CN205789880U - A kind of silicon chip wet chemical cleans fixture - Google Patents
A kind of silicon chip wet chemical cleans fixture Download PDFInfo
- Publication number
- CN205789880U CN205789880U CN201521130051.2U CN201521130051U CN205789880U CN 205789880 U CN205789880 U CN 205789880U CN 201521130051 U CN201521130051 U CN 201521130051U CN 205789880 U CN205789880 U CN 205789880U
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- frame
- frame structure
- wet chemical
- inside casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a kind of silicon chip wet chemical cleans fixture, this silicon chip wet chemical cleans fixture includes inner frame structure and frame structure, described inner frame structure is used for fixing silicon chip, described frame structure is used for fixing described inner frame structure, first inside casing handle of inner frame structure and the bottom circular arc of the second inside casing handle are stuck in the groove of two head rods of frame structure, in inner frame structure U-shape structure bottom is stuck in the groove of frame structure the second connecting rod the most smoothly simultaneously, inner frame structure and frame structure is made to be formed with stable entirety.The silicon chip wet chemical cleans fixture that this utility model provides, solve in prior art the problem that the manual cleaning for small size silicon chip does not has corresponding fixture, silicon chip can be held during wet chemical cleans and after cleaning is complete, silicon wafer horizontal is placed, it is simple to silicon chip shifts.
Description
Technical field
This utility model relates to a kind of fixture, particularly relates to a kind of silicon chip wet chemical cleans fixture.
Background technology
In semi-conductor industry produces, almost every procedure has the problem of Wafer Cleaning, and the quality of Wafer Cleaning has serious impact to device performance.Owing to Wafer Cleaning is most important most frequent step during semiconductor device manufactures, and its cleaning quality will directly influence the yield rate of device, Performance And Reliability, so the research to cleaning is carried out constantly both at home and abroad always.People have developed a variety of process that can be used for Wafer Cleaning and technology now, common are wet chemical cleans method, ultrasonic cleaning method, million sound ablutions, plasma clean etc..These methods and technology have been widely used in the Wafer Cleaning in silicon chip processing and device manufacture.Wherein wet chemical cleans method silicon chip surface process in still in leading position.
Although large scale industry produces the cleaning equipment having specialty, but is nearly all to tackle the cleaning in the Silicon Wafer of more than 6 inches.In actual technological experiment research, inevitably use the silicon chip of small size (2～4 inches), carry out manual cleaning.But the craft for small size silicon chip is cleaned, the most corresponding fixture.
Utility model content
In view of the above problems, propose this utility model and provide a kind of silicon chip wet chemical cleans fixture, going for the manual cleaning process of small size silicon chip, this fixture is for holding silicon chip and being placed by silicon wafer horizontal after cleaning is complete during wet chemical cleans, it is simple to silicon chip shifts.
This utility model provides a kind of silicon chip wet chemical cleans fixture, and including inner frame structure and frame structure, described inner frame structure is used for fixing silicon chip, and described frame structure is used for fixing described inner frame structure；
Described inner frame structure is symmetrical structure, including left half frame, right half frame, two inside casing handles, it is U-shape structure after described left half frame and described right half frame combination, described left half frame lowermost end and right half frame lowermost end are flexibly connected, described left half frame top and right half frame top are flexibly connected with two inside casing handles respectively, and the inner side of described U-shape structure is provided with the groove for fixing silicon chip；
nullDescribed frame structure includes two housing main frames、Two head rods、Two the second connecting rods and at least two border handle，Described housing main frame is rectangle or the square frame of upper opening，The top of the right and left of described rectangle or square frame is provided with two screw holes upwards，Two slots have been respectively arranged below it at described screw hole，The base of described rectangle or square frame is provided with two jacks，The distance of said two jack matches with the length of described U-shape structure bottom，Described at least two border handle is connected by described screw hole and said two housing main frame are fixing respectively，The groove that the lower shape with two inside casing handles matches it is provided with in the middle of described head rod，Two ends are provided with the plug matched with described slot，The groove that the thickness with described U-shape structure bottom matches it is provided with in the middle of described second connecting rod，Two ends are provided with the plug matched with described jack，Said two housing main frame is linked together by said two head rod and said two the second connecting rod respectively by two slots and two jacks.
This utility model has the beneficial effect that:
By providing a kind of silicon chip wet chemical cleans fixture, solve in prior art the problem that the manual cleaning for small size silicon chip does not has corresponding fixture, silicon chip can be held during wet chemical cleans and after cleaning is complete, silicon wafer horizontal is placed, it is simple to silicon chip shifts.
Accompanying drawing explanation
Fig. 1 is the front view of this utility model embodiment silicon chip wet chemical cleans fixture inner frame structure；
Fig. 2 is the three-view diagram of right half frame in this utility model embodiment silicon chip wet chemical cleans fixture inner frame structure；
Fig. 3 is the three-view diagram of left half frame in this utility model embodiment silicon chip wet chemical cleans fixture inner frame structure；
Fig. 4 is two inside casing handle schematic diagrams in this utility model embodiment silicon chip wet chemical cleans fixture inner frame structure；
Fig. 5 is the sectional view of this utility model embodiment silicon chip wet chemical cleans fixture frame structure；
Fig. 6 is left view and the front view of the first housing main frame of this utility model embodiment silicon chip wet chemical cleans fixture frame structure；
Fig. 7 is left view and the front view of the head rod of this utility model embodiment silicon chip wet chemical cleans fixture frame structure；
Fig. 8 is left view and the front view of the second connecting rod of this utility model embodiment silicon chip wet chemical cleans fixture frame structure；
Fig. 9 is the front view of the border handle of this utility model embodiment silicon chip wet chemical cleans fixture frame structure；
Figure 10 is the schematic diagram after this utility model embodiment inner frame structure assembles with frame structure.
In figure, right half frame 1, left half frame 2, first inside casing handle 3, second inside casing handle 4, silicon chip 5, first screw hole 6-1, second screw hole 6-2, 3rd screw hole 7-1, 4th screw hole 7-2, 5th screw hole 8-1, 6th screw hole 8-2, first border handle 9, second border handle 10, first housing main frame 11, second housing main frame 12, 7th screw hole 13-1, 8th screw hole 13-2, first slot 14-1, second slot 14-2, first plug 14-3, second plug 14-4, first jack 15-1, second plug 15-2, 3rd plug 15-3, 4th plug 15-4, head rod 16, second connecting rod 17, screw rod 18.
Detailed description of the invention
In order to the manual cleaning solved in prior art for small size silicon chip does not has the problem of corresponding fixture, this utility model provides a kind of silicon chip wet chemical cleans fixture, below in conjunction with accompanying drawing and embodiment, is further elaborated this utility model.Should be appreciated that specific embodiment described herein, only in order to explain this utility model, does not limit this utility model.
According to embodiment of the present utility model, provide a kind of silicon chip wet chemical cleans fixture, including inner frame structure and frame structure, described inner frame structure is used for fixing silicon chip, described frame structure is used for fixing described inner frame structure, first inside casing handle of concrete inner frame structure and the bottom of the second inside casing handle are stuck in the groove of two head rods of frame structure, in inner frame structure U-shape structure bottom is just stuck in the groove of frame structure the second connecting rod simultaneously.
Fig. 1 is the front view of the silicon chip wet chemical cleans fixture inner frame structure of this utility model embodiment, as shown in Figure 1, the inner frame structure of the silicon chip wet chemical cleans fixture according to this utility model embodiment includes: right half frame 1, left half frame 2, first inside casing handle 3 and the second inside casing handle 4, it is U-shape structure after described left half frame 2 and described right half frame 1 combination, described left half frame 2 lowermost end and right half frame 1 lowermost end are flexibly connected, described left half frame 2 top and right half frame 1 top are flexibly connected with the second inside casing handle 4 and the first inside casing handle 3 respectively, the inner side of described U-shape structure is provided with the groove for fixing silicon chip 5.The matching form of the shape of described groove and silicon chip 5 closes.
As it is shown in figure 1, described U-shape structure includes a base and be parallel to each other two limits with described base vertical, all it is connected at an angle with base be parallel to each other two limits of base vertical.
Concrete, the connected mode of described left half frame 2 lowermost end and right half frame 1 lowermost end connects for riveting or screw rod, and this utility model embodiment uses the mode that screw rod connects.Fig. 2 is the three-view diagram of right half frame in this utility model embodiment silicon chip wet chemical cleans fixture inner frame structure, and Fig. 3 is the three-view diagram of left half frame in this utility model embodiment silicon chip wet chemical cleans fixture inner frame structure；In figs. 2 and 3, Far Left is left view, and centre is front view, and rightmost is right view.As shown in Figure 2, it is provided with the first screw hole 6-1 at right half frame 1 lowermost end, being provided with the second screw hole 6-2 at left half frame 2 lowermost end, described right half frame 1 and left half frame 2 are linked together by the first screw hole 6-1 and the second screw hole 6-2, and right half frame 1 and left half frame 2 can be freely rotatable around the center of circle, junction.It addition, be provided with the 3rd screw hole 7-1 at right half frame 1 top, be provided with the 5th screw hole 8-1 at right half frame 2 top.
The connected mode of described left half frame 2 top and right half frame 1 top and the second inside casing handle 4 and the first inside casing handle 3 is that screw rod connects.Fig. 4 is two inside casing handle schematic diagrams in this utility model embodiment silicon chip wet chemical cleans fixture inner frame structure, and the left side is the first inside casing handle 3, and the right is the first inside casing handle 4.Described first inside casing handle 3 and the second inside casing handle 4 are all made up of the convex structure of rectangle handle portion and lowermost end.Lowermost end at the first inside casing handle 3 is provided with the 4th screw hole 7-2, and the lowermost end at the second inside casing handle 4 is provided with the 6th screw hole 8-2.Right half frame 1 and the first inside casing handle 3 are linked together by the 3rd screw hole 7-1 and the 4th screw hole 7-2, and right half frame 1 and the first inside casing handle 3 can be freely rotatable around the center of circle, junction；Right half frame 2 and the second inside casing handle 4 are linked together by the 5th screw hole 8-1 and the 6th screw hole 8-2, and right half frame 2 and the second inside casing handle 4 can be freely rotatable around the center of circle, junction.
Fig. 5 is the sectional view of the silicon chip wet chemical cleans fixture frame structure of this utility model embodiment, as shown in Figure 5, the frame structure of the silicon chip wet chemical cleans fixture according to this utility model embodiment includes: first housing main frame the 11, second housing main frame the 12, first border handle the 9, second border handle 10, head rod the 16, second connecting rod 17, described first border handle 9 and the second border handle 10 are fixed be connected with the first housing main frame 11 and the second housing main frame 12.
Although the silicon chip wet chemical cleans fixture frame structure of this utility model embodiment includes head rod that two structures are identical and identical the second connecting rod of two structures, but due to the sectional view of silicon chip wet chemical cleans fixture frame structure that Fig. 5 is this utility model embodiment, so illustrate only one of them head rod 16 and one of them second connecting rod 17.
Fig. 6 is left view and the front view of the first housing main frame 11 of this utility model embodiment silicon chip wet chemical cleans fixture frame structure, and wherein the left side is left view, and the right is front view.
As shown in Figure 6, described first housing main frame 11 is the square frame of upper opening, the top of the right and left of described square frame is provided with the 7th screw hole 13-1 upwards and the 8th screw hole 13-2, it has been respectively arranged below the first slot 14-1 and the second slot 14-2 at described 7th screw hole 13-1 and the 8th screw hole 13-2, the base of described rectangle or square frame is provided with the first jack 15-1 and the second jack 15-2, and the distance of described first jack 15-1 and the second jack 15-2 matches with the length of described U-shape structure bottom.Described first slot 14-1, the second slot 14-2 are square slot, and the first jack 15-1, the second plug 15-2 are circular socket holes.In this utility model embodiment, the first housing main frame 11 is identical with the structure of the second housing main frame 12.
Fig. 7 is left view and the front view of the head rod 16 of this utility model embodiment silicon chip wet chemical cleans fixture frame structure, and the left side is left view, and the right is front view.As shown in Figure 7, it is provided with, in the middle of described head rod 16, the groove that the lower shape with the first inside casing handle 3 or the second inside casing handle 4 matches, one end is provided with the first plug 14-3 that the first slot 14-1 with described first housing main frame 11 matches, it is arc-shaped that other end is provided with the groove arranged in the middle of the second plug 14-4 matched with corresponding slot on described second housing main frame 12, described head rod 16.In this utility model embodiment, the structure of two head rods is identical.The right and left of second housing main frame 11 and the second housing main frame 12 is linked together by two head rods respectively.
Fig. 8 is left view and the front view of the second connecting rod 17 of this utility model embodiment silicon chip wet chemical cleans fixture inner frame structure, and the left side is left view, and the right is front view.As shown in Figure 8, it is provided with, in the middle of described second connecting rod 17, the groove that the thickness with described U-shape structure bottom matches, one end is provided with the 3rd plug 15-3 that the first jack 15-1 with described first housing main frame 11 matches, and other end is provided with the 4th plug 14-4 matched with corresponding slot on described second housing main frame 12.In this utility model embodiment, the structure of two head rods is identical.The base of the second housing main frame 11 and the second housing main frame 12 is linked together by two the second connecting rods.
The quantity of described head rod 16 and the second connecting rod 17 upper groove may be arranged as multiple, is positioned on frame structure for more inner frame structure.
Fig. 9 is the front view of the first border handle 9 of this utility model embodiment silicon chip wet chemical cleans fixture inner frame structure, is provided with the screw rod 18 matched in the 7th screw hole 13-1 or the 8th screw hole 13-2 of the first housing main frame 11 in the bottom of the first border handle 9.In this utility model embodiment, the first border handle 9 is identical with the structure of the second border handle 10.
Concrete, the material of described inner frame structure and frame structure is politef, inner frame structure and frame structure and collectively forms silicon chip wet chemical cleans fixture.Figure 10 is the schematic diagram after this utility model embodiment inner frame structure assembles with frame structure, as shown in Figure 10, in the groove of the bottom circular arc of inner frame structure the first inside casing handle 3 and the second inside casing handle 4 two head rods 16 of card frame structure respectively, in inner frame structure U-shape structure bottom is stuck in the groove of frame structure the second connecting rod 17 the most smoothly simultaneously, inner frame structure and frame structure is made to be formed with stable entirety.
Can carry out in accordance with the following steps when using the silicon chip wet chemical cleans fixture cleaning silicon chip of this utility model embodiment:
Silicon chip is inserted perpendicularly in the groove of inner frame structure；
Inner frame structure is loaded frame structure, the circular arc making the first inside casing handle and the second inside casing handle is blocked in the semicircle groove of two head rods respectively, in U-shape structure bottom is stuck in the groove of the second connecting rod the most smoothly simultaneously, inner frame structure and frame structure is made to be formed with stable entirety；
Silicon chip can be positioned in cleanout fluid by the first border handle and the second border handle that utilize frame structure, utilizes the wet chemical technology method cleaning silicon chip of standard RCA process or other Optimal improvements；
Silicon chip after cleaning can dry or use the method such as isopropanol to remove surface moisture residual on fixture, also may utilize inner frame structure by silicon chip extracting, rotates the first inside casing handle and silicon wafer horizontal is positioned in protectiveness liquid by the second inside casing handle, it is simple to transfer；
Owing to silicon wafer horizontal is positioned in protectiveness liquid, institute is so that taking.When taking, using wand to be held by silicon chip, utilize the first inside casing handle and the second inside casing handle to be pulled open by the U-shape structure of inner frame structure, silicon chip i.e. can be taken off.
The silicon chip wet chemical cleans of this utility model embodiment fixture uses flexibly, the silicon chip cleaned is taken conveniently, it is easy to preserve, and can mate with silicon chip according to the size that the different designs of die size is different, and require to design more groove on head rod and the second connecting rod according to usage quantity, place for more inner frame structure and use, be a kind of cleaning means easy to use.
Obviously, those skilled in the art can carry out various change and modification without deviating from spirit and scope of the present utility model to this utility model.So, if these amendments of the present utility model and modification belong within the scope of this utility model claim and equivalent technologies thereof, then this utility model is also intended to comprise these change and modification.
Claims (6)
1. a silicon chip wet chemical cleans fixture, it is characterised in that include inner frame structure and frame structure,
Described inner frame structure is used for fixing silicon chip, and described frame structure is used for fixing described inner frame structure；
Described inner frame structure is symmetrical structure, including left half frame, right half frame, two inside casing handles, a described left side
Being U-shape structure after half frame and described right half frame combination, described left half frame lowermost end and right half frame lowermost end are movable
Connecting, described left half frame top and right half frame top are flexibly connected with two inside casing handles respectively, described
The inner side of U-shape structure is provided with the groove for fixing silicon chip；
Described frame structure include two housing main frames, two head rods, two the second connecting rods and
At least two border handle, described housing main frame is rectangle or the square frame of upper opening, described
The top of the right and left of rectangle or square frame is provided with two screw holes upwards, at described screw
Hole has been respectively arranged below two slots, and the base of described rectangle or square frame is provided with two and inserts
Hole, the distance of said two jack matches with the length of described U-shape structure bottom, outside described at least two
Frame handle is connected by described screw hole and said two housing main frame are fixing respectively, described head rod
On be provided with the groove that the lower shape with two inside casing handles matches, two ends are provided with and described slot phase
The plug coordinated, described second connecting rod is provided with recessed with what the thickness of described U-shape structure bottom matched
Groove, two ends are provided with the plug matched with described jack, said two head rod and said two
Said two housing main frame is linked together by two connecting rods respectively by two slots and two jacks.
2. silicon chip wet chemical cleans fixture as claimed in claim 1, it is characterised in that a described left side half
The connected mode of frame lowermost end and right half frame lowermost end connects for riveting or screw rod.
3. silicon chip wet chemical cleans fixture as claimed in claim 1, it is characterised in that a described left side half
The connected mode of frame top and right half frame top and two inside casing handles is that screw rod connects.
4. silicon chip wet chemical cleans fixture as claimed in claim 1, it is characterised in that described inside casing
The material of structure and frame structure is politef.
5. silicon chip wet chemical cleans fixture as claimed in claim 1, it is characterised in that said two
Slot is square slot, and said two jack is circular socket holes.
6. silicon chip wet chemical cleans fixture as claimed in claim 1, it is characterised in that said two
The lowermost end of inside casing handle is arc-shaped, and the groove arranged in the middle of described head rod is arc-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521130051.2U CN205789880U (en) | 2015-12-30 | 2015-12-30 | A kind of silicon chip wet chemical cleans fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521130051.2U CN205789880U (en) | 2015-12-30 | 2015-12-30 | A kind of silicon chip wet chemical cleans fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205789880U true CN205789880U (en) | 2016-12-07 |
Family
ID=57413630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521130051.2U Active CN205789880U (en) | 2015-12-30 | 2015-12-30 | A kind of silicon chip wet chemical cleans fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205789880U (en) |
-
2015
- 2015-12-30 CN CN201521130051.2U patent/CN205789880U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205789880U (en) | A kind of silicon chip wet chemical cleans fixture | |
| CN204292792U (en) | Washable singlehanded button cup cover for water cup | |
| CN103575075B (en) | A kind of silicon chip dries system | |
| CN107042592B (en) | One kind being convenient for clean pearl drilling equipment | |
| CN105576444A (en) | Realization method of mobile socket | |
| CN207068810U (en) | A kind of extracting tool | |
| CN207068800U (en) | A kind of delivery air air lock | |
| CN206472738U (en) | A kind of rinsing device after fish processing | |
| CN105251747B (en) | A kind of multifunction ultrasonic sample bottle rack for cleaning | |
| CN203970272U (en) | Outside a kind of family, window cleans cleaner | |
| CN204015039U (en) | Raisins, dried apricot, red date cleaning device | |
| CN208688744U (en) | A kind of fixed device of scene door and window air-leakage test | |
| CN207461830U (en) | One kind is convenient for the holding clean novel glass showcase of inner wall | |
| CN205771382U (en) | Buffering bucket | |
| CN207972841U (en) | A kind of conjunction stacking device of equivalent spoon | |
| CN208679890U (en) | A kind of electrothermal tube dedusting structure | |
| CN204806850U (en) | Wall -hanging sampling tube drying process device | |
| CN206542004U (en) | A kind of wiring board | |
| CN206566961U (en) | A kind of rack for test tube | |
| CN205146832U (en) | Silicon chip washs uses basket of flowers | |
| CN203965670U (en) | Tinsel Antikink device | |
| CN205570965U (en) | Chromatogram bottle auxiliary cleaning frame | |
| CN203610372U (en) | Ceramic tile surface de-dusting blower for production of ceramic tiles | |
| CN203991459U (en) | Clean test tube special-purpose ultrasonic oscillator | |
| CN210076896U (en) | Bonding brush mounting apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |