents
A kind of device of non-contact measurement bearing spheroid geometric parameter Download PDFInfo
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- CN205825905U CN205825905U CN201620554378.0U CN201620554378U CN205825905U CN 205825905 U CN205825905 U CN 205825905U CN 201620554378 U CN201620554378 U CN 201620554378U CN 205825905 U CN205825905 U CN 205825905U
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- measurement
- plane
- spheroid
- bearing spheroid
- rotating shaft
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Abstract
A kind of device of non-contact measurement bearing spheroid geometric parameter, including two optical displacement sensors, two optical displacement sensors are oppositely arranged and are positioned in same measurement plane, the optical axis of two optical displacement sensors is positioned on same axis, measured bearing spheroid is placed on one can be in the rotating shaft of an optical axis direction being perpendicular to two optical pickocffs, there is a pore at the center of this rotating shaft, this pore and a vacuum pump are connected, described rotating shaft and the output shaft linkage driving motor, one meridian plane of described measurement plane and measured bearing spheroid is in approximately the same plane.A kind of certainty of measurement of this utility model offer is higher, the device of the non-contact measurement bearing spheroid geometric parameter of speed.
Description
Technical field
This utility model relates to the measurement apparatus of bearing spheroid, the measurement dress of a kind of bearing spheroid geometric parameter
Put.
Background technology
Several core parameters in bearing spheroid are as the biggest in average diameter, maximum and the parameter measurement such as minimum diameter, circularity
Part uses contact mode, as utilized contact roundness measuring equipment to measure the diameter of bearing spheroid, circularity.Contact method measures bearing
There is following shortcoming in spheroid parameter: 1) certainty of measurement can only achieve 0.1 micron；2) detection speed is slow；3) for ultra-smooth
Bearing surface may produce frictionally damage.Along with the application of super-precision bearing is more and more extensive, its demand is the most more come
The biggest, it is badly in need of a kind of quick, accurate detection method, super-precision bearing can be carried out rapid screening, and conventional at present connect
Touch detection method cannot meet such requirement.
Summary of the invention
In order to the certainty of measurement overcoming existing contact type measurement bearing spheroid geometric parameter mode is relatively low, slow not
Foot, a kind of certainty of measurement of this utility model offer is higher, the dress of the non-contact measurement bearing spheroid geometric parameter of speed
Put.
This utility model solves its technical problem and be the technical scheme is that
The device of a kind of non-contact measurement bearing spheroid geometric parameter, including two optical displacement sensors, two light
Displacement sensor is oppositely arranged and is positioned in same measurement plane, and the optical axis of two optical displacement sensors is positioned at same axle
On line, measured bearing spheroid is placed on one can be in the rotating shaft of an optical axis direction being perpendicular to two optical pickocffs, this turn
The center of axle has a pore, this pore and a vacuum pump to be connected, described rotating shaft and the output shaft linkage driving motor,
One meridian plane of described measurement plane and measured bearing spheroid is in approximately the same plane.
Further, described device also includes the measurement inversion mechanism for driving measured bearing spheroid to rotate, described measurement
The motion end of inversion mechanism coordinates with described measured bearing spheroid.
Further, described measurement inversion mechanism includes rubbing bar with the hands and for the transposition driver driving described stranding bar to translate,
Described stranding bar is connected with the motion end of described transposition driver, and the front end of described stranding bar is curved, and the lower surface of described stranding bar is
For driving the rubbing surface of measured bearing spheroid.
Technology of the present utility model is contemplated that: using measuring method, bearing spheroid can quickly be surveyed by the method
Amount.Diameter on three orthogonal meridian planes of complete matched bearings spheroid, the measurement of circularity, certainty of measurement reaches 0.01 micron.
With two optical displacement sensors placed in opposite directions, the measurement axis making two sensors is coaxial, and uses standard ball
By two optical displacement sensors along the displacement set to zero measuring direction.By the tested ball measured on two displacement transducers
Body diameter variable quantity and the differential signal of circularity deviation standard ball, determine tested sphere diameter and circularities.
Using a kind of lower end is plane, and surface has certain frictional force, and there is the stranding lever apparatus of an arc front end, automatically
First, second and third time measure tested sphere diameter and circularity diameter by tested spheroid with measure plane (plane 1) phase
Ball 90-degree rotation will be measured along measurement axis in vertical plane (plane 2).
The beneficial effects of the utility model are mainly manifested in: certainty of measurement is higher, speed.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the device of non-contact measurement bearing ball body geometric parameter.
Fig. 2 is the structure chart that bearing spheroid rotates.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is further described.
With reference to Fig. 1～Fig. 2, the device of a kind of non-contact measurement bearing spheroid geometric parameter, including two optical displacements
Sensor 1, two optical displacement sensors 1 are oppositely arranged and are positioned in same measurement plane, two optical displacement sensors
Optical axis be positioned on same axis, measured bearing spheroid 2 is placed on one can be along an optical axis being perpendicular to two optical pickocffs
In the rotating shaft 3 in direction, the center of this rotating shaft 3 has a pore, this pore and a vacuum pump to be connected, described rotating shaft 3 with drive
The output shaft linkage of galvanic electricity machine, a meridian plane of described measurement plane and measured bearing spheroid is in approximately the same plane.
Further, described device also includes the measurement inversion mechanism for driving measured bearing spheroid to rotate, described measurement
The motion end of inversion mechanism coordinates with described measured bearing spheroid.
Further, described measurement inversion mechanism includes rubbing bar 4 with the hands and for the transposition driver driving described stranding bar to translate
5, described stranding bar 4 is connected with the motion end of described transposition driver 5, and the front end of described stranding bar 4 is curved, described stranding bar 4 times
End face is the rubbing surface for driving measured bearing spheroid.
In the present embodiment, measured bearing spheroid is placed on one can be along an optical axis direction being perpendicular to two optical pickocffs
Rotating shaft on, the center of this rotating shaft has a pore, this pore and a vacuum pump to be connected, during measurement, open vacuum valve, will
Bearing ball adsorbs in rotating shaft, and this rotating shaft can rotate along its axis under motor drives, and drives measured bearing spheroid to turn together
Dynamic.
Due to rotating shaft, when rotating, this has little rocking in diametrically measuring direction, and the amplitude rocked depends on
The bearing of rotating shaft used, such rocking can be reduced to below 100nm by general employing air bearing, the diameter of super-precision bearing
Tolerance is less than 100 nanometers, therefore, and can rocking and nothing due to rotating shaft itself with a displacement sensor bearing diameter
Method is accurately measured, in order to eliminate due to rotating shaft measure direction rock the measurement error brought, repetitive measurement can be passed through, often
Secondary measured bearing ball is turned a low-angle along the axis of rotating shaft when measuring, after the result of repetitive measurement is comprehensively analyzed, can go
Except the error brought is rocked in rotating shaft, but this measuring method need to be by repetitive measurement, and measurement also needs to make tested spheroid every time
Rotating an angle, therefore, measuring speed is slow, it is impossible to meet industrial needs.
For solving this problem, the present embodiment selects to use Measured by Twin Displacement Transducer metering method.Due to two displacement sensings
Device is placed in opposite directions, and the tested spheroid caused that rocks of rotating shaft is reverse relative to the movement of displacement transducer, therefore, real
Border measure time, by two displacement sensors to signal carry out difference, can effectively remove due to rotating shaft measure direction
Rock brought measurement error.
Two displacement transducers are placed on of same measurement plane (plane 1), this plane and measured bearing spheroid
Meridian plane is in approximately the same plane, as shown in FIG..Before measurement, first by a standard ball, system is corrected, regulates respectively
The position of two displacement transducers so that the displacement readings of two sensors is all zero.During measurement, measured bearing spheroid is by rotating shaft
Being rotated, if tested ball is completely the same with standard ball, the most after a full 360 degrees of rotation, the reading of two displacement transducers will begin
It is zero eventually, represents that this tested ball diameter on this meridian plane is consistent with standard ball, and circularity is the most consistent.Any deviation standard
The displacement of ball all will be got off as error log, by the data recorded, can calculate this quilt on this meridian plane
Survey ball to change relative to diameter change, the circularity of standard ball；After the measurement completing a meridian plane, ball at another and is surveyed
Plane (plane 2) the interior 90-degree rotation that amount plane is vertical, now, another meridian plane of tested spheroid and measurement planes overlapping,
Repeat primary process of measurement, this tested ball deviation of diameter and circularity and standard ball on second meridian plane can be measured；
After completing to measure for the second time, by ball 90-degree rotation in measuring plane (plane 1), then make it vertical with measuring plane
90-degree rotation, repeated measure program again in one plane (plane 2), can measure straight in its 3rd orthogonal meridian plane of this ball
Footpath and circularity are relative to the deviation of standard ball.
During the measurement being generally noted above, often completing diameter and the roundness measurement of a spheroid meridian plane, needs will be by
Survey spheroid in another plane perpendicular with measuring plane along measurement axis 90-degree rotation, patent describes one the completeest
Become the device of this action.
One surface has the bar of rubbing with the hands of bigger frictional force and is placed on the top of tested spheroid, and its lower surface is a plane, from
There is a gap on the upper summit of tested spheroid, when need by tested spheroid vertical with measure 90-degree rotation in the plane of plane
Time, this stranding bar being moved down a distance so that it is lower end plane is slightly below the upper summit of tested ball, the front end rubbing bar with the hands has one
Arc, when pushing stranding bar to tested spheroid, its lower end plane gradually contacts with the upper summit of tested spheroid and drives tested
Spheroid is having forward the trend rolled, owing to tested ball is limited in the top V-groove that rotating shaft is held, it is impossible to roll forward
Dynamic, can only roll in original place, when rub with the hands distance that bar moves equal to tested spheroid circumference four/for the moment, tested spheroid is just
Roll 90 degree well.
Claims (3)
1. the device of a non-contact measurement bearing spheroid geometric parameter, it is characterised in that: described device includes two optics
Displacement transducer, two optical displacement sensors are oppositely arranged and are positioned in same measurement plane, two optical displacement sensings
The optical axis of device is positioned on same axis, and measured bearing spheroid is placed on one can be along an optical axis being perpendicular to two optical pickocffs
In the rotating shaft in direction, the center of this rotating shaft has a pore, this pore and a vacuum pump to be connected, described rotating shaft and driving electricity
The output shaft linkage of machine, a meridian plane of described measurement plane and measured bearing spheroid is in approximately the same plane.
2. the device of non-contact measurement bearing spheroid geometric parameter as claimed in claim 1, it is characterised in that: described device
Also include the measurement inversion mechanism for driving measured bearing spheroid to rotate, the motion end of described measurement inversion mechanism and described quilt
Survey bearing spheroid to coordinate.
3. the device of contact type measurement bearing spheroid geometric parameter as claimed in claim 2, it is characterised in that: described measurement is changed
Position mechanism includes rubbing bar with the hands and for the transposition driver driving described stranding bar to translate, and described stranding bar is dynamic with described transposition driver
Making end to connect, the front end of described stranding bar is curved, and the lower surface of described stranding bar is the rubbing surface for driving measured bearing spheroid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620554378.0U CN205825905U (en) | 2016-06-08 | 2016-06-08 | A kind of device of non-contact measurement bearing spheroid geometric parameter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620554378.0U CN205825905U (en) | 2016-06-08 | 2016-06-08 | A kind of device of non-contact measurement bearing spheroid geometric parameter |
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| Publication Number | Publication Date |
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| CN205825905U true CN205825905U (en) | 2016-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620554378.0U Expired - Fee Related CN205825905U (en) | 2016-06-08 | 2016-06-08 | A kind of device of non-contact measurement bearing spheroid geometric parameter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105910542A (en) * | 2016-06-08 | 2016-08-31 | 浙江工业大学 | Non-contact measurement bearing sphere geometry parameter apparatus |
-
2016
- 2016-06-08 CN CN201620554378.0U patent/CN205825905U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105910542A (en) * | 2016-06-08 | 2016-08-31 | 浙江工业大学 | Non-contact measurement bearing sphere geometry parameter apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161221 Termination date: 20190608 |