CN205785541U - vacuum chamber temperature detecting system - Google Patents
vacuum chamber temperature detecting system Download PDFInfo
- Publication number
- CN205785541U CN205785541U CN201620669047.1U CN201620669047U CN205785541U CN 205785541 U CN205785541 U CN 205785541U CN 201620669047 U CN201620669047 U CN 201620669047U CN 205785541 U CN205785541 U CN 205785541U
- Authority
- CN
- China
- Prior art keywords
- vacuum chamber
- temperature detecting
- detecting system
- detector
- chamber temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
A kind of vacuum chamber temperature detecting system, the temperature of the testee in detecting vacuum chamber, described vacuum chamber temperature detecting system includes optical system, detector, signal processing circuit and display output device, described vacuum chamber has opening, described optical system is arranged in the opening of described vacuum chamber, the infrared energy of described optical system testee in the visual field converging in described vacuum chamber, and described infrared energy is passed to described detector；Described detector is for being changed into voltage signal by described infrared energy；Described signal processing circuit is used for the voltage signal that pick-up probe generates the temperature being transformed into described testee.Vacuum chamber temperature detecting system, it is not necessary to directly contact the surface temperature that just can measure it exactly with testee, easy to use, response speed is fast, highly sensitive, and temperature-measuring range is wide, may be implemented in line contactless continuous measuring.
Description
Technical field
This utility model relates to a kind of vacuum chamber temperature detecting system, belongs to face equipment technical field.
Background technology
Temperature is a physical quantity of the tolerance cold and hot degree of object, is a heat the most universal, critically important in commercial production
Work parameter, many production processes are required to monitor temperature and control, and measurement and the control of temperature directly influence
The quality of product and performance.Traditional contact temperature-measuring device (such as thermocouple, thermal resistance etc.) is because to carry out with measured matter
Sufficiently heat exchange, need to can be only achieved thermal balance after the regular hour, there is the delay phenomenon of thermometric, therefore the most raw
Yield and quality inspection exists certain use limitation.
Dry etching method is to be placed in specific gas under low-pressure state to impose voltage, is excited into plasma-based, to certain films layer
In addition chemical etching or ion bom bardment, reach a kind of lithographic method of membrane removal layer.Dry etching method needs utilization to have vacuum
The dry etching vacuum equipment of chamber performs etching.In etching process, for the demand of technique, need to detect at any time vacuum chamber
Interior ambient temperature and the temperature of engraving (such as TFT substrate etc.).The method of detecting vacuum chamber indoor temperature is very at present
Arranging contact temperature-measuring device in plenum chamber, in contact temperature-measuring device needs direct contact arrangement, environment carries out ability after heat exchange
Temperature can be detected, but due to environment harshness in vacuum equipment, it is impossible to detect temperature intuitively by contact temperature-measuring device.
Utility model content
The purpose of this utility model is to provide a kind of vacuum chamber temperature detecting system, it is not necessary to directly connect with testee
Touching the surface temperature that just can measure it exactly, easy to use, response speed is fast, highly sensitive, and temperature-measuring range is wide, may be implemented in
Line contactless continuous measuring.
This utility model embodiment provides a kind of vacuum chamber temperature detecting system, and be adapted to detect in vacuum chamber is tested
The temperature of object, described vacuum chamber temperature detecting system includes optical system, detector, signal processing circuit and display output
Device, described vacuum chamber has opening, and described optical system is arranged in the opening of described vacuum chamber, described optical system
The infrared energy of the testee in the visual field converging in described vacuum chamber, and described infrared energy is passed
Pass described detector；Described detector is for being changed into voltage signal by described infrared energy；Described signal processing electricity
Road is used for the voltage signal that pick-up probe generates the temperature being transformed into described testee.
Further, also to include that amplifier, described amplifier are used for receiving described for described vacuum chamber temperature detecting system
The described voltage signal of detector output and after described voltage signal is amplified output to described signal processing circuit.
Further, described vacuum chamber temperature detecting system also includes showing output device, described display output device
For showing heat picture and the temperature value of described testee.
Further, described optical system includes optical lens.
Further, described optical lens is Fresnel Lenses, including be positioned at described vacuum chamber even surface and with
The another side that described even surface is relative, the described another side imprinting concentric circular of some ascending arrangements.
Further, described optical system also includes that the first optical filter, described first optical filter are arranged on described optical lens
Between mirror and described detector.
Further, described detector is photodetector.
Further, described detector is pyroelectric infrared detector, including infrared induction source, field effect transistor and resistance,
Infrared induction source is used for receiving infrared energy and generating charge signal, and described field effect transistor and described resistance are for by described
Charge signal is converted into described voltage signal.
Further, described detector also includes the second optical filter.
Further, described vacuum chamber is the vacuum chamber of dry etching apparatus.
The vacuum chamber temperature detecting system that this utility model embodiment provides, including optical system, detector, amplification
Device, signal processing circuit, display output device etc., vacuum chamber temperature detecting system is that the infra-red radiation according to testee is special
Property, rely on its optical system that the infrared energy of object converges to detector, and be converted into the signal of telecommunication, then by amplifying
After device, signal processing circuit process, at heat picture and the temperature value of display output device display testee.Vacuum chamber temperature
Detecting system is when detecting the temperature of testee, it is not necessary to directly contact the surface temperature that just can measure it exactly with testee
Degree, easy to use, response speed is fast, highly sensitive, and temperature-measuring range is wide, may be implemented in line contactless continuous measuring etc. numerous excellent
Point.
Accompanying drawing explanation
Fig. 1 is the structural representation of the vacuum chamber temperature detecting system of this utility model preferred embodiment.
Fig. 2 is the structural representation of the optical system of the vacuum chamber temperature detecting system of this utility model preferred embodiment
Figure.
Fig. 3 is the interior of the pyroelectric infrared detector of the vacuum chamber temperature detecting system of this utility model preferred embodiment
Portion's circuit block diagram.
Detailed description of the invention
By further illustrating the technical approach and effect that this utility model taked by reaching predetermined utility model purpose,
Below in conjunction with drawings and Examples, to detailed description of the invention of the present utility model, structure, feature and effect thereof, describe in detail such as
After.
Wavelength is that the part of 2～1000 microns is referred to as Thermal Infra-Red.In nature, the only temperature of object is up to 1000
Time more than DEG C, visible ray, by contrast, the object more than absolute zero (-273 DEG C) can be sent, due to its internal heat
The existence of motion, can ceaselessly send Thermal Infra-Red (or claiming infra-red radiation), thus form certain temperature field at body surface,
It is commonly called as " thermal imagery ".Infrared temperature-test technology is exactly based on this infrared energy of absorption, measures temperature and the temperature of equipment surface
The distribution of field, thus judge the heat condition of testee.
Fig. 1 is the structural representation of the vacuum chamber temperature detecting system of this utility model preferred embodiment, such as Fig. 1 institute
Showing, vacuum chamber temperature detecting system is adapted to detect for the temperature of the testee in vacuum chamber 110, and it includes optical system
120, detector 130, amplifier 140, signal processing circuit 150 and display output device 160.
The vacuum chamber of vacuum chamber 110 for example, dry etching apparatus, vacuum chamber 110 has opening 111.
In optical system 120 is arranged on the opening 111 of vacuum chamber 110 and close this opening 111.Optical system 120 is used
The infrared energy of the testee in the visual field converging in vacuum chamber 110, and after infrared energy is passed to
The detector 130 stated.Visual field refers to the maximum magnitude that optical system 120 is able to observe that.
Specifically, optical system 120 such as includes optical lens 121 and the first optical filter 122.As in figure 2 it is shown, optical lens
Mirror 121 for example, Fresnel Lenses, it is made up of transparent plastic, and the one side of Fresnel Lenses is even surface, and even surface is arranged on
In vacuum chamber 110, the another side imprinting relative with the bright finish concentric circular of some ascending arrangements, the stricture of vagina of Fresnel Lenses
Reason is penetrated according to interference of light and disturbing and relative sensitivity and receiving angle requirement design, in this no limit.Optics
The effect of lens 121 has two: one to be focussing force, heat will release infrared signal refraction or be reflected on detector 130, second
Individual effect is will to be divided into several area pellucidas and dark space in search coverage, makes the measured object physical ability of entrance search coverage with variations in temperature
Form produce on detector 130 change heat release infrared signal.
First optical filter 122 is arranged between optical lens 121 and detector 130, and the first optical filter 122 is used for filtering institute
Needing the infrared ray beyond wave band, in other embodiments, the first optical filter 122 also can omit setting.
Optical system 120 in vacuum chamber the visual field size in 110 by the optical element of optical system 120 and place thereof
Position determines, optical system 120 is arranged in opening 111, and therefore, the position of opening 111 is arranged can be according in vacuum chamber 110
Whether testee is positioned at the visual field of optical system 120 and arranges, in this no limit.
The infrared energy of convergence is focused on detector 130 by optical system 120, and detector 130 is by infra-red radiation
Energy conversion is the corresponding signal of telecommunication.
Detector 130 for example, photodetector, the most for example, pyroelectric infrared detector.As it is shown on figure 3, detection
Device 130 includes infrared induction source 131, field effect transistor 132 and resistance 133 etc..Infrared induction source 131 e.g. pyroelectric crystal,
Infrared induction source 131 is used for receiving infrared energy and generating charge signal.Electric charge letter due to infrared induction source 131 output
Number fainter, it is impossible to directly using, need to be translated into voltage form with resistance 133, the impedance of resistance 133 is high, therefore
Field effect transistor 132 is set, to carry out signal amplification and impedance matching inside it.After pyroelectric infrared detector finally exports conversion
Voltage signal.Detector 130, to detect certain wavelength band targetedly, can arrange the second optical filtering at detector 130 housing
Sheet 134, the second optical filter 134 is used for stoping unwanted infrared ray or other light to enter detector.
Amplifier 140 is for the voltage signal of pick-up probe 130 output and by output extremely letter after the amplification of this voltage signal
Number process circuit 150.
Signal processing circuit 150 is for the voltage signal of reception amplifier 140 amplification and according to internal algorithm and target
The temperature of testee it is changed into after emissivity correction.
Display output device 160 is for showing heat picture and the temperature value of testee.Display output device 160 such as may be used
The infrared emanation image (i.e. heat picture) of the object in the visual field of generation optical system 120 and corresponding temperature value.
Optical system 120 is set in the front of detector 130, utilizes the special optical principle of optical system 120, in detection
Device 130 front produces " blind area " and " highly sensitive district " of an alternate, sensitive to improve the detection reception of detector 130
Degree.When testee occurs in the field range of optical system 120, the infrared ray that testee sends the most constantly replaces
From " blind area " entrance " highly sensitive district ", the infrared signal received thus is made to input with dynamic impulse form, thus
Strengthen the amplitude of its infrared energy.
Vacuum chamber temperature detecting system includes optical system, detector, amplifier, signal processing circuit, display output
Devices etc., vacuum chamber temperature detecting system is the infrared signature according to testee, relies on its optical system by object
Infrared energy converge to detector, and be converted into the signal of telecommunication, then after being processed by amplifier, signal processing circuit,
The heat picture of display output device display testee and temperature value.Vacuum chamber temperature detecting system is at detection testee
During temperature, it is not necessary to directly contact the surface temperature that just can measure it exactly with testee, easy to use, response speed is fast,
Highly sensitive, temperature-measuring range is wide, may be implemented in the many merits such as line contactless continuous measuring.
The above, be only preferred embodiment of the present utility model, not this utility model is made any in form
Restriction, although this utility model is disclosed above with preferred embodiment, but is not limited to this utility model, any ripe
Know professional and technical personnel, in the range of without departing from technical solutions of the utility model, when in the technology of available the disclosure above
Hold and make a little change or be modified to the Equivalent embodiments of equivalent variations, as long as being without departing from technical solutions of the utility model
Hold, any simple modification, equivalent variations and modification above example made according to technical spirit of the present utility model, the most still
Belong in the range of technical solutions of the utility model.
Claims (10)
1. a vacuum chamber temperature detecting system, is used for detecting the temperature of the testee in vacuum chamber (110), its feature
Being, described vacuum chamber temperature detecting system includes optical system (120), detector (130), signal processing circuit (150)
With display output device (160), described vacuum chamber (110) has opening (111), and described optical system (120) is arranged on institute
Stating in the opening (111) of vacuum chamber (110), described optical system (120) is used for converging in regarding of described vacuum chamber (110)
The infrared energy of the testee in Chang, and described infrared energy is passed to described detector (130)；Described spy
Survey device (130) for described infrared energy is changed into voltage signal；Described signal processing circuit (150) is used for receiving spy
Survey the voltage signal that device (130) generates the temperature being transformed into described testee.
Vacuum chamber temperature detecting system the most according to claim 1, it is characterised in that described vacuum chamber temperature detecting
System also includes that amplifier (140), described amplifier (140) are used for receiving the described voltage letter that described detector (130) exports
Number and after described voltage signal is amplified output to described signal processing circuit (150).
Vacuum chamber temperature detecting system the most according to claim 1, it is characterised in that described vacuum chamber temperature detecting
System also includes showing output device (160), and described display output device (160) is for showing the heat picture of described testee
And temperature value.
Vacuum chamber temperature detecting system the most according to claim 1, it is characterised in that described optical system (120) is wrapped
Include optical lens (121).
Vacuum chamber temperature detecting system the most according to claim 4, it is characterised in that described optical lens (121) is
Fresnel Lenses, including being positioned at the even surface of described vacuum chamber (110) and the another side relative with described even surface, described
The another side imprinting concentric circular of some ascending arrangements.
Vacuum chamber temperature detecting system the most according to claim 4, it is characterised in that described optical system (120) is also
Including the first optical filter (122), described first optical filter (122) is arranged on described optical lens (121) and described detector
(130) between.
Plenum chamber temperature detecting system the most according to claim 1, it is characterised in that described detector (130) is photoelectricity
Detector.
Vacuum chamber temperature detecting system the most according to claim 1, it is characterised in that described detector (130) is heat
Releasing electricity Infrared Detectors, including infrared induction source (131), field effect transistor (132) and resistance (133), infrared induction source (131) are used
In receiving infrared energy and generating charge signal, described field effect transistor (132) and described resistance (133) are for by described electricity
Lotus signal is converted into described voltage signal.
Vacuum chamber temperature detecting system the most according to claim 8, it is characterised in that described detector (130) also wraps
Include the second optical filter (134).
Vacuum chamber temperature detecting system the most according to claim 1, it is characterised in that described vacuum chamber (110) is
The vacuum chamber of dry etching apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620669047.1U CN205785541U (en) | 2016-06-29 | 2016-06-29 | vacuum chamber temperature detecting system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620669047.1U CN205785541U (en) | 2016-06-29 | 2016-06-29 | vacuum chamber temperature detecting system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205785541U true CN205785541U (en) | 2016-12-07 |
Family
ID=58128868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620669047.1U Active CN205785541U (en) | 2016-06-29 | 2016-06-29 | vacuum chamber temperature detecting system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205785541U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111473871A (en) * | 2020-04-21 | 2020-07-31 | 南方电网科学研究院有限责任公司 | Terminal temperature monitoring system and electric energy meter |
-
2016
- 2016-06-29 CN CN201620669047.1U patent/CN205785541U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111473871A (en) * | 2020-04-21 | 2020-07-31 | 南方电网科学研究院有限责任公司 | Terminal temperature monitoring system and electric energy meter |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107532944A (en) | For the equipment and method of the temperature correction that proximity sensor is used in contactless thermoelectric pile thermometer | |
| CN103675019B (en) | A kind of method of thermal infrared imager Quick Measurement material surface emissivity by virtue | |
| CN107817054B (en) | Temperature measurement method of infrared imager for parts in vacuum cavity | |
| CN106468636A (en) | High-temperature material mechanical performance loading measurement system based on ultra violet illumination DIC | |
| CN110487842A (en) | The apparatus and method of thermal conductivity and infrared emittance in pellicular front are measured simultaneously | |
| CN105352988A (en) | System for evaluating thermal insulation performance of exterior wall of building and method thereof | |
| CN102393375A (en) | Passive gas imaging system | |
| CN103344388A (en) | Performance evaluation device and method for gas leakage infrared imaging detecting system | |
| CN105784333A (en) | High-temperature spectrum emissivity measuring method and device of infrared window | |
| Yao et al. | Non-uniformity calibration method of space-borne area CCD for directional polarimetric camera | |
| CN205785541U (en) | vacuum chamber temperature detecting system | |
| CN104568164A (en) | Temperature uniformity measurement and control system for low-temperature vacuum microwave radiation source | |
| Aufar et al. | Design of non-contact thermometer using thermal camera for detecting people with fever | |
| CN102283637B (en) | Infrared ear thermometer and temperature measuring method thereof | |
| CN106370311B (en) | Temperature measuring device and method for thermal analyzer | |
| CN103616080A (en) | Portable optical fiber radiation thermodetector and measuring method thereof | |
| CN103344343A (en) | Non-contact type infrared temperature detecting system based on micromachine thermopile | |
| CN109932063A (en) | The measuring device and method of temperature in a kind of aluminum alloy heat forming process | |
| CN202024821U (en) | Thermal imaging system capable of improving imaging quality and temperature measurement precision | |
| CN106289541A (en) | A kind of passive sensor circuit with zero temperature compensation | |
| CN105136311B (en) | A kind of blast funnace hot blast stove vault infrared optical fiber temperature checking method | |
| Holtsberry et al. | Material identification from remote sensing of polarized self-emission | |
| CN211626710U (en) | Far infrared temperature detector | |
| Huang et al. | Research on radiometric calibration for super wide-angle staring infrared imaging system | |
| CN205506217U (en) | Life entity detection instrument and have aircraft of this life entity detection instrument |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |