CN205787302U - 一种高精度对准光学元件和玻璃平板的装置 - Google Patents
一种高精度对准光学元件和玻璃平板的装置 Download PDFInfo
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106895798A (zh) * | 2016-12-27 | 2017-06-27 | 中国科学院长春光学精密机械与物理研究所 | 一种光栅平行性检测装置 |
CN106959082A (zh) * | 2017-04-27 | 2017-07-18 | 中国科学院长春光学精密机械与物理研究所 | 一种多光轴系统光轴平行度检测方法及系统 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106895798A (zh) * | 2016-12-27 | 2017-06-27 | 中国科学院长春光学精密机械与物理研究所 | 一种光栅平行性检测装置 |
CN106895798B (zh) * | 2016-12-27 | 2019-03-22 | 中国科学院长春光学精密机械与物理研究所 | 一种光栅平行性检测装置 |
CN106959082A (zh) * | 2017-04-27 | 2017-07-18 | 中国科学院长春光学精密机械与物理研究所 | 一种多光轴系统光轴平行度检测方法及系统 |
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Inventor after: Huang Hui Inventor after: Zhao Zhihui Inventor after: Wang Huamao Inventor after: Liu Jianhui Inventor after: Luo Jingdong Inventor before: Xie Yu Inventor before: Li Heyi Inventor before: Huang Hui Inventor before: Zhao Zhihui |
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Effective date of registration: 20170301 Address after: 518000 Shenzhen City, Baoan District Province, Xixiang street, Aberdeen Road, No. 44 veterans industrial city, a building, floor 2 (West) Patentee after: Shenzhen Rui Sheng Automation Technology Co., Ltd. Address before: 518000 Guangdong city of Shenzhen province Baoan District Fuyong street Fuyong Junyi Industrial Park eighth layer 8015 rooms Patentee before: SHENZHEN DINGDIAN VISUAL AUTOMATION TECHNOLOGY CO., LTD. |
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Address after: 518000 Shenzhen City, Baoan District Province, Xixiang street, Aberdeen Road, No. 44 veterans industrial city, a building, floor 2 (West) Patentee after: Shenzhen Rui Sheng Automation Technology Co., Ltd. Address before: 518000 Shenzhen City, Baoan District Province, Xixiang street, Aberdeen Road, No. 44 veterans industrial city, a building, floor 2 (West) Patentee before: Shenzhen Rui Sheng Automation Technology Co., Ltd. |
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