CN205752112U - A kind of have the crystal silicon chip etching and cleaning device synchronizing roller structure for conveying - Google Patents
A kind of have the crystal silicon chip etching and cleaning device synchronizing roller structure for conveying Download PDFInfo
- Publication number
- CN205752112U CN205752112U CN201620278745.9U CN201620278745U CN205752112U CN 205752112 U CN205752112 U CN 205752112U CN 201620278745 U CN201620278745 U CN 201620278745U CN 205752112 U CN205752112 U CN 205752112U
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- China
- Prior art keywords
- conveying
- silicon chip
- etching
- angular wheel
- crystal silicon
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Abstract
The utility model discloses a kind of crystal silicon chip etching and cleaning device having and synchronizing roller structure for conveying, described etching and cleaning device includes frame, etching tank and cleaning sink it is provided with in described frame, it is provided with silicon wafer conveying device in described frame, described silicon wafer conveying device passes from etching tank and cleaning sink, described silicon wafer conveying device includes conveying roller, servo drive motor and drive shaft, the main shaft of described servo drive motor is connected with worm screw, it is provided with turbine in described drive shaft, described worm screw and turbine match, first angular wheel is installed on each conveying roller, second angular wheel corresponding with quantity with described first angular wheel position is installed in described drive shaft, described first angular wheel and the second angular wheel engage each other.The all conveying rollers of this utility model can run simultaneously, and therefore which raises the quality of crystal silicon chip processing.
Description
Technical field:
This utility model relates to losing cleaning equipment technical field, has synchronization roller conveying knot more specifically to one
The crystal silicon chip etching and cleaning device of structure.
Background technology:
Crystal silicon chip needs just can apply it on solar facilities, wherein after the production and processing of multiple working procedure
The most important operation just has the operation performing etching crystal silicon chip, needs to carry out crystal silicon chip clearly after etching procedure
Washing, the process of etching is, by acid solution, it is carried out corrosion processing, and etching apparatus of the prior art is typically by crystalline silicon
Sheet is placed on conveying roller, then carries out carrying crystal silicon chip by conveying roller, complete in the moving process of crystal silicon chip
Becoming lithography, conveying roller of the prior art typically uses chain and chain gear transmission, this kind of drive to make each roller
Between can not synchronize, therefore can affect the quality of processing.
Utility model content:
The purpose of this utility model is that provides a kind of crystal silicon chip etch cleaner having and synchronizing roller structure for conveying
Equipment, its all conveying rollers can run simultaneously, and therefore which raises the quality of crystal silicon chip processing.
For achieving the above object, a kind of crystal silicon chip etch cleaner with synchronization roller structure for conveying of the present utility model
Equipment, described etching and cleaning device includes frame, described frame is provided with etching tank and cleaning sink, described frame sets
Being equipped with silicon wafer conveying device, described silicon wafer conveying device passes from etching tank and cleaning sink, described silicon wafer conveying device
Including conveying roller, servo drive motor and drive shaft, the main shaft of described servo drive motor is connected with worm screw, described driving
Being provided with turbine on main shaft, described worm screw and turbine match, and each conveying roller is provided with the first angular wheel, described in drive
On dynamic main shaft, second angular wheel corresponding with quantity with described first angular wheel position, described first conical tooth are installed
Wheel and the second angular wheel engage each other.
Preferred as technique scheme, described silicon wafer conveying device also includes getting on the right track, described in get on the right track upper setting
Having U-shaped breach, the axle portion of described conveying roller is placed in described U-shaped breach.
Preferred as technique scheme, described first angular wheel is arranged on the axle portion of described conveying roller one end.
Preferred as technique scheme, is removably provided with U-shaped bracket, described conveying roller in described U-shaped breach
The axle portion of son is placed on described U-shaped bracket.
Preferred as technique scheme, the two side portion of described U-shaped breach is provided with T-rail, described U-shaped bracket
Being arranged on described T-rail and can move along described T-rail, the shape of described U-shaped bracket matches with described U-shaped breach
Close.
Preferred as technique scheme, described in get on the right track and be arranged on lower railway.
Preferred as technique scheme, described in get on the right track on be provided with installing hole, described installing hole is provided with tight
Fixing bolt, described in get on the right track and be arranged on described lower railway by fastening bolt, described in get on the right track on be additionally provided with counterbore, described
Being provided with regulation bolt in counterbore, threadeds with described lower railway in the bottom of described regulation bolt.
The beneficial effects of the utility model are: this utility model drives angular wheel by turbine, worm drive simultaneously
Rotate, in this process so that all of conveying roller synchronous axial system, prevent from leading due to the asynchronous of conveying roller
Cause some crystal silicon chip delayed or in advance in course of conveying, it is ensured that the quality of crystal silicon chip and non-defective unit in etching process
Rate.
Accompanying drawing illustrates:
Below in conjunction with the accompanying drawings this utility model is described further:
Fig. 1 is the perspective view of this utility model embodiment
Fig. 2 is the perspective view of silicon wafer conveying device in this utility model embodiment
Fig. 3 is the top view of silicon wafer conveying device in this utility model embodiment
Fig. 4 is the front view of Fig. 3
Fig. 5 is the mounting structure schematic diagram got on the right track in this utility model embodiment
In figure: 1, frame；2, silicon wafer conveying device；3, etching tank；4, hood；5, cleaning sink；6, middle control cabinet；7, heat
Blower fan；21, conveying roller；22, servo drive motor；23, turbine；24, the second angular wheel；25, worm screw；26, drive shaft；
27, the first angular wheel；28, U-shaped bracket；29, get on the right track；210, lower railway；211, axle portion；212, fastening bolt；213, heavy
Hole；214, installing hole；215, regulation bolt；216, U-shaped breach.
Detailed description of the invention:
The following stated is only the preferred embodiment embodying this utility model principle, the most therefore limits of the present utility model
Protection domain.
Set as Fig. 1 to 5 show a kind of crystal silicon chip etch cleaner with synchronization roller structure for conveying of this utility model
Standby, described etching and cleaning device includes frame 1, and described frame 1 is provided with etching tank 3 and cleaning sink 5, described frame 1
On be provided with silicon wafer conveying device 2, described silicon wafer conveying device 2 from etching tank 3 and cleaning sink 5 pass, described silicon chip
Conveyer device 2 includes conveying roller 21, servo drive motor 22 and drive shaft 26, the main shaft of described servo drive motor 22 with
Worm screw 25 connects, and described drive shaft 26 is provided with turbine 23, and described worm screw 25 and turbine 23 match, each conveying roller
First angular wheel 27 is installed on 21, described drive shaft 26 is provided with and described first angular wheel 27 position and quantity
The second corresponding angular wheel 24, described first angular wheel 27 and the second angular wheel 24 engage each other.It addition, this enforcement
In example, being provided with hood 4 in frame 1, the side of frame 1 is provided with hot-air blower 7 and middle control cabinet 6.
Conveying roller 21 in the present embodiment is under the drive of the first angular wheel 27 and the second angular wheel 24, all of
Conveying roller 21 carries out synchronous rotary, hence in so that all crystal silicon chips being positioned on conveying roller 21 all possess concordance, this
The time of sample etching and process all can control and etch more stable, therefore which raises the quality of crystal silicon chip processing.
Silicon wafer conveying device 2 also includes getting on the right track 29, described in get on the right track and be provided with U-shaped breach 216, described conveying roller on 29
The axle portion 211 of son 21 is placed in described U-shaped breach 216.
First angular wheel 27 is arranged on the axle portion 211 of described conveying roller 21 one end.
Removably being provided with U-shaped bracket 28 in U-shaped breach 216, the axle portion 211 of described conveying roller 21 is placed in described U
On shape bracket 28.
The two side portion of U-shaped breach 216 is provided with T-rail, described U-shaped bracket 28 be arranged on described T-rail and
Can move along described T-rail, the shape of described U-shaped bracket 28 matches with described U-shaped breach 216, described U-shaped bracket 28
Material hardness is less than the material hardness in described conveying roller axle portion.
During conveying roller rotates, position phase mutual friction to be in contact with it in the axle portion of roller, in friction
During components damage can be caused to scrap, therefore the U-shaped bracket in this structure is changed convenient, and convenient maintenance, it addition, U-shaped lacks
The structure of mouth makes the conveying roller in the present embodiment single to mount and dismount, and mounts and dismounts very convenient.
Get on the right track and 29 be arranged on lower railway 210.
Get on the right track and be provided with installing hole 214 on 29, described installing hole 214 is provided with fastening bolt 212, described in get on the right track
29 are arranged on described lower railway 210 by fastening bolt 212, described in get on the right track and be additionally provided with counterbore 213, described counterbore on 29
Being provided with regulation bolt 215 in 213, threadeds with described lower railway 210 in the bottom of described regulation bolt 215.
In roller conveying and etching process, the topmost needing all of roller is in the same plane, this enforcement
In example by regulation bolt 215 tighten and unscrew regulate get on the right track 29 height regulate the height at conveying roller place,
The quality of converted products can be effectively improved.
Specific embodiment described herein is only to the present embodiment spirit explanation for example.Belonging to this utility model
Described specific embodiment can be made various amendment or supplements or use similar by those skilled in the art
Mode substitutes, but without departing from spirit of the present utility model or surmount scope defined in appended claims.
Claims (7)
1. having the crystal silicon chip etching and cleaning device synchronizing roller structure for conveying, described etching and cleaning device includes frame
(1), described frame (1) is provided with etching tank (3) and cleaning sink (5), described frame (1) is provided with silicon chip conveying dress
Putting (2), described silicon wafer conveying device (2) passes from etching tank (3) and cleaning sink (5), it is characterised in that described silicon chip
Conveyer device (2) includes conveying roller (21), servo drive motor (22) and drive shaft (26), described servo drive motor
(22) main shaft is connected with worm screw (25), and described drive shaft (26) is provided with turbine (23), described worm screw (25) and turbine
(23) matching, each conveying roller (21) is provided with the first angular wheel (27), described drive shaft is provided with on (26)
Second angular wheel (24) corresponding with quantity with described first angular wheel (27) position, described first angular wheel (27)
Engage each other with the second angular wheel (24).
A kind of crystal silicon chip etching and cleaning device with synchronization roller structure for conveying the most according to claim 1, it is special
Levying and be, described silicon wafer conveying device (2) also includes get on the right track (29), described in get on the right track and be provided with U-shaped breach on (29)
(216) during, the axle portion (211) of described conveying roller (21) is placed in described U-shaped breach (216).
A kind of crystal silicon chip etching and cleaning device with synchronization roller structure for conveying the most according to claim 2, it is special
Levying and be, described first angular wheel (27) is arranged on the axle portion (211) of described conveying roller (21) one end.
A kind of crystal silicon chip etching and cleaning device with synchronization roller structure for conveying the most according to claim 2, it is special
Levy and be, described U-shaped breach (216) is removably provided with U-shaped bracket (28), the axle portion of described conveying roller (21)
(211) it is placed on described U-shaped bracket (28).
A kind of crystal silicon chip etching and cleaning device with synchronization roller structure for conveying the most according to claim 4, it is special
Levying and be, the two side portion of described U-shaped breach (216) is provided with T-rail, and described U-shaped bracket (28) is arranged on described T-shaped and leads
On rail and can move along described T-rail, the shape of described U-shaped bracket (28) matches with described U-shaped breach (216).
A kind of crystal silicon chip etching and cleaning device with synchronization roller structure for conveying the most according to claim 5, it is special
Levy and be, described in get on the right track (29) be arranged on lower railway (210).
A kind of crystal silicon chip etching and cleaning device with synchronization roller structure for conveying the most according to claim 6, it is special
Levy and be, described in get on the right track and be provided with installing hole (214) on (29), described installing hole is provided with fastening bolt in (214)
(212), described in get on the right track (29) be arranged on described lower railway (210) by fastening bolt (212), described in get on the right track on (29)
It is additionally provided with counterbore (213), described counterbore (213) is provided with regulation bolt (215), the bottom of described regulation bolt (215)
Threaded with described lower railway (210).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620278745.9U CN205752112U (en) | 2016-04-05 | 2016-04-05 | A kind of have the crystal silicon chip etching and cleaning device synchronizing roller structure for conveying |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620278745.9U CN205752112U (en) | 2016-04-05 | 2016-04-05 | A kind of have the crystal silicon chip etching and cleaning device synchronizing roller structure for conveying |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205752112U true CN205752112U (en) | 2016-11-30 |
Family
ID=57375100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620278745.9U Expired - Fee Related CN205752112U (en) | 2016-04-05 | 2016-04-05 | A kind of have the crystal silicon chip etching and cleaning device synchronizing roller structure for conveying |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205752112U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110139493A (en) * | 2019-04-29 | 2019-08-16 | 深圳市科路迪机械设备有限公司 | Pcb board cleans line |
| CN111029289A (en) * | 2019-12-30 | 2020-04-17 | 浙江鸿禧能源股份有限公司 | Etching groove |
-
2016
- 2016-04-05 CN CN201620278745.9U patent/CN205752112U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110139493A (en) * | 2019-04-29 | 2019-08-16 | 深圳市科路迪机械设备有限公司 | Pcb board cleans line |
| CN111029289A (en) * | 2019-12-30 | 2020-04-17 | 浙江鸿禧能源股份有限公司 | Etching groove |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Hao Baocai Inventor after: Huang Rihong Inventor before: Huang Rihong Inventor before: Huang Yong |
|
| CB03 | Change of inventor or designer information | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Shipai Town Plaza Road Kunshan city 215312 Suzhou city in Jiangsu province No. 92 room 2 Patentee after: Jiangsu Xi Gil Equipment Technology Co. Address before: Shipai Town Plaza Road Kunshan city 215312 Suzhou city in Jiangsu province No. 92 room 2 Patentee before: Kunshan Xi Gil Automation System Co. Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161130 Termination date: 20190405 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |