CN103616080A - Portable optical fiber radiation thermodetector and measuring method thereof - Google Patents
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Abstract
本发明公开了一种便携式光纤辐射测温仪及其测量方法,属于高温测量领域。测温仪包括大功率光纤耦合器、传能光纤、光电探测器、前置放大模块、AD采样模块、信号处理模块、显示模块、键盘输入、数模转换和4-20mA电流环。大功率光纤耦合器耦合宽波段的热辐射能量,通过传能光纤传递到光电探测器上把光信号转成电信号,电信号由AD采样,信号处理模块采用曲线拟合算法分析得到的采样信号,最后通过标定可以计算出相应的温度值。本发明的便携式光纤辐射测温仪结构很适用于晶体炉热场的测量,简单方便非常实用化。
The invention discloses a portable optical fiber radiation thermometer and a measuring method thereof, belonging to the field of high temperature measurement. The thermometer includes high-power fiber optic coupler, energy transmission fiber, photoelectric detector, preamplifier module, AD sampling module, signal processing module, display module, keyboard input, digital-to-analog conversion and 4-20mA current loop. The high-power fiber optic coupler couples the wide-band thermal radiation energy, and transmits the optical signal to the photodetector through the energy-transmitting optical fiber to convert the optical signal into an electrical signal. The electrical signal is sampled by AD, and the signal processing module uses a curve fitting algorithm to analyze the sampled signal. , and finally the corresponding temperature value can be calculated by calibration. The structure of the portable optical fiber radiation thermometer of the invention is very suitable for measuring the thermal field of a crystal furnace, and is simple, convenient and very practical.
Description
技术领域technical field
本发明涉及晶体炉热场测量仪器,具体地涉及一种测量晶体炉热场的便携式光纤型辐射测温仪及其测量方法。The invention relates to a measuring instrument for the thermal field of a crystal furnace, in particular to a portable optical fiber type radiation thermometer for measuring the thermal field of a crystal furnace and a measuring method thereof.
背景技术Background technique
辐射测温仪经常应用于化工、能源、冶金和科学研究等领域的高温测量。对于1800℃以上测量范围,辐射测温仪凭借非接触测量红外热辐射的能量来推算相应的温度,测量上限不受感温元件耐温程度的限制,因而对最高可测温度原则上没有限制,所以在工业领域取得了广泛的应用。由于辐射测温仪的分辨率高,测温精度高,重复性好等优点,因此在高温测量中得到普及应用。比如德国赛腾的MS/MI系列红外测温仪,在1500℃到2500℃的范围内的系统精度达到0.5%测量值,重复精度为0.1%测温值+1K,温度分辨率为0.1℃。以此类为代表的高精度的红外测温仪是基于黑体辐射的基本定律,测得特定波段的辐射能量与相应温度的对应关系,并对相应材料的发射率进行修正,从而推算出相应的温度。但是这些仪器需要精密的光学镜头以及复杂的光信号处理装置,因而难以做成结构紧凑,价格低廉的测量仪器。Radiation thermometers are often used in high temperature measurement in the fields of chemical industry, energy, metallurgy and scientific research. For the measurement range above 1800°C, the radiation thermometer calculates the corresponding temperature by means of non-contact measurement of the energy of infrared thermal radiation. The upper limit of measurement is not limited by the temperature resistance of the temperature sensing element, so there is no limit to the maximum measurable temperature in principle. Therefore, it has been widely used in the industrial field. Due to the advantages of high resolution, high temperature measurement accuracy and good repeatability, radiation thermometers are widely used in high temperature measurement. For example, the MS/MI series of infrared thermometers from Saiten, Germany, have a system accuracy of 0.5% of the measured value in the range of 1500°C to 2500°C, a repeatability of 0.1% of the measured temperature value + 1K, and a temperature resolution of 0.1°C. The high-precision infrared thermometer represented by this type is based on the basic law of black body radiation. It measures the corresponding relationship between the radiation energy of a specific band and the corresponding temperature, and corrects the emissivity of the corresponding material to calculate the corresponding temperature. temperature. However, these instruments require sophisticated optical lenses and complex optical signal processing devices, so it is difficult to make compact and inexpensive measuring instruments.
传统的辐射测温仪结构普遍庞大,光路复杂,对坏境影响敏感,而且价格昂贵,因此迫切需要更加简单、紧凑、稳定的测温系统。另外,大多数的辐射测温仪是一种基于光电精密测温的技术,所以光电探测器是精密测温技术中的关键元件。最早期的光电元件多为光电倍增管和光电管,这类电真空器件应用中要求几百伏至几千伏的高压,而且光谱响应都在可见光至近红外范围内。后来,重量轻、体积小的光电探测器陆续出现。而且在稳定性、灵敏度、光谱响应范围、通带宽度等方面都有很大的提高和改善,并很快在工程应用中占据了不可替代的位置。Traditional radiation thermometers generally have large structures, complex optical paths, are sensitive to environmental influences, and are expensive. Therefore, there is an urgent need for a simpler, more compact, and more stable temperature measurement system. In addition, most radiation thermometers are a technology based on photoelectric precision temperature measurement, so photoelectric detectors are key components in precision temperature measurement technology. The earliest photoelectric components were mostly photomultiplier tubes and phototubes. The application of such electric vacuum devices required high voltages of several hundred volts to several thousand volts, and the spectral responses were in the range of visible light to near-infrared. Later, photodetectors with light weight and small size appeared one after another. Moreover, it has been greatly improved and improved in terms of stability, sensitivity, spectral response range, and passband width, and soon occupied an irreplaceable position in engineering applications.
发明内容Contents of the invention
本发明的目的是提供便携式光纤辐射测温仪,该仪器是一种能够检测超高温的测量仪器。本发明的另外一个目的是提供一种利用该便携式光纤辐射测温仪进行温度测量的方法。The object of the present invention is to provide a portable fiber optic radiation thermometer, which is a measuring instrument capable of detecting ultrahigh temperatures. Another object of the present invention is to provide a method for temperature measurement using the portable fiber optic radiation thermometer.
本发明为解决其技术问题所采用的技术方案是:The technical scheme that the present invention adopts for solving its technical problem is:
便携式光纤辐射测温仪,由光学系统和电路系统组成,其特征在于:所述光学系统由大功率光纤耦合器连接传能光纤组成;所述电路系统包括光电探测器、前置放大器、AD采样模块、信号处理模块、显示模块、按键输入、数模转换模块和电流环,其中,所述光电探测器、前置放大器、AD采样模块和信号处理模块依次连接,所述显示模块、按键输入和数模转换模块分别与所述信号处理模块连接,所述电流环与所述数模转换模块连接;所述传能光纤的输出端与光电探测器的输入端相连。The portable fiber optic radiation thermometer consists of an optical system and a circuit system. module, signal processing module, display module, key input, digital-to-analog conversion module and current loop, wherein, the photodetector, preamplifier, AD sampling module and signal processing module are connected in sequence, and the display module, key input and The digital-to-analog conversion module is respectively connected to the signal processing module, the current loop is connected to the digital-to-analog conversion module; the output end of the energy transmission optical fiber is connected to the input end of the photodetector.
其中,所述电流环采用4-20mA电流环。光电探测器采用标准FC/PC封装的InGaAs光电二极管。前置放大器采用对数放大器。AD采样模块采用的是24位高精度的采样芯片。Wherein, the current loop adopts a 4-20mA current loop. The photodetector is an InGaAs photodiode in a standard FC/PC package. The preamp uses a logarithmic amplifier. The AD sampling module uses a 24-bit high-precision sampling chip.
为了利用上述的便携式光纤辐射测温仪测量晶体炉的温度,本发明的测量法方法包括以下步骤:首先把大功率光纤耦合器安装到晶体炉的观察孔上,打开观察孔上的开关,那么炉内的热辐射能量就通过大功率光纤耦合器汇聚到传能光纤的端面上;能量再通过传能光纤传输到光电探测器上,然后辐射能量由光电探测器转换成对应的电流信号;电流信号经过前置放大模块进行I/V转换以及放大,得到的电压信号由AD采样模块进行高精度地采样;模拟信号转换成数字信号后,经信号处理模块通过曲线拟合的算法分析得到的采样信号,最后通过标定计算出对应的温度值并通过显示模块输出;数字信号也可以数模转后通过4-20mA电流环的方式传输到电脑上通过虚拟仪器Labview进行处理;在测试不同温度范围时,可以通过按键输入对信号处理模块内的算法参数进行修改,方便适应不同温度段的精确测量。In order to utilize the above-mentioned portable optical fiber radiation thermometer to measure the temperature of the crystal furnace, the measuring method method of the present invention comprises the following steps: at first the high-power optical fiber coupler is installed on the observation hole of the crystal furnace, and the switch on the observation hole is opened, then The thermal radiation energy in the furnace is converged to the end face of the energy-transmitting optical fiber through the high-power optical fiber coupler; the energy is then transmitted to the photodetector through the energy-transmitting optical fiber, and then the radiant energy is converted into a corresponding current signal by the photodetector; The signal is I/V converted and amplified by the preamplifier module, and the obtained voltage signal is sampled with high precision by the AD sampling module; after the analog signal is converted into a digital signal, the sample is analyzed by the signal processing module through a curve fitting algorithm Finally, the corresponding temperature value is calculated by calibration and output through the display module; the digital signal can also be transferred to the computer through a 4-20mA current loop after digital-to-analog conversion and processed by the virtual instrument Labview; when testing different temperature ranges , the algorithm parameters in the signal processing module can be modified by key input, which is convenient for accurate measurement in different temperature ranges.
本发明具有以下有益效果:(1)采用的大功率光纤耦合器耦合波长范围超宽,在0.4μm~2.5μm的范围内都有极高的耦合效率,可以直接插拨,重复性和互换性非常好;(2)采用纤芯为600μm的传能光纤,能量传输损耗极低。在光纤外皮里面有一层金属铠,使里面纤芯受到保护,有抗强压抗拉伸功能。利用光纤来传输能量可以减少测温仪的安装与保护的困难,并使测温仪具有挠性和小型化;(3)本发明的光电探测器采用标准FC/PC封装的InGaAs光电二极管与传能光纤连接十分方便,光纤的使用可以不受电磁干扰的影响,而使光电探测器远离高温物体,保证了长期在线工作的稳定性。(4)高度集成的电路系统非常方便安装在晶体炉控制台上面,利于操作者观察;(5)本发明采用精密的对数放大器对微弱信号进行I/V转换,以及24位的采样芯片进行采样,保证了整个仪器的测量性能:测量范围为800-2200℃,测量精度为±0.2%,分辨率为1℃,响应速度小于1ms。The invention has the following beneficial effects: (1) The high-power optical fiber coupler adopted has an ultra-wide coupling wavelength range, and has extremely high coupling efficiency in the range of 0.4 μm to 2.5 μm, and can be directly plugged in, repeatable and interchangeable (2) The energy transmission fiber with a core of 600μm is used, and the energy transmission loss is extremely low. There is a layer of metal armor inside the outer sheath of the optical fiber, which protects the inner fiber core and has the function of resisting strong pressure and stretching. Using optical fiber to transmit energy can reduce the difficulty of installing and protecting the thermometer, and make the thermometer flexible and miniaturized; (3) the photodetector of the present invention uses a standard FC/PC packaged InGaAs photodiode and sensor The optical fiber connection is very convenient, and the use of optical fiber can not be affected by electromagnetic interference, so that the photodetector is far away from high-temperature objects, ensuring the stability of long-term online work. (4) The highly integrated circuit system is very convenient to install on the console of the crystal furnace, which is convenient for the operator to observe; (5) The present invention uses a precise logarithmic amplifier to perform I/V conversion on weak signals, and a 24-bit sampling chip to perform I/V conversion. Sampling ensures the measurement performance of the entire instrument: the measurement range is 800-2200°C, the measurement accuracy is ±0.2%, the resolution is 1°C, and the response speed is less than 1ms.
附图说明Description of drawings
图1是本发明便携式光纤辐射测温仪的系统框图;Fig. 1 is the system block diagram of portable optical fiber radiation thermometer of the present invention;
图2是本发明便携式光纤辐射测温仪的结构图;Fig. 2 is the structural diagram of portable optical fiber radiation thermometer of the present invention;
图3是本发明测量方法中对信号的软件处理流程图。Fig. 3 is a flow chart of software processing of signals in the measurement method of the present invention.
具体实施方式Detailed ways
下面结合附图和实施方法,对本发明做进一步详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings and implementation methods.
如图1,本发明装置中光学系统由大功率光纤耦合器1连接传能光纤2组成,其中大功率光纤耦合器1的耦合波长范围为0.4μm~2.5μm,其耦合透镜的直径为25mm,传能光纤2采用的是纤芯为600μm的石英光纤;电路系统由光电探测器3、前置放大器4、AD采样模块5、信号处理模块6、显示模块7、按键输入8、数模转换模块9和4-20mA电流环10组成,所有模块集成在一个电子盒上。光学系统与电路系统是独立分开的,完全可以避免测温现场对仪器测温的干扰。其中,前置放大器4采用对数放大器来处理微弱信号,可以精确地把弱小电流信号转成电压信号。AD采样模块5采用的是24位高精度的采样芯片,在工作中可以精确采样得到的模拟信号。光电探测器3采用标准FC/PC封装的InGaAs光电二极管。光学系统与电路系统的连接是通过传能光纤2的输出端与光电探测器3的输入端相连;图2是本发明的机械结构示意图。As shown in Figure 1, the optical system in the device of the present invention is composed of a high-power fiber coupler 1 connected to an energy-transmitting
结合图1与图2说明利用光学系统接收辐射能量、测量温度的实施方法。首先把大功率光纤耦合器1安装到晶体炉的观察孔上,打开观察孔上的开关,那么炉内的热辐射能量就通过大功率光纤耦合器1汇聚到传能光纤2的端面上;能量再通过传能光纤2传输到光电探测器3上,然后辐射能量由光电探测器3转换成对应的电流信号;电流信号经过前置放大模块4进行I/V转换以及放大,得到的电压信号由AD采样模块5进行高精度地采样;模拟信号转换成数字信号后,经信号处理模块6通过曲线拟合的算法计算出对应的温度值并通过显示模块7输出;数字信号也可以通过4-20mA电流环10的方式传输到电脑上通过虚拟仪器Labview进行处理,4-20mA电流环10可以实现温度在线监控,虚拟仪器Labview可以绘制动态曲线并保存各个时间节点的温度值。。在测试不同温度范围时,可以通过按键输入8对信号处理模块6内的算法参数进行修改,方便适应不同温度段的精确测量。The implementation method of receiving radiant energy and measuring temperature by using an optical system will be described with reference to FIG. 1 and FIG. 2 . First install the high-power optical fiber coupler 1 on the observation hole of the crystal furnace, turn on the switch on the observation hole, then the heat radiation energy in the furnace will converge to the end face of the energy-transmitting
结合图3说明测温仪中信号处理模块对信号的处理流程。当仪器开机之后,信号处理模块6首先初始化AD采样模块5与显示模块7,之后AD采样模块5处于持续采样工作状态,显示模块7输出当前温度值。打开观察窗的开关之后,如果检测到电压信号有变化,AD采样模块5就会把新的采样得到数字信号传给信号处理模块6进行计算,并通过显示模块7输出新的温度值。The signal processing flow of the signal processing module in the thermometer is described in conjunction with FIG. 3 . After the instrument is turned on, the signal processing module 6 first initializes the AD sampling module 5 and the
测温系统能够应用在现场精确测温,就必须经过标定才能正确显示出被测目标的温度。本发明采用的基于最小二乘法的多项式曲线拟合法,测量多点温度再通过拟合得到一条温度趋势的曲线。本发明标定的方法是采用标准黑体炉替代被测目标,采集不同温度下的电压信号。直接把温度与电压采样码数的关系进行6次多项式曲线拟合,然后得到一个温度与采样码数的公式:T=a·x6+b·x5+c·x4+d·x3+e·x2+f·x+g,其中T为温度(℃),x为采样码数,a,b,c,d,e,f,g为常数。把这个公式的算法写入信号处理模块6,这样仪器就可以正常工作。If the temperature measurement system can be applied to accurately measure the temperature on site, it must be calibrated to correctly display the temperature of the measured target. The polynomial curve fitting method based on the least square method adopted in the present invention measures the temperatures of multiple points and obtains a temperature trend curve through fitting. The calibration method of the present invention is to use a standard black body furnace to replace the measured target, and to collect voltage signals at different temperatures. Directly fit the relationship between the temperature and the number of voltage sampling codes with a polynomial curve of degree 6, and then obtain a formula for the temperature and the number of sampling codes: T=a x 6 +b x 5 +c x 4 +d x 3 +e·x 2 +f·x+g, where T is the temperature (°C), x is the number of sampling codes, and a, b, c, d, e, f, g are constants. Write the algorithm of this formula into the signal processing module 6, so that the instrument can work normally.
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CN105606226A (en) * | 2016-02-03 | 2016-05-25 | 江苏浩瀚蓝宝石科技有限公司 | Portable fiber radiation thermometric indicator |
CN106225951A (en) * | 2016-08-31 | 2016-12-14 | 江苏能建机电实业集团有限公司 | Sapphire fiber blackbody chamber pyrostat and temp measuring method thereof |
CN112254836A (en) * | 2020-09-23 | 2021-01-22 | 菲兹克光电(长春)有限公司 | Optical fiber ultra-high temperature thermometer based on colorimetric method |
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CN112254836A (en) * | 2020-09-23 | 2021-01-22 | 菲兹克光电(长春)有限公司 | Optical fiber ultra-high temperature thermometer based on colorimetric method |
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