CN205774907U - A kind of differing heights micro-nano post substrate preparation facilities - Google Patents
A kind of differing heights micro-nano post substrate preparation facilities Download PDFInfo
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- CN205774907U CN205774907U CN201620472731.0U CN201620472731U CN205774907U CN 205774907 U CN205774907 U CN 205774907U CN 201620472731 U CN201620472731 U CN 201620472731U CN 205774907 U CN205774907 U CN 205774907U
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- micro
- fixed
- bath
- differing heights
- water
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Abstract
This utility model relates to a kind of differing heights micro-nano post substrate preparation facilities, belongs to technical field of micro and nano fabrication.The water-bath including box body, being arranged in box body, the plated material being arranged at intervals in water-bath and electroplated sample, the constant current source modular cartridge being connected by power positive cathode respectively with plated material and electroplated sample in described water-bath, also include hoisting mechanism and plating distance adjusting mechanism, described hoisting mechanism is connected with electroplated sample, and described plating distance adjusting mechanism is connected with plated material.This utility model can control plated material and the distance of sample room when nickel plate rise and fall speed in electroplate liquid, plating accurately, electric current density in the temperature of convenient regulation water-bath and water-bath, thus it is accurately controlled the electrodeposited coating size of micro nano structure above template, complete the preparation of differing heights micron post substrate.
Description
Technical field
This utility model relates to technical field of micro and nano fabrication, is specifically related to a kind of differing heights
Micro-nano post substrate preparation facilities.
Background technology
Micro-nano technology technology is a kind of particularly significant in preparing various micro element, micro structure
Technology, the preparation of micro-nano structure template is sent out in micro-nano technology with to advanced manufacturing technology
In exhibition significant, along with the day by day ripe of micro-nano technology technology and micro structure template exist
The research in various fields and application are increasingly wider, and different micro structure templates more and more obtain
Application.Therefore, the most accurate making micro-nano structure template, is current micro-nano technology
Technology and the important topic of advanced manufacturing technology.
Traditional micro-nano technology technology is usually the substrate micro-nano prepared above knot in two dimension
Structure, these micro nano structure height are consistent, if face preparation to have on a planar substrate
There is the micro nano structure of altitudinal gradient, then need, by soft lithographic exposure technique, spin coating to be had
The substrate tilting exposure of photoresist, realizes micro nano structure by controlling the thickness of photoresist
Height change, thus prepare the micro-nano structure with altitudinal gradient, but this method
Defect be: the altitudinal gradient of micro nano structure control uneven, operation easier is high, tilt
The bad control in angle, precision is the highest.Therefore, realize that there is height by the simple device of one
The micro nano structure of degree gradient seems extremely important.
Utility model content
The purpose of this utility model is aiming at the defect of prior art, it is provided that a kind of different high
Spend micro-nano post substrate preparation facilities.
The technical solution adopted in the utility model is: includes box body, be arranged in box body
Water-bath, the plated material being arranged at intervals in water-bath and electroplated sample, with described water-bath
The constant current source that in Guo, plated material and electroplated sample are connected by power positive cathode respectively
Modular cartridge, also includes hoisting mechanism and plating distance adjusting mechanism, described hoisting mechanism and electricity
Plating sample connects, and described plating distance adjusting mechanism is connected with plated material.
Further preferred structure, described hoisting mechanism and plating distance adjusting mechanism are fixed
In the fixed plate being arranged on above water-bath.
Further preferred structure, described fixed plate is fixed on inboard wall of cartridge.
Further preferred structure, described hoisting mechanism includes motor, ball-screw
Pair, mobile link plate, fixed pulley, guide rail and connection rope；One end of described ball screw assembly,
It is connected with motor by shaft coupling, described mobile link plate and described ball screw assembly,
Feed screw nut is fixed, and the other end of described ball screw assembly, is fixed on the bearing block at two ends,
Described guide rail is arranged between bearing block, and described mobile link plate is slideably positioned on guide rail,
Described mobile link plate is fixed with being connected rope one end, and the described rope other end that connects walks around fixed pulley
It is connected with electroplated sample.
Further preferred structure, described fixed pulley is arranged on pulley base by rotating shaft,
Described bearing block and pulley base are both secured to fixed plate top.
Further preferred structure, described plating distance adjusting mechanism includes electricity push rod, company
Fishplate bar, shifting axle, described shifting axle one end connects electricity push rod, and the other end connects connecting plate,
Described plated material is fixed on bottom connecting plate.
Further preferred structure, described electricity push rod is fixed on bottom fixed plate.
Further preferred structure, described constant current source modular cartridge is arranged at water in box body
Bath side.
Further preferred structure, described box body is connected above lid, described box portion outside
Power key and liquid crystal display screen are set.
This utility model can control nickel plate rise and fall speed in electroplate liquid accurately
When degree, plating, plated material and the distance of sample room, regulate the temperature of water-bath easily
With the electric current density in water-bath, thus it is accurately controlled the electricity of micro nano structure above template
Coating size, completes the preparation of differing heights micron post substrate.
The speed that this utility model has the advantages that 1, electroplated sample rises or falls
Rate is stable, makes electrodeposited coating more uniform；2, the lifting of electroplated sample can be by accurate silk
Thick stick realizes high accuracy stepping；3, flexible operation, can be used for the plating of multiple material；4, collection
One-tenth degree is high, can control multiple experiment condition simultaneously, reach optimal experiment effect；5. system system
Make simple, integrated level height, compact conformation, low cost, can be mass-produced.
Accompanying drawing explanation
Fig. 1 is this utility model structural representation；
Fig. 2 is this utility model side view；
Fig. 3 is this utility model axonometric chart.
In figure, 101-box body, 102-power key, 103-liquid crystal display screen, 104-lid, 201-water
Bath, 301-motor, 302-shaft coupling, 303-mobile link plate, 304-guide rail,
305-ball screw assembly, 306-bearing block, 307-fixed pulley, 308-connect rope, 309-pulley
Seat, 401-constant current source modular cartridge, 501-fixed plate, 601-electricity push rod, 602-sample
Folder, 603-connecting plate, 604-shifting axle, 701-plated material, 801-electroplated sample.
Detailed description of the invention
With specific embodiment, this utility model is made the most below in conjunction with the accompanying drawings
Bright, it is simple to be well understood to this utility model, but they do not constitute restriction to this utility model.
As shown in Fig. 1 Fig. 3, this utility model includes box body 101, is arranged at box body 101
Interior water-bath 201, the plated material 701 being arranged at intervals in water-bath 201 and plating
In sample 801, with described water-bath 201, plated material 701 and electroplated sample 801 are respectively
The constant current source modular cartridge 401 connected by power positive cathode, also include hoisting mechanism and
Plating distance adjusting mechanism, described hoisting mechanism is connected with electroplated sample 801, described plating
Distance adjusting mechanism is connected with plated material 701.
In technique scheme, described hoisting mechanism and plating distance adjusting mechanism are fixed on
It is arranged in the fixed plate 501 above water-bath 201.Described fixed plate 501 is fixed on box
On body 101 inwall.
In technique scheme, described hoisting mechanism includes motor 301, ball-screw
Pair 305, mobile link plate 303, fixed pulley 307, guide rail 304 and connection rope 308；Institute
The one end stating ball screw assembly, 305 is connected with motor 301 by shaft coupling 302, institute
The feed screw nut stating mobile link plate 303 and described ball screw assembly, 305 is fixed, described rolling
The other end of ballscrew pair 305 is fixed on the bearing block 306 at two ends, described guide rail 304
Being arranged between bearing block 306, described mobile link plate 303 is slideably positioned in guide rail 304
On, described mobile link plate 303 is fixed with being connected rope 308 one end, described connection rope 308
The other end is walked around fixed pulley 307 and is connected with electroplated sample 801.Described fixed pulley 307 passes through
Rotating shaft is arranged on pulley base 309, and described bearing block 306 is both secured to pulley base 309
Fixed plate 501 top.
In technique scheme, described plating distance adjusting mechanism includes electricity push rod 601, connects
Fishplate bar 603, shifting axle 604, described shifting axle 604 one end connects electricity push rod 601, another
End connects connecting plate 603, and described plated material 701 is fixed on connection by specimen holder 602
Bottom plate 603.Described electricity push rod 601 is fixed on bottom fixed plate 501.
In technique scheme, described constant current source modular cartridge 401 is arranged at box body 101
Interior water-bath 201 side.Described box body 101 is connected above lid 104, described box body 101
Outside arranges power key 102 and liquid crystal display screen 103.
In this utility model, hoisting mechanism is driven a secondary precision by a motor 301
Roller screw secondary 305 rotates, and makes the mobile link plate 303 being fixed together with feed screw nut
Move in the horizontal direction, thus drive the rope that is connected with mobile link plate 303 pull by
Electroplated sample 801 rises, and is plated sample 801 and is at the uniform velocity promoted, so being plated sample
The surface of 801 forms the electrodeposited coating with altitudinal gradient.Water-bath module is one and can regulate
The module of solution temperature in water-bath 201, constant current output module box 401 is one and carries
Module for constant current output.It is plated sample 801 with plated material 701 at electroplate liquid
In be placed in parallel, be plated sample by specimen holder 602 and be fixed on a connecting plate 603
On, connecting plate 603 is connected with an electric push rod 601, by the straight line position of electricity push rod 601
Move and control to be plated sample 801 moving horizontally in electroplate liquid, thus what realization was adjusted the distance
Regulation.
Wherein, the rotating speed of motor 1 is adjustable, so the linear velocity of feed screw nut is
Adjustable, the rotating speed of motor 1 can be by program setting and manually arranges control；
Distance between sample 11 and plated material 10 is adjustable, and distance range of accommodation is 1mm
—100mm；The precision moved horizontally is less than or equal to 10um, so the rising of hoisting mechanism
With the precision declined less than or equal to 10um；It is ± 0.5 DEG C that water-bath temperature controls error, directly
Stream regulated power supply rated output voltage 0 60V, output-current rating 0 5A.
Utility model works process:
(1), on ITO (or other base materials), get rid of photoresist and make annealing treatment；
(2), expose under ultraviolet light, then develop in developer solution, obtain micro structure；
(3), with acetone get rid of and there is no a part of optical cement of microstructure area, expose substrate
On ITO, and current source negative pole is connected this part.
(4), positive source is connected nickel plate (or other plated materials)
(5), water-bath temperature is set, output size of current is set.
(6), the ITO template and nickel plate with micro structure are submerged in electroplate liquid, set
The lifting speed of good hoisting mechanism, starting current output simultaneously and hoisting mechanism run.
The content that this specification is not described in detail belongs to known in professional and technical personnel in the field
Prior art.
Claims (9)
1. a differing heights micro-nano post substrate preparation facilities, including box body (101), sets
The water-bath (201) being placed in box body (101), the plating being arranged at intervals in water-bath (201)
In material (701) and electroplated sample (801), with described water-bath (201) plated material (701) and
The constant current source modular cartridge that electroplated sample (801) is connected by power positive cathode respectively
(401), it is characterised in that: also include hoisting mechanism and plating distance adjusting mechanism, described in carry
Rise mechanism to be connected with electroplated sample (801), described plating distance adjusting mechanism and plated material
(701) connect.
A kind of differing heights micro-nano post substrate preparation dress the most according to claim 1
Put, it is characterised in that: described hoisting mechanism and plating distance adjusting mechanism are fixed on and are arranged on
In the fixed plate (501) of water-bath (201) top.
A kind of differing heights micro-nano post substrate preparation dress the most according to claim 2
Put, it is characterised in that: described fixed plate (501) is fixed on box body (101) inwall.
A kind of differing heights micro-nano post substrate preparation dress the most according to claim 2
Put, it is characterised in that: described hoisting mechanism includes motor (301), ball screw assembly,
(305), mobile link plate (303), fixed pulley (307), guide rail (304) and connection rope (308)；
One end of described ball screw assembly, (305) is by shaft coupling (302) with motor (301) even
Connecing, the feed screw nut of described mobile link plate (303) and described ball screw assembly, (305) is fixed,
The other end of described ball screw assembly, (305) is fixed on the bearing block (306) at two ends, described
Guide rail (304) is arranged between bearing block (306), and described mobile link plate (303) is slided and arranged
On guide rail (304), described mobile link plate (303) is fixed with being connected rope (308) one end, institute
State connection rope (308) other end to walk around fixed pulley (307) and be connected with electroplated sample (801).
A kind of differing heights micro-nano post substrate preparation dress the most according to claim 4
Put, it is characterised in that: described fixed pulley (307) is arranged on pulley base (309) by rotating shaft,
Described bearing block (306) and pulley base (309) are both secured to fixed plate (501) top.
A kind of differing heights micro-nano post substrate preparation dress the most according to claim 2
Put, it is characterised in that: described plating distance adjusting mechanism includes electricity push rod (601), connecting plate
(603), shifting axle (604), described shifting axle (604) one end connect electricity push rod (601), another
End connects connecting plate (603), and described plated material (701) is fixed on connecting plate (603) bottom.
A kind of differing heights micro-nano post substrate preparation dress the most according to claim 6
Put, it is characterised in that: described electricity push rod (601) is fixed on fixed plate (501) bottom.
A kind of differing heights micro-nano post substrate preparation dress the most according to claim 1
Put, it is characterised in that: described constant current source modular cartridge (401) is arranged in box body (101)
Water-bath (201) side.
A kind of differing heights micro-nano post substrate preparation dress the most according to claim 1
Put, it is characterised in that: described box body (101) is connected above lid (104), described box body (101)
Outside arranges power key (102) and liquid crystal display screen (103).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620472731.0U CN205774907U (en) | 2016-05-23 | 2016-05-23 | A kind of differing heights micro-nano post substrate preparation facilities |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620472731.0U CN205774907U (en) | 2016-05-23 | 2016-05-23 | A kind of differing heights micro-nano post substrate preparation facilities |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205774907U true CN205774907U (en) | 2016-12-07 |
Family
ID=58116056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620472731.0U Expired - Fee Related CN205774907U (en) | 2016-05-23 | 2016-05-23 | A kind of differing heights micro-nano post substrate preparation facilities |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205774907U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108624940A (en) * | 2017-03-22 | 2018-10-09 | 株式会社荏原制作所 | The determination method of plater and plating slot structure |
-
2016
- 2016-05-23 CN CN201620472731.0U patent/CN205774907U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108624940A (en) * | 2017-03-22 | 2018-10-09 | 株式会社荏原制作所 | The determination method of plater and plating slot structure |
| CN108624940B (en) * | 2017-03-22 | 2021-06-25 | 株式会社荏原制作所 | Plating apparatus and method for determining structure of plating tank |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161207 Termination date: 20170523 |